{"id":11370,"date":"2026-07-13T02:00:06","date_gmt":"2026-07-12T18:00:06","guid":{"rendered":"https:\/\/toquartz.com\/?p=11370"},"modified":"2026-02-28T16:21:13","modified_gmt":"2026-02-28T08:21:13","slug":"quartz-thermocouple-tubes-in-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/toquartz.com\/ko\/quartz-thermocouple-tubes-in-semiconductor-manufacturing\/","title":{"rendered":"\uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \ud2b9\uc131 \ubc0f \ubc18\ub3c4\uccb4 \uc18c\uc131\ub85c\uc5d0\uc11c\uc758 \ud65c\uc6a9"},"content":{"rendered":"<p>\ubc18\ub3c4\uccb4 \uc81c\uc870 \uacfc\uc815\uc5d0\uc11c\ub294 \ub300\ubd80\ubd84\uc758 \uc0b0\uc5c5 \ud604\uc7a5\uc5d0\uc11c \uacbd\ud5d8\ud560 \uc218 \uc5c6\ub294 \uc218\uc900\uc758 \uce21\uc815 \uc815\ubc00\ub3c4\uac00 \uc694\uad6c\ub429\ub2c8\ub2e4. \uc628\ub3c4\uac00 \ub2e8 \uba87 \ub3c4\ub9cc \ubc97\uc5b4\ub098\ub3c4 \uc6e8\uc774\ud37c \uc804\uccb4 \ubc30\uce58\uc5d0 \ubd88\ub7c9\uc774 \ubc1c\uc0dd\ud558\uac8c \ub418\uba70, \uc5f4\uc804\ub300\ub97c \ub458\ub7ec\uc2fc \ubcf4\ud638\uad00\uc774 \uc774\ub97c \ub9c9\uc544\ub0b4\ub294 \ub9c8\uc9c0\ub9c9 \ubc29\uc5b4\uc120 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n<p>\ud655\uc0b0\ub85c, \uc0b0\ud654\uad00, CVD \ubc18\uc751\uae30 \ub4f1 \ub2e4\uc591\ud55c \ubd84\uc57c\uc5d0\uc11c, \uc624\uc5fc, \uad6c\uc870\uc801 \uacb0\ud568 \ub610\ub294 \uce21\uc815 \uc624\ucc28\ub97c \uc6a9\ub0a9\ud560 \uc218 \uc5c6\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub4e4\uc5d0\uac8c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub294 \ud544\uc218 \uc18c\uc7ac\ub85c \uc790\ub9ac \uc7a1\uc558\uc2b5\ub2c8\ub2e4. \ubcf8 \uae30\uc0ac\uc5d0\uc11c\ub294 \uc7ac\ub8cc \ud2b9\uc131, \uad6c\uc870\uc801 \uad6c\uc131, \uc5f4\uc804\ub300 \uc870\ud569, \uc131\ub2a5 \ub9e4\uac1c\ubcc0\uc218, \uacf5\uc815\ubcc4 \uc801\uc6a9 \uc0ac\ub840\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc5f4 \uce21\uc815\uc6a9 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00\uc744 \ud3c9\uac00\ud558\ub294 \ub370 \ud544\uc694\ud55c \ubaa8\ub4e0 \ub0b4\uc6a9\uc744 \uc544\uc6b0\ub974\ub294 \ud3ec\uad04\uc801\uc778 \uae30\uc220 \ucc38\uace0 \uc790\ub8cc\ub97c \uc81c\uc2dc\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc11d\uc601\uc774 \ub2e4\ub978 \ubaa8\ub4e0 \uacbd\uc7c1 \uc18c\uc7ac\ubcf4\ub2e4 \ub6f0\uc5b4\ub09c \uc131\ub2a5\uc744 \ubc1c\ud718\ud558\ub294 \uc774\uc720\ub97c \uc774\ud574\ud558\ub824\uba74, \uba3c\uc800 \uc11d\uc601\uc774 \uc0ac\uc6a9\ub418\ub294 \ud658\uacbd\uc744 \ud30c\uc545\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Installed-Quartz-Thermocouple-Tubes-for-Semiconductor-Diffusion-Furnace-Operations.webp\" alt=\"\ubc18\ub3c4\uccb4 \ud655\uc0b0\ub85c \uac00\ub3d9\uc744 \uc704\ud55c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c \uc124\uce58\" title=\"\ubc18\ub3c4\uccb4 \ud655\uc0b0\ub85c \uac00\ub3d9\uc744 \uc704\ud55c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c \uc124\uce58\" \/><\/p>\n<h2>\ubc18\ub3c4\uccb4 \uc5f4 \ud658\uacbd\uacfc \uc774\uc5d0 \ub530\ub978 \ubcf4\ud638 \ud29c\ube0c\uc5d0 \ub300\ud55c \uc694\uad6c \uc0ac\ud56d<\/h2>\n<p>\ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uc758 \uc804 \uacfc\uc815\uc5d0\uc11c \uc628\ub3c4 \uce21\uc815\uc740 \ub2e8\uc21c\ud55c \ubcf4\uc870 \uae30\ub2a5\uc774 \uc544\ub2c8\ub77c \uacf5\uc815 \uadf8 \uc790\uccb4\uc785\ub2c8\ub2e4. \uc5f4\uc804\ub300\ub97c \uac10\uc2f8\uace0 \uc788\ub294 \ubcf4\ud638\uad00\uc740 \uac70\uc758 \ubaa8\ub4e0 \uae30\uc874 \uc18c\uc7ac\uac00 \uacac\ub514\uc9c0 \ubabb\ud558\ub294 \uadf9\ud55c \uc870\uac74\uc744 \uacac\ub38c\ub0b4\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc8fc\uc694 \ubc18\ub3c4\uccb4 \uc5f4 \uacf5\uc815 \uc804\ubc18\uc5d0 \uac78\uce5c \uc628\ub3c4 \uc870\uac74<\/h3>\n<p>\ubc18\ub3c4\uccb4 \uc5f4 \uacf5\uc815\uc740 \uad11\ubc94\uc704\ud558\uace0 \uae4c\ub2e4\ub85c\uc6b4 \uc628\ub3c4 \ubc94\uc704\ub97c \uc544\uc6b0\ub974\uba70, \uac01 \uacf5\uc815 \uad6c\uc5ed\uc740 \uc0bd\uc785\ub41c \ubcf4\ud638 \ud29c\ube0c\uc5d0 \uac01\uae30 \ub2e4\ub978 \uae30\uacc4\uc801 \ubc0f \ud654\ud559\uc801 \ubd80\ud558\ub97c \uac00\ud569\ub2c8\ub2e4.<\/p>\n<p>\ubd95\uc18c \ub610\ub294 \uc778 \ub3c4\ud551\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc218\ud3c9\uc2dd \ud655\uc0b0\ub85c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c \ubc94\uc704\uc5d0\uc11c \uc791\ub3d9\ud569\ub2c8\ub2e4. <strong>900\u00b0C \ubc0f 1100\u00b0C<\/strong>, \uc77c\ubd80 \uace0\uae09 \uc0b0\ud654 \uc0ac\uc774\ud074\uc758 \uacbd\uc6b0 \ucd5c\ub300 <strong>1200\u00b0C<\/strong> \uad6d\ubd80\uc801\uc778 \uace0\uc628 \uc601\uc5ed\uc5d0\uc11c. \uc9c8\ud654\uaddc\uc18c \ub610\ub294 \ud3f4\ub9ac\uc2e4\ub9ac\ucf58 \uc99d\ucc29\uc744 \uc704\ud55c \uc800\uc555 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(LPCVD) \uacf5\uc815\uc740 \ub2e4\uc74c \ubc94\uc704\uc5d0\uc11c \uc218\ud589\ub429\ub2c8\ub2e4. <strong>600\u00b0C \ubc0f 900\u00b0C<\/strong>, \ubc18\uba74 \uc0c1\uc555 \uc0b0\ud654\ub85c\ub294 <strong>950\u00b0C ~ 1100\u00b0C<\/strong> \ud55c \uc0ac\uc774\ud074\ub2f9 \uba87 \uc2dc\uac04 \ub3d9\uc548 \uc9c0\uc18d\uc801\uc73c\ub85c. \uae09\uc18d \uc5f4\ucc98\ub9ac(RTP) \uc2dc\uc2a4\ud15c\uc740 \uc11c\ub85c \ub2e4\ub978 \uc13c\uc11c \uad6c\uc870\ub97c \uc0ac\uc6a9\ud558\uc9c0\ub9cc, \ucd5c\uace0 \uc628\ub3c4\uac00 <strong>1250\u00b0C<\/strong> \uba87 \ucd08 \ub9cc\uc5d0.<\/p>\n<p><strong>\uc0dd\uc0b0\uc6a9 \uc6a9\uad11\ub85c\uc758 \uc5f4 \uade0\uc77c\ub3c4 \ud5c8\uc6a9 \uc624\ucc28\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \u00b10.5\u00b0C\uc5d0\uc11c \u00b11.0\u00b0C \uc774\ub0b4\ub85c \uc720\uc9c0\ub429\ub2c8\ub2e4.<\/strong> \ud29c\ube0c \uc804\uccb4 \uae38\uc774\uc5d0 \uac78\uccd0. \uc5f4\uc6a9\ub7c9\uc758 \ubd88\uade0\uc77c\uc131, \uae30\ud558\ud559\uc801 \uc65c\uace1 \ub610\ub294 \uad6d\ubd80\uc801\uc778 \ubc29\uc0ac\uc728 \ubcc0\ub3d9\uc744 \ucd08\ub798\ud558\ub294 \ubcf4\ud638 \ud29c\ube0c\ub294 \uad6c\uc5ed\ubcc4 \uc628\ub3c4 \uce21\uc815\uac12\uc744 \uc65c\uace1\uc2dc\ud0a4\ubbc0\ub85c, \uc791\ub3d9 \uc628\ub3c4\uc5d0\uc11c\uc758 \uce58\uc218 \uc548\uc815\uc131\uc740 \uc808\ub300 \uc591\ubcf4\ud560 \uc218 \uc5c6\ub294 \uc0ac\uc591\uc785\ub2c8\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4 \uc5f4 \uacf5\uc815 \uc804\ubc18\uc5d0 \uac78\uce5c \uc628\ub3c4 \ubc94\uc704<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ud504\ub85c\uc138\uc2a4<\/th>\n<th>\uc628\ub3c4 \ubc94\uc704(\u00b0C)<\/th>\n<th>\ubd84\uc704\uae30<\/th>\n<th>\uc77c\ubc18\uc801\uc778 \uc18c\uc694 \uc2dc\uac04<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ubd95\uc18c\/\uc778 \ud655\uc0b0<\/td>\n<td>900 \u2013 1100<\/td>\n<td>N\u2082 \/ O\u2082<\/td>\n<td>30~120\ubd84<\/td>\n<\/tr>\n<tr>\n<td>\ub300\uae30 \uc0b0\ud654<\/td>\n<td>950 \u2013 1100<\/td>\n<td>O\u2082 \/ H\u2082O<\/td>\n<td>20 \u2013 180\ubd84<\/td>\n<\/tr>\n<tr>\n<td>LPCVD (Si\u2083N\u2084, \ud3f4\ub9ac\uc2e4\ub9ac\ucf58)<\/td>\n<td>600 \u2013 900<\/td>\n<td>SiH\u2084, NH\u2083, N\u2082<\/td>\n<td>60\u2013240\ubd84<\/td>\n<\/tr>\n<tr>\n<td>\uc5b4\ub2d0\ub9c1 (RTA \/ \uc6a9\uad11\ub85c)<\/td>\n<td>800 \u2013 1150<\/td>\n<td>N\u2082 \/ Ar<\/td>\n<td>10~90\ubd84<\/td>\n<\/tr>\n<tr>\n<td>HCl \uac8c\ud130\ub9c1 \/ \uc138\uc815<\/td>\n<td>950 \u2013 1050<\/td>\n<td>HCl \/ O\u2082<\/td>\n<td>15~45\ubd84<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uace0\uc21c\ub3c4 \uc6e8\uc774\ud37c \uacf5\uc815\uc5d0\uc11c\uc758 \uc624\uc5fc \ubbfc\uac10\ub3c4<\/h3>\n<p>\uace0\uc628\uc5d0\uc11c \uac00\uacf5\ub418\ub294 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub294 \uae08\uc18d \uc624\uc5fc\uc5d0 \uadf9\ub3c4\ub85c \ubbfc\uac10\ud558\uba70, \uacf5\uc815 \ud658\uacbd\uc73c\ub85c\ubd80\ud130 \uc218 \ubc00\ub9ac\ubbf8\ud130 \uac70\ub9ac\uc5d0 \uc704\uce58\ud55c \ubcf4\ud638 \ud29c\ube0c\ub294 \ubd80\uc801\uc808\ud55c \uc7ac\uc9c8\uc774 \uc120\ud0dd\ub420 \uacbd\uc6b0 \uc8fc\uc694 \uc624\uc5fc \uc6d0\uc778\uc774 \ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\ub098\ud2b8\ub968(Na\u207a)\uacfc \uac19\uc740 \uc54c\uce7c\ub9ac \uae08\uc18d \uc774\uc628\uc740 300\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc774\ub3d9\uc131\uc774 \uc788\ub2e4.<\/strong> \ub610\ud55c \uc0b0\ud654\ub9c9\uc744 \ud1b5\uacfc\ud558\uc5ec \uc2e4\ub9ac\ucf58 \uaca9\uc790 \ub0b4\ub85c \uc774\ub3d9\ud560 \uc218 \uc788\uc73c\uba70, \uc774\ub85c \uc778\ud574 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uc784\uacc4 \uc804\uc555 \uc548\uc815\uc131\uc744 \uc800\ud558\uc2dc\ud0a4\ub294 \uacc4\uba74 \uc0c1\ud0dc\uac00 \uc0dd\uc131\ub429\ub2c8\ub2e4. \ucca0(Fe), \ub2c8\ucf08(Ni), \uad6c\ub9ac(Cu)\ub294 \uc2e4\ub9ac\ucf58 \ub0b4\uc5d0 \uc2ec\uce35 \ud2b8\ub7a9\uc744 \uc720\ubc1c\ud558\uc5ec \uc18c\uc218 \uce90\ub9ac\uc5b4 \uc218\uba85\uc744 \ub2e8\ucd95\uc2dc\ud0a4\uace0, \uc644\uc131\ub41c \uc18c\uc790\uc5d0\uc11c \ub204\uc124 \uc804\ub958\ub97c \uac00\uc18d\ud654\ud569\ub2c8\ub2e4. \uacf5\uc815 \uc628\ub3c4\uc5d0\uc11c \uc774\ub7ec\ud55c \uc6d0\uc18c\ub4e4\uc744 \ubbf8\ub7c9\uc774\ub77c\ub3c4 \ubc29\ucd9c\ud558\ub294 \ubcf4\ud638 \ud29c\ube0c\ub294 \uc218\uc728 \uc81c\ud55c \uc694\uc778\uc774 \ub418\ub294 \uc624\uc5fc\uc6d0\uc785\ub2c8\ub2e4.