{"id":7701,"date":"2025-07-16T10:50:47","date_gmt":"2025-07-16T02:50:47","guid":{"rendered":"https:\/\/toquartz.com\/?p=7701"},"modified":"2025-09-19T11:06:32","modified_gmt":"2025-09-19T03:06:32","slug":"quartz-glass-transmission-optical-design-2025","status":"publish","type":"post","link":"https:\/\/toquartz.com\/ko\/quartz-glass-transmission-optical-design-2025\/","title":{"rendered":"\uc5d4\uc9c0\ub2c8\uc5b4\ub294 2025\ub144 \uad11\ud559 \uc2dc\uc2a4\ud15c \uc124\uacc4\ub97c \uc704\ud574 \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\ub97c \uc5b4\ub5bb\uac8c \ud3c9\uac00\ud574\uc57c \ud560\uae4c\uc694?"},"content":{"rendered":"

\ucffc\uce20 \uc720\ub9ac \ud22c\uacfc\uc728\uc740 \ud2b9\uc815 \ud30c\uc7a5\uc5d0\uc11c \ucffc\uce20 \uc720\ub9ac\ub97c \ud1b5\uacfc\ud558\ub294 \ube5b\uc758 \ube44\uc728\uc785\ub2c8\ub2e4. \uad11\ud559 \uc124\uacc4\uc758 \uacbd\uc6b0 \uc774\ub7ec\ud55c \ud2b9\uc131\uc744 \uc774\ud574\ud558\uba74 \ucd5c\uc801\uc758 \ud6a8\uc728\uc131\uacfc \uc815\ubc00\ud55c \uc7ac\ub8cc \uc120\ud0dd\uc744 \ubcf4\uc7a5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\"\uc11d\uc601<\/p>\n

\uc5d4\uc9c0\ub2c8\uc5b4\uc640 \uc124\uacc4\uc790\ub294 \uc804\uc1a1 \uac12\ubfd0\ub9cc \uc544\ub2c8\ub77c \uae30\ubcf8 \ubb3c\ub9ac\uc801 \uba54\ucee4\ub2c8\uc998, \uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcc4 \uc694\uad6c \uc0ac\ud56d \ubc0f \uc870\ub2ec \uc694\uc18c\ub3c4 \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4. \ub2e4\uc74c \uac00\uc774\ub4dc\ub294 \uace0\uae09 \uad11\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \ucffc\uce20 \uc720\ub9ac \ud22c\uacfc\uc728\uc744 \ub9c8\uc2a4\ud130\ud558\uae30 \uc704\ud55c \uccb4\uacc4\uc801\uc778 \uc811\uadfc \ubc29\uc2dd\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\ub780 \ubb34\uc5c7\uc774\uba70 \uad11\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc911\uc694\ud55c \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/h2>\n

\uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\uc728\uc740 \uc8fc\uc5b4\uc9c4 \ud30c\uc7a5\uc758 \ube5b\uc774 \uc18c\uc7ac\ub97c \ud1b5\uacfc\ud558\ub294 \uc591\uc744 \uc815\uc758\ud569\ub2c8\ub2e4. \uc790\uc678\uc120 \ubc0f \uac00\uc2dc\uad11\uc120 \ubc94\uc704\uc5d0\uc11c \ub192\uc740 \ud22c\uacfc\uc728\uc740 \uc815\ubc00 \uad11\ud559\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\"\uc11d\uc601<\/p>\n

\uc11d\uc601 \uc720\ub9ac\ub294 \uc790\uc678\uc120\ubd80\ud130 \uc801\uc678\uc120\uae4c\uc9c0 \ud22c\uacfc\uc728\uc774 \ub6f0\uc5b4\ub098\uace0 \ud761\uc218\uc728\uc774 \ub0ae\uc73c\uba70 \uc0b0\ub780\uc744 \ucd5c\uc18c\ud654\ud558\uae30 \ub54c\ubb38\uc5d0 \uad11\ud559 \uc2dc\uc2a4\ud15c\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ub9ac\uc18c\uadf8\ub798\ud53c<\/a>1<\/a><\/sup>\ub808\uc774\uc800 \uac00\uacf5, \ubd84\uc11d \uacc4\uce21 \ub4f1 \uc0ac\uc18c\ud55c \uc190\uc2e4\ub3c4 \uc2dc\uc2a4\ud15c \uc131\ub2a5\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\ub294 \ubd84\uc57c\uc785\ub2c8\ub2e4.<\/p>\n

\uc11d\uc601 \uc720\ub9ac \ud22c\uacfc \ud2b9\uc131 \uac1c\uc694<\/h3>\n\n\n\n\n\n\n\n\n
\uc18d\uc131<\/th>\n\uc77c\ubc18\uc801\uc778 \uac12\/\ubc94\uc704<\/th>\n\ucee8\ud14d\uc2a4\ud2b8\/\uc870\uac74<\/th>\n<\/tr>\n<\/thead>\n
\uc790\uc678\uc120 \ud22c\uacfc(200nm)<\/td>\n>1mm\ub2f9 90% \uc774\uc0c1<\/td>\n\uace0\uc21c\ub3c4 \uc6a9\uc735 \uc2e4\ub9ac\uce74<\/td>\n<\/tr>\n
\uac00\uc2dc\uad11\uc120(400-700nm)<\/td>\n1mm\ub2f9 >93%<\/td>\n\ud45c\uc900 \uad11\ud559 \ub4f1\uae09<\/td>\n<\/tr>\n
\uadfc\uc801\uc678\uc120(1000-2000nm)<\/td>\n>1mm\ub2f9 92% \uc774\uc0c1<\/td>\n\ub0ae\uc740 OH \ucf58\ud150\uce20<\/td>\n<\/tr>\n
\uc911\uc801\uc678\uc120(2.7\/3.5\u03bcm)<\/td>\n\uae09\uaca9\ud55c \ud558\ub77d<\/td>\nOH- \ud761\uc218 \ud53c\ud06c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\uc11d\uc601 \uc720\ub9ac\uc758 \ubb3c\ub9ac\uc801 \ud2b9\uc131\uc740 \uc790\uc678\uc120, \uac00\uc2dc\uad11\uc120, \uc801\uc678\uc120 \ud30c\uc7a5\uc5d0 \uac78\uccd0 \ud22c\uacfc\uc728\uc744 \uc5b4\ub5bb\uac8c \uacb0\uc815\ud560\uae4c\uc694?<\/h2>\n

\ubc34\ub4dc \uad6c\uc870, \uc218\uc0b0\uae30 \ud568\ub7c9, \ubbf8\uc138\ud55c \uacb0\ud568 \ub4f1 \uc11d\uc601 \uc720\ub9ac\uc758 \uace0\uc720\ud55c \ud2b9\uc131\uc740 \uc2a4\ud399\ud2b8\ub7fc \uc804\ubc18\uc5d0 \uac78\uccd0 \ud22c\uacfc\uc728\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n

