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Custom High Purity Quartz Flanges for Semiconductor & Laboratory Equipment -TOQUARTZ®
Features of Quartz Flanges
TOQUARTZ® quartz flanges are engineered to provide exceptional performance in demanding industrial and laboratory applications where chemical resistance, thermal stability, and precision connections are critical requirements.
High Material Purity
TOQUARTZ® flanges are manufactured from high-purity quartz containing up to 99.995% SiO₂, ensuring minimal contamination in sensitive applications like semiconductor processing.
- Available in purity ranges from 99.9% to 99.995%
- Low metallic impurity content
- Suitable for ultra-clean applications
Chemical Resistance
TOQUARTZ® quartz flanges demonstrate exceptional stability against acids, bases, molten salts, and fluorinated gases. This makes them ideal for aggressive chemical environments where standard materials would quickly deteriorate.
- Resistance to hydrofluoric acid up to certain concentrations
- Stability in both strong acid and alkaline solutions
- Inert to most organic solvents and chemicals
Thermal Properties
With high thermal stability and low coefficient of thermal expansion, our quartz flanges maintain structural integrity and sealing properties even during rapid temperature changes.
- Maximum continuous operating temperature of 1200°C
- Low thermal expansion coefficient (5.5×10⁻⁷/K)
- Excellent thermal shock resistance compared to other ceramics
-
Up to 99.995%
SiO₂ Purity
-
Low metallic
impurity content
-
Custom geometries
available
Technical Specifications & Dimensions of Quartz Flanges
TOQUARTZ® offers both standard and custom quartz flanges to meet specific application requirements. Our manufacturing capabilities allow us to produce flanges with precise dimensions and tight tolerances.
Technical Specifications of Fused Quartz Flanges
Physical Properties
| Parameter | Value |
| Density | 2.2 g/cm³ |
| Thermal Expansion Coefficient | 5.5 × 10-7/K |
| Thermal Conductivity | 1.4 W/m·K |
| Maximum Working Temperature | 1200°C |
| Thermal Shock Resistance | Excellent |
Chemical Properties
| Parameter | Value |
| SiO2 Content | 99.9% to 99.995% |
| Acid Resistance | Excellent (except for HF) |
| Alkali Resistance | Good up to 300°C |
| Water Absorption | Nil |
| Gas Permeability | Very low |
Size Chart of Quartz Glass Flanges
| Model | Outer Diameter (mm) | Inner Diameter (mm) | Height (mm) | SiO2 Purity (%) |
| AT-SY-FL001 | 10 | 5 | 4 | 99.9-99.99 |
| AT-SY-FL002 | 20 | 12 | 3 | 99.9-99.99 |
| AT-SY-FL003 | 80 | 52.8 | 5 | 99.9-99.99 |
| AT-SY-FL004 | 105 | 82.5 | 8 | 99.9-99.99 |
| AT-SY-FL005 | 115 | 92.5 | 5 | 99.9-99.99 |
| AT-SY-FL006 | 152 | 102.8 | 7 | 99.9-99.99 |
| AT-SY-FL007 | 195 | 154 | 6 | 99.9-99.99 |
| AT-SY-FL008 | 275 | 165 | 10 | 99.9-99.99 |
| AT-SY-FL009 | 300 | 230 | 7.5 | 99.9-99.99 |
| AT-SY-FL010 | 300 | 230 | 15 | 99.9-99.99 |
| AT-SY-FL011 | 335 | 265 | 7.5 | 99.9-99.99 |
| AT-SY-FL012 | 335 | 265 | 15 | 99.9-99.99 |
TOQUARTZ® Solving Lab Challenges with Quartz Flanges
Quartz Flanges for Semiconductor Manufacturing Equipment
Key Advantages
-
Ultra-low metal impurity content (<10 ppm)
Ensures no ion contamination in plasma etching and CVD processes. -
Dimensional flatness ≤0.02mm for sealing surfaces
Maintains vacuum integrity in high-precision semiconductor chambers. -
Thermal stability up to 1200°C with <0.5% deformation
Withstands repeated thermal cycling in diffusion furnace environments.
TOQUARTZ® solution
U.S.-based semiconductor required quartz flanges for a 1100°C LPCVD system with <±0.05mm tolerance and <15 ppm total metal content. TOQUARTZ delivered 120 units within 18 days, achieving 0.02mm flatness and 99.995% SiO₂ purity. Post-installation, the client reported zero seal failures over 6 months of continuous operation.
Fused Quartz Flanges for Laboratory Equipment and Research
Key Advantages
-
UV-Vis transmission >90% at 200–800nm
Enables in-situ optical monitoring in photochemical reaction chambers. -
Surface roughness Ra ≤0.4μm on sealing faces
Minimizes outgassing and leakage in high-vacuum lab setups. -
Custom micro-flange ID as small as 3mm
Supports compact analytical instruments and microfluidic systems.
TOQUARTZ® solution
A German university lab required 30 custom quartz flanges with 5mm ID and Ra ≤0.5μm for a high-vacuum spectroscopy system. TOQUARTZ delivered within 14 working days. Leak rate testing showed <1×10⁻⁹ mbar·L/s, exceeding the lab’s UHV requirements and reducing sample contamination risk by 80%.
Quartz Glass Quartz Flanges for Chemical Processing Equipment
Key Advantages
-
HF resistance validated up to 5% concentration at 80°C
Suitable for fluorine-based wet etching and cleaning systems. -
SiO₂ leaching rate <0.01 mg/cm²·h in 10% HCl at 100°C
Prevents contamination in high-purity chemical synthesis. -
Structural integrity maintained after 1000 thermal cycles (25–900°C)
Ensures long-term reliability in batch reactor environments.