<\/p>\n<p>\ubc18\ub3c4\uccb4 \uc18c\uc131\ub85c \ubd80\ud488\uc5d0 \ub300\ud55c \uc0b0\uc5c5\uc6a9 \uc624\uc5fc \uae30\uc900\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uc744 \uc694\uad6c\ud569\ub2c8\ub2e4. <strong>\ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 \uc9c8\ub7c9 \uae30\uc900\uc73c\ub85c 50 ppb \ubbf8\ub9cc<\/strong>, \uc54c\uce7c\ub9ac \uae08\uc18d(Na, K, Li)\uc740 \uadf8 \uc544\ub798\uc5d0 \uc704\uce58\ud558\uba70 <strong>\uac01\uac01 5 ppb<\/strong>. \uc774 \uae30\uc900\uce58\ub294 \ubcf4\ud638\uad00\uc744 \ud3ec\ud568\ud558\uc5ec \uc6a9\uad11\ub85c \uacf5\uc815 \uad6c\uc5ed\uc5d0 \uc9c4\uc785\ud558\uac70\ub098 \uc774\uc640 \uc811\ucd09\ud558\ub294 \ubaa8\ub4e0 \ubd80\ud488\uc758 \uc7ac\ub8cc \uc120\uc815\uc5d0 \uc9c1\uc811\uc801\uc778 \uc81c\uc57d\uc744 \uac00\ud569\ub2c8\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c \ubd80\ud488\uc5d0 \ub300\ud55c \ud5c8\uc6a9 \uae08\uc18d \ubd88\uc21c\ubb3c \ud55c\uacc4\uce58<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc694\uc18c<\/th>\n<th>\ucd5c\ub300 \ud5c8\uc6a9 \ub18d\ub3c4 (ppb)<\/th>\n<th>\uc624\uc5fc \ud6a8\uacfc<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ub098\ud2b8\ub968(Na)<\/td>\n<td>\u2264 5<\/td>\n<td>\uac8c\uc774\ud2b8 \uc0b0\ud654\ub9c9 \uc5f4\ud654, \uc784\uacc4 \uc804\uc555 \ubcc0\ud654<\/td>\n<\/tr>\n<tr>\n<td>\ucca0(Fe)<\/td>\n<td>\u2264 20<\/td>\n<td>\uce90\ub9ac\uc5b4 \uc218\uba85 \ub2e8\ucd95<\/td>\n<\/tr>\n<tr>\n<td>\uad6c\ub9ac(Cu)<\/td>\n<td>\u2264 10<\/td>\n<td>\uc2ec\uce35 \ud2b8\ub7a9 \ud615\uc131<\/td>\n<\/tr>\n<tr>\n<td>\ub2c8\ucf08(Ni)<\/td>\n<td>\u2264 20<\/td>\n<td>\ub204\uc124 \uc804\ub958 \uc99d\uac00<\/td>\n<\/tr>\n<tr>\n<td>\uce7c\ub968(K)<\/td>\n<td>\u2264 5<\/td>\n<td>\uc774\ub3d9\uc131 \uc774\uc628 \uc624\uc5fc<\/td>\n<\/tr>\n<tr>\n<td>\ucd1d \uae08\uc18d<\/td>\n<td>\u2264 50<\/td>\n<td>\uc885\ud569 \uc218\uc728 \uc601\ud5a5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c \uad00 \ub0b4\ubd80\uc758 \ub300\uae30 \uc870\uac74<\/h3>\n<p>\uc628\ub3c4\uc640 \uc624\uc5fc \uc678\uc5d0\ub3c4, \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c \uad00 \ub0b4\ubd80\uc758 \ud654\ud559\uc801 \ud658\uacbd\uc740 \uc0bd\uc785\ub41c \ubaa8\ub4e0 \ubcf4\ud638 \ubd80\ud488\uc5d0 \uc138 \ubc88\uc9f8 \uc720\ud615\uc758 \uc694\uad6c \uc0ac\ud56d\uc744 \ubd80\uacfc\ud569\ub2c8\ub2e4.<\/p>\n<p>\uac74\uc870\ud558\uac70\ub098 \uc2b5\ud55c O\u2082\ub97c \ud3ec\ud568\ud558\ub294 \uc0b0\ud654\uc131 \ubd84\uc704\uae30\ub294 \uac8c\uc774\ud2b8 \uc0b0\ud654\ub9c9 \ubc0f \ud544\ub4dc \uc0b0\ud654\ub9c9 \uc131\uc7a5\uc5d0 \uad11\ubc94\uc704\ud558\uac8c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc218\uc18c(H\u2082) \ub610\ub294 \ud3ec\ubc0d \uac00\uc2a4(H\u2082\/N\u2082 \ud63c\ud569\ubb3c)\ub97c \ud3ec\ud568\ud55c \ud658\uc6d0\uc131 \ubd84\uc704\uae30\ub294 \uc5b4\ub2d0\ub9c1 \ubc0f \uac8c\ud130\ub9c1 \ub2e8\uacc4\uc5d0\uc11c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. <strong>\ubd80\ud53c \ub18d\ub3c4\uac00 1\u20135%\uc778 HCl \uac00\uc2a4<\/strong> \uccad\uc18c \uc8fc\uae30 \ub3d9\uc548 \uc8fc\uae30\uc801\uc73c\ub85c \uc8fc\uc785\ub418\uc5b4 \uc6a9\uad11\ub85c \ubcbd\uba74\uc5d0 \ubd80\ucc29\ub41c \uae08\uc18d \uc624\uc5fc \ubb3c\uc9c8\uc744 \ud718\ubc1c\uc2dc\ud0b5\ub2c8\ub2e4. \uc774 \ud658\uacbd\uc740 \ub300\ubd80\ubd84\uc758 \uc138\ub77c\ubbf9 \ubc0f \uae08\uc18d \uc7ac\ub8cc\ub97c \ubd80\uc2dd\uc2dc\ud0a4\uc9c0\ub9cc, \uace0\uc21c\ub3c4 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0\ub294 \ud654\ud559\uc801 \uc601\ud5a5\uc744 \ubbf8\uce58\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ubd88\ud65c\uc131 \ud37c\uc9c0 \uac00\uc2a4(N\u2082, Ar)\ub294 \uc8fc\ubcc0 \ud658\uacbd \uc81c\uc5b4 \ub2e8\uacc4\uc5d0\uc11c \uc8fc\ub85c \uc0ac\uc6a9\ub418\uba70, \ud654\ud559\uc801 \ubd80\ud558\ub97c \ubc1c\uc0dd\uc2dc\ud0a4\uc9c0 \uc54a\uc9c0\ub9cc \uc0bd\uc785\ub41c \ud29c\ube0c\uc5d0\ub294 \uc5ec\uc804\ud788 \uce58\uc218 \uc548\uc815\uc131\uc774 \uc694\uad6c\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc774\ub7ec\ud55c \ub300\uae30 \uc911 \uc5b4\ub290 \ud558\ub098\uc640 \ubc18\uc751(\uc0b0\ud654, \ud658\uc6d0 \ub610\ub294 \uc0b0 \ubd80\uc2dd \ub4f1\uc744 \ud1b5\ud574)\ud558\ub294 \ubcf4\ud638\uad00\uc740 \uc624\uc5fc \ucc28\ub2e8\ub9c9\uc774 \uc544\ub2c8\ub77c \uc624\ud788\ub824 \uc624\uc5fc\uc6d0\uc774 \ub429\ub2c8\ub2e4. <strong>\ub530\ub77c\uc11c \ubaa8\ub4e0 \uacf5\uc815 \ud658\uacbd\uc5d0\uc11c\uc758 \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc740 \uc5f4\uc801 \uc548\uc815\uc131\ub9cc\ud07c\uc774\ub098 \uc911\uc694\ud569\ub2c8\ub2e4.<\/strong>, \uadf8\ub9ac\uace0 \ubc14\ub85c \uc774\ub7ec\ud55c \ud2b9\uc131\ub4e4\uc758 \uc870\ud569 \ub355\ubd84\uc5d0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \ud45c\uc900 \ubcf4\ud638\uad00 \uc18c\uc7ac\ub85c \uc790\ub9ac\ub9e4\uae40\ud558\uac8c \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc11d\uc601\uc774 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \uc120\ud638 \uc18c\uc7ac\ub85c \uaf3d\ud788\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00<\/h2>\n<p>\uadf9\ud55c \uc628\ub3c4, \ucd08\uc800 \uc624\uc5fc \ud5c8\uc6a9 \uae30\uc900, \ud654\ud559\uc801 \ubd80\uc2dd\uc131\uc774 \uac15\ud55c \ub300\uae30 \ub4f1 \ubc18\ub3c4\uccb4 \uc5f4 \ud658\uacbd\uc774 \uc694\uad6c\ud558\ub294 \ubcf5\ud569\uc801\uc778 \uc870\uac74\uc744 \uace0\ub824\ud560 \ub54c, \ubcf4\ud638 \ud29c\ube0c\uc6a9 \uc18c\uc7ac \uc120\uc815\uc740 \ub2e4\ubcc0\uc218 \ucd5c\uc801\ud654 \ubb38\uc81c\uc785\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc774\ub7ec\ud55c \ubaa8\ub4e0 \uc81c\uc57d \uc870\uac74\uc744 \ub3d9\uc2dc\uc5d0 \ucda9\uc871\uc2dc\ud0a4\uba70, \uc774\uac83\uc774 \ubc14\ub85c \uc774 \uc18c\uc7ac\uac00 \ub110\ub9ac \ucc44\ud0dd\ub41c \uc774\uc720\uc785\ub2c8\ub2e4. <a href=\"https:\/\/toquartz.com\/ko\/wholesale-fused-quartz-glass-tubes\/\">\uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c<\/a> \uc774 \uc5c5\uacc4\uc758 \uc0ac\uc591.<\/p>\n<h3>\uc6a9\uc735 \uc11d\uc601\uc758 \uc5f4\uc801 \uc548\uc815\uc131 \ubc0f \ub0ae\uc740 \uc5f4\ud33d\ucc3d \uacc4\uc218<\/h3>\n<p>\ubcf4\ud638\uad00 \uc7ac\uc9c8\uc758 \uc5f4\ud33d\ucc3d \ud2b9\uc131\uc740 \uae09\uaca9\ud55c \uc628\ub3c4 \ubcc0\ud654\uc640 \uad00 \ubcbd\uc744 \uac00\ub85c\uc9c0\ub974\ub294 \uc9c0\uc18d\uc801\uc778 \uc628\ub3c4 \ucc28\ub85c \uc778\ud574 \ubc1c\uc0dd\ud558\ub294 \uc5f4\uc5d0 \uc758\ud55c \uc751\ub825\uc5d0 \ub300\ud55c \ub0b4\uc131\uc744 \uc9c1\uc811\uc801\uc73c\ub85c \uacb0\uc815\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc735\ud569 \uc2e4\ub9ac\uce74\uc758 \uc5f4\ud33d\ucc3d \uacc4\uc218(CTE)\ub294 \uc57d 0.55 \u00d7 10\u207b\u2076\/\u00b0C\uc785\ub2c8\ub2e4.<\/strong>, 20\u00b0C\uc5d0\uc11c 1000\u00b0C\uc5d0 \uc774\ub974\ub294 \ubc94\uc704\uc5d0\uc11c \uce21\uc815\ub41c \uac12\uc785\ub2c8\ub2e4. \uc774 \uac12\uc740 \uc0b0\uc5c5\uc6a9\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \ubaa8\ub4e0 \uc0b0\ud654\ubb3c \uc18c\uc7ac \uc911\uc5d0\uc11c\ub3c4 \uac00\uc7a5 \ub0ae\uc740 \ud3b8\uc5d0 \uc18d\ud569\ub2c8\ub2e4. \uc774\uc5d0 \ube44\ud574 \uc54c\ub8e8\ubbf8\ub098(Al\u2082O\u2083)\uc758 \uc5f4\ud33d\ucc3d \uacc4\uc218(CTE)\ub294 <strong>7.2 \u00d7 10\u207b\u2076\/\u00b0C<\/strong>, \uadf8\ub9ac\uace0 \uba40\ub77c\uc774\ud2b8\ub294 <strong>5.0 \u00d7 10\u207b\u2076\/\u00b0C<\/strong> \u2014 \uc774 \uc218\uce58\ub294 \ubaa8\ub450 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ubcf4\ub2e4 8\ubc30 \uc774\uc0c1 \ub192\uc740 \uc218\uc900\uc774\ub2e4. \uc6a9\uad11\ub85c \uad00\uc774 \uc0c1\uc628\uc5d0\uc11c 1000\u00b0C\uae4c\uc9c0 \uac00\uc5f4\ub418\uc5c8\ub2e4\uac00 \ub2e4\uc2dc \uc0c1\uc628\uc73c\ub85c \ub3cc\uc544\uc624\ub294 \uc5f4 \uc0ac\uc774\ud074\uc744 \uac70\uce60 \ub54c, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubd80\ud488\uc758 \uce58\uc218 \ubcc0\ud654\ub294 \uac70\uc758 \ubb34\uc2dc\ud560 \uc218 \uc788\ub294 \uc218\uc900\uc778 \ubc18\uba74, \uc54c\ub8e8\ubbf8\ub098\ub098 \uc138\ub77c\ubbf9 \uad00\uc740 \uc0c1\ub2f9\ud55c \ub0b4\ubd80 \uc751\ub825\uc744 \ucd95\uc801\ud558\uac8c \ub41c\ub2e4.<\/p>\n<p>\uc774\ub7ec\ud55c \ub0ae\uc740 \uc5f4\ud33d\ucc3d \uacc4\uc218(CTE)\uac00 \uac00\uc838\uc624\ub294 \uc2e4\uc9c8\uc801\uc778 \ud6a8\uacfc\ub294 \ub9e4\uc6b0 \ud0c1\uc6d4\ud569\ub2c8\ub2e4. <strong>\uc5f4 \ucda9\uaca9 \uc800\ud56d<\/strong>. \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00\uc740 \uc0c1\uc628\uc5d0\uc11c 1000\u00b0C\uc758 \uc6a9\uad11\ub85c \ud658\uacbd\uc73c\ub85c \uc62e\uaca8\uc838\ub3c4 \ud30c\uc190\ub418\uc9c0 \uc54a\ub294\ub370, \uc774\ub294 \uc6a9\uad11\ub85c \uc801\uc7ac \uacfc\uc815 \uc911 \uc6b4\uc601\uc0c1 \ub9e4\uc6b0 \uc911\uc694\ud55c \ud2b9\uc131\uc785\ub2c8\ub2e4. \uc774 \ud2b9\uc131\uc740 \uc5f4\ucda9\uaca9 \uc800\ud56d \ub9e4\uac1c\ubcc0\uc218(R')\ub85c \uc815\ub7c9\ud654\ub418\uba70, \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0, <strong>R' \uac12\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 1000\u00b0C\ub97c \ucd08\uacfc\ud569\ub2c8\ub2e4.<\/strong> \uae09\uc18d \ub0c9\uac01 \uc870\uac74 \ud558\uc5d0\uc11c \u2014 \uc774\ub294 1200\u00b0C \ubbf8\ub9cc \ubc94\uc704\uc5d0\uc11c \uc5b4\ub5a4 \uc54c\ub8e8\ubbf8\ub098\ub098 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ub300\uccb4\uc7ac\ub3c4 \ub530\ub77c\uc62c \uc218 \uc5c6\ub294 \uc218\uce58\uc785\ub2c8\ub2e4.