\uc774\ub7ec\ud55c \uad00\uacc4\ub97c \uc774\ud574\ud558\uba74 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc131\ub2a5\uc744 \uc608\uce21\ud558\uace0 \uac01 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud55c \uc18c\uc7ac\ub97c \uc120\ud0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc804\uc1a1\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \ubb3c\ub9ac\uc801 \uc694\uc778<\/h3>\n\n\n\n\n\n\n\n
\uc694\uc778<\/th>\n\uc601\ud5a5\uc744 \ubc1b\ub294 \ud30c\uc7a5<\/th>\n\uc804\uc1a1\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/th>\n\uc77c\ubc18 \uac12\/\uc784\uacc4\uac12<\/th>\n<\/tr>\n<\/thead>\n
\ubc34\ub4dc\uac2d(eV)<\/td>\n<200nm(UV)<\/td>\nUV \ucc28\ub2e8 \uc124\uc815<\/td>\n~8.3eV(~150nm)<\/td>\n<\/tr>\n
OH- \ud568\ub7c9(ppm)<\/td>\n2.7\/3.5\u03bcm(IR)<\/td>\n\uc801\uc678\uc120 \ud53c\ud06c\uc5d0\uc11c \ud761\uc218\uc728 \uc99d\uac00<\/td>\n<\ub192\uc740 \uc801\uc678\uc120 \ud22c\uacfc\uc728\uc758 \uacbd\uc6b0 10ppm \ubbf8\ub9cc<\/td>\n<\/tr>\n
\uacf5\uc11d\/\ud3ec\ud568 \ubc00\ub3c4<\/td>\n400-700nm(\uac00\uc2dc\uad11\uc120)<\/td>\n\uc0b0\ub780 \uc99d\uac00, \uc120\uba85\ub3c4 \uac10\uc18c<\/td>\n<\uace0\uc131\ub2a5 \uad11\ud559 \uc7a5\uce58\uc758 \uacbd\uc6b0 1ppm \ubbf8\ub9cc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\ubc34\ub4dc \uad6c\uc870 \ubc0f UV \ucc28\ub2e8 \uba54\ucee4\ub2c8\uc998<\/h3>\n

\uc804\uc790 \ubc34\ub4dc \uad6c\uc870 \uc11d\uc601 \uc720\ub9ac<\/a> \uc5d0 \ub530\ub77c \uc790\uc678\uc120 \ucc28\ub2e8\uc774 \uacb0\uc815\ub429\ub2c8\ub2e4. \ubc34\ub4dc\uac2d(~8.3eV, ~150nm) \uc774\uc0c1\uc758 \uc5d0\ub108\uc9c0\ub97c \uac00\uc9c4 \uad11\uc790\ub294 \uc804\uc790 \uc804\uc774\ub97c \ud1b5\ud574 \ud761\uc218\ub418\uc5b4 \uae4a\uc740 \uc790\uc678\uc120 \ud22c\uacfc\ub97c \uc81c\ud55c\ud569\ub2c8\ub2e4. \uc774 \uc591\uc790 \uc5ed\ud559\uc801 \ud2b9\uc131\uc740 \uc5d1\uc2dc\uba38 \ub808\uc774\uc800 \uad11\ud559 \ub4f1 200nm \uc774\ud558\uc758 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud544\uc218\uc801\uc778 \uc694\uc18c\uc785\ub2c8\ub2e4.<\/p>\n

\ud558\uc774\ub4dc\ub85d\uc2e4 \ud568\ub7c9\uc774 IR \ud22c\uacfc \ucc3d\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/h3>\n

\uc218\uc0b0\uae30(OH-)\ub294 2.7\u339b\uc640 3.5\u339b\uc5d0\uc11c \ud761\uc218 \ud53c\ud06c\uac00 \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/a>2<\/a><\/sup> OH- \ud568\ub7c9\uc774 \ub192\uc744\uc218\ub85d \uc801\uc678\uc120 \ud22c\uacfc \ucc3d\uc774 \uc881\uc544\uc9d1\ub2c8\ub2e4. OH-\ub97c 1000ppm\uc5d0\uc11c 10ppm \ubbf8\ub9cc\uc73c\ub85c \uc904\uc774\uba74 \uc774 \ud30c\uc7a5\uc5d0\uc11c IR \ud22c\uacfc\uc728\uc744 20% \uc774\uc0c1 \uac1c\uc120\ud560 \uc218 \uc788\uc73c\uba70, \uc774\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uacbd\uc6b0\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. IR \uad11\ucf00\uc774\ube14 \ubc0f \uc13c\uc11c \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/a>3<\/a><\/sup>.<\/p>\n

\n

\ubbf8\uc138\ud55c \uacb0\ud568\uc73c\ub85c \uc778\ud55c \ud30c\uc7a5 \uc120\ud0dd\uc801 \uc0b0\ub780<\/h3>\n

\uacf5\uadf9 \ud074\ub7ec\uc2a4\ud130 \ubc0f \ub0b4\ud3ec\ubb3c\uacfc \uac19\uc740 \ubbf8\uc138\ud55c \uacb0\ud568\uc740 \uac00\uc2dc\uad11\uc120\uc744 \uc0b0\ub780\uc2dc\ucf1c 400~700nm \ubc94\uc704\uc5d0\uc11c \ud22c\uacfc\uc728\uc744 \uac10\uc18c\uc2dc\ud0b5\ub2c8\ub2e4. \ubaac\ud14c\uce74\ub97c\ub85c \uc2dc\ubbac\ub808\uc774\uc158\uc5d0 \ub530\ub974\uba74 ppm \ubbf8\ub9cc\uc758 \ub0b4\ud3ec\ubb3c\ub3c4 \uce21\uc815 \uac00\ub2a5\ud55c \uc0b0\ub780 \uc190\uc2e4\uc744 \uc77c\uc73c\ud0ac \uc218 \uc788\uc73c\uba70, \uc774\ub294 \uace0\uc131\ub2a5 \uac00\uc2dc\uad11\ud559\uc5d0 \uc788\uc5b4 \ucd08\uc21c\uc218 \uc11d\uc601\uc758 \uc911\uc694\uc131\uc744 \uac15\uc870\ud569\ub2c8\ub2e4.<\/p>\n

\uc8fc\uc694 \ud30c\uc7a5\uc5d0\uc11c \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uc77c\ubc18\uc801\uc778 \ud22c\uacfc \uac12\uc740 \uc5bc\ub9c8\uc785\ub2c8\uae4c?<\/h2>\n

\uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc790\uc678\uc120, \uac00\uc2dc\uad11\uc120 \ubc0f \uc801\uc678\uc120 \ubc94\uc704\uc5d0\uc11c \ub6f0\uc5b4\ub09c \ud22c\uacfc\uc728\uc744 \uc81c\uacf5\ud558\ubbc0\ub85c \uae4c\ub2e4\ub85c\uc6b4 \uad11\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc120\ud638\ub418\ub294 \uc18c\uc7ac\uc785\ub2c8\ub2e4.<\/p>\n

