{"id":9792,"date":"2025-08-27T09:51:51","date_gmt":"2025-08-27T01:51:51","guid":{"rendered":"https:\/\/toquartz.com\/?p=9792"},"modified":"2025-09-03T09:00:13","modified_gmt":"2025-09-03T01:00:13","slug":"opaque-quartz-plates-semiconductor-yield-enhancement","status":"publish","type":"post","link":"https:\/\/toquartz.com\/ko\/opaque-quartz-plates-semiconductor-yield-enhancement\/","title":{"rendered":"\ubd88\ud22c\uba85\ud55c \uc11d\uc601\ud310 \ud2b9\uc131\uc740 \uc5b4\ub5bb\uac8c \ubc18\ub3c4\uccb4 \uc218\uc728\uc744 \ud5a5\uc0c1\uc2dc\ud0ac\uae4c\uc694?"},"content":{"rendered":"<p>\uc6e8\uc774\ud37c \uc65c\uace1\uc744 \uc904\uc774\ub824\uba74 \uc548\uc815\uc131\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ucca8\ub2e8 \uc18c\uc7ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.  <\/p>\n<p>\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \ucd08\uc800\uc5f4\ud33d\ucc3d(\u22640.55\u00d710-\u2076\/K)\uacfc 193nm\uc5d0\uc11c &gt;99% UV \ubd88\ud22c\uba85\ub3c4\ub97c \ud1b5\ud574 \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \uc65c\uace1\uc744 15%\uae4c\uc9c0 \uc904\uc5ec \uace0\uc815\ubc00 \ub9ac\uc18c\uadf8\ub798\ud53c\uc758 \uc218\uc728\uc744 \uc9c1\uc811\uc801\uc73c\ub85c \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.  <\/p>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plate-for-semiconductor-applications.webp\" alt=\"\ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc6a9 \ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\" title=\"\ubc18\ub3c4\uccb4 \uc218\uc728\uc744 \uc704\ud55c \ubd88\ud22c\uba85 \uc11d\uc601\ud310 \ud2b9\uc131\" \/>  <\/p>\n<p>\ub2e4\uc74c \uc139\uc158\uc5d0\uc11c\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc758 \uace0\uc720\ud55c \ud2b9\uc131, \uc131\ub2a5 \ubca4\uce58\ub9c8\ud06c \ubc0f \uc0b0\uc5c5\uc801 \uad00\ub828\uc131\uc5d0 \ub300\ud574 \uc0b4\ud3b4\ubd05\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc774\ub780 \ubb34\uc5c7\uc774\uba70 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc11d\uc601\ud310\uc758 \uc5ed\ud560\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/h2>\n<p>\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\ub41c \ub9c8\uc774\ud06c\ub85c \ubc84\ube14 \ubd84\uc0b0\uc774 \uc801\uc6a9\ub41c \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc131\ubd84\uc740 \uc5f4\uc5d0 \uacac\ub514\uace0 \uc790\uc678\uc120\uc744 \ucc28\ub2e8\ud558\ub294 \ub2a5\ub825\uc73c\ub85c \uadf8 \uac00\uce58\ub97c \uc778\uc815\ubc1b\uace0 \uc788\uc2b5\ub2c8\ub2e4. <a href=\"https:\/\/toquartz.com\/ko\/schott-quartz-glass-microcrystalline-plate\/\">\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8<\/a>\ub294 \ubd88\ud22c\uba85 \uae30\ud310\uc73c\ub85c \uc704\uce58\ud558\uba70 \ub9ac\uc18c\uadf8\ub798\ud53c, \ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \ubc0f \uc5f4 \ucc98\ub9ac\uc5d0\uc11c \uc911\uc694\ud55c \uae30\ub2a5\uc744 \uc218\ud589\ud569\ub2c8\ub2e4. <\/p>\n<p>\uc0b0\ub780 \uc790\uc678\uc120\uc744 \ud761\uc218\ud558\uace0 \uace0\uc628\uc5d0\uc11c \uce58\uc218 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud568\uc73c\ub85c\uc368 \uc6e8\uc774\ud37c \ud658\uacbd\uc744 \uc81c\uc5b4\ud558\uace0 \uc0dd\uc0b0 \uc8fc\uae30 \ub0b4\ub0b4 \uad6c\uc870\uc801 \ubb34\uacb0\uc131\uc744 \ubcf4\ud638\ud569\ub2c8\ub2e4. <\/p>\n<p>\uc774\ub7ec\ud55c \uae30\ubc18\uc744 \uc774\ud574\ud558\ub294 \uac83\uc740 \uc218\uc775\ub960 \uc190\uc2e4\uc5d0 \uc9c1\uc811\uc801\uc73c\ub85c \ub300\uc751\ud558\ub294 \ubc29\ubc95\uc744 \ud0d0\uad6c\ud558\ub294 \ub370 \uc788\uc5b4 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc758 \ud654\uc5fc \uc735\ud569\uacfc \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 \ube44\uad50<\/h2>\n<p>\uc81c\uc870 \ubc29\ubc95\uc740 \ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc758 \ubbf8\uc138 \uad6c\uc870\uc640 \uc131\ub2a5\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\uba70, \uc774\ub294 \ub2e4\uc2dc \ubc18\ub3c4\uccb4 \uc218\uc728\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.  <\/p>\n<h3>\uc5f4 \uc548\uc815\uc131 \ucc28\uc774\uac00 \uc6e8\uc774\ud37c \uc815\ub82c\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/h3>\n<p>\ud50c\ub808\uc784 \ud4e8\uc804\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \ud50c\ub808\uc774\ud2b8\ub97c \uc0dd\uc0b0\ud569\ub2c8\ub2e4. <strong>\ubb34\uc791\uc704 \uac70\ud488 \ubd84\ud3ec<\/strong> (0.5-10\u03bcm)\ub85c \uad6d\ubd80\uc801\uc778 \uc5f4\ud33d\ucc3d \ubcc0\ud654\ub97c \uc77c\uc73c\ud0b5\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \ub9ac\uc18c\uadf8\ub798\ud53c \uacfc\uc815\uc5d0\uc11c \uc774\ub7ec\ud55c \ubbf8\uc138\ud55c \ubd88\uade0\uc77c\uc131\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \ubb38\uc81c\ub97c \uc77c\uc73c\ud0b5\ub2c8\ub2e4. <strong>\ucc28\ub4f1 \ud655\uc7a5 \uc18d\ub3c4<\/strong> \ucffc\uce20 \ud45c\uba74\uc744 \uac00\ub85c\uc9c0\ub985\ub2c8\ub2e4. \uadf8 \uacb0\uacfc <strong>\uc6e8\uc774\ud37c \uc2a4\ud14c\uc774\uc9c0 \uc815\ub82c \ubd88\ub7c9<\/strong> 100\u00b0C \uc5f4 \uc0ac\uc774\ud074\ub2f9 \ucd5c\ub300 0.3\u03bcm\uae4c\uc9c0 \uac10\uc18c\ud558\uc5ec \uba40\ud2f0 \ub808\uc774\uc5b4 \ud328\ud130\ub2dd\uc758 \uc624\ubc84\ub808\uc774 \uc624\ub958\uc5d0 \uc9c1\uc811\uc801\uc73c\ub85c \uae30\uc5ec\ud569\ub2c8\ub2e4.  <\/p>\n<p>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\uc740 \ub2e4\uc74c\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. <strong>\uade0\uc77c\ud55c \ubb34\uc815\ud615 \uad6c\uc870<\/strong> \ub2e4\uacf5\uc131\uc774 \uac70\uc758 \uc81c\ub85c\uc5d0 \uac00\uae5d\uc2b5\ub2c8\ub2e4. \uc77c\uad00\ub41c \ubd84\uc790 \ubc30\uc5f4\uc740 \ub2e4\uc74c\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4. <strong>\uade0\uc77c\ud55c \uc5f4 \ud33d\ucc3d<\/strong> (\u22640.55\u00d710-\u2076\/K). \uace0\uc628 \ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d\uc5d0\uc11c CVD \ud50c\ub808\uc774\ud2b8\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \ubc94\uc704 \ub0b4\uc5d0\uc11c \uc704\uce58 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. <strong>\u00b10.05\u03bcm<\/strong> 300mm \uc6e8\uc774\ud37c\uc5d0 \uac78\uccd0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc815\ubc00\ub3c4\ub294 \uc911\uc694\ud55c UV \ub178\ucd9c \ub2e8\uacc4\uc5d0\uc11c \ud3ec\ud1a0\ub9c8\uc2a4\ud06c \uc815\ub82c\uc774 \uc798\ubabb\ub418\ub294 \uac83\uc744 \ubc29\uc9c0\ud569\ub2c8\ub2e4.  <\/p>\n<p>\ud654\uc5fc \uc735\ud569 \uc11d\uc601\uc744 \uc0ac\uc6a9\ud558\ub294 \ubc18\ub3c4\uccb4 \ud339 \ubcf4\uace0\uc11c <strong>3-5% \uc218\uc728 \uc190\uc2e4<\/strong> \uc5f4 \ub4dc\ub9ac\ud504\ud2b8\uac00 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. CVD \ud50c\ub808\uc774\ud2b8\ub85c \uc804\ud658\ud558\uba74 \ub2e4\uc74c\uacfc \uac19\uc774 \uac10\uc18c\ud569\ub2c8\ub2e4. <strong>&lt;0.8%<\/strong> \ubbf8\uc138 \uad6c\uc870\ub85c \uc778\ud55c \uc65c\uace1\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc0c1\uad00\uad00\uacc4\ub294 \ubd88\ud654\uc544\ub974\uace4(ArF) \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc758 \uc778\ub77c\uc778 \uacc4\uce21 \ub370\uc774\ud130\ub97c \ud1b5\ud574 \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.  <\/p>\n<h3>\ub9ac\uc18c\uadf8\ub798\ud53c \ud574\uc0c1\ub3c4\uc5d0 \ub300\ud55c \uad11\ud559 \uade0\uc77c\uc131 \uc601\ud5a5<\/h3>\n<p>\ud654\uc5fc \uc735\ud569\uc758 <strong>\ubb34\uc791\uc704 \ubc84\ube14 \uc0b0\ub780<\/strong> \ub294 UV \ubd88\ud22c\uba85\ub3c4 \ubcc0\ub3d9(200mm \ud50c\ub808\uc774\ud2b8\uc5d0\uc11c \u00b14%)\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubcc0\ub3d9\uc73c\ub85c \uc778\ud574 <strong>\uc77c\uad00\ub418\uc9c0 \uc54a\uc740 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ub178\ucd9c<\/strong> 193nm \ub9ac\uc18c\uadf8\ub798\ud53c \uc911\uc785\ub2c8\ub2e4. \ud544\ub4dc \uac04 \uc784\uacc4 \uce58\uc218(CD) \ubcc0\ud654\ub294 \ub2e4\uc74c\uc744 \ucd08\uacfc\ud569\ub2c8\ub2e4. <strong>\u00b11.2nm<\/strong>5nm \ub178\ub4dc \ud504\ub85c\uc138\uc2a4 \ucc3d\uc744 \uc704\ubc18\ud569\ub2c8\ub2e4.  <\/p>\n<p>CVD \ud50c\ub808\uc774\ud2b8\ub294 \ub2e4\uc74c\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4. <strong>&gt;99% \ubd88\ud22c\uba85\ub3c4 \uade0\uc77c\uc131<\/strong> \uc0b0\uc18c \uacf5\uadf9 \ubd84\ud3ec\ub97c \uc81c\uc5b4\ud569\ub2c8\ub2e4. \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\ub41c \uacb0\ud568 \ubc00\ub3c4\ub294 \ub2e4\uc74c\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. <strong>\u00b10.25% \uc804\uc1a1 \uc548\uc815\uc131<\/strong> 193nm \ud30c\uc7a5\uc5d0\uc11c. \uc774\ub97c \ud1b5\ud574 \ub2e4\uc74c\uc744 \uc218\ud589\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>CD \uade0\uc77c\uc131<\/strong> 450mm \ud544\ub4dc\uc5d0\uc11c \u00b10.3nm \uc774\ub0b4\ub85c \uace0\uae09 \ub178\ub4dc \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4.  <\/p>\n<p>\uade0\uc77c\ud558\uc9c0 \uc54a\uc740 \uc790\uc678\uc120 \ucc28\ub2e8\ub3c4 \uac00\uc18d\ud654\ub429\ub2c8\ub2e4. <strong>\ub80c\uc988 \uc624\uc5fc<\/strong>. \ud654\uc5fc \uc735\ud569 \ud50c\ub808\uc774\ud2b8 \ub9b4\ub9ac\uc2a4 <strong>5\ubc30 \ub354 \ub9ce\uc740 \uc2e4\ub9ac\uce74 \uc785\uc790<\/strong> \uc5d1\uc2dc\uba38 \ub808\uc774\uc800\uc5d0 \ub178\ucd9c\ub418\uba74 \uce68\uc804\ubb3c\uc774 \ud615\uc131\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uce68\uc804\ubb3c\uc740 \ube5b\uc744 \uc0b0\ub780\uc2dc\ucf1c \ub9e4\uc8fc \ucc54\ubc84\ub97c \uccad\uc18c\ud574\uc57c \ud558\ubbc0\ub85c 15%\uc758 \uc0dd\uc0b0\uc131 \uc190\uc2e4\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. CVD\uc758 \ubaa8\ub180\ub9ac\uc2dd \uad6c\uc870\ub294 \uc720\uc9c0\ubcf4\uc218 \uc8fc\uae30\ub97c 6\uc8fc \uc774\uc0c1\uc73c\ub85c \uc5f0\uc7a5\ud569\ub2c8\ub2e4.  <\/p>\n<h3>\uc81c\uc870 \ubc29\uc2dd\ubcc4 \uc218\uc728 \uc0c1\uad00\uad00\uacc4 \ubd84\uc11d<\/h3>\n<table>\n<thead>\n<tr>\n<th>\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\ud50c\ub808\uc784 \ud4e8\uc804 \ucffc\uce20<\/th>\n<th>CVD \ucffc\uce20<\/th>\n<th>\uc218\uc775\ub960 \uc601\ud5a5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>\uc5f4 \uc548\uc815\uc131<\/strong><\/td>\n<td>\u00b10.15\u00d710-\u2076\/K CTE \ud3b8\ucc28<\/td>\n<td>\u00b10.02\u00d710-\u2076\/K CTE<\/td>\n<td>3.2% \ub300 0.5% \uc6e8\uc774\ud37c \uc65c\uace1<\/td>\n<\/tr>\n<tr>\n<td><strong>UV \uade0\uc77c\uc131<\/strong><\/td>\n<td>95-99% \ubd88\ud22c\uba85\ub3c4<\/td>\n<td>99.2~99.8% \ubd88\ud22c\uba85\ub3c4<\/td>\n<td>2.8% \ub300 0.3% CD \ucc28\uc774<\/td>\n<\/tr>\n<tr>\n<td><strong>\ud30c\ud2f0\ud074 \uc0dd\uc131<\/strong><\/td>\n<td>120 \uc785\uc790\/cm\u00b2\/\uc2dc\uac04<\/td>\n<td>&lt;20 \uc785\uc790\/cm\u00b2\/\uc2dc\uac04<\/td>\n<td>8% \ub300 1.2% \uacb0\ud568 \ubc00\ub3c4 \ube44\uad50<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\ud50c\ub808\uc784 \ud4e8\uc804\uc740 \uc790\ubcf8 \uc9c0\ucd9c\uc744 40%\uae4c\uc9c0 \uc904\uc774\uc9c0\ub9cc \uc6b4\uc601 \ube44\uc6a9\uc740 \uc624\ud788\ub824 \uc99d\uac00\ud569\ub2c8\ub2e4:  <\/p>\n<ul>\n<li><strong>\ucd94\uac00 \uacc4\uce21 \ub2e8\uacc4<\/strong> \uc5f4 \ub9e4\ud551\uc6a9(+$120k\/\ub3c4\uad6c\/\ub144)  <\/li>\n<li><strong>\ud3ec\ud1a0\ub9c8\uc2a4\ud06c \uc7ac\uc778\uc99d<\/strong> \uc2ec\uac01\ud55c \uc815\ub82c \uc624\ub958 \ud6c4(+48\uc2dc\uac04 \ub2e4\uc6b4\ud0c0\uc784)  <\/li>\n<li><strong>\uc218\uc775\ub960 \uc870\uc815<\/strong> \ubd88\uade0\uc77c \uc5d0\uce6d(5-7% \uc2a4\ud06c\ub7a9\ub960)\uc73c\ub85c\ubd80\ud130\uc758 \ubcf4\ud638  <\/li>\n<\/ul>\n<p>CVD \ud50c\ub808\uc774\ud2b8\ub294 \ub2e4\uc74c\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. <strong>\uc21c 23% \uc6e8\uc774\ud37c\ub2f9 \ube44\uc6a9 \uac10\uc18c<\/strong> \ub192\uc740 \ucd08\uae30 \uac00\uaca9\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0. \ubbf8\uc138 \uad6c\uc870\uc758 \uc548\uc815\uc131\uc740 \ub2e4\uc74c\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4. <strong>15% \ub354 \ub192\uc740 \ub178\ucd9c \uc120\ub7c9<\/strong> \uc624\ubc84\ub808\uc774 \ud398\ub110\ud2f0 \uc5c6\uc774 \uc6e8\uc774\ud37c\ub2f9 \ub2e4\uc774 \uc218\uc728\uc744 \uc9c1\uc811\uc801\uc73c\ub85c \uc99d\uac00\uc2dc\ud0b5\ub2c8\ub2e4.  <\/p>\n<hr \/>\n<h2>\uace0\uc815\ubc00 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 \ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc774 \ud544\uc218\uc778 \uc774\uc720\ub294 \ubb34\uc5c7\uc77c\uae4c\uc694?<\/h2>\n<p>\ube5b\uc758 \uc0b0\ub780\uacfc \uc6e8\uc774\ud37c \ub4dc\ub9ac\ud504\ud2b8\ub294 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c \uc911\uc694\ud55c \ubcd1\ubaa9 \ud604\uc0c1\uc785\ub2c8\ub2e4.  <\/p>\n<p>\ubd88\ud22c\uba85\ud55c \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \uae4a\uc740 \uc790\uc678\uc120 \uac04\uc12d\uc744 \ucc28\ub2e8\ud558\ub294 \ub3d9\uc2dc\uc5d0 \uce58\uc218 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\uc5ec \uc6e8\uc774\ud37c\uc5d0 \uc815\ud655\ud55c \ud53c\ucc98 \uc804\uc1a1\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.  <\/p>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/Opaque-quartz-plates-shield-wafers-from-unintended-radiation.webp\" alt=\"\uc11d\uc601\ud310 \ub9ac\uc18c\uadf8\ub798\ud53c UV \ucc28\ub2e8\" title=\"\ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c UV\ub97c \ucc28\ub2e8\ud558\ub294 \ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\" \/>  <\/p>\n<p>\uc774\ub7ec\ud55c \ud1b5\ud569\uc740 \uc624\ubc84\ub808\uc774 \uc624\ub958\ub97c \uc904\uc774\uace0 \ubc18\uc0ac\ub97c \uc5b5\uc81c\ud558\uba70 \ub098\ub178\ubbf8\ud130 \uaddc\ubaa8\uc758 \ud574\uc0c1\ub3c4\uc5d0\uc11c \ud53c\ucc98 \ucda9\uc2e4\ub3c4\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \uc2e4\uc81c\ub85c \uc774\ub294 \uacb0\ud568 \ubc00\ub3c4\ub97c \ub0ae\ucd94\uace0 \ucc98\ub9ac\ub7c9\uc744 \uac1c\uc120\ud558\ub294 \uac83\uc73c\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc758 \uc5f4\ud33d\ucc3d \ud2b9\uc131\uacfc \uc6e8\uc774\ud37c \uc815\ud655\ub3c4\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/h2>\n<p>\uc815\ubc00 \uc6e8\uc774\ud37c \uc81c\uc870\ub294 \ucd5c\uc18c\ud55c\uc758 \uce58\uc218 \ubcc0\ud654\uc5d0\ub3c4 \ubbfc\uac10\ud569\ub2c8\ub2e4.  <\/p>\n<p>\ubd88\ud22c\uba85\ud55c \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 20-1000\u00b0C\uc5d0\uc11c \u22640.55\u00d710-\u2076\/K\uc758 \ucd08\uc800\uc5f4\ud33d\ucc3d\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uc774 \ud2b9\uc131\uc740 <a href=\"https:\/\/en.wikipedia.org\/wiki\/Bow_and_warp_of_semiconductor_wafers_and_substrates\">\uc6e8\uc774\ud37c \ubcf4\uc6b0<\/a><sup id=\"fnref1:1\"><a href=\"#fn:1\" class=\"footnote-ref\">1<\/a><\/sup> \uadf8\ub9ac\uace0 <a href=\"https:\/\/semiengineering.com\/getting-over-overlay\/\">\uc624\ubc84\ub808\uc774 \uc624\ub958<\/a><sup id=\"fnref1:2\"><a href=\"#fn:2\" class=\"footnote-ref\">2<\/a><\/sup> \uace0\uae09 \ub178\ub4dc\uc5d0\uc11c. <\/p>\n<p>\uc5f4 \ubd88\uc77c\uce58\ub97c \uc81c\uc5b4\ud568\uc73c\ub85c\uc368 \uc81c\uc870\uc5c5\uccb4\ub294 \ubc18\ubcf5\uc801\uc778 \uac00\uc5f4 \uc0ac\uc774\ud074\uc5d0\uc11c \uc6e8\uc774\ud37c \uc218\uc728 \uc548\uc815\uc131\uc774 \ucd5c\ub300 15% \ud5a5\uc0c1\ub418\uc5c8\ub2e4\uace0 \ubcf4\uace0\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc5f4 \uc548\uc815\uc131\uc744 \uc704\ud55c \ubbf8\uc138 \uad6c\uc870 \ubc00\ub3c4\uc758 SEM \ubd84\uc11d<\/h3>\n<p>\uc8fc\uc0ac \uc804\uc790 \ud604\ubbf8\uacbd(SEM)\uc744 \ud1b5\ud574 \uc870\ubc00\ud55c \ubbf8\uc138 \uae30\ud3ec \ubd84\ud3ec\uac00 \uc5f4 \uc2a4\ud2b8\ub808\uc2a4\uc5d0 \ub300\ud55c \uc800\ud56d\ub825\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 \uac83\uc73c\ub85c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4.  <\/p>\n<p>\uace0\ubc00\ub3c4 \uad6c\uc870\ub294 \uade0\uc5f4 \uc804\ud30c\ub97c \uc5b5\uc81c\ud558\uace0, \uade0\uc77c\ud55c \uae30\uacf5 \ud06c\uae30\ub294 \ube60\ub978 \uc5f4 \uc21c\ud658 \ub3d9\uc548 \uce58\uc218 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubbf8\uc138 \uad6c\uc870\uc801 \ubb34\uacb0\uc131\uc740 \ud50c\ub808\uc774\ud2b8\uc758 \uc218\uc728 \ud5a5\uc0c1 \uae30\ub2a5\uc758 \ucd08\uc11d\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uc5f4\ud33d\ucc3d\uacfc \uc6e8\uc774\ud37c \ud3b8\ucc28 \uc0c1\uad00\uad00\uacc4<\/h3>\n<table>\n<thead>\n<tr>\n<th>\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\uc77c\ubc18 \uac12<\/th>\n<th>\uc6e8\uc774\ud37c \uc815\ud655\ub3c4\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc5f4\ud33d\ucc3d \uacc4\uc218(CTE, 20-1000\u00b0C)<\/td>\n<td>\u22640.55 \u00d7 10-\u2076\/K<\/td>\n<td>\ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c \uc624\ubc84\ub808\uc774 \uc624\uc815\ub82c \uac10\uc18c<\/td>\n<\/tr>\n<tr>\n<td>\uad7d\ud798 \uac15\ub3c4(MPa)<\/td>\n<td>45-70<\/td>\n<td>\ubd80\ud558\uac00 \uac78\ub9b0 \uc0c1\ud0dc\uc5d0\uc11c\ub3c4 \uae30\uacc4\uc801 \ubb34\uacb0\uc131 \uc720\uc9c0<\/td>\n<\/tr>\n<tr>\n<td>\uc5f4 \ucda9\uaca9 \uc800\ud56d(\u0394T \u00b0C)<\/td>\n<td>250-300<\/td>\n<td>\uae09\uc18d \uac00\uc5f4 \uc2dc \uade0\uc5f4 \ubc29\uc9c0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 UV \ubd88\ud22c\uba85\ub3c4 \ubc0f \ud22c\uacfc \uc131\ub2a5<\/h2>\n<p><a href=\"https:\/\/www.hamamatsu.com\/us\/en\/applications\/semiconductor-manufacturing\/common-process-steps\/wafer-alignment.html\">\uc6e8\uc774\ud37c \uc815\ub82c<\/a><sup id=\"fnref1:3\"><a href=\"#fn:3\" class=\"footnote-ref\">3<\/a><\/sup> \uadf8\ub9ac\uace0 <a href=\"https:\/\/www.microchemicals.com\/dokumente\/application_notes\/exposure_photoresist.pdf\">\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ub178\ucd9c<\/a><sup id=\"fnref1:4\"><a href=\"#fn:4\" class=\"footnote-ref\">4<\/a><\/sup> \uc815\ubc00\ud55c UV \uc81c\uc5b4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. <\/p>\n<p>\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 193nm\uc5d0\uc11c 99% \uc774\uc0c1\uc758 \ubd88\ud22c\uba85\ub3c4\ub97c \uc81c\uacf5\ud558\uc5ec \uc758\ub3c4\ud558\uc9c0 \uc54a\uc740 \ubc29\uc0ac\uc120\uc73c\ub85c\ubd80\ud130 \uc6e8\uc774\ud37c\ub97c \ubcf4\ud638\ud558\ub294 \ub3d9\uc2dc\uc5d0 \ub9ac\uc18c\uadf8\ub798\ud53c\ub97c \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.  <\/p>\n<h3>2025\ub144 193nm\uc5d0\uc11c \uc790\uc678\uc120 \ucc28\ub2e8 \ud6a8\uc728\uc5d0 \ub300\ud55c \ubca4\uce58\ub9c8\ud06c<\/h3>\n<p>\uc5c5\ub370\uc774\ud2b8\ub41c SEMI \ud45c\uc900(2025\ub144)\uc5d0 \ub530\ub974\uba74, \ud5c8\uc6a9\ub418\ub294 \ucffc\uce20 \ucc28\ud3d0\ub294 193nm \ubc0f 248nm\uc5d0\uc11c &gt;99% \ubd88\ud22c\uba85\ub3c4\ub97c \uc720\uc9c0\ud574\uc57c \ud558\uba70 500\uc2dc\uac04 \ub178\ucd9c \uc2dc 1% \ubbf8\ub9cc\uc758 \ub204\ucd9c \ud3b8\ucc28\ub97c \uac00\uc838\uc57c \ud569\ub2c8\ub2e4.  <\/p>\n<p>\uc774\ub7ec\ud55c \ubca4\uce58\ub9c8\ud06c\ub294 \ub9ac\uc18c\uadf8\ub798\ud53c \uad11\ud559 \ubc0f \uc6e8\uc774\ud37c \ud328\ud134 \uc548\uc815\uc131\uc758 \uc7a5\uae30\uc801\uc778 \uc2e0\ub8b0\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/ultra-low-thermal-expansion-of-opaque-quartz-plates-directly-correlates-with-reduced-wafer-bow-and-overlay-error.webp\" alt=\"\uc790\uc678\uc120 \ucc28\ub2e8 \ucffc\uce20 \ud50c\ub808\uc774\ud2b8\" title=\"\ubd88\ud22c\uba85 \ucffc\uce20 \ud50c\ub808\uc774\ud2b8 \uc790\uc678\uc120 \ucc28\ub2e8 \ubca4\uce58\ub9c8\ud06c 193nm\" \/>  <\/p>\n<hr \/>\n<h2>\ubd88\ud22c\uba85\ud55c \uc11d\uc601\ud310\uc774 \uc5f4 \uc548\uc815\uc131\uc744 \ud1b5\ud574 \ubc18\ub3c4\uccb4 \uc218\uc728\uc744 \uc9c1\uc811\uc801\uc73c\ub85c \ud5a5\uc0c1\uc2dc\ud0a4\ub294 \ubc29\ubc95<\/h2>\n<p>\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \ubc18\ubcf5\uc801\uc778 \uc5f4 \uc0ac\uc774\ud074 \ub3d9\uc548 \uc6e8\uc774\ud37c \ud3c9\ud0c4\ub3c4\uc640 \uce58\uc218 \uc77c\uad00\uc131\uc744 \ubcf4\uc7a5\ud558\uc5ec \uc218\uc728 \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4.  <\/p>\n<p>\uc9c1\uc811\uc801\uc778 \uc5f0\uad00\uc131: \uc5f4\ud33d\ucc3d\uc774 0.1 \u00d7 10-\u2076\/K \uac10\uc18c\ud560 \ub54c\ub9c8\ub2e4 \uc6e8\uc774\ud37c \uc624\ubc84\ub808\uc774 \uc624\ub958\uc758 \uce21\uc815 \uac00\ub2a5\ud55c \uac10\uc18c\uc640 \uc5f0\uad00\ub418\uc5b4 \ub9ac\uc18c\uadf8\ub798\ud53c \uc815\ubc00\ub3c4\uac00 \ub192\uc544\uc9c0\uace0 \ubd88\ub7c9 \ub2e4\uc774\uac00 \uc904\uc5b4\ub4ed\ub2c8\ub2e4.  <\/p>\n<p>\uc0ac\ub840 \uc5f0\uad6c\uc5d0 \ub530\ub974\uba74 \ubd88\ud22c\uba85 \uc11d\uc601 \ubd80\ud488\uc744 \uc2dd\uac01 \ubc0f \ub9ac\uc18c\uadf8\ub798\ud53c \ubaa8\ub4c8\uc5d0 \ud1b5\ud569\ud560 \uacbd\uc6b0 7nm \uc774\ud558 \uacf5\uc815\uc5d0\uc11c \ucd5c\ub300 15%\uc758 \uc218\uc728 \uac1c\uc120\uc774 \uc774\ub8e8\uc5b4\uc9d1\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\ud50c\ub77c\uc988\ub9c8 \uc2dd\uac01 \uc2e4\ub4dc \uc751\uc6a9 \ubd84\uc57c\ub97c \uc704\ud55c \ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8 \uc120\ud0dd\ud558\uae30<\/h2>\n<p>\ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \ucc54\ubc84\ub294 \uc7ac\ub8cc\ub97c \ub192\uc740 \uc774\uc628 \ud50c\ub7ed\uc2a4\uc640 UV \ud50c\ub77c\uc988\ub9c8 \ubc29\uc0ac\uc120\uc5d0 \ub178\ucd9c\uc2dc\ud0b5\ub2c8\ub2e4.  <\/p>\n<p>\ubd88\ud22c\uba85\ud55c \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \uce58\uc218 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\uace0 \ud50c\ub77c\uc988\ub9c8 \uce68\uc2dd\uc744 \ubc29\uc9c0\ud558\uba70 \uc6e8\uc774\ud37c \ud45c\uba74\uc744 \ubcc0\uacbd\ud560 \uc218 \uc788\ub294 \uc720\ud574\ud55c \ud30c\uc7a5\uc744 \ucc28\ub2e8\ud558\uae30 \ub54c\ubb38\uc5d0 \ucc28\ud3d0\uc6a9\uc73c\ub85c \uc120\ud0dd\ub429\ub2c8\ub2e4.  <\/p>\n<p>\uc8fc\uc694 \uc120\ud0dd \ud30c\ub77c\ubbf8\ud130\ub85c\ub294 \ud310 \ub450\uaed8 \uacf5\ucc28(\u00b10.05mm), 193~248nm\uc5d0\uc11c\uc758 \uc790\uc678\uc120 \ucc28\ub2e8, \ud50c\ub77c\uc988\ub9c8\ub85c \uc778\ud55c \ubbf8\uc138 \uade0\uc5f4\uc5d0 \ub300\ud55c \ub0b4\uc131 \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\ubc18\ub3c4\uccb4 \uc0dd\uc0b0\uc5d0\uc11c \uc218\uc728 \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud558\uae30 \uc704\ud55c \ubd88\ud22c\uba85 \uc11d\uc601\ud310 \uad6c\ud604<\/h2>\n<p>\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub97c \ud6a8\uacfc\uc801\uc73c\ub85c \ubc30\uce58\ud558\ub824\uba74 \uc5d0\uce6d \uc2e4\ub4dc, \ub9ac\uc18c\uadf8\ub798\ud53c \uad11\ud559 \ubc0f \uc5f4 \uc9c0\uc9c0 \ud504\ub808\uc784\uc5d0 \uc815\ubc00\ud558\uac8c \ud1b5\ud569\ud574\uc57c \ud569\ub2c8\ub2e4.  <\/p>\n<p>\uc5c4\uaca9\ud55c \uacf5\uc815 \ubaa8\ub2c8\ud130\ub9c1\uacfc \uacb0\ud569\ud558\uba74 \uc6e8\uc774\ud37c \ubcc0\ub3d9\uc131\uc744 \uc904\uc774\uae30 \uc704\ud55c \uc77c\uad00\ub41c \uacbd\ub85c\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4. \uadf8 \uacb0\uacfc \uc218\uc728 \ud5a5\uc0c1, \uac00\ub3d9 \uc911\ub2e8 \uc2dc\uac04 \uac10\uc18c, \uc5c5\ub370\uc774\ud2b8\ub41c 2025 SEMI \ud45c\uc900 \uc900\uc218 \uac15\ud654 \ub4f1 \uce21\uc815 \uac00\ub2a5\ud55c \uacb0\uacfc\ub97c \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uacb0\ub860<\/h2>\n<p>\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \ubc18\ub3c4\uccb4 \uc0dd\uc0b0\uc5d0\uc11c \uc6e8\uc774\ud37c \uc815\ud655\ub3c4\ub97c \ubcf4\ud638\ud558\uace0 \uc218\uc728\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.  <\/p>\n<blockquote>\n<p>\uc6e8\uc774\ud37c \uc218\uc728 \ubb38\uc81c\ub97c \ud574\uacb0\ud558\ub824\uba74 \uace0\uae09 \uc7ac\ub8cc \ud1b5\ud569\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. 20\ub144 \uc774\uc0c1\uc758 \uc81c\uc870 \uacbd\ud5d8\uacfc \uacf5\uc7a5 \uc9c1\uc811 \uacf5\uae09\uc73c\ub85c \ub4b7\ubc1b\uce68\ub418\ub294 TOQUARTZ \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ud300\uc758 \uc804\ubb38 \uc9c0\uc2dd\uc744 \ud65c\uc6a9\ud558\uc5ec \ubd88\ud22c\uba85 \uc11d\uc601\ud310 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub300\ud55c \ub9de\ucda4\ud615 \ucee8\uc124\ud305\uc744 \ubc1b\uc544\ubcf4\uc138\uc694.<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38(FAQ)<\/h2>\n<p><strong>Q1: \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc758 \uc8fc\uc694 \uc131\ub2a5 \ud2b9\uc131\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><br \/>\n\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \uc5f4\ud33d\ucc3d\uc774 \ub9e4\uc6b0 \ub0ae\uace0 \uc790\uc678\uc120 \ubd88\ud22c\uba85\ub3c4\uac00 \ub192\uc73c\uba70 \uc5f4 \uc548\uc815\uc131\uc774 \ub6f0\uc5b4\ub0a9\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131\uc740 \ub9ac\uc18c\uadf8\ub798\ud53c \ubc0f \uc5d0\uce6d \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc6e8\uc774\ud37c \uc65c\uace1\uc744 \ubc29\uc9c0\ud558\uace0 \uc624\ubc84\ub808\uc774 \uc624\ub958\ub97c \uc904\uc774\uba70 \ubd80\ud488 \uc218\uba85\uc744 \uc5f0\uc7a5\ud569\ub2c8\ub2e4.  <\/p>\n<p><strong>Q2: \uc62c\ubc14\ub978 \ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub97c \uc120\ud0dd\ud558\ub294 \uac83\uc774 \uc804\uccb4 \uc0dd\uc0b0 \ube44\uc6a9\uc5d0 \uc5b4\ub5a4 \uc601\ud5a5\uc744 \ubbf8\uce58\ub098\uc694?<\/strong><br \/>\n\uace0\uc131\ub2a5 \ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \uc6e8\uc774\ud37c \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \uc218\uc728\uc744 \uac1c\uc120\ud568\uc73c\ub85c\uc368 \ub2e4\uc774\ub2f9 \ube44\uc6a9\uc744 \ub0ae\ucda5\ub2c8\ub2e4. \ucd08\uae30 \ud22c\uc790 \ube44\uc6a9\uc740 \ud45c\uc900 \ucffc\uce20\ubcf4\ub2e4 \ub192\uc9c0\ub9cc, \ubd88\ub7c9\ub960 \uac10\uc18c\uc640 \uac00\ub3d9 \uc911\ub2e8 \uc2dc\uac04 \uac10\uc18c\ub85c \uc7a5\uae30\uc801\uc778 \ube44\uc6a9 \uc808\uac10 \ud6a8\uacfc\ub97c \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.  <\/p>\n<p><strong>Q3: \ub9de\ucda4\ud615 \ubc18\ub3c4\uccb4 \ud234\uc6a9 \ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub97c \uc870\ub2ec\ud560 \ub54c \uc5b4\ub5a4 \uc0ac\uc591\uc744 \uc81c\uacf5\ud574\uc57c \ud569\ub2c8\uae4c?<\/strong><br \/>\n\uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uce58\uc218, \ub450\uaed8 \uacf5\ucc28(\u00b10.05mm), \uc790\uc678\uc120 \ucc28\ub2e8 \uc694\uac74(193~248nm) \ubc0f \uc5f4\ud33d\ucc3d \ud55c\uacc4\ub97c \uc9c0\uc815\ud574\uc57c \ud569\ub2c8\ub2e4. \ub9de\ucda4\ud615 \ub3c4\uba74 \ub610\ub294 \uc0d8\ud50c\uc740 \uacf5\uae09\uc5c5\uccb4\uac00 \ub3c4\uad6c \ud1b5\ud569\uc744 \uc704\ud55c \uc815\ud655\ud55c \ud54f\uc744 \uc81c\uacf5\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.  <\/p>\n<p><strong>Q4: \ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ud22c\uba85 \uc11d\uc601\uacfc \uc5b4\ub5bb\uac8c \ube44\uad50\ub418\ub098\uc694?<\/strong><br \/>\n\ud22c\uba85\ud55c \uc11d\uc601\uc740 \uc790\uc678\uc120 \ud22c\uacfc\uac00 \uac00\ub2a5\ud558\uc5ec \uad11\ud559 \ucc3d\ubb38\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4. \ubd88\ud22c\uba85 \uc11d\uc601\uc740 \ubbf8\uc138 \uae30\ud3ec \ubd84\uc0b0\uc744 \uc81c\uc5b4\ud558\uc5ec \ucc28\ud3d0 \ubc0f \uc5f4 \uc81c\uc5b4\uc6a9\uc73c\ub85c \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uacf5\uc815 \ubaa8\ub4c8\uc5d0 UV \ucc28\ub2e8 \ub610\ub294 \ud22c\uacfc\uac00 \ud544\uc694\ud55c\uc9c0 \uc5ec\ubd80\uc5d0 \ub530\ub77c \uc120\ud0dd\uc774 \ub2ec\ub77c\uc9d1\ub2c8\ub2e4.  <\/p>\n<p>\ub808\ud37c\ub7f0\uc2a4:<\/p>\n<div class=\"footnotes\">\n<hr \/>\n<ol>\n<li id=\"fn:1\">\n<p>\uc6e8\uc774\ud37c \ubcf4\uc6b0\ub97c \uc774\ud574\ud558\ub294 \uac83\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uc744 \uac1c\uc120\ud558\uace0 \uacb0\ud568\uc744 \uc904\uc774\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<a href=\"#fnref1:1\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:2\">\n<p>\uc624\ubc84\ub808\uc774 \uc624\ub958\ub97c \ud0d0\uc0c9\ud558\uba74 \ub9ac\uc18c\uadf8\ub798\ud53c\uc758 \uc815\ubc00\ub3c4\ub97c \ud5a5\uc0c1\uc2dc\ucf1c \uce69 \uc131\ub2a5\uc744 \uac1c\uc120\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<a href=\"#fnref1:2\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:3\">\n<p>\uc6e8\uc774\ud37c \uc815\ub82c\uc774 \uc5b4\ub5bb\uac8c \ubc18\ub3c4\uccb4 \uc81c\uc870\uc758 \uc815\ud655\uc131\uc744 \ubcf4\uc7a5\ud558\uc5ec \uc218\uc728\uc744 \ub192\uc774\uace0 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294\uc9c0 \uc54c\uc544\ubcf4\uc138\uc694.<a href=\"#fnref1:3\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:4\">\n<p>\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ub178\uad11 \uae30\uc220\uc744 \ud0d0\uad6c\ud558\uba74 \uce69 \uc0dd\uc0b0\uc758 \uc911\uc694\ud55c \ub2e8\uacc4\uc5d0 \ub300\ud55c \uc9c0\uc2dd\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<a href=\"#fnref1:4\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<\/ol>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\uc6e8\uc774\ud37c \uc65c\uace1\uc744 \uc904\uc774\ub824\uba74 \uc548\uc815\uc131\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ucca8\ub2e8 \uc18c\uc7ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\ub294 \ucd08\uc800 [...]\ub97c \ud1b5\ud574 \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \uc65c\uace1\uc744 15%\uae4c\uc9c0 \uc904\uc785\ub2c8\ub2e4.<\/p>","protected":false},"author":2,"featured_media":9796,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[10],"tags":[],"class_list":["post-9792","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blogs"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v25.4 (Yoast SEO v25.4) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Critical Properties of Opaque Quartz Plates: Enhancing Semiconductor Yield by 15% in 2025<\/title>\n<meta name=\"description\" content=\"Discover how key properties like thermal expansion (\u22640.55\u00d710\u207b\u2076\/K) and UV opacity in opaque quartz plates directly reduce wafer distortion by 15%, enhancing semiconductor yield. Includes SEM data and 2025 benchmarks.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/toquartz.com\/ko\/opaque-quartz-plates-semiconductor-yield-enhancement\/\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"How Do Opaque Quartz Plate Properties Enhance Semiconductor Yield?\" \/>\n<meta property=\"og:description\" content=\"Discover how key properties like thermal expansion (\u22640.55\u00d710\u207b\u2076\/K) and UV opacity in opaque quartz plates directly reduce wafer distortion by 15%, enhancing semiconductor yield. Includes SEM data and 2025 benchmarks.