<\/p>\n<h4>CTE \uae30\uc900 \ubcf4\ud638\uad00 \uc7ac\uc9c8 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>CTE(\u00d710-\u2076\/\u00b0C)<\/th>\n<th>\ucd5c\ub300 \uc11c\ube44\uc2a4 \uc628\ub3c4(\u00b0C)<\/th>\n<th>\uc5f4 \ucda9\uaca9 \uc800\ud56d<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74(\ud569\uc131)<\/td>\n<td>0.55<\/td>\n<td>1100(\uc5f0\uc18d)<\/td>\n<td>\uc6b0\uc218<\/td>\n<\/tr>\n<tr>\n<td>\uc735\ud569 \uc2e4\ub9ac\uce74 (\ucc9c\uc5f0)<\/td>\n<td>0.55<\/td>\n<td>1050 (\uc5f0\uc18d)<\/td>\n<td>\uc6b0\uc218<\/td>\n<\/tr>\n<tr>\n<td>\uc54c\ub8e8\ubbf8\ub098 (99.7%)<\/td>\n<td>7.2<\/td>\n<td>1700<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<\/tr>\n<tr>\n<td>\uba40\ub77c\uc774\ud2b8<\/td>\n<td>5.0<\/td>\n<td>1600<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<\/tr>\n<tr>\n<td>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc (SiC)<\/td>\n<td>4.0<\/td>\n<td>1600<\/td>\n<td>Good<\/td>\n<\/tr>\n<tr>\n<td>\uc2a4\ud14c\uc778\ub9ac\uc2a4\uac15 (310S)<\/td>\n<td>16.0<\/td>\n<td>1050<\/td>\n<td>Poor<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uacf5\uc815 \ubd84\uc704\uae30 \ud558\uc5d0\uc11c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \ud654\ud559\uc801 \ubd88\ud65c\uc131<\/h3>\n<p>\ubaa8\ub4e0 \ud45c\uc900 \ubc18\ub3c4\uccb4 \uacf5\uc815 \ub300\uae30 \uc870\uac74\uc5d0\uc11c, \ubcf4\ud638 \ud29c\ube0c \uc18c\uc7ac\uc758 \ud654\ud559\uc801 \uac70\ub3d9\uc740 \ud29c\ube0c\uc758 \uc218\uba85\ubfd0\ub9cc \uc544\ub2c8\ub77c \uc6e8\uc774\ud37c \ud658\uacbd\uc758 \uc21c\ub3c4 \uc720\uc9c0 \uce21\uba74\uc5d0\uc11c\ub3c4 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc735\ud569 \uc2e4\ub9ac\uce74\ub294 \ubc18\ub3c4\uccb4 \uacf5\uc815 \uc628\ub3c4 \ubc94\uc704\uc5d0\uc11c O\u2082, N\u2082, Ar, H\u2082, HCl \ubc0f \ub300\ubd80\ubd84\uc758 \uc0b0 \uc99d\uae30\uc5d0 \ub300\ud574 \ud654\ud559\uc801 \ube44\ud65c\uc131\uc744 \ub771\ub2c8\ub2e4.<\/strong> \uc774 \ubb3c\uc9c8\uc740 \uc774\ubbf8 SiO\u2082 \ud615\ud0dc\ub85c \uc644\uc804\ud788 \uc0b0\ud654\ub418\uc5b4 \uc788\uc73c\ubbc0\ub85c \uc0b0\ud654\uc131 \ubd84\uc704\uae30\uc5d0\uc11c\ub3c4 \ub354 \uc774\uc0c1 \uc0b0\ud654\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. 1200\u00b0C \ubbf8\ub9cc\uc758 \ud658\uc6d0\uc131 H\u2082 \ubd84\uc704\uae30\uc5d0\uc11c \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uad6c\uc870\uc801\u00b7\ud654\ud559\uc801 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\uba70, \ud45c\uc900 LPCVD \ub610\ub294 \uc5b4\ub2d0\ub9c1 \uc870\uac74 \ud558\uc5d0\uc11c\ub294 \uce21\uc815 \uac00\ub2a5\ud55c \ud658\uc6d0 \ubc18\uc751\uc744 \ubcf4\uc774\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ub85c \uc138\uc815\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ub18d\ub3c4\uc758 HCl \ubd84\uc704\uae30(900\u20131050\u00b0C\uc5d0\uc11c 1\u20135%)\uc5d0\uc11c\ub294 \uace0\uc21c\ub3c4 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0 \uce21\uc815 \uac00\ub2a5\ud55c \ubd80\uc2dd\uc774 \ubc1c\uc0dd\ud558\uc9c0 \uc54a\ub294 \ubc18\uba74, \uc54c\ub8e8\ubbf8\ub098 \ud29c\ube0c\ub294 \uc720\uc0ac\ud55c \uc870\uac74\uc5d0\uc11c \ud45c\uba74 \ud53c\ud305 \ubc0f \uc785\uacc4 \uc5d0\uce6d \ud604\uc0c1\uc774 \ub098\ud0c0\ub0a9\ub2c8\ub2e4.<\/p>\n<p>\uc911\uc694\ud55c \uc608\uc678\ub294 \ubd88\ud654\uc218\uc18c\uc0b0(HF)\uacfc \uc774\uc5d0 \uc0c1\uc751\ud558\ub294 \uae30\uc0c1 \ubb3c\uc9c8\uc785\ub2c8\ub2e4. <strong>HF\ub294 \uc5b4\ub5a4 \uc628\ub3c4\uc5d0\uc11c\ub4e0 SiO\u2082\ub97c \ube60\ub974\uac8c \ubd80\uc2dd\uc2dc\ud0a8\ub2e4<\/strong>, \ub610\ud55c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub294 \uc0ac\uc804 \uc911\ud654 \ucc98\ub9ac\ub97c \uac70\uce58\uc9c0 \uc54a\uc740 \uc0c1\ud0dc\uc5d0\uc11c\ub294 HF\uac00 \ud3ec\ud568\ub41c \ub300\uae30\ub098 HF \ucc98\ub9ac \ud6c4\uc758 \uc2b5\uc2dd \uc791\uc5c5\ub300 \ud658\uacbd\uc5d0\uc11c \uc0ac\uc6a9\ud574\uc11c\ub294 \uc548 \ub429\ub2c8\ub2e4. \uc774 \ud2b9\uc815 \uc608\uc678\ub97c \uc81c\uc678\ud558\uba74, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcf4\ud638 \ud29c\ube0c\uc758 \ud654\ud559\uc801 \ud638\ud658\uc131 \ud504\ub85c\ud30c\uc77c\uc740 \ubc18\ub3c4\uccb4 \uc5f4 \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uac70\uc758 \ubaa8\ub4e0 \ud654\ud559 \ubb3c\uc9c8\uc744 \ud3ec\uad04\ud569\ub2c8\ub2e4.<\/p>\n<h4>\uc735\ud569 \uc2e4\ub9ac\uce74\uc640 \ubc18\ub3c4\uccb4 \uacf5\uc815 \ubd84\uc704\uae30\uc758 \ud654\ud559\uc801 \ud638\ud658\uc131<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ubd84\uc704\uae30<\/th>\n<th>\ud638\ud658\uc131<\/th>\n<th>\ucc38\uace0<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uac74\uc870 \uc0b0\uc18c<\/td>\n<td>\u2713 \uc644\ubcbd\ud558\uac8c \ud638\ud658\ub428<\/td>\n<td>\ubc18\uc751 \uc5c6\uc74c; \uc774\ubbf8 \uc644\uc804\ud788 \uc0b0\ud654\ub428<\/td>\n<\/tr>\n<tr>\n<td>\uc2b5\ud55c \uc0b0\uc18c(O\u2082) \/ \uc218\uc99d\uae30(H\u2082O)<\/td>\n<td>\u2713 \ud638\ud658 \uac00\ub2a5<\/td>\n<td>1000\u00b0C \uc774\uc0c1\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ubbf8\uc138\ud55c \ud45c\uba74 \ud558\uc774\ub4dc\ub85d\uc2e4\ud654<\/td>\n<\/tr>\n<tr>\n<td>N\u2082 \/ Ar (\ubd88\ud65c\uc131 \uac00\uc2a4)<\/td>\n<td>\u2713 \uc644\ubcbd\ud558\uac8c \ud638\ud658\ub428<\/td>\n<td>\uc5b4\ub5a4 \uacf5\uc815 \uc628\ub3c4\uc5d0\uc11c\ub3c4 \ubc18\uc751\uc774 \uc77c\uc5b4\ub098\uc9c0 \uc54a\ub294\ub2e4<\/td>\n<\/tr>\n<tr>\n<td>H\u2082 \/ \uc131\ud615 \uac00\uc2a4<\/td>\n<td>\u2713 1200\u00b0C\uae4c\uc9c0 \uc0ac\uc6a9 \uac00\ub2a5<\/td>\n<td>1200\u00b0C \uc774\ud558\ub85c \ub0ae\ucd94\uc9c0 \ub9c8\uc2ed\uc2dc\uc624<\/td>\n<\/tr>\n<tr>\n<td>HCl (1\u20135%)<\/td>\n<td>\u2713 \ud638\ud658 \uac00\ub2a5<\/td>\n<td>\uce21\uc815 \uac00\ub2a5\ud55c \ud45c\uba74 \uce68\uc2dd \uc5c6\uc74c<\/td>\n<\/tr>\n<tr>\n<td>HF \uc99d\uae30<\/td>\n<td>\u2717 \ud638\ud658\ub418\uc9c0 \uc54a\uc74c<\/td>\n<td>SiO\u2082\uc758 \uae09\uc18d \uc5d0\uce6d; \uc644\uc804\ud788 \ud53c\ud574\uc57c \ud568<\/td>\n<\/tr>\n<tr>\n<td>SiH\u2084 \/ NH\u2083 (CVD)<\/td>\n<td>\u2713 \ud638\ud658 \uac00\ub2a5<\/td>\n<td>\ud29c\ube0c \uc678\ubd80\uc640\ub294 \ubc18\uc751\uc774 \uc5c6\uc74c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uc21c\ub3c4 \ub4f1\uae09 \ubc0f \ubbf8\ub7c9 \uae08\uc18d \uc624\uc5fc \uad00\ub9ac<\/h3>\n<p>\ubaa8\ub4e0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ub3d9\uc77c\ud55c \uc21c\ub3c4\ub85c \uc81c\uc870\ub418\ub294 \uac83\uc740 \uc544\ub2c8\uba70, \ubc18\ub3c4\uccb4 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ucc9c\uc5f0 \ub4f1\uae09\uacfc \ud569\uc131 \ub4f1\uae09\uc758 \uad6c\ubd84\uc740 \uae30\ub2a5\uc801\uc73c\ub85c \uc911\uc694\ud55c \uc758\ubbf8\ub97c \uc9c0\ub2d9\ub2c8\ub2e4.<\/p>\n<p><strong>\ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74<\/strong>, \uace0\uc21c\ub3c4 \uc0ac\uc5fc\ud654\uaddc\uc18c(SiCl\u2084)\ub97c \ud654\uc5fc \uac00\uc218\ubd84\ud574 \ub610\ub294 \ud50c\ub77c\uc988\ub9c8 \uc0b0\ud654\ud558\uc5ec \uc81c\uc870\ub418\uba70, SiO\u2082 \ud568\ub7c9\uc774 <strong>\u226599.999% (5N)<\/strong> \uc77c\ubc18\uc801\uc73c\ub85c \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 <strong>\uc9c8\ub7c9 \uae30\uc900 20 ppb<\/strong>. \uac1c\ubcc4 \uc54c\uce7c\ub9ac \uae08\uc18d(Na, K, Li)\uc740 \uc544\ub798\uc5d0 \uc704\uce58\ud558\uba70 <strong>1\u20132 ppb<\/strong> \uace0\uae09 \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc18c\uc7ac\ub85c \uc81c\uc791\ub418\uc5c8\uc2b5\ub2c8\ub2e4. <strong>\ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74<\/strong>, \uace0\uc21c\ub3c4 \uc11d\uc601 \uacb0\uc815 \uc6d0\ub8cc\uc5d0\uc11c \ucd94\ucd9c\ub41c \uc774 \uc81c\ud488\uc740 \uc57d <strong>99.9%<\/strong> \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 \ub2e4\uc74c \ubc94\uc704 \ub0b4\uc5d0 \uc788\ub294 <strong>50\u2013200 ppb<\/strong> \u2014 \ub9ce\uc740 \uc0b0\uc5c5\uc6a9 \uc751\uc6a9 \ubd84\uc57c\uc5d0\ub294 \ucda9\ubd84\ud558\uc9c0\ub9cc, \ucca8\ub2e8 CMOS \ub610\ub294 \uba54\ubaa8\ub9ac \uc18c\uc790 \uc81c\uc870\uc5d0\ub294 \ud55c\uacc4\uac00 \uc788\ub2e4.<\/p>\n<p>\uc21c\ub3c4 \ub4f1\uae09 \uc120\ud0dd\uc774 \uc6b4\uc601\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5\uc740 \uace0\uc628 \uc0b0\ud654 \ubc0f \ud655\uc0b0 \uacf5\uc815 \ub2e8\uacc4\uc5d0\uc11c \uac00\uc7a5 \ub450\ub4dc\ub7ec\uc9c0\uac8c \ub098\ud0c0\ub098\ub294\ub370, \uc774 \ub2e8\uacc4\uc5d0\uc11c\ub294 <strong>\uaddc\uaca9 \ubbf8\ub2ec\uc758 \ubcf4\ud638 \ud29c\ube0c\ub85c \uc778\ud55c \ub098\ud2b8\ub968 \uc624\uc5fc\uc740 MOS \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uc784\uacc4 \uc804\uc555\uc744 50~200 mV \uc815\ub3c4 \ubcc0\ud654\uc2dc\ud0ac \uc218 \uc788\ub2e4<\/strong> \u2014 \uc774\ub294 \uc804\uc555 \ub9c8\uc9c4 \uc0ac\uc591\uc774 \uc5c4\uaca9\ud55c \uc7a5\uce58\uc5d0\uc11c \uae30\ub2a5\uc801 \uc624\uc791\ub3d9\uc744 \uc720\ubc1c\ud558\ub294 \ubcc0\ud615\uc785\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub97c \uc870\ub2ec\ud560 \ub54c\ub294 \ubbf8\ub7c9 \uae08\uc18d \ud568\ub7c9(\ud2b9\ud788 Na, K, Fe, Cu, Ni)\uc5d0 \ub300\ud55c \ubd84\uad11 \ubd84\uc11d \uacb0\uacfc\ub97c \ud3ec\ud568\ud55c \uc644\uc804\ud55c \uc7ac\ub8cc \uc778\uc99d\uc11c\ub97c \ubc18\ub4dc\uc2dc \ud655\ubcf4\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4\uc6a9 \uc5f4\uc804\ub300 \ubcf4\ud638\uad00\uc758 \uc21c\ub3c4 \ub4f1\uae09 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ub4f1\uae09<\/th>\n<th>SiO\u2082 \ud568\ub7c9(%)<\/th>\n<th>\ucd1d \uae08\uc18d \ud568\ub7c9 (ppb)<\/th>\n<th>Na + K (ppb)<\/th>\n<th>\uad8c\uc7a5 \uc6a9\ub3c4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ud569\uc131 (5N)<\/td>\n<td>\u2265 99.999<\/td>\n<td>&lt; 20<\/td>\n<td>&lt; 2<\/td>\n<td>\uace0\uc131\ub2a5 CMOS, \uba54\ubaa8\ub9ac, \uac8c\uc774\ud2b8 \uc0b0\ud654\ub9c9<\/td>\n<\/tr>\n<tr>\n<td>\ud569\uc131 (4N)<\/td>\n<td>\u2265 99.99<\/td>\n<td>&lt; 50<\/td>\n<td>&lt; 5<\/td>\n<td>\ud45c\uc900 \ud655\uc0b0, LPCVD<\/td>\n<\/tr>\n<tr>\n<td>\ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74<\/td>\n<td>\u2265 99.9<\/td>\n<td>50 \u2013 200<\/td>\n<td>10 \u2013 50<\/td>\n<td>\uc5b4\ub2d0\ub9c1, \ube44\uc911\uc694 \uacf5\uc815<\/td>\n<\/tr>\n<tr>\n<td>\ud45c\uc900 \uc0b0\uc5c5\uc6a9 \uc11d\uc601<\/td>\n<td>\u2265 99.5<\/td>\n<td>&gt; 200<\/td>\n<td>&gt; 50<\/td>\n<td>\ube44\ubc18\ub3c4\uccb4 \ubd84\uc57c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uad11\ud559\uc801 \ud22c\uba85\uc131\uacfc \uadf8 \uae30\ub2a5\uc801 \uc758\uc758<\/h3>\n<p>\ud22c\uba85\ud55c \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc790\uc678\uc120(UV)\ubd80\ud130 \uadfc\uc801\uc678\uc120(NIR)\uc5d0 \uc774\ub974\ub294 \uad11\ubc94\uc704\ud55c \uc2a4\ud399\ud2b8\ub7fc \ubc94\uc704\uc5d0\uc11c \ubcf5\uc0ac\ub97c \ud22c\uacfc\uc2dc\ud0a4\uba70, \uc774\ub7ec\ud55c \ud2b9\uc131\uc740 \ubc18\ub3c4\uccb4 \uc18c\uc131\ub85c \ud658\uacbd\uc5d0\uc11c \ubbf8\uc801 \uce21\uba74\uc744 \ub118\uc5b4 \uc2e4\uc9c8\uc801\uc778 \uc911\uc694\uc131\uc744 \uc9c0\ub2d9\ub2c8\ub2e4.