\ud22c\uacfc\uc728\uc740 \uc21c\ub3c4, \ub450\uaed8, \ud30c\uc7a5\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. \uc544\ub798 \ud45c\uc5d0\ub294 \uc8fc\uc694 \ubca4\uce58\ub9c8\ud06c\uac00 \uc694\uc57d\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc804\uc1a1 \ubca4\uce58\ub9c8\ud06c<\/h3>\n\n\n\n\n\n\n\n\n\n\n
\ud30c\uc7a5(nm\/\u03bcm)<\/th>\n\uc804\uc1a1(1mm\ub2f9 %)<\/th>\n\ub4f1\uae09\/\uc870\uac74<\/th>\n<\/tr>\n<\/thead>\n
200<\/td>\n>90<\/td>\n\uace0\uc21c\ub3c4, \ub0ae\uc740 Fe\u00b3\u207a<\/td>\n<\/tr>\n
254<\/td>\n>92<\/td>\n\uc790\uc678\uc120 \uc0b4\uade0 \ub4f1\uae09<\/td>\n<\/tr>\n
355<\/td>\n>93<\/td>\n\ub808\uc774\uc800 \uad11\ud559<\/td>\n<\/tr>\n
1064<\/td>\n>93<\/td>\nIR \ub808\uc774\uc800 \uad11\ud559<\/td>\n<\/tr>\n
2700(2.7\u03bcm)<\/td>\n60-80<\/td>\n\uc800\uc0b0\uc18c, \uace0\uc21c\ub3c4<\/td>\n<\/tr>\n
3500(3.5\u03bcm)<\/td>\n40-70<\/td>\n\uc800\uc0b0\uc18c, \uace0\uc21c\ub3c4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\uace0\ucd9c\ub825 \uad11\ud559 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ud761\uc218\uc640 \uc0b0\ub780\uc740 \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\uc5d0 \uc5b4\ub5a4 \uc601\ud5a5\uc744 \ubbf8\uce58\ub098\uc694?<\/h2>\n

\ud761\uc218\uc640 \uc0b0\ub780\uc740 \uace0\ucd9c\ub825 \uad11\ud559 \uc2dc\uc2a4\ud15c\uc758 \ud575\uc2ec \uc694\uc18c\ub85c \ud6a8\uc728\uc131, \ube54 \ud488\uc9c8, \ubd80\ud488 \uc218\uba85\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n

\uc774\ub7ec\ud55c \ud6a8\uacfc\ub97c \uc774\ud574\ud558\uba74 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc2dc\uc2a4\ud15c \uc124\uacc4 \ubc0f \uc720\uc9c0 \uad00\ub9ac \uc77c\uc815\uc744 \ucd5c\uc801\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ud761\uc218 \ubc0f \uc0b0\ub780 \uc601\ud5a5 \uacc4\uc218<\/h3>\n\n\n\n\n\n\n\n
\uc694\uc778<\/th>\n\uc77c\ubc18\uc801\uc778 \uac12\/\ubc94\uc704<\/th>\n\uc2dc\uc2a4\ud15c \uc601\ud5a5<\/th>\n<\/tr>\n<\/thead>\n
\ud761\uc218(%)<\/td>\n<0.1cm\ub2f9<\/td>\n\uc5f4 \ub80c\uc988 \ucd5c\uc18c\ud654<\/td>\n<\/tr>\n
\ud45c\uba74 \uac70\uce60\uae30(Ra, nm)<\/td>\n<0.5<\/td>\n\ud45c\uba74 \uc0b0\ub780 \uac10\uc18c<\/td>\n<\/tr>\n
\uc218\uba85(\ud384\uc2a4)<\/td>\n>\ubc31\ub9cc \uc774\uc0c1<\/td>\n\uc804\uc1a1 \uc131\ub2a5 \uc800\ud558 \uc608\uce21<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\ube44\uc120\ud615 \ud761\uc218 \uc720\ub3c4 \uc5f4 \ub80c\uc9d5<\/h3>\n

10kW\uae09 \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c\uc5d0\uc11c 0.1%\uc758 \ud761\uc218\ub294 \uce21\uc815 \uac00\ub2a5\ud55c \uc5f4 \ub80c\uc988 \ud604\uc0c1\uc744 \uc77c\uc73c\ucf1c \ucd08\uc810\uc774 \uc774\ub3d9\ud558\uace0 \ube54 \ud488\uc9c8\uc774 \uc800\ud558\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc815\ud655\ud55c \ubaa8\ub378\ub9c1\uc740 \uc2dc\uc2a4\ud15c \uc548\uc815\uc131\uc744 \uc704\ud574 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\ubc8c\ud06c\uc640 \ud45c\uba74 \uc0b0\ub780 \uc0ac\uc774\uc758 \uc804\ub825 \uc190\uc2e4 \ud560\ub2f9<\/h3>\n

Ra <0.5nm\ub85c \uc5f0\ub9c8\ub41c \ud45c\uba74\uc758 \uacbd\uc6b0, \ubc8c\ud06c \uc0b0\ub780\uc774 \uc804\ub825 \uc190\uc2e4\uc744 \uc9c0\ubc30\ud569\ub2c8\ub2e4. \uc815\ub7c9\uc801 \ubaa8\ub378\uc740 \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \uc190\uc2e4 \uc608\uc0b0\uc744 \ud560\ub2f9\ud558\uace0 \ud45c\uba74 \ud488\uc9c8\uc744 \uc9c0\uc815\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/p>\n

\uc190\uc0c1 \ub204\uc801\uc73c\ub85c \uc778\ud55c \uc804\uc1a1 \uc131\ub2a5 \uc800\ud558 \uc608\uce21 \uc54c\uace0\ub9ac\uc998<\/h3>\n

\uc5d4\uc9c0\ub2c8\uc5b4\ub294 \ubbf8\uc5d0 \uc0b0\ub780 \uc774\ub860\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc218\ubc31\ub9cc \uac1c\uc758 \ub808\uc774\uc800 \ud384\uc2a4\uc5d0 \ub300\ud55c \uc804\uc1a1 \uc131\ub2a5 \uc800\ud558\ub97c \uc2dc\ubbac\ub808\uc774\uc158\ud558\uc5ec \uc608\uce21 \uc720\uc9c0\ubcf4\uc218 \ubc0f \ubd80\ud488 \uad50\uccb4 \uacc4\ud68d\uc744 \uc9c0\uc6d0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uad11\ud559 \uc7a5\ube44\uc758 \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\uc5d0 \uc628\ub3c4\uac00 \ubbf8\uce58\ub294 \uc601\ud5a5\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/h2>\n

\uc628\ub3c4 \ubcc0\ud654\ub294 \uad74\uc808\ub960\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\uace0 \uc5f4\ud33d\ucc3d\uc744 \uc720\ub3c4\ud558\uba70 \ud3ec\ub17c \uad00\ub828 \ud761\uc218\ub97c \uc99d\uac00\uc2dc\ucf1c \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\uc728\uc744 \ubcc0\ud654\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\"\uc804\uc1a1\uc5d0<\/p>\n

\uc608\ub97c \ub4e4\uc5b4, \uc628\ub3c4\uac00 20\u00b0C\uc5d0\uc11c 200\u00b0C\ub85c \uc0c1\uc2b9\ud558\uba74 1550nm\uc5d0\uc11c\uc758 \uc804\uc1a1\uc740 \ucd5c\ub300 2%\uae4c\uc9c0 \uac10\uc18c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uace0\uc628 \ub610\ub294 \uc5f4 \uc21c\ud658 \ud658\uacbd\uc5d0\uc11c \uc774\ub7ec\ud55c \uc601\ud5a5\uc744 \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n