TOQUARTZ® solution
A Polish chemical reactor integrator needed quartz flanges for a system handling 10% HCl at 100°C with weekly thermal cycling. TOQUARTZ supplied 60 units with verified leaching rate <0.01 mg/cm²·h and dimensional stability after 1000 cycles. The client reported zero flange replacements after 9 months, cutting maintenance downtime by 40%.
TOQUARTZ® Customization Services for Fused Silica Flanges
Custom Design Capabilities
- Non-standard dimensions with outer diameters from 5mm to 500mm
- Special geometries including multi-port flanges and asymmetrical designs
- Integration with other quartz components (tubes, chambers, etc.)
- Surface treatments including fire polishing, grinding, and acid etching
- Material grade selection based on application requirements
Custom Process
-
Technical Consultation
Our engineers discuss your application requirements and help identify the optimal specifications for your quartz flanges. -
Design & Drafting
We create detailed technical drawings based on your specifications or samples, with engineering input to optimize manufacturability. -
Prototype Development
For new designs, we can produce prototype samples for your testing and validation before full production. -
Production & Quality Control
Each custom flange undergoes rigorous inspection to ensure it meets all specified dimensional and material requirements.
Usage Guidelines of Quartz Flanges
Proper installation and handling of quartz flanges is essential to ensure optimal performance and longevity. The following guidelines will help you maximize the value of your TOQUARTZ products while minimizing the risk of damage.
Installation Recommendations
- Use appropriate gasket materials (PTFE, Viton, or other compatible elastomers) depending on your temperature requirements.
- Apply uniform torque when tightening bolts in a star pattern to ensure even pressure distribution.
- Avoid over-tightening; quartz is strong but can crack under excessive localized pressure.
- For high-temperature applications, consider thermal expansion of all components and use appropriate compensation mechanisms.
Handling & Storage
- Inspect flanges for chips or cracks before installation; even small defects can lead to failure under vacuum or pressure.
- Store in clean, dry conditions with appropriate padding between components to prevent contact damage.
- Handle with clean gloves to prevent surface contamination, especially for high-purity applications.
- For cleaning, use appropriate solvents (acetone, isopropyl alcohol) followed by deionized water rinse for most applications.
2. For vacuum applications, regularly check sealing surfaces for cleanliness and integrity to maintain proper vacuum levels.
3. Avoid rapid thermal cycling when possible; gradual temperature changes will extend component life.
4. Replace gaskets during reassembly rather than reusing them, especially for critical applications.
Need Technical Assistance with Quartz Flanges?
Let us help you find the optimal quartz flange solution for your specific application.
Why Partner with TOQUARTZ
Direct Factory Advantage
As a direct manufacturer, we can cut out the numerous intermediate links.
Engineering Expertise
Technical team guides clients from material selection to design optimization, translating specs into deliverables.
Flexible Manufacturing
Handling standard & custom orders via small-batch expertise and prototyping rigor to meet urgent deadlines.
Quality
Assurance
Pre-shipment 3-step validation:
1. dimensional accuracy,
2. material purity ,
3. performance thresholds
Global Supply Chain
Reliable global logistics to industrial hubs (DE/US/JP/KR priority) with trackable milestones.
Releted Products
As a specialized manufacturer with direct factory capabilities, TOQUARTZ provides both standard and custom quartz solutions with engineering support throughout the specification and implementation process.
FAQ
Q: What are the temperature limitations of quartz flanges?
A: TOQUARTZ® quartz flanges can withstand continuous operating temperatures up to 1200°C without degradation. The practical upper limit depends on the specific application, particularly regarding thermal gradients and mechanical stresses. For applications above 1000°C, we recommend discussing your specific requirements with our engineering team.
Q: How do quartz flanges compare to metal flanges for vacuum applications?
A: Quartz flanges offer several advantages over metal flanges in specific applications: they don’t outgas in vacuum, have excellent chemical resistance, won’t contaminate sensitive processes, and provide electrical insulation. However, they typically require more careful handling and installation than metal flanges, and appropriate gasket selection is critical for achieving proper seals.
Q: What gasket materials are recommended for quartz flanges?
A: The optimal gasket material depends on your operating conditions. For high-temperature applications (up to 300°C), Viton or similar fluoroelastomers work well. For ultra-high vacuum or higher temperatures, PTFE or expanded PTFE gaskets are recommended. For extreme temperatures (800°C+), specialized ceramic fiber gaskets or metal seals with appropriate buffer materials may be necessary. Our technical team can provide specific recommendations based on your temperature, pressure, and chemical exposure requirements.
Q: Can quartz flanges withstand pressure applications?
A: Quartz flanges are primarily designed for vacuum or low-pressure applications. While quartz has high compressive strength (up to 1100 MPa), its tensile strength is much lower. For pressure-bearing applications, the design must carefully account for this limitation. Typically, our standard flanges are rated for vacuum to slight positive pressure (up to 2-3 bar), but specialized designs can be developed for specific pressure requirements.
Q: Are quartz flanges compatible with KF/QF, CF, or ISO flange standards?
A: Yes, we can manufacture quartz flanges that are dimensionally compatible with standard vacuum flange systems including KF/QF (quick flange), CF (ConFlat), and ISO standards. These flanges typically require additional components (like metal adapters or clamps) to complete the connection to standard metal vacuum systems. For these applications, we work closely with customers to ensure the quartz components integrate properly with their existing equipment.
Contact our engineering team for technical consultation and pricing. We’ll help you select the optimal specifications for your application requirements.