<\/p>\n<p><strong>\ud22c\uba85\ud55c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub97c \uc0ac\uc6a9\ud558\uba74 \uc5f4\uc804\ub300 \uc811\ud569\ubd80\uc640 \uc804\uc120\uc758 \uc0c1\ud0dc\ub97c \uc9c1\uc811 \uc721\uc548\uc73c\ub85c \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong> \ud29c\ube0c\ub97c \uc81c\uac70\ud560 \ud544\uc694 \uc5c6\uc774. \uc608\uae30\uce58 \uc54a\uc740 \uc6a9\uad11\ub85c \uac1c\ubc29\uc73c\ub85c \uc778\ud574 \uc218\uc728 \uc190\uc2e4\uacfc \uc5f4\uc801 \uad50\ub780\uc774 \ubaa8\ub450 \ubc1c\uc0dd\ud558\ub294 \uace0\ubd80\uac00\uac00\uce58 \uc0dd\uc0b0 \ud658\uacbd\uc5d0\uc11c, \ud29c\ube0c \ubcbd\uc744 \ud1b5\ud574 \uc640\uc774\uc5b4\uc758 \uc0b0\ud654 \uc0c1\ud0dc, \uc811\ud569\ubd80 \ubb34\uacb0\uc131 \ub610\ub294 \uc774\ubb3c\uc9c8 \ucd95\uc801 \uc5ec\ubd80\ub97c \uc721\uc548\uc73c\ub85c \ud3c9\uac00\ud560 \uc218 \uc788\ub294 \ub2a5\ub825\uc740 \uc758\ubbf8 \uc788\ub294 \uc6b4\uc601\uc0c1\uc758 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ub610\ud55c, \uad11\ud559 \uace0\uc628\uacc4\ub098 \ubcf5\uc0ac \uc628\ub3c4\uacc4\uac00 2\ucc28 \uc628\ub3c4 \uae30\uc900\uce58\ub85c \uc0ac\uc6a9\ub418\ub294 \uacf5\uc815\uc5d0\uc11c\ub294, \ud22c\uba85\ud55c \ubcf4\ud638\uad00\uc774 \uace0\uc628\uacc4\uc640 \uacf5\uc815 \uad6c\uc5ed \uc0ac\uc774\uc5d0 \uad11\ud559\uc801 \uc7a5\uc560\ubb3c\uc744 \uc77c\uc73c\ud0a4\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uae30\ud3ec \ud568\ub7c9\uc744 \uc5c4\uaca9\ud788 \uc81c\uc5b4\ud558\uc5ec \ucc9c\uc5f0 \uc11d\uc601\uc744 \uc6a9\uc735\uc2dc\ucf1c \uc81c\uc870\ub41c \ubd88\ud22c\uba85(\ubc18\ud22c\uba85 \ud770\uc0c9) \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 \uae30\uacc4\uc801 \uac15\ub3c4\uac00 \uc57d\uac04 \ub354 \ub192\uace0 \uc801\uc678\uc120 \ud22c\uacfc\uc728\uc774 \ub0ae\uc544, \ubcf5\uc0ac\uc5f4 \uad00\ub9ac\ub098 \uadfc\uc801\uc678\uc120 \uc0b0\ub780\uad11 \uc5b5\uc81c\uac00 \ud544\uc694\ud55c \uc6a9\ub3c4\uc5d0\uc11c \uc120\ud638\ub429\ub2c8\ub2e4. <strong>\ub530\ub77c\uc11c \ud22c\uba85 \ud29c\ube0c\uc640 \ubd88\ud22c\uba85 \ud29c\ube0c \uc911 \uc5b4\ub290 \uac83\uc744 \uc120\ud0dd\ud560\uc9c0\ub294 \uacf5\uc815\ubcc4\ub85c \uacb0\uc815\ud574\uc57c \ud569\ub2c8\ub2e4.<\/strong>, \ub610\ud55c \uc624\uc5fc \uad00\ub9ac\uc640 \uc721\uc548 \uac80\uc0ac \uc811\uadfc\uc131\uc774 \uac00\uc7a5 \uc911\uc694\ud55c \uace0\ub824 \uc0ac\ud56d\uc778 \ub300\ubd80\ubd84\uc758 \ubc18\ub3c4\uccb4 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ud22c\uba85\ud55c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ud45c\uc900\uc73c\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Multi-Bore-Quartz-Thermocouple-Tubes-for-Dimensional-Inspection-in-Semiconductor-Component-Qualification.webp\" alt=\"\ubc18\ub3c4\uccb4 \uc18c\uc790 \uac80\uc99d\uc6a9 \uce58\uc218 \uac80\uc0ac\uc6a9 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\" title=\"\ubc18\ub3c4\uccb4 \uc18c\uc790 \uac80\uc99d\uc6a9 \uce58\uc218 \uac80\uc0ac\uc6a9 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\" \/><\/p>\n<h2>\ubc18\ub3c4\uccb4\uc6a9 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \uad6c\uc870\uc801 \uad6c\uc131<\/h2>\n<p>\ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c\uc6a9 \ubcf4\ud638\uad00\uc744 \uc120\uc815\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub4e4\uc5d0\uac8c\ub294 \uc7ac\ub8cc \uc870\uc131\ub9cc\uc73c\ub85c\ub294 \ucda9\ubd84\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc11d\uc601 \uc5f4\uc804\ub300\uad00\uc758 \uae30\ud558\ud559\uc801 \ubc0f \uad6c\uc870\uc801 \ud615\ud0dc\uac00 \ud2b9\uc815 \uc6a9\uad11\ub85c \uad6c\uc870 \ubc0f \uce21\uc815 \uc694\uad6c \uc0ac\ud56d\uacfc\uc758 \uae30\ub2a5\uc801 \ud638\ud658\uc131\uc744 \uacb0\uc815\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/p>\n<h3>\ub2e8\uc77c \ub0b4\uacbd \ubc0f \ub2e4\uc911 \ub0b4\uacbd \ud29c\ube0c \ud615\uc0c1<\/h3>\n<p>\ubcf4\ud638\uad00\uc758 \ub0b4\ubd80 \ub0b4\uacbd \uad6c\uc870\uc5d0 \ub530\ub77c \ud574\ub2f9 \ubcf4\ud638\uad00\uc5d0 \uc7a5\ucc29\ud560 \uc218 \uc788\ub294 \uc5f4\uc804\ub300 \uc18c\uc790\uc758 \uc218\uc640, \uc774\ub7ec\ud55c \uc18c\uc790\ub4e4\uc774 \uc11c\ub85c \uc5f4\uc801\u00b7\uc804\uae30\uc801\uc73c\ub85c \uc5b4\ub5bb\uac8c \uc808\uc5f0\ub418\ub294\uc9c0\uac00 \uacb0\uc815\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\ub2e8\uc77c \ub0b4\uacbd \uc11d\uc601\uad00<\/strong> \uc774\ub294 \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c\uc5d0\uc11c \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uad6c\uc131\uc73c\ub85c, \ud55c \uc30d\uc758 \uc5f4\uc804\ub300\ub97c \uc218\uc6a9\ud558\uba70, \ub450 \uac1c\uc758 \uc5f4\uc804\ub300 \uc120\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc11d\uc601 \uc258 \ub0b4\ubd80\uc5d0 \uc7a5\ucc29\ub41c \ubcc4\ub3c4\uc758 \uc774\uc911 \uad6c\uba4d \uc54c\ub8e8\ubbf8\ub098 \uc808\uc5f0\ubd09\uc744 \ud1b5\ud574 \ud1b5\uacfc\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubc30\uce58\ub294 \uc804\uae30\uc801 \uc808\uc5f0\uc744 \uc720\uc9c0\ud558\ub294 \ub3d9\uc2dc\uc5d0, \uc11d\uc601 \ud29c\ube0c\uac00 \ud654\ud559\uc801 \ubc0f \uc5f4\uc801 \ubcf4\ud638 \uae30\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ub418\ub294 \ud45c\uc900 \ub2e8\uc77c \ubcf4\uc5b4 \uc678\uacbd\uc740 <strong>4 mm ~ 12 mm<\/strong>, \ub0b4\uacbd \uc9c1\uacbd\uc774 <strong>2 mm ~ 8 mm<\/strong>.<\/p>\n<p><strong>\ub2e4\uc911 \uad6c\uacbd \ud29c\ube0c<\/strong> \u2014 \uac00\uc7a5 \uc77c\ubc18\uc801\uc778 \ud615\ud0dc\ub294 \ub4c0\uc5bc \ubcf4\uc5b4(\ub2e8\uc77c \uc11d\uc601 \ubcf8\uccb4 \ub0b4\uc5d0 \ub450 \uac1c\uc758 \ud3c9\ud589\ud55c \ucc44\ub110\uc774 \uc788\ub294 \ud615\ud0dc) \ub610\ub294 4-\ubcf4\uc5b4 \uad6c\uc131\uc73c\ub85c, \uc774\ub97c \ud1b5\ud574 \uc5ec\ub7ec \uc30d\uc758 \ub3c5\ub9bd\uc801\uc778 \uc5f4\uc804\ub300 \uc30d\uc774 \ub2e8\uc77c \uc0bd\uc785 \uc5b4\uc148\ube14\ub9ac\uc5d0 \uc7a5\ucc29\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \uacf5\uac04\uc801 \uc81c\uc57d\uc73c\ub85c \uc778\ud574 \ub3c5\ub9bd\uc801\uc778 \ud29c\ube0c \uc0bd\uc785 \ud69f\uc218\uac00 \uc81c\ud55c\ub418\ub294 \ub2e4\uc911 \uad6c\uc5ed \uc6a9\uad11\ub85c\uc5d0\uc11c, \ub610\ub294 \uc8fc \uc5f4\uc804\ub300 \uc30d\uacfc \uc608\ube44 \uc5f4\uc804\ub300 \uc30d\uc774 \ub2e8\uc77c \uc0bd\uc785 \ud3ec\ud2b8\ub97c \uacf5\uc720\ud574\uc57c \ud558\ub294 \uacbd\uc6b0\uc5d0 \ud2b9\ud788 \uc720\uc6a9\ud569\ub2c8\ub2e4. <strong>\ub2e4\uc911 \ub0b4\uacbd \uc11d\uc601\uad00\uc758 \ub0b4\uacbd \uac04 \ubcbd \ub450\uaed8\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 0.8 mm\uc5d0\uc11c 1.5 mm\uc785\ub2c8\ub2e4.<\/strong>, \uadf8\ub9ac\uace0 \uc774 \ubcbd\uc758 \ubb34\uacb0\uc131\uc744 \ud574\ub2f9 \uc628\ub3c4\uc5d0\uc11c \uc720\uc9c0\ud558\ub824\uba74 \ub0b4\ubd80 \uae30\ud3ec \ud568\ub7c9\uc774 \ub0ae\uc740 \uace0\ud488\uc9c8\uc758 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4 \ub4f1\uae09 \ubcf4\ud638\uad00\uc758 \ud45c\uc900 \ub0b4\uacbd \uad6c\uc131<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uad6c\uc131<\/th>\n<th>\uad6c\uacbd \uc218<\/th>\n<th>\uc77c\ubc18\uc801\uc778 \uc678\uacbd \ubc94\uc704 (mm)<\/th>\n<th>\uc77c\ubc18\uc801\uc778 \ub0b4\uacbd (mm)<\/th>\n<th>\uae30\ubcf8 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ub2e8\uc77c \uad6c\uacbd<\/td>\n<td>1<\/td>\n<td>4 \u2013 12<\/td>\n<td>2 \u2013 8<\/td>\n<td>\ud45c\uc900 \uad6c\uc5ed \uce21\uc815<\/td>\n<\/tr>\n<tr>\n<td>\uc774\uc911 \uad6c\uacbd<\/td>\n<td>2<\/td>\n<td>8 \u2013 16<\/td>\n<td>\uad6c\uacbd\ub2f9 2~4\uac1c<\/td>\n<td>\uc911\ubcf5 \uc5f4\uc804\ub300 \uc30d<\/td>\n<\/tr>\n<tr>\n<td>4\uad6c\uacbd<\/td>\n<td>4<\/td>\n<td>14 \u2013 22<\/td>\n<td>\uad6c\uacbd\ub2f9 1.5~3\uac1c<\/td>\n<td>\ub2e4\uc911 \uc18c\uc790 \uc18c\ud615 \uc5b4\uc148\ube14\ub9ac<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uce58\uc218 \uacf5\ucc28 \ubc0f \ubcbd \ub450\uaed8 \uc0ac\uc591<\/h3>\n<p>\uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \uce58\uc218 \uc815\ubc00\ub3c4\ub294 \uacb0\ucf54 \ubd80\ucc28\uc801\uc778 \ubb38\uc81c\uac00 \uc544\ub2d9\ub2c8\ub2e4. \ud29c\ube0c\uac00 \uc815\ubc00 \uac00\uacf5\ub41c \ud50c\ub79c\uc9c0\ub97c \ud1b5\uacfc\ud558\uace0, \ub2e4\uc911 \uad6c\uc5ed \ud504\ub85c\ube0c \uc5b4\uc148\ube14\ub9ac\uc640 \uc815\ub82c\ub418\uba70, \uace0\uc628\uc5d0\uc11c\ub3c4 \uc77c\uad00\ub41c \ubc18\uacbd \ubc29\ud5a5 \uac04\uadf9\uc744 \uc720\uc9c0\ud574\uc57c \ud558\ub294 \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c\uc758 \uacbd\uc6b0, \uc5c4\uaca9\ud55c \uacf5\ucc28\ub294 \uc6b4\uc601\uc0c1 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc758 \uc678\uacbd \uacf5\ucc28\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \u00b10.10 mm\uc5d0\uc11c \u00b10.15 mm \uc0ac\uc774\ub85c \uc720\uc9c0\ub429\ub2c8\ub2e4.