\uc804\uc1a1\uc5d0 \ubbf8\uce58\ub294 \uc628\ub3c4 \uc601\ud5a5<\/h3>\n\n\n\n\n\n\n\n
\uc628\ub3c4(\u00b0C)<\/th>\n\uc804\uc1a1 \ubcc0\uacbd(%)<\/th>\n\ud30c\uc7a5(nm)<\/th>\n\ucc38\uace0<\/th>\n<\/tr>\n<\/thead>\n
20<\/td>\n0<\/td>\n1550<\/td>\n\ucc38\uc870<\/td>\n<\/tr>\n
100<\/td>\n-0.5<\/td>\n1550<\/td>\n\uc18c\ud3ed \uac10\uc18c<\/td>\n<\/tr>\n
200<\/td>\n-2.0<\/td>\n1550<\/td>\n\ub208\uc5d0 \ub744\ub294 \uac10\uc18c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\uace0\uc21c\ub3c4 \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\uac00 \ub808\uc774\uc800 \ubc0f DUV \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc5d0 \uc5b4\ub5a4 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\uae4c?<\/h2>\n

\uace0\uc21c\ub3c4 \uc11d\uc601 \uc720\ub9ac\ub294 \ud22c\uacfc\uc728\uacfc \uc7ac\ub8cc \uade0\uc77c\uc131\uc774 \uc131\ub2a5\uacfc \uc218\uc728\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \ucca8\ub2e8 \ub808\uc774\uc800 \ubc0f \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

DUV\/EUV \ub9ac\uc18c\uadf8\ub798\ud53c \ubc0f \uace0\ucd9c\ub825 \ub808\uc774\uc800\uc640 \uac19\uc740 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \ubd88\uc21c\ubb3c, \ud22c\uacfc\uc728 \ubc0f \uade0\uc77c\uc131\uc5d0 \ub300\ud55c \uc5c4\uaca9\ud55c \uc81c\uc5b4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n

\ub808\uc774\uc800 \ubc0f \ub9ac\uc18c\uadf8\ub798\ud53c \uc131\ub2a5 \uc694\uc18c<\/h3>\n\n\n\n\n\n\n\n
\ub9e4\uac1c\ubcc0\uc218<\/th>\n\uc77c\ubc18 \uac12\/\uc784\uacc4\uac12<\/th>\n\uc2dc\uc2a4\ud15c \uc131\ub2a5\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/th>\n<\/tr>\n<\/thead>\n
Fe\u00b3\u207a \ud568\ub7c9(ppm)<\/td>\n<0.1<\/td>\n193nm\uc5d0\uc11c 90% \uc774\uc0c1 \uc720\uc9c0<\/td>\n<\/tr>\n
\uc804\uc1a1 @ 1064\/355nm<\/td>\n>99.5%<\/td>\n15J\/cm\u00b2 \uc774\uc0c1\uc758 \uc190\uc0c1 \uc784\uacc4\uac12 \uc9c0\uc6d0<\/td>\n<\/tr>\n
\uc804\uc1a1 \uadf8\ub77c\ub370\uc774\uc158<\/td>\n<0.1%\/cm<\/td>\n\ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c CDU \uc81c\uc5b4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

DUV\/EUV \ub9ac\uc18c\uadf8\ub798\ud53c \uae08\uc18d \ubd88\uc21c\ubb3c \uc784\uacc4\uac12<\/h3>\n

DUV\/EUV \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c\ub294 0.1ppm \uc774\uc0c1\uc758 \ubbf8\ub7c9 Fe\u00b3\u207a\ub3c4 193nm \ud22c\uacfc\uc728\uc744 \uba87 \ud37c\uc13c\ud2b8 \uac10\uc18c\uc2dc\ucf1c \ud328\ud134 \ucda9\uc2e4\ub3c4\uc640 \ucc98\ub9ac\ub7c9\uc5d0 \uc601\ud5a5\uc744 \uc904 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ub098\ub178\ucd08 \ub808\uc774\uc800 \uc190\uc0c1 \uc784\uacc4\uac12\uc758 \uc804\uc1a1 \uc758\uc874\uc131<\/h3>\n

1064nm \ubc0f 355nm\uc5d0\uc11c\uc758 \ub192\uc740 \ud22c\uacfc\uc728(>99.5%)\uc740 \ub808\uc774\uc800\ub85c \uc778\ud55c \uc190\uc0c1 \uc784\uacc4\uac12(>15J\/cm\u00b2)\uc758 \uc99d\uac00\uc640 \uc0c1\uad00\uad00\uacc4\uac00 \uc788\uc5b4 \uace0\ucd9c\ub825 \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ubd80\ud488 \uc218\uba85\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n

\ubd88\uade0\uc77c\uc131\uc73c\ub85c \uc778\ud55c \ud30c\uba74 \uc65c\uace1\uc5d0 \ub300\ud55c \ubcf4\uc0c1 \uc804\ub7b5<\/h3>\n

\ucca8\ub2e8 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c \uc784\uacc4 \uce58\uc218 \uade0\uc77c\uc131(CDU)\uc744 \uc81c\uc5b4\ud558\ub294 \ub370 \uc911\uc694\ud55c \ud30c\uba74 \uc65c\uace1\uc744 \ucd5c\uc18c\ud654\ud558\ub824\uba74 0.1%\/cm \ubbf8\ub9cc\uc758 \ud22c\uacfc \uad6c\ubc30\uac00 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\uc5d4\uc9c0\ub2c8\uc5b4\ub4e4\uc774 \uc815\ubc00 \uad11\ud559 \ubd84\uc57c\uc5d0\uc11c \uc720\ub9ac\uc9c8 \uc2e4\ub9ac\uce74 \ud22c\uacfc\ubcf4\ub2e4 \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\ub97c \uc120\ud638\ud558\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc77c\uae4c\uc694?<\/h2>\n

\uc6b0\uc218\ud55c \uc790\uc678\uc120 \ud22c\uacfc\uc728, \ub0ae\uc740 \ubd88\uc21c\ubb3c \uc218\uc900, \ubc29\uc0ac\uc120\uc73c\ub85c \uc778\ud55c \uc5b4\ub450\uc6cc\uc9d0\uc5d0 \ub300\ud55c \ub192\uc740 \ub0b4\uc131\uc774 \uc694\uad6c\ub418\ub294 \uacbd\uc6b0 \uc720\ub9ac\uc9c8 \uc2e4\ub9ac\uce74\ubcf4\ub2e4 \uc11d\uc601 \uc720\ub9ac\uac00 \uc120\ud638\ub429\ub2c8\ub2e4.<\/p>\n

\uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uace0\uc815\ubc00 \uad11\ud559, \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c \ubc0f \ubc18\ub3c4\uccb4 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 \uc774\uc0c1\uc801\uc774\uba70, \uc720\ub9ac\uc9c8 \uc2e4\ub9ac\uce74\ub294 \ub35c \uae4c\ub2e4\ub86d\uace0 \ube44\uc6a9\uc5d0 \ubbfc\uac10\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc11d\uc601 \uc720\ub9ac\uc640 \uc720\ub9ac\uc9c8 \uc2e4\ub9ac\uce74 \uc120\ud0dd \uae30\uc900<\/h3>\n\n\n\n\n\n\n\n\n\n
\uae30\uc900<\/th>\n\uc11d\uc601 \uc720\ub9ac(\uc6a9\uc735 \uc2e4\ub9ac\uce74)<\/th>\n\uc720\ub9ac\uc9c8 \uc2e4\ub9ac\uce74<\/th>\n<\/tr>\n<\/thead>\n
\uc790\uc678\uc120 \ud22c\uacfc<\/td>\n\uc6b0\uc218<\/td>\n\ubcf4\ud1b5<\/td>\n<\/tr>\n
\ubd88\uc21c\ubb3c \uc218\uc900<\/td>\n\ub9e4\uc6b0 \ub0ae\uc74c<\/td>\n\ub354 \ub192\uc74c<\/td>\n<\/tr>\n
\ubc29\uc0ac\uc120 \uc800\ud56d<\/td>\n\ub192\uc74c<\/td>\n\ubcf4\ud1b5<\/td>\n<\/tr>\n
\ube44\uc6a9<\/td>\n\ub354 \ub192\uc74c<\/td>\nLower<\/td>\n<\/tr>\n
\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/td>\n\ub9ac\uc18c\uadf8\ub798\ud53c, \ub808\uc774\uc800<\/td>\n\uc77c\ubc18 \uad11\ud559, \ub7a8\ud504<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\uc5d4\uc9c0\ub2c8\uc5b4\ub294 \ub9de\ucda4\ud615 \uad11\ud559 \ubd80\ud488\uc758 \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc \uc694\uad6c \uc0ac\ud56d\uc744 \uc5b4\ub5bb\uac8c \uc9c0\uc815\ud574\uc57c \ud560\uae4c\uc694?<\/h2>\n

\uc2dc\uc2a4\ud15c \uc218\uc900\uc758 \uc131\ub2a5\uacfc \ube44\uc6a9 \ud6a8\uc728\uc131\uc744 \ubcf4\uc7a5\ud558\ub294 \ub9de\ucda4\ud615 \uad11\ud559 \uad6c\uc131 \uc694\uc18c\uc5d0\ub294 \uc815\ud655\ud55c \uc804\uc1a1 \uc694\uad6c \uc0ac\ud56d\uc744 \uc815\uc758\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc2dc\uc2a4\ud15c \ud6a8\uc728\uc131, \uc2a4\ud399\ud2b8\ub7fc \uac00\uc911\uce58, \ub514\uc9c0\ud138 \uac80\uc99d\uc744 \uace0\ub824\ud558\uc5ec \uccb4\uacc4\uc801\uc778 \uc811\uadfc \ubc29\uc2dd\uc744 \uc0ac\uc6a9\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n

\uc804\uc1a1 \uc0ac\uc591 \uc811\uadfc \ubc29\uc2dd<\/h3>\n\n\n\n\n\n\n\n
\uc811\uadfc \ubc29\uc2dd<\/th>\n\uc124\uba85<\/th>\n\uc608\uc81c\/\uc870\uac74<\/th>\n<\/tr>\n<\/thead>\n
\uc2dc\uc2a4\ud15c \uc218\uc900 \ud560\ub2f9<\/td>\n\ucd1d \ud6a8\uc728\uc5d0\uc11c \uc5ed\uacc4\uc0b0<\/td>\nEUV \ub9ac\uc18c\uadf8\ub798\ud53c: >\uc635\ud2f1\ub2f9 99.8% \uc774\uc0c1<\/td>\n<\/tr>\n
\uc2a4\ud399\ud2b8\ub7fc \ub300\uc5ed \uac00\uc911\uce58<\/td>\nUV, VIS, IR \ub300\uc5ed\uc5d0 \uac00\uc911\uce58 \ud560\ub2f9\ud558\uae30<\/td>\nIR \uac00\uc911\uce58: \ub35c \uc911\uc694\ud55c \uacbd\uc6b0 0.2<\/td>\n<\/tr>\n
\ub514\uc9c0\ud138 \ud2b8\uc708 \uac80\uc99d<\/td>\n\uc2e4\uc81c \ub370\uc774\ud130\ub97c \uc0ac\uc6a9\ud558\uc5ec OptiWave\/Zemax\ub85c \uc2dc\ubbac\ub808\uc774\uc158\ud558\uae30<\/td>\n\uad6c\ub9e4 \uc804 \uac00\uc0c1 \uac80\uc99d<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\uc2dc\uc2a4\ud15c \uc218\uc900 \uc804\uc1a1 \uc608\uc0b0 \ud560\ub2f9<\/h3>\n

For EUV \ub9ac\uc18c\uadf8\ub798\ud53c<\/a>4<\/a><\/sup>\uc758 \uacbd\uc6b0 \uac01 \uad6c\uc131 \uc694\uc18c\ub294 \uc804\uccb4 \ucc98\ub9ac\ub7c9 \ubaa9\ud45c\ub97c \ub2ec\uc131\ud558\uae30 \uc704\ud574 99.8% \uc774\uc0c1\uc758 \uc804\uc1a1\uc774 \ud544\uc694\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \uc2dc\uc2a4\ud15c \uc218\uc900 \ud6a8\uc728\uc131 \ubaa9\ud45c\uc5d0\uc11c \ud5c8\uc6a9 \uc624\ucc28\ub97c \ud560\ub2f9\ud558\uc5ec \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc2a4\ud399\ud2b8\ub7fc \ub300\uc5ed \uac00\uc911 \uc804\uc1a1 \uc0ac\uc591<\/h3>\n

\uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uc2a4\ud399\ud2b8\ub7fc \uc6b0\uc120\uc21c\uc704\uc5d0 \ub530\ub77c \ud22c\uacfc \uc694\uad6c\uc0ac\ud56d\uc5d0 \uac00\uc911\uce58\ub97c \ubd80\uc5ec\ud574\uc57c \ud569\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, \uc801\uc678\uc120 \ud22c\uacfc\uc728\uc774 \uc790\uc678\uc120\uc774\ub098 \uac00\uc2dc\uad11\uc120\ubcf4\ub2e4 \ub35c \uc911\uc694\ud55c \uacbd\uc6b0 0.2\uc758 \uac00\uc911\uce58\ub97c \ud560\ub2f9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ub514\uc9c0\ud138 \ud2b8\uc708 \uae30\ubc18 \uac00\uc0c1 \uac80\uc99d \uc6cc\ud06c\ud50c\ub85c<\/h3>\n

\ub2e4\uc74c\uacfc \uac19\uc740 \ub514\uc9c0\ud138 \ubaa8\ub378\ub9c1 \ub3c4\uad6c \uc635\ud2f0\uc6e8\uc774\ube0c<\/a>5<\/a><\/sup> \uadf8\ub9ac\uace0 Zemax<\/a>6<\/a><\/sup> \uc804\uc1a1 \uc0ac\uc591\uc744 \uac00\uc0c1\uc73c\ub85c \uac80\uc99d\ud558\uace0 \uc2e4\uc81c \uc7ac\ub8cc \ub370\uc774\ud130\ub97c \ud1b5\ud569\ud558\uc5ec \uc81c\uc791 \uc804\uc5d0 \uc815\ud655\ud55c \uc131\ub2a5\uc744 \uc608\uce21\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\ub97c \ubcf4\uc7a5\ud558\ub294 \ud488\uc9c8 \ud45c\uc900 \ubc0f \ud14c\uc2a4\ud2b8 \ubc29\ubc95\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/h2>\n

