Advanced-Performance Semiconductor Quartz Glass for Critical Process Environments
Built for demanding semiconductor applications, TOQUARTZ® delivers advanced-performance quartz components with unmatched reliability and customization flexibility.
- Built for critical processes
- Consistent dimensional accuracy
- MOQ-friendly custom orders
What is Semiconductor Quartz Glass?
Semiconductor Quartz Glass refers to high-purity quartz components specifically engineered for semiconductor manufacturing processes. These specialized quartz parts are crafted from ultra-pure silicon dioxide (SiO₂) with purity levels up to 99.995%, providing exceptional thermal stability, chemical resistance, and dimensional precision required for critical semiconductor fabrication environments.
Key Properties of Semiconductor Grade Quartz Glass
Semiconductor grade quartz glass is engineered to meet the extreme demands of wafer processing, thermal treatment, and chemical exposure.
Its unique combination of purity, stability, and durability ensures consistent performance in high-precision semiconductor environments.
Thermal Stability
Withstands extreme temperatures in semiconductor processes.
- Max temperature: 1600°C+
- Thermal shock resistance: Excellent
- Expansion coefficient: 5.5×10⁻⁷ /°C
- Stable in rapid heating cycles
Chemical Resistance
Resists acids, bases, and reactive gases.
- HF, HCl, H₂SO₄ resistant
- Alkali corrosion: <0.01% loss
- Compatible with fluorine gases
- No reaction with molten salts
Electrical Insulation
Provides high dielectric strength and resistivity.
- Resistivity: >10⁷ Ω·cm
- Dielectric strength: 40 kV/mm
- Low dielectric loss factor
- Ideal for plasma environments
Product Ranges of Semiconductor Quartz Glass We Offer
Explore TOQUARTZ’s full range of semiconductor quartz glass components engineered for high-performance wafer processing, thermal treatment, and chemical handling.
Used in diffusion and LPCVD, TOQUARTZ® quartz tubes ensure thermal stability and precise fit in semiconductor furnaces.
The wafer boats and holders provide stable, accurate wafer support during high-temperature processing.
High-purity semiconductor quartz crucibles for silicon melting with excellent thermal and chemical resistance.
Custom semiconductor quartz parts like etching rings and source bottles for critical semiconductor applications.
Applications in Semiconductor Manufacturing
Semiconductor quartz glass components play critical roles throughout the semiconductor manufacturing process, from wafer fabrication to final testing. Our precision-engineered quartz products support various applications in the most demanding semiconductor environments.
Thermal Processing Applications
Semiconductor quartz parts are essential in high-temperature processing of silicon wafers, including:
- Oxidation processes using large diameter quartz tubes
- Diffusion processes using high purity quartz tubes
- Annealing processes utilizing quartz furnace doors
- Silicon crystal growing using quartz crucibles
Wafer Processing Applications
TOQUARTZ® quartz wafer carriers and process components are designed for critical wafer handling and processing:
Chemical Vapor Deposition
Fused silica components are critical for controlled deposition of thin films in semiconductor manufacturing:
- Reaction chambers using quartz process tubes
- Gas flow components using custom quartz fabrication
Research & Development
Quartz custom parts for semiconductor research enables advanced process development and testing:
- Process development with custom quartz parts
- Small-batch testing using specialized quartz components
Custom Semiconductor Quartz Glass Solutions
Tailored to Your Needs
TOQUARTZ® specializes in creating semiconductor quartz glass components that precisely match your technical specifications. Our engineering team provides comprehensive support from design to delivery, ensuring optimal solutions for your unique requirements.
Engineering Support
TOQUARTZ® experienced engineers collaborate with your team to optimize designs for manufacturability while maintaining critical specifications. We can assist with material selection, dimensional adjustments, and process compatibility.
Rapid Prototyping
We specialize in quick turnaround of prototypes and small-batch orders, with sample delivery in as little as 1-2 weeks. This allows you to test and validate custom quartz components before full production.
Flexible Manufacturing
TOQUARTZ® accepts both small custom orders and large production runs. Our flexible manufacturing capabilities allow us to meet your specific volume requirements without imposing restrictive MOQs.