<\/strong>, \ubc18\uba74 \ud45c\uc900 \uc0b0\uc5c5\uc6a9 \uc11d\uc601 \ud29c\ube0c\uc758 \uacbd\uc6b0 \u00b10.3 mm \uc774\uc0c1\uc785\ub2c8\ub2e4. \ubcbd \ub450\uaed8 \uade0\uc77c\ub3c4\ub294 \ub2e4\uc74c \ubc94\uc704 \uc774\ub0b4\ub85c \uaddc\uc815\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. <strong>\u00b10.1 mm<\/strong> \ub300\uce6d\uc801\uc778 \ubc29\uc0ac\ud615 \uc5f4\uc804\ub2ec\uc744 \ubcf4\uc7a5\ud558\uace0, \uc9c0\uc18d\uc801\uc778 \ud558\uc911 \ud558\uc5d0\uc11c \uc5f4\uc5d0 \uc758\ud55c \ud728 \ud604\uc0c1\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud568\uc785\ub2c8\ub2e4. \uae38\uc774 \uacf5\ucc28\ub294 \uc77c\ubc18\uc801\uc73c\ub85c <strong>\u00b11.0 mm ~ \u00b12.0 mm<\/strong> \uc2e4\uc81c \uc808\ub2e8 \ubc0f \ud654\uc5fc \uc5f0\ub9c8\uc758 \ud55c\uacc4\ub97c \uace0\ub824\ud558\uc5ec 300mm\uc5d0\uc11c 1500mm \ubc94\uc704\uc758 \ud29c\ube0c\uc5d0 \uc801\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p>\ubcbd \ub450\uaed8\uc758 \uc120\ud0dd\uc740 \uae30\uacc4\uc801 \ub0b4\uad6c\uc131\uacfc \uc5f4 \ubc18\uc751 \uc2dc\uac04 \ubaa8\ub450\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. <strong>\ubcbd \ub450\uaed8\ub97c \uc587\uac8c(1.0\u20131.5 mm) \ud558\uba74 \uc5f4\uc6a9\ub7c9\uc774 \uc904\uc5b4\ub4ed\ub2c8\ub2e4<\/strong> \ub610\ud55c \uc5f4\uc804\ub300 \uc811\ud569\ubd80\uac00 \uc6a9\uad11\ub85c \uc628\ub3c4 \ubcc0\ud654\uc5d0 \ub354 \ube60\ub974\uac8c \ubc18\uc751\ud560 \uc218 \uc788\uac8c \ud558\uc5ec, \uad6c\uc5ed \uc81c\uc5b4\uc758 \ubc18\uc751\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 \ud2b9\uc131\uc744 \uac16\uc2b5\ub2c8\ub2e4. \ubcbd \ub450\uaed8\uac00 \ub450\uaebc\uc6cc\uc9c8\uc218\ub85d(2.0\u20133.0 mm) \ucde8\uae09 \uc2dc \uc190\uc0c1 \uc800\ud56d\uc131\uc774 \uc99d\uac00\ud558\uace0 \uc8fc\uae30\uc801 \ud558\uc911 \ud558\uc5d0\uc11c \uc218\uba85\uc774 \uc5f0\uc7a5\ub418\uc9c0\ub9cc, \uc5f4 \ubc18\uc751\uc5d0 \uc57d\uac04\uc758 \uc9c0\uc5f0\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \ub300\ubd80\ubd84\uc758 \ubc18\ub3c4\uccb4 \ud655\uc0b0 \ubc0f \uc0b0\ud654 \uacf5\uc815\uc5d0\uc11c \ubcbd \ub450\uaed8\ub294 <strong>1.5 mm\uc5d0\uc11c 2.0 mm\uae4c\uc9c0\uac00 \ud45c\uc900 \uc124\uacc4 \ubc94\uc704\uc785\ub2c8\ub2e4.<\/strong>, \uc751\ub2f5 \uc18d\ub3c4\uc640 \uae30\uacc4\uc801 \uacac\uace0\uc131 \uc0ac\uc774\uc758 \uade0\ud615\uc744 \ub9de\ucd94\uace0 \uc788\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4\uc6a9 \uc11d\uc601\uad00\uc758 \uce58\uc218 \uc0ac\uc591 \ubc94\uc704<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\ubc18\ub3c4\uccb4 \ub4f1\uae09<\/th>\n<th>\ud45c\uc900 \uc0b0\uc5c5\uc6a9 \ub4f1\uae09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>OD \uacf5\ucc28 (mm)<\/td>\n<td>\u00b1 0.10 \u2013 0.15<\/td>\n<td>\u00b1 0.30 \u2013 0.50<\/td>\n<\/tr>\n<tr>\n<td>\ubcbd \ub450\uaed8 \ud5c8\uc6a9 \uc624\ucc28(mm)<\/td>\n<td>\u00b1 0.10<\/td>\n<td>\u00b1 0.20 \u2013 0.30<\/td>\n<\/tr>\n<tr>\n<td>\ubcbd \ub450\uaed8 \ubc94\uc704 (mm)<\/td>\n<td>1.0 \u2013 3.0<\/td>\n<td>1.0 \u2013 5.0<\/td>\n<\/tr>\n<tr>\n<td>\uae38\uc774 \uacf5\ucc28 (mm)<\/td>\n<td>\u00b1 1.0 \u2013 2.0<\/td>\n<td>\u00b1 2.0 \u2013 5.0<\/td>\n<\/tr>\n<tr>\n<td>\uad6c\uba4d \ub3d9\uc2ec\ub3c4 (mm)<\/td>\n<td>\u00b1 0.05 \u2013 0.10<\/td>\n<td>\u00b1 0.15 \u2013 0.30<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\ud3d0\uc1c4\ud615 \ub300 \uac1c\ubc29\ud615 \ud29c\ube0c \uad6c\uc131<\/h3>\n<p>\uc11d\uc601 \uc5f4\uc804\ub300 \ubcf4\ud638\uad00\uc758 \ub2e8\ubd80 \ud615\uc0c1(\uce21\uc815 \ub2e8\ubd80\uac00 \ub9c9\ud600 \uc788\ub294\uc9c0 \ub610\ub294 \uc5f4\ub824 \uc788\ub294\uc9c0 \uc5ec\ubd80\uc5d0 \uad00\uacc4\uc5c6\uc774)\uc740 \uc5f4\uc804\ub300 \uc811\ud569\ubd80\uc758 \ud654\ud559\uc801 \ubcf4\ud638 \ubc0f \uc5b4\uc148\ube14\ub9ac\uc758 \uc5f4 \uce21\uc815 \ud2b9\uc131\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p><strong>\ud3d0\uc1c4\ud615 \ud29c\ube0c<\/strong> \uce21\uc815 \ub2e8\ubd80\uc5d0 \uc6a9\uc735 \ubc00\ubd09\ub41c \ud301\uc774 \uc7a5\ucc29\ub418\uc5b4 \uc788\uc5b4 \uc5f4\uc804\ub300 \uc811\ud569\ubd80\ub97c \uc644\uc804\ud788 \ubc00\ud3d0\ub41c \ud658\uacbd\uc73c\ub85c \ubcf4\ud638\ud569\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \uacf5\uc815 \ub300\uae30 \uac00\uc2a4\uc640 \uc5f4\uc804\ub300 \uc640\uc774\uc5b4 \uac04\uc758 \uc9c1\uc811\uc801\uc778 \uc811\ucd09\uc744 \ubc29\uc9c0\ud560 \uc218 \uc788\uc73c\uba70, \uc774\ub294 HCl\uc774 \ud3ec\ud568\ub41c \uc138\uc815 \ub300\uae30, \ubc18\uc751\uc131 \uc804\uad6c\uccb4 \uac00\uc2a4\uac00 \uc788\ub294 CVD \ud658\uacbd, \uadf8\ub9ac\uace0 \uc5f4\uc804\ub300 \ud569\uae08\uc774 \uac00\uc2a4\uc5d0 \uc9c1\uc811 \ub178\ucd9c\ub418\uc5b4 \ud654\ud559\uc801 \ubd80\uc2dd\uc744 \uc77c\uc73c\ud0ac \uc218 \uc788\ub294 \ubaa8\ub4e0 \uacf5\uc815\uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ud3d0\uc1c4\ud615 \ub05d\ub2e8 \uad6c\uc870\ub294 \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c\uc6a9 \uc5f4\uc804\ub300 \uc5b4\uc148\ube14\ub9ac\uc758 \ud45c\uc900 \uc0ac\uc591\uc774\uba70, <strong>\uc811\ud569\ubd80\uc5d0\uc11c \ud29c\ube0c \ub05d\uae4c\uc9c0\uc758 \uac04\uaca9\uc774 5mm\uc5d0\uc11c 15mm\uc778 \uacbd\uc6b0<\/strong> \uc77c\ubc18\uc801\uc73c\ub85c \uacf5\uc815 \ud658\uacbd\uacfc \uce21\uc815 \uc9c0\uc810 \uac04\uc758 \uc5f4\uc801 \uacb0\ud569\uc744 \uc6d0\ud65c\ud558\uac8c \uc720\uc9c0\ud558\uae30 \uc704\ud574 \uad00\ub9ac\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\uac1c\ubc29\ud615 \ud29c\ube0c<\/strong> \uc5f4\uc804\ub300 \uc811\ud569\ubd80\ub97c \uacf5\uc815 \ub300\uae30 \ud658\uacbd\uc5d0 \uc9c1\uc811 \ub178\ucd9c\uc2dc\ud0ac \uc218 \uc788\uc5b4, \uc5f4 \uc751\ub2f5 \uc18d\ub3c4\uac00 \ube68\ub77c\uc9c0\uace0 \ud3d0\uc1c4\ud615 \uc124\uacc4\uc5d0 \ub0b4\uc7ac\ub41c \ud301 \uc804\ub3c4 \uc9c0\uc5f0 \ud604\uc0c1\uc744 \uc81c\uac70\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc774\ub7ec\ud55c \uad6c\uc131\uc740 \uacf5\uc815 \ub300\uae30 \ud658\uacbd\uc774 \uc5f4\uc804\ub300 \ud569\uae08\uacfc \ube44\ubc18\uc751\uc131\uc77c \ub54c, \uc989 \uc8fc\ub85c \ubd88\ud65c\uc131 \ub610\ub294 \uc57d\uc0b0\uc131 \uc0b0\ud654\uc131 N\u2082 \ubc0f Ar \ud658\uacbd\uc5d0\uc11c\uc5d0\ub9cc \uc801\ud569\ud569\ub2c8\ub2e4. <strong>\uac1c\ubc29\ud615 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 \ubc18\ub3c4\uccb4 \ubd84\uc57c\uc5d0\uc11c \uc0ac\uc6a9 \ubc94\uc704\uac00 \uc81c\ud55c\uc801\uc774\ub2e4<\/strong>, \uc8fc\ub85c \uce21\uc815 \uc18d\ub3c4\uac00 \uc624\uc5fc \uc704\ud5d8\ubcf4\ub2e4 \ub354 \uc911\uc694\ud55c, \uc81c\uc5b4\ub41c \ubd88\ud65c\uc131 \ubd84\uc704\uae30 \ud558\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uc5f0\uad6c\uc6a9 \uc6a9\uad11\ub85c\uc5d0 \uad6d\ud55c\ub418\uc5b4 \uc788\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Platinum-Paired-Quartz-Thermocouple-Tubes-for-High-Temperature-Assembly-in-Semiconductor-Equipment.webp\" alt=\"\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \uace0\uc628 \uc870\ub9bd\uc6a9 \ubc31\uae08-\ucffc\uce20 \uc5f4\uc804\ub300 \ud29c\ube0c\" title=\"\ubc18\ub3c4\uccb4 \uc7a5\ube44\uc758 \uace0\uc628 \uc870\ub9bd\uc6a9 \ubc31\uae08-\ucffc\uce20 \uc5f4\uc804\ub300 \ud29c\ube0c\" \/><\/p>\n<h2>\ubc18\ub3c4\uccb4 \uc18c\uc131\ub85c\uc5d0\uc11c \uc11d\uc601 \ubcf4\ud638\uad00\uacfc \ud568\uaed8 \uc0ac\uc6a9\ub418\ub294 \uc5f4\uc804\ub300 \uc885\ub958<\/h2>\n<p>\uc5f4\uc804\ub300 \uc120\uc7ac \ud569\uae08\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00 \uac04\uc758 \uc7ac\ub8cc \ud638\ud658\uc131\uc740 \uc7ac\ub8cc \uc120\uc815 \uacfc\uc815\uacfc \ubcd1\ud589\ud558\uc5ec \ubc18\ub4dc\uc2dc \ud655\uc778\ud574\uc57c \ud569\ub2c8\ub2e4. \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c \uc5b4\uc148\ube14\ub9ac \ub0b4\uc5d0\uc11c, \uc5f4\uc804\ub300 \uc720\ud615\uc5d0 \ub530\ub77c \uce21\uc815 \uc2dc\uc2a4\ud15c\uc758 \uc0ac\uc6a9 \uac00\ub2a5 \ucd5c\uace0 \uc628\ub3c4, \uc815\ud655\ub3c4 \ub4f1\uae09 \ubc0f \uc7a5\uae30 \uc548\uc815\uc131 \ud2b9\uc131\uc774 \uacb0\uc815\ub429\ub2c8\ub2e4.<\/p>\n<h3>1100\u00b0C \ubbf8\ub9cc\uc758 \ubc18\ub3c4\uccb4 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 K\ud615 \ubc0f N\ud615 \uc5f4\uc804\ub300<\/h3>\n<p>\ube44\uadc0\uae08\uc18d \uc5f4\uc804\ub300 \uc720\ud615 \uc911 K\ud615\uacfc N\ud615\uc740 1100\u00b0C \ubbf8\ub9cc\uc758 \uc628\ub3c4\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c \ubd84\uc57c\uc5d0\uc11c \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\uba70, \ub450 \uc720\ud615 \ubaa8\ub450 \uc77c\ubc18\uc801\uc73c\ub85c \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00 \ub0b4\uc5d0 \uc7a5\ucc29\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>K\ud615 \uc5f4\uc804\ub300 (\ud06c\ub85c\uba5c-\uc54c\ub8e8\uba5c, Ni-Cr\/Ni-Al)<\/strong> ~\uc758 \uce21\uc815 \ubc94\uc704\ub97c \ucee4\ubc84\ud569\ub2c8\ub2e4. <strong>-200\u00b0C ~ 1260\u00b0C<\/strong>, \ud45c\uc900 \uc815\ud655\ub3c4\ub294 <strong>\u00b12.2\u00b0C \ub610\ub294 \u00b10.75%<\/strong> 375\u00b0C \uc774\uc0c1 (IEC 60584 Class 1). \uc774\ub4e4\uc740 <a href=\"https:\/\/en.wikipedia.org\/wiki\/Seebeck_coefficient\">\uc81c\ubca0\ud06c \uacc4\uc218<\/a><sup id=\"fnref1:1\"><a href=\"#fn:1\" class=\"footnote-ref\">1<\/a><\/sup> \uc57d <strong>41 \u00b5V\/\u00b0C<\/strong> 1000\u00b0C\uc5d0\uc11c \u2014 \ud45c\uc900 \ube44\uadc0\uae08\uc18d \uc720\ud615 \uc911 \uac00\uc7a5 \ub192\uc740 \uac12 \u2014 \ub370\uc774\ud130 \uc218\uc9d1 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ub6f0\uc5b4\ub09c \uc2e0\ud638 \ubd84\ud574\ub2a5\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 K\ud615 \uc5f4\uc804\ub300\ub294 <strong>\u201c\ub179\uc369\uc74c\u201d \uc0b0\ud654<\/strong> 800\u00b0C \uc774\uc0c1\uc758 \uc800\uc0b0\uc18c \ubd84\uc555 \ud658\uacbd\uc5d0\uc11c\ub294 \ud06c\ub85c\uba5c \uc640\uc774\uc5b4 \ub0b4\ubd80\uc758 \ud06c\ub86c\uc774 \uc120\ud0dd\uc801\uc73c\ub85c \uc0b0\ud654\ub429\ub2c8\ub2e4. \uc774\ub85c \uc778\ud574 \uc0b0\uc18c \ud568\ub7c9\uc774 \ucda9\ubd84\ud558\uc9c0 \uc54a\uc740 \uc131\ud615 \uac00\uc2a4 \ub610\ub294 N\u2082 \ud37c\uc9c0 \ud658\uacbd\uc5d0\uc11c\ub294 \uc774 \uc640\uc774\uc5b4\uc758 \uc0ac\uc6a9\uc774 \uc81c\ud55c\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>N\ud615 \uc5f4\uc804\ub300 (Nicrosil-Nisil)<\/strong> K\ud615\uc758 \uc0b0\ud654 \ubd88\uc548\uc815\uc131\uc744 \ud574\uacb0\ud558\uae30 \uc704\ud574 \ud2b9\ubcc4\ud788 \uac1c\ubc1c\ub418\uc5c8\uc73c\uba70, \ub2e4\uc74c\uacfc \uac19\uc740 \ud2b9\uc131\uc744 \ubcf4\uc785\ub2c8\ub2e4. <strong>800\u00b0C \uc774\uc0c1\uc5d0\uc11c \ub4dc\ub9ac\ud504\ud2b8 \uc800\ud56d\uc131\uc774 \ud604\uc800\ud788 \ud5a5\uc0c1\ub428<\/strong>. 