\uad6d\uc81c \ud45c\uc900\uacfc \uc5c4\uaca9\ud55c \ud14c\uc2a4\ud2b8 \ubc29\ubc95\uc744 \uc900\uc218\ud558\uc5ec \uc548\uc815\uc801\uc778 \uc804\uc1a1\uc774 \ubcf4\uc7a5\ub429\ub2c8\ub2e4.<\/p>\n

\"\uc11d\uc601<\/p>\n

\ub2e4\uc74c\uacfc \uac19\uc740 \ud45c\uc900 ISO 10110-7<\/a>7<\/a><\/sup>, ASTM F2183<\/a>8<\/a><\/sup>\ubc0f MIL-PRF-13830B<\/a>9<\/a><\/sup> \uad11\ud559 \uc7ac\ub8cc \ud22c\uacfc \ubc0f \ud45c\uba74 \ud488\uc9c8\uc5d0 \ub300\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \uc815\uc758\ud569\ub2c8\ub2e4.<\/p>\n

\uc804\uc1a1 \ud488\uc9c8 \ud45c\uc900 \ubc0f \ud14c\uc2a4\ud2b8 \ubc29\ubc95<\/h3>\n\n\n\n\n\n\n\n\n\n\n
\ud45c\uc900\/\ud14c\uc2a4\ud2b8 \ubc29\ubc95<\/th>\n\uc124\uba85<\/th>\n\uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ucee8\ud14d\uc2a4\ud2b8<\/th>\n<\/tr>\n<\/thead>\n
ISO 10110-7<\/td>\n\uad11\ud559 \uc7ac\ub8cc \uc804\uc1a1<\/td>\n\uc77c\ubc18 \uad11\ud559<\/td>\n<\/tr>\n
ASTM F2183<\/td>\nUV\/\uac00\uc2dc\/\uc801\uc678\uc120 \ud22c\uacfc \ud14c\uc2a4\ud2b8<\/td>\n\uc2e4\ud5d8\uc2e4, \uc0b0\uc5c5<\/td>\n<\/tr>\n
MIL-PRF-13830B<\/td>\n\uad11\ud559\uc6a9 \ud45c\uba74 \ud488\uc9c8<\/td>\n\uad70\uc0ac, \ud56d\uacf5\uc6b0\uc8fc<\/td>\n<\/tr>\n
\ubd84\uad11\uad11\ub3c4\uacc4<\/td>\n\uc2a4\ud399\ud2b8\ub7fc \uc804\ubc18\uc758 \uc804\uc1a1 \uce21\uc815<\/td>\n\ubaa8\ub4e0 \uad11\ud559 \uad6c\uc131 \uc694\uc18c<\/td>\n<\/tr>\n
\ub808\uc774\uc800 \uc5f4\ub7c9 \uce21\uc815<\/td>\n\ud761\uc218 \uc190\uc2e4\uc744 \uc815\ub7c9\ud654\ud569\ub2c8\ub2e4.<\/td>\n\uace0\ucd9c\ub825 \uad11\ud559<\/td>\n<\/tr>\n
\uac04\uc12d\uacc4 \ubd84\uc11d<\/td>\n\ud45c\uba74 \ud3c9\ud0c4\ub3c4\/\ud488\uc9c8 \ud3c9\uac00<\/td>\n\uc815\ubc00 \uad11\ud559<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\uace0\ud22c\uacfc\uc728 \uc11d\uc601 \uc720\ub9ac\uc758 \ube44\uc6a9\uacfc \ub9ac\ub4dc \ud0c0\uc784\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc870\ub2ec \uc694\uc778\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/h2>\n

\uace0\ud22c\uacfc\uc728 \uc11d\uc601 \uc720\ub9ac\uc758 \uc870\ub2ec \uacb0\uc815\uc740 \uc21c\ub3c4, \ud06c\uae30, \uc81c\uc870 \uae30\uc220 \ubc0f \uc7ac\ub8cc \uacf5\uae09\uc6d0\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4.<\/p>\n

\uc774\ub7ec\ud55c \uc694\uc18c\ub97c \uc774\ud574\ud558\uba74 \uad6c\ub9e4\uc790\uac00 \ube44\uc6a9, \ub9ac\ub4dc \ud0c0\uc784 \ubc0f \uc131\uacfc\ub97c \ucd5c\uc801\ud654\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/p>\n

\uc870\ub2ec \ube44\uc6a9 \ubc0f \ub9ac\ub4dc \ud0c0\uc784 \uc694\uc778<\/h3>\n\n\n\n\n\n\n\n
\uc694\uc778<\/th>\n\uc77c\ubc18\uc801\uc778 \uac12\/\ubc94\uc704<\/th>\n\uc870\ub2ec\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/th>\n<\/tr>\n<\/thead>\n
\uc21c\ub3c4 \ub4f1\uae09(0.01% \uc99d\uac00\ub2f9)<\/td>\n\uc0c1\ub2f9\ud55c \ube44\uc6a9 \uc99d\uac00<\/td>\n\ud2b9\ud788 193nm\uc5d0\uc11c<\/td>\n<\/tr>\n
\ube14\ub7ad\ud06c \uc9c0\ub984(mm)<\/td>\n\ucd5c\ub300 300<\/td>\n\uc131\uc7a5 \uc18d\ub3c4 ~1mm\/h, \ub9ac\ub4dc \ud0c0\uc784 \uc5f0\uc7a5<\/td>\n<\/tr>\n
\uc7ac\ud65c\uc6a9 \uc7ac\ub8cc \uc8fc\uae30<\/td>\n\u22643<\/td>\n3\ubc88 \uc0ac\uc6a9 \ud6c4 \uc790\uc678\uc120 \ud22c\uacfc\uc728\uc774 \uc800\ud558\ub428<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\uc21c\ub3c4 \ub4f1\uae09 \ub300 \ube44\uc6a9 \uc9c0\uc218 \ubaa8\ub378<\/h3>\n

193nm \ud22c\uacfc\uc728\uc774 0.01% \uc99d\uac00\ud560 \ub54c\ub9c8\ub2e4 \uc7ac\ub8cc\ube44\uac00 \ud06c\uac8c \uc99d\uac00\ud560 \uc218 \uc788\uc73c\uba70, \ud2b9\ud788 \ucd08\uace0\uc21c\ub3c4 \ub4f1\uae09\uc758 \uacbd\uc6b0 \ub354\uc6b1 \uadf8\ub807\uc2b5\ub2c8\ub2e4. \ube44\uc6a9 \ubaa8\ub378\uc740 \uc131\ub2a5\uacfc \uc608\uc0b0\uc758 \uade0\ud615\uc744 \ub9de\ucd94\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/p>\n

\ub300\uad6c\uacbd \ube14\ub7ad\ud06c \uc131\uc7a5 \uae30\uc220\uc774 \ubc30\uc1a1\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/h3>\n