From Drawing to Delivery
Drawing & Specification
Send us your technical drawings or samples. We accept various formats including CAD files, PDFs, or even hand sketches with dimensions.
Technical Consultation
Our engineers review your requirements and provide feedback on feasibility, material selection, and possible optimizations.
Quotation & Prototype
Receive a detailed quotation with pricing and timeline. After approval, we produce a prototype for validation before full production.
Production & Delivery
Upon approval, we complete full production with comprehensive quality control before secure packaging and international shipping.
Assurance of TOQUARTZ® Semiconductor Quartz Glass
Our semiconductor quartz glass components deliver exceptional performance characteristics that meet or exceed industry standards, ensuring reliable operation in the most demanding semiconductor environments.
TOQUARTZ® vs. Industry Standards
| Property | Industry Standard | TOQUARTZ® Performance | Benefit |
| SiO₂ Purity | 99.90% | Up to 99.995% | Minimal contamination risk for sensitive semiconductor processes |
| Temperature Resistance | 1100-1300°C | Up to 1600°C+ | Suitable for the most demanding high-temperature applications |
| Dimensional Tolerance | ±0.2mm | ±0.1mm standard | Better fit and functionality in precision equipment |
| Surface Roughness | Ra ≤ 1.2μm | Ra ≤ 0.8μm | Smoother surfaces for better process control and reduced particle generation |
| Lead Time (Custom) | 6-8 weeks | 2-3 weeks | Faster equipment setup and reduced production downtime |
Quality Certifications & Standards
ISO 9001 Certification
TOQUARTZ® manufacturing processes adhere to ISO 9001 quality management standards, ensuring consistent product quality and customer satisfaction. This certification demonstrates our commitment to:
- Stringent quality control procedures
- Continuous process improvement
- Customer-focused management systems
- Comprehensive documentation and traceability
REACH Compliance
TOQUARTZ® semiconductor quartz products comply with the European Union’s REACH regulations (Registration, Evaluation, Authorization and Restriction of Chemicals), ensuring:
- Freedom from substances of very high concern (SVHCs)
- Safe handling throughout the supply chain
- Environmentally responsible manufacturing
- Documentation for regulatory compliance
RoHS Compliance
TOQUARTZ® products meet RoHS (Restriction of Hazardous Substances) requirements, which restricts the use of specific hazardous materials in electronic and electrical equipment:
- Free from lead, mercury, cadmium, and other restricted substances
- Environmentally friendly manufacturing processes
- Documentation available upon request
- Compatible with global electronics supply chains
FAQs About Semiconductor Quartz Glass
Q: What is the maximum operating temperature of semiconductor-grade quartz glass components?
A: TOQUARTZ® Semiconductor quartz can withstand continuous temperatures up to 1100°C and intermittent exposure up to 1600°C, making it ideal for diffusion and oxidation processes.
Q: How does quartz purity affect semiconductor manufacturing performance?
A: Higher SiO₂ purity (≥99.995%) reduces contamination risk, improves chemical resistance, and ensures compatibility with ultra-clean semiconductor environments.
Q: What surface treatments are available for quartz parts used in semiconductor tools?
A: We offer fire polishing, mechanical grinding, sandblasting, and chemical etching. Annealing and ultrasonic cleaning are also available to reduce stress and contamination.
Q: Are TOQUARTZ products compatible with LPCVD and PECVD systems?
A: Absolutely. Our quartz tubes, wafer boats, and source bottles are widely used in LPCVD/PECVD systems for silicon nitride, polysilicon, and oxide deposition.
Q: Can TOQUARTZ fabricate custom semiconductor quartz glass parts based on customer drawings?
A: Yes, we support full custom fabrication from CAD drawings, 2D sketches, or physical samples, including complex geometries and multi-part assemblies.
Q: How does TOQUARTZ ensure quality and consistency in semiconductor quartz glass components?
A: We follow ISO 9001 standards, perform dimensional inspections, material purity testing, and provide full documentation including COA, COC, and dimensional reports.