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/toquartz.com\/ko\/opaque-quartz-plates-semiconductor-yield-enhancement\/\" \/>\n<meta property=\"og:site_name\" content=\"TOQUARTZ: Quartz Glass Solution\" \/>\n<meta property=\"article:published_time\" content=\"2025-08-27T01:51:51+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2025-09-03T01:00:13+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp\" \/>\n\t<meta property=\"og:image:width\" content=\"900\" \/>\n\t<meta property=\"og:image:height\" content=\"600\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/webp\" \/>\n<meta name=\"author\" content=\"ECHO\u00a0YANG\u200b\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\uae00\uc4f4\uc774\" \/>\n\t<meta name=\"twitter:data1\" content=\"ECHO\u00a0YANG\u200b\" \/>\n\t<meta name=\"twitter:label2\" content=\"\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04\" \/>\n\t<meta name=\"twitter:data2\" content=\"4\ubd84\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/\"},\"author\":{\"name\":\"ECHO\u00a0YANG\u200b\",\"@id\":\"https:\/\/toquartz.com\/#\/schema\/person\/64de60160e69ad73646f68c4a56a90d3\"},\"headline\":\"How Do Opaque Quartz Plate Properties Enhance Semiconductor Yield?\",\"datePublished\":\"2025-08-27T01:51:51+00:00\",\"dateModified\":\"2025-09-03T01:00:13+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/\"},\"wordCount\":1324,\"commentCount\":0,\"publisher\":{\"@id\":\"https:\/\/toquartz.com\/#organization\"},\"image\":{\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp\",\"articleSection\":[\"Blogs\"],\"inLanguage\":\"ko-KR\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/\",\"url\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/\",\"name\":\"Critical Properties of Opaque Quartz Plates: Enhancing Semiconductor Yield by 15% in 2025\",\"isPartOf\":{\"@id\":\"https:\/\/toquartz.com\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp\",\"datePublished\":\"2025-08-27T01:51:51+00:00\",\"dateModified\":\"2025-09-03T01:00:13+00:00\",\"description\":\"Discover how key properties like thermal expansion (\u22640.55\u00d710\u207b\u2076\/K) and UV opacity in opaque quartz plates directly reduce wafer distortion by 15%, enhancing semiconductor yield. Includes SEM data and 2025 benchmarks.\",\"breadcrumb\":{\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#breadcrumb\"},\"inLanguage\":\"ko-KR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#primaryimage\",\"url\":\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp\",\"contentUrl\":\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp\",\"width\":900,\"height\":600,\"caption\":\"opaque quartz plates semiconductor yield enhancement\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/toquartz.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Blogs\",\"item\":\"https:\/\/toquartz.com\/blogs\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"How Do Opaque Quartz Plate Properties Enhance Semiconductor Yield?\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/toquartz.com\/#website\",\"url\":\"https:\/\/toquartz.com\/\",\"name\":\"TOQUARTZ\",\"description\":\"\",\"publisher\":{\"@id\":\"https:\/\/toquartz.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/toquartz.com\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ko-KR\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/toquartz.com\/#organization\",\"name\":\"TOQUARTZ\",\"url\":\"https:\/\/toquartz.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/toquartz.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/02\/logo-2.png\",\"contentUrl\":\"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/02\/logo-2.png\",\"width\":583,\"height\":151,\"caption\":\"TOQUARTZ\"},\"image\":{\"@id\":\"https:\/\/toquartz.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/toquartz.com\/#\/schema\/person\/64de60160e69ad73646f68c4a56a90d3\",\"name\":\"ECHO\u00a0YANG\u200b\",\"url\":\"https:\/\/toquartz.com\/ko\/author\/webadmin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc758 \uc911\uc694\ud55c \ud2b9\uc131: 2025\ub144 \ubc18\ub3c4\uccb4 \uc218\uc728 15% \ud5a5\uc0c1","description":"\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\uc758 \uc5f4\ud33d\ucc3d(\u22640.55\u00d710-\u2076\/K) \ubc0f UV \ubd88\ud22c\uba85\ub3c4\uc640 \uac19\uc740 \uc8fc\uc694 \ud2b9\uc131\uc774 \uc5b4\ub5bb\uac8c \uc6e8\uc774\ud37c \uc65c\uace1\uc744 15%\uae4c\uc9c0 \uc9c1\uc811 \uac10\uc18c\uc2dc\ucf1c \ubc18\ub3c4\uccb4 \uc218\uc728\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294\uc9c0 \uc54c\uc544\ubcf4\uc138\uc694. SEM \ub370\uc774\ud130 \ubc0f 2025\ub144 \ubca4\uce58\ub9c8\ud06c \ud3ec\ud568.