\ub300\uad6c\uacbd \ube14\ub7ad\ud06c(\uc608: \u03a6300mm)\ub294 \ub290\ub9b0 \uacb0\uc815 \uc131\uc7a5 \uc18d\ub3c4(~1mm\/h)\uac00 \ud544\uc694\ud558\ubbc0\ub85c \ub9ac\ub4dc \ud0c0\uc784\uc774 \uae38\uc5b4\uc9d1\ub2c8\ub2e4. \ub300\uaddc\ubaa8 \uad11\ud559 \ud504\ub85c\uc81d\ud2b8\uc5d0\ub294 \ucd08\uae30 \uacc4\ud68d\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\uc7ac\ud65c\uc6a9 \uc7ac\ub8cc \uc804\uc1a1 \uc131\ub2a5 \uac80\uc99d<\/h3>\n

\uc7ac\ud65c\uc6a9\ub41c \uc11d\uc601 \ubaa8\ub798\ub294 \uc790\uc678\uc120 \ud22c\uacfc\uc728\uc774 \ud5c8\uc6a9 \ud55c\ub3c4 \uc774\uc0c1\uc73c\ub85c \uc800\ud558\ub418\uae30 \uc804\uae4c\uc9c0 \ucd5c\ub300 3\uc8fc\uae30\uae4c\uc9c0 \uc7ac\uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uac80\uc99d \ud14c\uc2a4\ud2b8\ub97c \ud1b5\ud574 \uc7ac\ud65c\uc6a9 \uc18c\uc7ac\uac00 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294\uc9c0 \ud655\uc778\ud569\ub2c8\ub2e4.<\/p>\n

\uacb0\ub860<\/h2>\n

\uc11d\uc601 \uc720\ub9ac \uc804\uc1a1\uc740 \ucca8\ub2e8 \uad11\ud559 \uc2dc\uc2a4\ud15c\uc758 \ud6a8\uc728\uc131, \uc2e0\ub8b0\uc131 \ubc0f \uc131\ub2a5\uc744 \uacb0\uc815\ud558\ub294 \ub370 \uc911\ucd94\uc801\uc778 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uae30\ubcf8 \ubb3c\ub9ac\uc801 \uba54\ucee4\ub2c8\uc998, \uc804\uc1a1 \ubca4\uce58\ub9c8\ud06c \ubc0f \uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcc4 \uc694\uad6c \uc0ac\ud56d\uc744 \uc774\ud574\ud568\uc73c\ub85c\uc368 \uc2dc\uc2a4\ud15c \uc131\uacf5\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc815\ubcf4\uc5d0 \uc785\uac01\ud55c \uacb0\uc815\uc744 \ub0b4\ub9b4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\n

\uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\uc728 \uc120\ud0dd\uc758 \ubcf5\uc7a1\uc131\uc744 \ud0d0\uc0c9\ud558\ub294 \uac83\uc740 \uc911\uc694\ud55c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uacfc\uc81c\ub97c \uc81c\uc2dc\ud569\ub2c8\ub2e4. 20\ub144 \uc774\uc0c1\uc758 \uc81c\uc870 \uacbd\ud5d8\uacfc \uacf5\uc7a5 \uc9c1\uc811 \uacf5\uae09\uc73c\ub85c \ub4b7\ubc1b\uce68\ub418\ub294 TOQUARTZ \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ud300\uc758 \uc804\ubb38 \uc9c0\uc2dd\uc744 \ud65c\uc6a9\ud558\uc5ec \ub9de\ucda4\ud615 \ucffc\uce20 \uc720\ub9ac \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub300\ud55c \ubb34\ub8cc \uc0c1\ub2f4\uc744 \ubc1b\uc544\ubcf4\uc138\uc694.<\/p>\n<\/blockquote>\n

\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38(FAQ)<\/h2>\n

\uad11\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc6a9 \uace0\uc21c\ub3c4 \uc11d\uc601 \uc720\ub9ac\uc640 \ud45c\uc900 \uc11d\uc601 \uc720\ub9ac\uc758 \ucc28\uc774\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong>
\n\uace0\uc21c\ub3c4 \uc11d\uc601 \uc720\ub9ac\ub294 \ubd88\uc21c\ubb3c\uc774 \uc801\uae30 \ub54c\ubb38\uc5d0 \uc790\uc678\uc120 \ud22c\uacfc\uc728\uc774 \ub192\uace0 \ud761\uc218\uc728\uc774 \ub0ae\uc73c\uba70 \ubc29\uc0ac\uc120\uc73c\ub85c \uc778\ud55c \uc5b4\ub450\uc6cc\uc9d0\uc5d0 \ub300\ud55c \uc800\ud56d\ub825\uc774 \ub6f0\uc5b4\ub098 \uc815\ubc00 \uad11\ud559 \ubc0f \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\uad6c\ub9e4\ud558\uae30 \uc804\uc5d0 \uc11d\uc601 \uc720\ub9ac\uc758 \ud22c\uacfc \ud488\uc9c8\uc744 \uc5b4\ub5bb\uac8c \ud655\uc778\ud560 \uc218 \uc788\ub098\uc694?<\/strong>
\n\uacf5\uae09\uc5c5\uccb4\uc5d0 \ubd84\uad11\uad11\ub3c4\uacc4 \ud14c\uc2a4\ud2b8 \ubcf4\uace0\uc11c \ubc0f ISO 10110-7 \ub610\ub294 ASTM F2183\uacfc \uac19\uc740 \uc778\uc99d\uc744 \uc694\uccad\ud558\uc138\uc694. \uc774\ub7ec\ud55c \ubb38\uc11c\ub294 \uc804\uc1a1 \uc131\ub2a5\uc5d0 \ub300\ud55c \uac1d\uad00\uc801\uc778 \ub370\uc774\ud130\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\ub9de\ucda4\ud615 \uc11d\uc601 \uc720\ub9ac \ubd80\ud488\uc744 \uc9c0\uc815\ud560 \ub54c \uc5b4\ub5a4 \uc694\uc18c\ub97c \uace0\ub824\ud574\uc57c \ud558\ub098\uc694?<\/strong>
\n\uc2dc\uc2a4\ud15c \uc218\uc900\uc758 \uc804\uc1a1 \uc694\uad6c \uc0ac\ud56d, \uc2a4\ud399\ud2b8\ub7fc \uac00\uc911\uce58, \ub514\uc9c0\ud138 \uc2dc\ubbac\ub808\uc774\uc158 \uacb0\uacfc\ub97c \uace0\ub824\ud558\uc138\uc694. \uacf5\uae09\uc5c5\uccb4\uc640 \ud611\ub825\ud558\uc5ec \uac00\uc0c1 \ubaa8\ub378\ub9c1 \ub3c4\uad6c\ub97c \uc0ac\uc6a9\ud558\uc5ec \ud5c8\uc6a9 \uc624\ucc28\ub97c \uc815\uc758\ud558\uace0 \uc131\ub2a5\uc744 \uac80\uc99d\ud558\uc138\uc694.<\/p>\n