1000\u00b0C\uc5d0\uc11c N\ud615 \uc5f4\uc804\ub300\uc758 \ub4dc\ub9ac\ud504\ud2b8\ub294 \uc77c\ubc18\uc801\uc73c\ub85c <strong>100\uc2dc\uac04\ub2f9 0.5\u00b0C<\/strong> \uc5f0\uc18d \uadfc\ubb34 \uae30\uac04\uc740, \uc774\uc5d0 \ube44\ud574 <strong>100\uc2dc\uac04\ub2f9 1\u20133\u00b0C<\/strong> \ub3d9\ub4f1\ud55c \uc870\uac74 \ud558\uc5d0\uc11c K\ud615\uacfc \ube44\uad50\ud588\uc744 \ub54c. \uc774\ub7ec\ud55c \uc548\uc815\uc131 \ub355\ubd84\uc5d0 N\ud615\uc740 \uad50\uc815 \uc8fc\uae30\ub97c \ucd5c\uc18c\ud654\ud574\uc57c \ud558\uace0 \uacf5\uc815 \uc7ac\ud604\uc131\uc744 \uc5c4\uaca9\ud558\uac8c \uad00\ub9ac\ud574\uc57c \ud558\ub294 \ubc18\ub3c4\uccb4 \uc5b4\ub2d0\ub9c1\ub85c\uc5d0\uc11c \uac00\uc7a5 \uc120\ud638\ub418\ub294 \ube44\uadc0\uae08\uc18d \uc5f4\uc804\ub300\uc785\ub2c8\ub2e4. K\ud615\uacfc N\ud615 \ubaa8\ub450 \uc791\ub3d9 \uc628\ub3c4 \ubc94\uc704 \ub0b4\uc5d0\uc11c \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c \ub0b4\ubcbd\uacfc \ud654\ud559\uc801 \ud638\ud658\uc131\uc744 \uac16\ucd94\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h4>\uc735\ud569 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc5d0 \uc0ac\uc6a9\ub41c \ube44\uadc0\uae08\uc18d \uc5f4\uc804\ub300 \uc720\ud615\ubcc4 \uc131\ub2a5 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc18d\uc131<\/th>\n<th>K\ud615<\/th>\n<th>N\ud615<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc628\ub3c4 \ubc94\uc704(\u00b0C)<\/td>\n<td>-200 ~ 1260<\/td>\n<td>-200 ~ 1300<\/td>\n<\/tr>\n<tr>\n<td>IEC \uc815\ud655\ub3c4 (\ud074\ub798\uc2a4 1)<\/td>\n<td>\u00b12.2\u00b0C \ub610\ub294 \u00b10.75%<\/td>\n<td>\u00b12.2\u00b0C \ub610\ub294 \u00b10.75%<\/td>\n<\/tr>\n<tr>\n<td>1000\u00b0C\uc5d0\uc11c\uc758 \uc81c\ubca0\ud06c \uacc4\uc218 (\u00b5V\/\u00b0C)<\/td>\n<td>~41<\/td>\n<td>~36<\/td>\n<\/tr>\n<tr>\n<td>1000\u00b0C\uc5d0\uc11c\uc758 \ub4dc\ub9ac\ud504\ud2b8 (\u00b0C\/100\uc2dc\uac04)<\/td>\n<td>1 \u2013 3<\/td>\n<td>&lt; 0.5<\/td>\n<\/tr>\n<tr>\n<td>\ub179\ubd80\ud328 \uac10\uc218\uc131<\/td>\n<td>\uace0\uc628 (&gt; 800\u00b0C, \ub0ae\uc740 pO\u2082)<\/td>\n<td>\ub0ae\uc74c<\/td>\n<\/tr>\n<tr>\n<td>\uc735\ud569 \uc2e4\ub9ac\uce74\uc640\uc758 \ud638\ud658\uc131<\/td>\n<td>\u2713 \ud638\ud658 \uac00\ub2a5<\/td>\n<td>\u2713 \ud638\ud658 \uac00\ub2a5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uace0\uc628 \ud655\uc0b0 \ubc0f \uc0b0\ud654 \uc6a9\uad11\ub85c\uc6a9 S\ud615, R\ud615, B\ud615 \uc5f4\uc804\ub300<\/h3>\n<p>1100\u00b0C \uc774\uc0c1\uc5d0\uc11c \uc9c4\ud589\ub418\ub294 \ubc18\ub3c4\uccb4 \uacf5\uc815(\uace0\uc628 \uc0b0\ud654, \uc2ec\uce35 \ud655\uc0b0 \ubc0f \uc77c\ubd80 LPCVD \uacf5\uc815 \ub4f1)\uc758 \uacbd\uc6b0, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc5d0 \ub0b4\uc7a5\ub41c \uadc0\uae08\uc18d \uc5f4\uc804\ub300 \uc720\ud615\uc774 \ud544\uc694\ud55c \uace0\uc628 \ub0b4\uc5f4\uc131\uacfc \uc624\uc5fc \ubc29\uc9c0 \uae30\ub2a5\uc744 \ubaa8\ub450 \uac16\ucd94\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>S\ud615(Pt-10%Rh\/Pt) \ubc0f R\ud615(Pt-13%Rh\/Pt) \uc5f4\uc804\ub300<\/strong> \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud558\uc5ec <strong>1600\u00b0C<\/strong> \uc5f0\uc18d \uc791\ub3d9 \uc2dc, IEC Class 1 \uc815\ud655\ub3c4\ub97c \uac16\ucd98 <strong>\u00b11.0\u00b0C \ub610\ub294 \u00b10.25%<\/strong> 1100\u00b0C \uc774\uc0c1. \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c \ud604\uc7a5\uc5d0\uc11c\ub294 \ube44\uadc0\uae08\uc18d \uc5f4\uc804\ub300\uac00 \ub4dc\ub9ac\ud504\ud2b8 \ud55c\uacc4\uc5d0 \uadfc\uc811\ud558\ub294 1050\u00b0C~1200\u00b0C \ubc94\uc704\uc5d0\uc11c \uc774\ub7ec\ud55c \uc720\ud615\uc758 \uc5f4\uc804\ub300\uac00 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ubc31\uae08-\ub85c\ub4d0 \ud569\uae08\uc740 \ub2e4\uc74c\uc758 \uc601\ud5a5\uc744 \ubc1b\uae30 \uc26c\uc6b0\uba70 <strong>1300\u00b0C \uc774\uc0c1\uc5d0\uc11c\uc758 \ub85c\ub4d0 \uc774\ub3d9 \ubc0f \uacb0\uc815\ub9bd \uc131\uc7a5<\/strong>, \uadf8\ub9ac\uace0 ~\uc5d0 <strong>\uc2e4\ub9ac\ucf58 \uc99d\uae30, \uc778, \ubd95\uc18c\uc5d0 \uc758\ud55c \uc624\uc5fc<\/strong> \u2014 \uc774 \ubaa8\ub4e0 \ubb3c\uc9c8\uc740 \ud655\uc0b0\ub85c \ub0b4\ubd80 \ubd84\uc704\uae30\uc5d0\uc11c \ub3c4\ud310\ud2b8 \uc131\ubd84\uc73c\ub85c \uc874\uc7ac\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \ubc18\ub3c4\uccb4 \ud658\uacbd\uc5d0\uc11c S\ud615 \ubc0f R\ud615 \uc6d0\uc18c\ub97c \uce21\uc815\ud560 \ub54c, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00\uc740 \uae30\ub2a5\uc801\uc73c\ub85c \uc5c6\uc5b4\uc11c\ub294 \uc548 \ub420 \uc694\uc18c\uc785\ub2c8\ub2e4. \uc774 \ubcf4\ud638\uad00\uc740 \uce21\uc815 \uc7a5\uce58\ub97c \uacf5\uc815 \uc601\uc5ed\uc5d0\uc11c 5~15mm \uc774\ub0b4\ub85c \uc720\uc9c0\ud558\uba74\uc11c, \ubc31\uae08 \uc640\uc774\uc5b4\ub97c \ubc18\uc751\uc131 \uacf5\uc815 \ubb3c\uc9c8\ub85c\ubd80\ud130 \uaca9\ub9ac\ud574 \uc90d\ub2c8\ub2e4.<\/p>\n<p><strong>B\ud615 (Pt-30%Rh \/ Pt-6%Rh)<\/strong> \uce21\uc815 \uc0c1\ud55c\uc744 ~\ub85c \ud655\uc7a5\ud569\ub2c8\ub2e4. <strong>1820\u00b0C<\/strong>, \uc800\uc628\uc5d0\uc11c\ub294 \uc81c\ubca0\ud06c \uacc4\uc218\uac00 \uac70\uc758 0\uc5d0 \uac00\uae4c\uc6cc 600\u00b0C \ubbf8\ub9cc\uc758 \uc0ac\uc6a9 \uac00\ub2a5\ud55c \ucd9c\ub825\uc740 \ubb34\uc2dc\ud560 \uc218 \uc788\uc744 \uc815\ub3c4\ub85c \ubbf8\ubbf8\ud569\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c \uc2e4\ubb34\uc5d0\uc11c\ub294 B\ud615\uc774 \ud2b9\uc218\ud55c \ucd08\uace0\uc628 \uc5b4\ub2d0\ub9c1 \uc6a9\ub3c4\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774 \uc720\ud615\uc740 \ub85c\ub4d0 \ud568\ub7c9\uc73c\ub85c \uc778\ud574 <strong>\ub85c\ub4d0 \uace0\uac08 \ub4dc\ub9ac\ud504\ud2b8\uc5d0 \ub35c \ubbfc\uac10\ud568<\/strong> Type S\ub098 R\ubcf4\ub2e4 \uc6b0\uc218\ud558\uba70, \uc2e4\ub9ac\ucf58 \uc624\uc5fc\uc5d0 \ub300\ud55c \ub0b4\uc131\uc774 \ud5a5\uc0c1\ub418\uc5c8\uc2b5\ub2c8\ub2e4. Type B\uc758 \uacbd\uc6b0, \ud29c\ube0c\uc758 \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4 \ud55c\uacc4\uc778 \uc57d 1100\u00b0C\uae4c\uc9c0\ub294 \uc735\ud569 \uc2e4\ub9ac\uce74 \ud29c\ube0c \ubcf4\ud638 \ubc29\uc2dd\uc774 \ud45c\uc900\uc73c\ub85c \uc720\uc9c0\ub418\uba70, \uc774 \uc628\ub3c4\ub97c \ucd08\uacfc\ud560 \uacbd\uc6b0 \ub300\uccb4 \ubcf4\ud638 \uc7ac\ub8cc\ub97c \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h4>\uc735\ud569 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00\uacfc \ud568\uaed8 \uc0ac\uc6a9\ub418\ub294 \uadc0\uae08\uc18d \uc5f4\uc804\ub300 \uc720\ud615<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc720\ud615<\/th>\n<th>\uad6c\uc131<\/th>\n<th>\ubc94\uc704 (\u00b0C)<\/th>\n<th>\uc815\ud655\ub3c4 (IEC 1\uae09)<\/th>\n<th>\uc8fc\uc694 \ud55c\uacc4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>S<\/td>\n<td>Pt-10%Rh \/ Pt<\/td>\n<td>0 \u2013 1600<\/td>\n<td>\u00b11.0\u00b0C \ub610\ub294 \u00b10.25%<\/td>\n<td>Rh \uc774\ub3d9 &gt; 1300\u00b0C<\/td>\n<\/tr>\n<tr>\n<td>R<\/td>\n<td>Pt-13%Rh \/ Pt<\/td>\n<td>0 \u2013 1600<\/td>\n<td>\u00b11.0\u00b0C \ub610\ub294 \u00b10.25%<\/td>\n<td>Rh \uc774\ub3d9 &gt; 1300\u00b0C<\/td>\n<\/tr>\n<tr>\n<td>B<\/td>\n<td>Pt-30%Rh \/ Pt-6%Rh<\/td>\n<td>600 \u2013 1820<\/td>\n<td>\u00b10.25% (&gt; 1050\u00b0C)<\/td>\n<td>\uc800\ucd9c\ub825 &lt; 600\u00b0C<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Closed-End-Quartz-Thermocouple-Tubes-for-Thermal-Stability-Verification-in-Process-Furnaces.webp\" alt=\"\uacf5\uc815 \uc6a9\uad11\ub85c\uc758 \uc5f4\uc801 \uc548\uc815\uc131 \uac80\uc99d\uc744 \uc704\ud55c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\" title=\"\uacf5\uc815 \uc6a9\uad11\ub85c\uc758 \uc5f4\uc801 \uc548\uc815\uc131 \uac80\uc99d\uc744 \uc704\ud55c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\" \/><\/p>\n<h2>\uacf5\uc815 \uc870\uac74 \ud558\uc5d0\uc11c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \uc131\ub2a5 \ub9e4\uac1c\ubcc0\uc218<\/h2>\n<p>\ubc18\ub3c4\uccb4 \ub4f1\uae09\uc758 \uc6a9\ub3c4\uc5d0\uc11c\ub294 \uc7ac\ub8cc\uc758 \ud2b9\uc131\ub9cc\uc73c\ub85c\ub294 \ubcf4\ud638 \ud29c\ube0c\ub97c \uc120\uc815\ud558\uae30\uc5d0 \ucda9\ubd84\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc815\ub7c9\ud654\ub41c \uc131\ub2a5 \ub9e4\uac1c\ubcc0\uc218, \ud2b9\ud788 \ucd5c\ub300 \uc0ac\uc6a9 \uc628\ub3c4, \uc5f4\ucda9\uaca9 \ub0b4\uc131, \uae30\uacc4\uc801 \ud558\uc911 \uc800\ud56d\uc131 \ubc0f \uae30\ubc00\uc131\uc744 \uaddc\uc815\ud558\ub294 \ub9e4\uac1c\ubcc0\uc218\ub4e4\uc740 \ud574\ub2f9 \ud29c\ube0c\uac00 \uc9c1\uba74\ud558\uac8c \ub420 \uad6c\uccb4\uc801\uc778 \uacf5\uc815 \uc870\uac74\uc5d0 \ube44\ucd94\uc5b4 \ud3c9\uac00\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc735\ud569 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc758 \ucd5c\ub300 \uc0ac\uc6a9 \uc628\ub3c4 \ud55c\uacc4<\/h3>\n<p>\uc735\ud569 \uc2e4\ub9ac\uce74 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \ucd5c\ub300 \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4\ub294 \uace0\uc815\ub41c \ub2e8\uc77c \uac12\uc774 \uc544\ub2c8\uba70, \ud29c\ube0c\uc758 \ud615\ud0dc, \ub300\uae30 \uc870\uac74, \ubd80\ud558 \ubc0f \ub178\ucd9c \uc2dc\uac04\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4.