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/toquartz.com\/ko\/opaque-quartz-plates-semiconductor-yield-enhancement\/","og_locale":"ko_KR","og_type":"article","og_title":"How Do Opaque Quartz Plate Properties Enhance Semiconductor Yield?","og_description":"Discover how key properties like thermal expansion (\u22640.55\u00d710\u207b\u2076\/K) and UV opacity in opaque quartz plates directly reduce wafer distortion by 15%, enhancing semiconductor yield. Includes SEM data and 2025 benchmarks.","og_url":"https:\/\/toquartz.com\/ko\/opaque-quartz-plates-semiconductor-yield-enhancement\/","og_site_name":"TOQUARTZ: Quartz Glass Solution","article_published_time":"2025-08-27T01:51:51+00:00","article_modified_time":"2025-09-03T01:00:13+00:00","og_image":[{"width":900,"height":600,"url":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp","type":"image\/webp"}],"author":"ECHO\u00a0YANG\u200b","twitter_card":"summary_large_image","twitter_misc":{"\uae00\uc4f4\uc774":"ECHO\u00a0YANG\u200b","\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04":"4\ubd84"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#article","isPartOf":{"@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/"},"author":{"name":"ECHO\u00a0YANG\u200b","@id":"https:\/\/toquartz.com\/#\/schema\/person\/64de60160e69ad73646f68c4a56a90d3"},"headline":"How Do Opaque Quartz Plate Properties Enhance Semiconductor Yield?","datePublished":"2025-08-27T01:51:51+00:00","dateModified":"2025-09-03T01:00:13+00:00","mainEntityOfPage":{"@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/"},"wordCount":1324,"commentCount":0,"publisher":{"@id":"https:\/\/toquartz.com\/#organization"},"image":{"@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#primaryimage"},"thumbnailUrl":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp","articleSection":["Blogs"],"inLanguage":"ko-KR","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/","url":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/","name":"\ubd88\ud22c\uba85 \uc11d\uc601\ud310\uc758 \uc911\uc694\ud55c \ud2b9\uc131: 2025\ub144 \ubc18\ub3c4\uccb4 \uc218\uc728 15% \ud5a5\uc0c1","isPartOf":{"@id":"https:\/\/toquartz.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#primaryimage"},"image":{"@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#primaryimage"},"thumbnailUrl":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp","datePublished":"2025-08-27T01:51:51+00:00","dateModified":"2025-09-03T01:00:13+00:00","description":"\ubd88\ud22c\uba85 \uc11d\uc601 \ud50c\ub808\uc774\ud2b8\uc758 \uc5f4\ud33d\ucc3d(\u22640.55\u00d710-\u2076\/K) \ubc0f UV \ubd88\ud22c\uba85\ub3c4\uc640 \uac19\uc740 \uc8fc\uc694 \ud2b9\uc131\uc774 \uc5b4\ub5bb\uac8c \uc6e8\uc774\ud37c \uc65c\uace1\uc744 15%\uae4c\uc9c0 \uc9c1\uc811 \uac10\uc18c\uc2dc\ucf1c \ubc18\ub3c4\uccb4 \uc218\uc728\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294\uc9c0 \uc54c\uc544\ubcf4\uc138\uc694. SEM \ub370\uc774\ud130 \ubc0f 2025\ub144 \ubca4\uce58\ub9c8\ud06c \ud3ec\ud568.","breadcrumb":{"@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#breadcrumb"},"inLanguage":"ko-KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/"]}]},{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#primaryimage","url":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp","contentUrl":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/08\/opaque-quartz-plates-semiconductor-yield-enhancement.webp","width":900,"height":600,"caption":"opaque quartz plates semiconductor yield enhancement"},{"@type":"BreadcrumbList","@id":"https:\/\/toquartz.com\/opaque-quartz-plates-semiconductor-yield-enhancement\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/toquartz.com\/"},{"@type":"ListItem","position":2,"name":"Blogs","item":"https:\/\/toquartz.com\/blogs\/"},{"@type":"ListItem","position":3,"name":"How Do Opaque Quartz Plate Properties Enhance Semiconductor Yield?"}]},{"@type":"WebSite","@id":"https:\/\/toquartz.com\/#website","url":"https:\/\/toquartz.com\/","name":"\ud1a0\ucffc\uce20","description":"","publisher":{"@id":"https:\/\/toquartz.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/toquartz.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ko-KR"},{"@type":"Organization","@id":"https:\/\/toquartz.com\/#organization","name":"\ud1a0\ucffc\uce20","url":"https:\/\/toquartz.com\/","logo":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/toquartz.com\/#\/schema\/logo\/image\/","url":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/02\/logo-2.png","contentUrl":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/02\/logo-2.png","width":583,"height":151,"caption":"TOQUARTZ"},"image":{"@id":"https:\/\/toquartz.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/toquartz.com\/#\/schema\/person\/64de60160e69ad73646f68c4a56a90d3","name":"\uc5d0\ucf54 \uc591","url":"https:\/\/toquartz.com\/ko\/author\/webadmin\/"}]}},"_links":{"self":[{"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/posts\/9792","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/comments?post=9792"}],"version-history":[{"count":4,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/posts\/9792\/revisions"}],"predecessor-version":[{"id":10171,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/posts\/9792\/revisions\/10171"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/media\/9796"}],"wp:attachment":[{"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/media?parent=9792"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/categories?post=9792"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/tags?post=9792"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}