\uc7ac\ud65c\uc6a9 \uc11d\uc601 \uc720\ub9ac\ub294 \ud22c\uacfc\uc728 \uce21\uba74\uc5d0\uc11c \ubc84\uc9c4 \uc18c\uc7ac\uc640 \uc5b4\ub5bb\uac8c \ube44\uad50\ub418\ub098\uc694?<\/strong>
\n\uc7ac\ud65c\uc6a9 \uc11d\uc601 \uc720\ub9ac\ub294 \ucd5c\ub300 3\uc8fc\uae30 \ub3d9\uc548 \ud5c8\uc6a9 \uac00\ub2a5\ud55c \uc790\uc678\uc120 \ud22c\uacfc\uc728\uc744 \uc720\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8 \uc774\ud6c4\uc5d0\ub294 \ud22c\uacfc\uc728\uc774 \uc800\ud558\ub420 \uc218 \uc788\uc73c\ubbc0\ub85c \uc911\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uac80\uc99d \ud14c\uc2a4\ud2b8\uac00 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\ucc38\uc870:<\/p>\n

\n
\n
    \n
  1. \n

    \ucca8\ub2e8 \uad11\ud559 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ub9ac\uc18c\uadf8\ub798\ud53c\uac00 \uc5b4\ub5bb\uac8c \uc791\ub3d9\ud558\ub294\uc9c0, \ub192\uc740 \uc815\ubc00\ub3c4\uc640 \ud6a8\uc728\uc131\uc744 \ub2ec\uc131\ud558\uae30 \uc704\ud574 \uc11d\uc601 \uc720\ub9ac\uac00 \ud544\uc218\uc801\uc778 \uc774\uc720\ub97c \uc54c\uc544\ubcf4\uc138\uc694.↩<\/a><\/p>\n<\/li>\n

  2. \n

    IR \uc2a4\ud399\ud2b8\ub7fc\uc758 OH \ud761\uc218 \ud53c\ud06c\uc5d0 \ub300\ud55c \uacfc\ud559\uc801 \uc124\uba85\uacfc \uc774\uac83\uc774 \uad11\uc12c\uc720 \ubc0f \uc13c\uc11c \uc131\ub2a5\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5\uc5d0 \ub300\ud574 \uc54c\uc544\ubcf4\uc138\uc694.↩<\/a><\/p>\n<\/li>\n

  3. \n

    \ud5a5\uc0c1\ub41c IR \uc804\uc1a1\uc774 \uad11\ucf00\uc774\ube14 \ubc0f \uc13c\uc11c \uc131\ub2a5\uc744 \uc5b4\ub5bb\uac8c \ud5a5\uc0c1\uc2dc\ud0a4\ub294\uc9c0 \uc54c\uc544\ubcf4\uace0 \ud1b5\uc2e0, \uac10\uc9c0 \ubc0f \uc774\ubbf8\uc9d5 \ubd84\uc57c\uc758 \ucd5c\ucca8\ub2e8 \uc6a9\ub3c4\uc5d0 \ub300\ud574 \uc54c\uc544\ubcf4\uc138\uc694.↩<\/a><\/p>\n<\/li>\n

  4. \n

    EUV \ub9ac\uc18c\uadf8\ub798\ud53c\uac00 \uc5b4\ub5bb\uac8c \ub354 \ub192\uc740 \uc815\ubc00\ub3c4\ub85c \uce69 \uc0dd\uc0b0\uc744 \ud601\uc2e0\ud558\ub294\uc9c0, \uadf8\ub9ac\uace0 \ucc28\uc138\ub300 \ubc18\ub3c4\uccb4\uc5d0 \uc65c \uc911\uc694\ud55c\uc9c0 \uc54c\uc544\ubcf4\uc138\uc694.↩<\/a><\/p>\n<\/li>\n

  5. \n

    \uc774 \ub9c1\ud06c\ub97c \ud1b5\ud574 \uc635\ud2f0\uc6e8\uc774\ube0c\uac00 \ub514\uc9c0\ud138 \ubaa8\ub378\ub9c1\uc744 \ud5a5\uc0c1\ud558\uace0 \uc124\uacc4 \uc815\ud655\ub3c4\ub97c \uac1c\uc120\ud558\ub294 \ubc29\ubc95\uc744 \uc54c\uc544\ubcf4\uc138\uc694.↩<\/a><\/p>\n<\/li>\n

  6. \n

    \uad11\ud559 \uc124\uacc4\uc5d0\uc11c Zemax\uc758 \uc7a5\uc810\uacfc \uc6cc\ud06c\ud50c\ub85c\uc6b0\ub97c \uac04\uc18c\ud654\ud558\ub294 \ubc29\ubc95\uc744 \uc54c\uc544\ubcf4\uc138\uc694.↩<\/a><\/p>\n<\/li>\n

  7. \n

    \uc774 \ub9c1\ud06c\ub97c \ud0d0\uc0c9\ud558\uba74 \uad11\ud559 \uc7ac\ub8cc \uc804\uc1a1 \ud45c\uc900\uc5d0 \ub300\ud55c \uc790\uc138\ud55c \uc815\ubcf4\ub97c \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.↩<\/a><\/p>\n<\/li>\n

  8. \n

    \uc774 \ub9ac\uc18c\uc2a4\ub294 \uad11\ud559 \uc7ac\ub8cc\uc5d0 \ub300\ud574 ASTM F2183\uc5d0\uc11c \uc815\ud55c \uad6c\uccb4\uc801\uc778 \uc694\uad6c \uc0ac\ud56d\uacfc \uac00\uc774\ub4dc\ub77c\uc778\uc744 \uc774\ud574\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.↩<\/a><\/p>\n<\/li>\n

  9. \n

    \uad11\ud559 \ud45c\uba74 \ud488\uc9c8\uc5d0 \ub300\ud55c \uc911\uc694\ud55c \ud45c\uc900\uacfc \uad11\ud559 \uc5c5\uacc4\uc5d0\uc11c \uc774 \ud45c\uc900\uc774 \ub110\ub9ac \ucc38\uc870\ub418\ub294 \uc774\uc720\ub97c \uc774\ud574\ud558\ub824\uba74 MIL-PRF-13830B\uc5d0 \ub300\ud574 \uc54c\uc544\ubcf4\uc138\uc694.↩<\/a><\/p>\n<\/li>\n<\/ol>\n<\/div>","protected":false},"excerpt":{"rendered":"

    \uc11d\uc601 \uc720\ub9ac \ud22c\uacfc\uc728\uc740 \ud2b9\uc815 \ud30c\uc7a5\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ub97c \ud1b5\uacfc\ud558\ub294 \ube5b\uc758 \ubc31\ubd84\uc728\uc785\ub2c8\ub2e4. \uad11\ud559 \uc124\uacc4\uc758 \uacbd\uc6b0 \uc774\ub97c \uc774\ud574\ud558\uba74 [...]<\/p>","protected":false},"author":2,"featured_media":7707,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[10],"tags":[],"class_list":["post-7701","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blogs"],"acf":[],"yoast_head":"\nHow Should Engineers Evaluate Quartz Glass Transmission for Optical System Design?<\/title>\n<meta name=\"description\" content=\"Discover how to assess quartz glass transmission for optical systems in 2025. 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