<\/p>\n<p><strong>\ud22c\uba85\ud55c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 \uc57d 1100\u00b0C\uc758 \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4 \ub4f1\uae09\uc744 \uac16\uc2b5\ub2c8\ub2e4.<\/strong> \uc0b0\ud654\uc131 \ub610\ub294 \ubd88\ud65c\uc131 \ubd84\uc704\uae30\uc5d0\uc11c. \ub2e8\uae30\uac04 \ub3d9\uc548 <strong>1250\u00b0C\uc758 \uc628\ub3c4\ub294 1\uc2dc\uac04 \ubbf8\ub9cc\uc758 \uae30\uac04 \ub3d9\uc548 \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong>, \ub2e8, \ud29c\ube0c\uc5d0 \uae30\uacc4\uc801 \ud558\uc911\uc774 \uac00\ud574\uc9c0\uc9c0 \uc54a\uace0 \ub300\uae30 \uc870\uac74\uc774 \ud658\uc6d0 \uc0c1\ud0dc\uac00 \uc544\ub2cc \uacbd\uc6b0\ub97c \uc804\uc81c\ub85c \ud569\ub2c8\ub2e4. \uc57d <strong>1050\u20131100\u00b0C, \ube44\uc720\ud654 \ud604\uc0c1\uc774 \uc2dc\uc791\ub428<\/strong> \u2014 \ubb34\uc815\ud615 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uacb0\uc815\uc9c8 \ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\ub85c \uc810\uc9c4\uc801\uc73c\ub85c \ubcc0\ud658\ub418\ub294 \uacfc\uc815\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc0c1\ubcc0\ud0dc\ub85c \uc778\ud574 \ud45c\uba74 \ubd88\ud22c\uba85\ub3c4\uac00 \ubc1c\uc0dd\ud558\uace0, \ubd80\ud53c\uac00 \ubcc0\ud558\uba70, \uae30\uacc4\uc801 \uac15\ub3c4\uac00 \uc800\ud558\ub418\uc5b4 \uacb0\uad6d \ud29c\ube0c\uc758 \uc218\uba85\uc744 \ub2e8\ucd95\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<p>\ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc758 \uc5f0\uc18d \uc0ac\uc6a9 \ud55c\uacc4\ub294 \uc57d <strong>1000\u20131050\u00b0C<\/strong>, \uc774\ub294 \ub354 \ub0ae\uc740 \uc628\ub3c4\uc5d0\uc11c \ube44\uacb0\uc815\ud654\ub97c \ucd09\uc9c4\ud558\ub294 \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 \uc57d\uac04 \ub354 \ub192\uc74c\uc744 \ubc18\uc601\ud569\ub2c8\ub2e4. \uacf5\uc815 \uc628\ub3c4\uac00 \uc5c4\uaca9\ud558\uac8c \uc81c\uc5b4\ub418\uba70 1100\u00b0C\ub97c \uac70\uc758 \ucd08\uacfc\ud558\uc9c0 \uc54a\ub294 \ubc18\ub3c4\uccb4 \ud655\uc0b0\ub85c\uc5d0\uc11c\ub294, <strong>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 \ucda9\ubd84\ud55c \uc5ec\uc720\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4<\/strong> \uacf5\uc815 \ucd5c\uace0 \uc628\ub3c4\ubcf4\ub2e4 \uc57d 50~100\u00b0C \ub192\uc740 \uc218\uc900\uc774\uba70, \uc774\ub294 \uc815\uc0c1\uc801\uc778 \uc791\ub3d9 \uc8fc\uae30\uc5d0\uc11c \uc7a5\uae30\uac04\uc758 \uc218\uba85\uc744 \uc720\uc9c0\ud558\uae30\uc5d0 \ucda9\ubd84\ud569\ub2c8\ub2e4.<\/p>\n<h4>\uc735\ud569 \uc2e4\ub9ac\uce74 \ud29c\ube0c \uac01 \uc720\ud615\ubcc4 \ucd5c\ub300 \uc0ac\uc6a9 \uc628\ub3c4<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ud29c\ube0c \uc720\ud615<\/th>\n<th>\uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4 (\u00b0C)<\/th>\n<th>\ub2e8\uae30 \ud53c\ud06c(\u00b0C)<\/th>\n<th>\ub370\ube44\ud2b8\ub9ac\ud53c\ucf00\uc774\uc158 \uc2dc\uc791(\u00b0C)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ud22c\uba85\ud55c \ud569\uc131 \uc18c\uc7ac<\/td>\n<td>1100<\/td>\n<td>1250<\/td>\n<td>1050 \u2013 1100<\/td>\n<\/tr>\n<tr>\n<td>\ubd88\ud22c\uba85 \ud569\uc131 \uc18c\uc7ac<\/td>\n<td>1050<\/td>\n<td>1200<\/td>\n<td>1000 \u2013 1050<\/td>\n<\/tr>\n<tr>\n<td>\ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74<\/td>\n<td>1000 \u2013 1050<\/td>\n<td>1150<\/td>\n<td>950 \u2013 1000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uc5f4\ucda9\uaca9 \uc800\ud56d\uc131 \ubc0f \uc8fc\uae30\uc801 \uac00\uc5f4 \uac70\ub3d9<\/h3>\n<p>\uc735\ud569 \uc2e4\ub9ac\uce74\uc758 \ucd08\uc800 \uc5f4\ud33d\ucc3d\uacc4\uc218(CTE)\ub294 \uacbd\uc7c1\ud558\ub294 \uc5b4\ub5a4 \uc0b0\ud654\ubb3c \uc138\ub77c\ubbf9\ub3c4 \ub530\ub77c\uc62c \uc218 \uc5c6\ub294 \ub0b4\uc5f4\ucda9\uaca9\uc131\uc73c\ub85c \uc9c1\uc811 \uc774\uc5b4\uc9c0\uba70, \uc774 \ud2b9\uc131\uc740 \ud29c\ube0c\uac00 \uc218\uba85 \uae30\uac04 \ub3d9\uc548 \uc218\ubc31 \ubc88\uc758 \uc5f4 \uc0ac\uc774\ud074\uc744 \uacaa\ub294 \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c\uc5d0\uc11c \ud2b9\ud788 \uc911\uc694\ud55c \uc758\ubbf8\ub97c \uac16\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\uc735\ud569 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00\uc740 1000\u00b0C\uc5d0\uc11c \uc8fc\ubcc0 \uc628\ub3c4\uae4c\uc9c0\uc758 \uc9c1\uc811\uc801\uc778 \uae09\ub0c9\uc744 \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong> \ud30c\ub2e8 \uc5c6\uc774 \u2014 \uc774\ub294 \ub3d9\uc77c\ud55c \ubcbd \ub450\uaed8\ub97c \uac00\uc9c4 \uc54c\ub8e8\ubbf8\ub098 \ub610\ub294 \uba40\ub77c\uc774\ud2b8 \ud29c\ube0c\ub77c\uba74 \uce58\uba85\uc801\uc778 \ud30c\uc190\uc744 \ucd08\ub798\ud588\uc744 \uc870\uac74\uc774\ub2e4. \uc774\ub7ec\ud55c \uac70\ub3d9\uc740 \ud30c\ub2e8 \ud655\ub960\uc774 50%\ub97c \ucd08\uacfc\ud558\ub294 \uc784\uacc4 \uc628\ub3c4 \ucc28(\u0394T_c)\ub85c \uc815\ub7c9\ud654\ub418\uba70, \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0, <strong>\u0394T_c\uac00 1000\u00b0C\ub97c \ucd08\uacfc\ud55c\ub2e4<\/strong>, \uc57d <strong>\uc54c\ub8e8\ubbf8\ub098(99.5%)\uc758 \uacbd\uc6b0 200\u00b0C<\/strong> \uadf8\ub9ac\uace0 <strong>\uba40\ub77c\uc774\ud2b8\uc758 \uacbd\uc6b0 350\u00b0C<\/strong>. \uc608\uc5f4\ub41c \uc6a9\uad11\ub85c\uc5d0 \ub0c9\uac01\ub41c \ud29c\ube0c \uc5b4\uc148\ube14\ub9ac\ub97c \uc0bd\uc785\ud558\ub294 \uc6a9\uad11\ub85c \uc801\uc7ac \uc791\uc5c5(\ubc30\uce58 \ud655\uc0b0 \uc7a5\ube44\uc5d0\uc11c \uc77c\uc0c1\uc801\uc73c\ub85c \uc218\ud589\ub418\ub294 \uc808\ucc28)\uc5d0\uc11c, \uc774\ub7ec\ud55c \uc5f4\ucda9\uaca9 \ub0b4\uc131 \ub355\ubd84\uc5d0 \uc138\ub77c\ubbf9 \ub300\uccb4\uc7ac\ub97c \uc0ac\uc6a9\ud560 \ub54c \ubc1c\uc0dd\ud558\ub294 \ube44\uacc4\ud68d\uc801 \uacf5\uc815 \uc911\ub2e8\uc758 \uac00\uc7a5 \ud754\ud55c \uc6d0\uc778 \uc911 \ud558\ub098\uc778 \ud29c\ube0c \ud30c\ub2e8 \uace0\uc7a5 \uc591\uc0c1\uc774 \uc81c\uac70\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc7a5\uae30\uac04\uc5d0 \uac78\uce5c \uc8fc\uae30\uc801 \uc6b4\uc6a9 \uacfc\uc815\uc5d0\uc11c, <strong>\uc735\ud569 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 \uce58\uc218 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4<\/strong> \ub2e4\uacb0\uc815 \uc138\ub77c\ubbf9\uc2a4\uc758 \uc8fc\uae30\uc801 \uc218\uba85\uc744 \uc81c\ud55c\ud558\ub294 \uc810\uc9c4\uc801\uc778 \ubbf8\uc138\uade0\uc5f4\uc774\ub098 \uc785\uacc4 \uc774\ub3d9 \ud604\uc0c1 \uc5c6\uc774 \uc218\ucc9c \ud68c\uc758 \uac00\uc5f4-\ub0c9\uac01 \uc8fc\uae30\ub97c \uacac\ub38c\ub0c5\ub2c8\ub2e4. \uc5d0\uc11c \uc2e4\uc2dc\ud55c \uac00\uc18d \uc218\uba85 \uc2dc\ud5d8 \uacb0\uacfc, <strong>25\u00b0C\uc5d0\uc11c 1000\u00b0C \uc0ac\uc774\uc5d0\uc11c \ud558\ub8e8 50\ud68c \uc0ac\uc774\ud074<\/strong> ~\uc744 \ub6f0\uc5b4\ub118\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc758 \ubb34\uacb0\uc131\uc744 \uc785\uc99d\ud588\uc2b5\ub2c8\ub2e4. <strong>2,000\ud68c \uc0ac\uc774\ud074 \ud6c4\uc5d0\ub3c4 \uce21\uc815 \uac00\ub2a5\ud55c \uce58\uc218 \ubcc0\ud654\ub098 \uad6c\uc870\uc801 \uc5f4\ud654\uac00 \ubc1c\uc0dd\ud558\uc9c0 \uc54a\uc74c<\/strong> \u2014 \uc774\ub294 \uc77c\ubc18\uc801\uc778 \ubc18\ub3c4\uccb4 \uc18c\uc131\ub85c \uac00\ub3d9 \uc77c\uc815 \ud558\uc5d0\uc11c \uc218\ub144\uc5d0 \uac78\uce5c \uc0ac\uc6a9 \uc218\uba85\uc744 \ub4b7\ubc1b\uce68\ud558\ub294 \uc218\uce58\uc785\ub2c8\ub2e4.<\/p>\n<h4>\uc5f4\ucda9\uaca9 \uc800\ud56d\uc131 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>\uc784\uacc4 \u0394T_c (\u00b0C)<\/th>\n<th>CTE(\u00d710-\u2076\/\u00b0C)<\/th>\n<th>\uc0ac\uc774\ud074 \uc218\uba85 (25\u20131000\u00b0C \uc0ac\uc774\ud074)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74<\/td>\n<td>&gt; 1000<\/td>\n<td>0.55<\/td>\n<td>&gt; 2,000<\/td>\n<\/tr>\n<tr>\n<td>\uc54c\ub8e8\ubbf8\ub098 (99.5%)<\/td>\n<td>~200<\/td>\n<td>7.2<\/td>\n<td>200 \u2013 500<\/td>\n<\/tr>\n<tr>\n<td>\uba40\ub77c\uc774\ud2b8<\/td>\n<td>~350<\/td>\n<td>5.0<\/td>\n<td>300 \u2013 700<\/td>\n<\/tr>\n<tr>\n<td>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc<\/td>\n<td>~400<\/td>\n<td>4.0<\/td>\n<td>500 \u2013 1000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uc6b4\ud589 \ud558\uc911 \ud558\uc5d0\uc11c\uc758 \uae30\uacc4\uc801 \uac15\ub3c4 \ubc0f \ub0b4\uc555\uc131<\/h3>\n<p>\uc735\ud569 \uc2e4\ub9ac\uce74\ub294 \ub6f0\uc5b4\ub09c \uc5f4\uc801 \ubc0f \ud654\ud559\uc801 \uc131\ub2a5\uc744 \uac16\ucd94\uace0 \uc788\uc74c\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0, \uc54c\ub8e8\ubbf8\ub098\ub098 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc5d0 \ube44\ud574 \uace0\uc720\ud55c \uae30\uacc4\uc801 \uac15\ub3c4\uac00 \ub0ae\uc73c\ubbc0\ub85c, \uc124\uce58 \uc124\uacc4 \ubc0f \ud29c\ube0c \uce58\uc218 \uc120\uc815 \uc2dc \uc774 \uc810\uc744 \ubc18\ub4dc\uc2dc \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\ud22c\uba85\ud55c \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ud30c\ub2e8 \ubaa8\ub4c8\ub7ec\uc2a4(MOR)\ub294 \uc57d 50~65 MPa\uc774\ub2e4.<\/strong> \uc2e4\uc628\uc5d0\uc11c, \uc57d <strong>1000\u00b0C\uc5d0\uc11c 40\u201355 MPa<\/strong> \u2014 \ub3d9\ub4f1\ud55c \uc870\uac74\uc5d0\uc11c \uc54c\ub8e8\ubbf8\ub098(99.7%)\uc758 MOR\uc758 \uc57d \uc808\ubc18 \uc218\uc900\uc785\ub2c8\ub2e4. \uc774\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uac00 \ub2e4\uacb0\uc815 \uc138\ub77c\ubbf9 \ud29c\ube0c\uc5d0 \ube44\ud574 \uc810\ud558\uc911, \ucde8\uae09 \uc2dc \ucda9\uaca9 \ub610\ub294 \uc124\uce58 \uc2dc \uc751\ub825\uc73c\ub85c \uc778\ud55c \ud30c\uc190\uc5d0 \ub354 \ucde8\uc57d\ud568\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. <strong>\ubcbd \ub450\uaed8 \uc120\uc815\uc740 \uac00\uc7a5 \uc911\uc694\ud55c \uacf5\ud559\uc801 \uc218\ub2e8\uc785\ub2c8\ub2e4<\/strong> \uae30\uacc4\uc801 \uc704\ud5d8\uc744 \uad00\ub9ac\ud558\uae30 \uc704\ud574: \ubcbd \ub450\uaed8\ub97c 1.5 mm\uc5d0\uc11c 2.5 mm\ub85c \ub298\ub9ac\uba74 \ud29c\ube0c\uc758 \ub2e8\uba74\uc801\uc774 \uc57d 2\ubc30\ub85c \uc99d\uac00\ud55c\ub2e4. <a href=\"https:\/\/en.wikipedia.org\/wiki\/Moment_of_inertia\">\uad00\uc131 \ubaa8\uba58\ud2b8<\/a><sup id=\"fnref1:2\"><a href=\"#fn:2\" class=\"footnote-ref\">2<\/a><\/sup>, \uc774\ub97c \ud1b5\ud574 \uc218\ud3c9\ud615 \uc6a9\uad11\ub85c \uc124\uce58 \uc2dc \uc790\uc911\uc73c\ub85c \uc778\ud55c \ubcc0\ud615\uc5d0 \ub300\ud55c \uc800\ud56d\uc131\uc744 \ud06c\uac8c \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<p>900\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc7a5\uae30\uac04 \uc218\ud3c9\uc73c\ub85c \uc124\uce58\ud560 \uacbd\uc6b0 \ub2e4\uc74c\uacfc \uac19\uc740 \uc704\ud5d8\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\uc810\uc131 \ud06c\ub9ac\ud504 (\ucc98\uc9d0)<\/strong> \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c \ub0b4\uc5d0\uc11c. 600 mm\ubcf4\ub2e4 \uae34 \ud29c\ube0c\ub97c \uc218\ud3c9\uc73c\ub85c \uc124\uce58\ud558\uace0 \uc628\ub3c4\uac00 1100\u00b0C\uc5d0 \uadfc\uc811\ud558\ub294 \uacbd\uc6b0, \uc218\uac1c\uc6d4 \uc774\uc0c1 \uc0ac\uc6a9 \uae30\uac04 \ub3d9\uc548 \ucc98\uc9d0 \ud604\uc0c1\uc774 \uce21\uc815 \uac00\ub2a5\ud55c \uc218\uc900\uc5d0 \uc774\ub97c \uc218 \uc788\ub2e4. <strong>\ud29c\ube0c\uc758 \uc804\uccb4 \uae38\uc774\uc5d0 \uac78\uccd0 \uc5ec\ub7ec \uc9c0\uc810\uc5d0\uc11c \uc9c0\uc9c0\ud558\uae30<\/strong> \u2014 \ub610\ub294 \uc678\uacbd\uc744 \uc57d\uac04 \ub354 \ud06c\uac8c \ud558\uc5ec \ub2e8\uba74 \uacc4\uc218\ub97c \ub192\uc774\uba74 \u2014 \uc774\ub7ec\ud55c \ud604\uc0c1\uc744 \uc644\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc218\uc9c1\ud615 \uc6a9\uad11\ub85c \uad6c\uc870\uc758 \uacbd\uc6b0, \uc911\ub825 \ud558\uc911\uc740 \uad7d\ud798 \ud558\uc911\uc774 \uc544\ub2cc \ucd95\ubc29\ud5a5 \ud558\uc911\uc774\ubbc0\ub85c \ud06c\ub9ac\ud504 \ubc1c\uc0dd \uc704\ud5d8\uc774 \uc0c1\ub2f9\ud788 \uc904\uc5b4\ub4ed\ub2c8\ub2e4.<\/p>\n<h4>\uc735\ud569 \uc2e4\ub9ac\uce74\uc640 \uacbd\uc7c1 \uc18c\uc7ac\uc758 \uae30\uacc4\uc801 \ud2b9\uc131 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc18d\uc131<\/th>\n<th>\uc6a9\uc735 \uc2e4\ub9ac\uce74<\/th>\n<th>\uc54c\ub8e8\ubbf8\ub098 (99.7%)<\/th>\n<th>SiC<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc2e4\uc628\uc5d0\uc11c\uc758 \ud30c\ub2e8 \ubaa8\ub4c8\ub7ec\uc2a4 (MPa)<\/td>\n<td>50 \u2013 65<\/td>\n<td>300 \u2013 380<\/td>\n<td>400 - 500<\/td>\n<\/tr>\n<tr>\n<td>1000\u00b0C\uc5d0\uc11c\uc758 \ud30c\ub2e8 \ud0c4\uc131\uacc4\uc218 (MPa)<\/td>\n<td>40 \u2013 55<\/td>\n<td>250 \u2013 320<\/td>\n<td>350 \u2013 450<\/td>\n<\/tr>\n<tr>\n<td>\ud0c4\uc131 \uacc4\uc218(GPa)<\/td>\n<td>73<\/td>\n<td>370<\/td>\n<td>410<\/td>\n<\/tr>\n<tr>\n<td>\ube44\ucee4\uc2a4 \uacbd\ub3c4 (GPa)<\/td>\n<td>9<\/td>\n<td>15<\/td>\n<td>25<\/td>\n<\/tr>\n<tr>\n<td>\ubc00\ub3c4(g\/cm\u00b3)<\/td>\n<td>2.20<\/td>\n<td>3.90<\/td>\n<td>3.10<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uace0\uc628\uc5d0\uc11c\uc758 \uac00\uc2a4 \ud22c\uacfc\uc131 \ubc0f \ubc00\ud3d0\uc131<\/h3>\n<p>\uc5f4\uc804\ub300 \ubcf4\ud638\uad00\uc758 \uac00\uc2a4 \ucc28\ub2e8 \uae30\ub2a5\uc740 \uc7ac\ub8cc \uc120\uc815 \ub17c\uc758\uc5d0\uc11c \uc885\uc885 \uac04\uacfc\ub418\uace4 \ud558\uc9c0\ub9cc, \uc774\ub294 \uc6b4\uc601\uc0c1 \ub9e4\uc6b0 \uc911\uc694\ud55c \uc694\uc18c\uc785\ub2c8\ub2e4. \uacf5\uc815 \uac00\uc2a4\uac00 \uc720\uc785\ub420 \uc218 \uc788\ub294 \ubcf4\ud638\uad00\uc740 \uc5f4\uc804\ub300 \uc120\uc744 \ud654\ud559\uc801 \ubd80\uc2dd\uc5d0 \ub178\ucd9c\uc2dc\ud0a4\uace0 \uce21\uc815 \uc2dc\uc2a4\ud15c\uc758 \ubb34\uacb0\uc131\uc744 \ud6fc\uc190\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\uc735\ud569 \uc2e4\ub9ac\uce74\ub294 1000\u00b0C \ubbf8\ub9cc\uc758 \uc628\ub3c4\uc5d0\uc11c \uadf9\ud788 \ub0ae\uc740 \uae30\uccb4 \ud22c\uacfc\uc131\uc744 \ub098\ud0c0\ub0b8\ub2e4.<\/strong>, \ud5ec\ub968 \ud22c\uacfc\ub3c4\uac00 \uc57d <strong>10\u207b\u00b9\u2070 cm\u00b3\u00b7cm\/(cm\u00b2\u00b7s\u00b7cmHg)<\/strong> \uc2e4\uc628\uc5d0\uc11c \u2014 \uc774\ub294 \uc77c\ubc18\uc801\uc778 \uc0b0\ud654\ubb3c \uc720\ub9ac \uc911 \uac00\uc7a5 \ub0ae\uc740 \uc218\uce58\uc785\ub2c8\ub2e4. O\u2082\ub098 N\u2082\uc640 \uac19\uc740 \ubb34\uac70\uc6b4 \uc774\uc6d0\uc790 \uac00\uc2a4\uc758 \uacbd\uc6b0 \ud22c\uacfc\uc728\uc774 \uba87 \ucc28\uc218\ub098 \ub354 \ub0ae\uae30 \ub54c\ubb38\uc5d0, \uc801\uc808\ud558\uac8c \uc81c\uc870\ub41c \ud3d0\uc1c4\ud615 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 \ubc18\ub3c4\uccb4 \uacf5\uc815 \uc870\uac74 \ud558\uc5d0\uc11c \uc0ac\uc2e4\uc0c1 \ubc00\ud3d0 \uc0c1\ud0dc\ub97c \uc720\uc9c0\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubc00\ud3d0\uc131\uc740 \ub2e4\uc74c \uc694\uc778\uc5d0 \ub2ec\ub824 \uc788\uc2b5\ub2c8\ub2e4. <strong>\ud3d0\uc1c4 \ub2e8\ubd80\uc5d0 \ub0b4\ubd80 \uae30\ud3ec, \ud45c\uba74 \uade0\uc5f4 \ubc0f \uc6a9\ucc29 \uacb0\ud568\uc774 \uc5c6\uc74c<\/strong> \u2014 \uc774 \ubaa8\ub4e0 \uac83\uc740 \uacf5\uae09\uc5c5\uccb4 \uac80\uc0ac \uc808\ucc28\uc5d0 \ub530\ub77c \ubc18\ub4dc\uc2dc \uac80\uc99d\ub418\uc5b4\uc57c \ud558\ub294 \ud488\uc9c8 \ud2b9\uc131\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc8fc\ubaa9\ud560 \ub9cc\ud55c \uc608\uc678\ub294 <strong>900\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc218\uc18c<\/strong>. H\u2082\ub294 \uc5f4\uc18d\ub3c4\uac00 \ub192\uc740 \uc18c\ubd84\uc790\ub85c, 900\u00b0C \uc774\uc0c1\uc5d0\uc11c\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \ud1b5\ud55c \ud22c\uacfc\uc131\uc774 \ud604\uc800\ud788 \uc99d\uac00\ud558\uc5ec, \uc7a5\uc2dc\uac04\uc758 \uacf5\uc815 \uc9c4\ud589 \ub3d9\uc548 \ud29c\ube0c \ub0b4\ubd80\ub85c \uce21\uc815 \uac00\ub2a5\ud55c \uc218\uc900\uc758 \uc218\uc18c \uc720\uc785\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\ub294 \uc218\uc900\uc5d0 \uc774\ub985\ub2c8\ub2e4. H\u2082 \ub18d\ub3c4\uac00 \uc57d <strong>900\u00b0C\ub97c \ucd08\uacfc\ud558\ub294 \uc628\ub3c4\uc5d0\uc11c \ubd80\ud53c \uae30\uc900 5%<\/strong>, \ud29c\ube0c \ubcbd\uc744 \ud1b5\ud55c \uc218\uc18c \ud655\uc0b0 \uc18d\ub3c4\ub294 \uc218 \uc2dc\uac04\uc5d0 \uac78\uccd0 \uc5f4\uc804\ub300 \uc811\uc810 \uc8fc\ubcc0\uc758 \uad6d\uc18c \ub300\uae30\ub97c \ubcc0\ud654\uc2dc\ud0a4\uae30\uc5d0 \ucda9\ubd84\ud560 \uc218 \uc788\ub2e4. <strong>\ubcbd \ub450\uaed8 \uc99d\uac00(\u2265 2.0 mm) \uc9c0\uc815 \ubc0f \uc5f4\uc804\ub300 \uad50\uc815 \ud3b8\ucc28 \ubaa8\ub2c8\ud130\ub9c1<\/strong> \uc774 \ud2b9\uc815 \uc81c\uc57d \uc0ac\ud56d\uc5d0 \ub300\ud55c \ud45c\uc900\uc801\uc778 \uacf5\ud559\uc801 \ub300\uc751 \ubc29\uc548\uc740 \uc77c\uc815\ud55c \uac04\uaca9\uc73c\ub85c \uc870\uce58\ub97c \ucde8\ud558\ub294 \uac83\uc785\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Semiconductor-Grade-Quartz-Thermocouple-Tubes-for-High-Purity-Wafer-Processing-Applications.webp\" alt=\"\uace0\uc21c\ub3c4 \uc6e8\uc774\ud37c \uacf5\uc815\uc6a9 \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\" title=\"\uace0\uc21c\ub3c4 \uc6e8\uc774\ud37c \uacf5\uc815\uc6a9 \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\" \/><\/p>\n<h2>\ubc18\ub3c4\uccb4 \uacf5\uc815 \uc804\ubc18\uc5d0 \uac78\uce5c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \uc751\uc6a9 \ubd84\uc57c\ubcc4 \uc0ac\uc6a9<\/h2>\n<p>\ud604\ub300\uc2dd \ubc18\ub3c4\uccb4 \ud339\uc758 \uc0dd\uc0b0 \uacf5\uc815 \uc804\ubc18\uc5d0 \uac78\uccd0, \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub294 \uc5ec\ub7ec \uacf5\uc815 \ub178\ub4dc\uc5d0\uc11c \uc0ac\uc6a9\ub418\uba70, \uac01 \ub178\ub4dc\ub9c8\ub2e4 \ud574\ub2f9 \uacf5\uc815\uc758 \ud2b9\uc815 \uc5f4\uc801\u00b7\ud654\ud559\uc801 \uc870\uac74\uc5d0 \ub530\ub77c \uc11c\ub85c \ub2e4\ub978 \uae30\ub2a5\uc801 \uc694\uad6c \uc0ac\ud56d\uc774 \uc801\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\ud655\uc0b0\ub85c<\/strong> \uc774\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacfc\uc815\uc5d0\uc11c \ubcf4\ud638 \ud29c\ube0c\uac00 \uac00\uc7a5 \ub9ce\uc774 \uc0ac\uc6a9\ub418\ub294 \ubd84\uc57c\uc785\ub2c8\ub2e4. \uc218\ud3c9 \ubc0f \uc218\uc9c1 \ubc30\uce58\uc2dd \ud655\uc0b0 \uc7a5\ube44 \ubaa8\ub450\uc5d0\uc11c, \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub294 \uac01 \uc81c\uc5b4 \ubc0f \ubaa8\ub2c8\ud130\ub9c1 \uad6c\uc5ed\uc5d0 \uc124\uce58\ub418\uba70, \uc77c\ubc18\uc801\uc73c\ub85c \uc6a9\uad11\ub85c \uae38\uc774\ub97c \ub530\ub77c 3~5\uacf3\uc5d0 \ubc30\uce58\ub429\ub2c8\ub2e4. O\u2082\/N\u2082 \ub610\ub294 N\u2082\/\ub3c4\ud310\ud2b8 \ud63c\ud569 \ubd84\uc704\uae30\uc5d0\uc11c 900\u00b0C~1100\u00b0C\uc758 \uc791\ub3d9 \uc628\ub3c4\uc5d0\uc11c, <strong>SiO\u2082 \uc21c\ub3c4 \u2265 99.99% \ub4f1\uae09\uc758 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c<\/strong> \uc774\uac83\uc774 \ud45c\uc900\uc785\ub2c8\ub2e4. \uc218\ud3c9\uc2dd \uc6a9\uad11\ub85c\uc758 \ud29c\ube0c \uae38\uc774\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 800mm\uc5d0\uc11c 1500mm \uc0ac\uc774\uc774\uba70, \ud2b9\ud788 \uc9c0\uc9c0 \uc7a5\uce58\uac00 \uc81c\ud55c\uc801\uc778 \uad6c\ud615 \uc6a9\uad11\ub85c \uc124\uacc4\uc758 \uacbd\uc6b0 \ucc98\uc9d0 \uc800\ud56d\uc131\uc5d0 \uc138\uc2ec\ud55c \uc8fc\uc758\ub97c \uae30\uc6b8\uc5ec\uc57c \ud569\ub2c8\ub2e4. \ub192\uc740 \uc5f4 \uc0ac\uc774\ud074 \ube48\ub3c4(\ud558\ub8e8\uc5d0 \uc5ec\ub7ec \ubc88\uc758 \uc6e8\uc774\ud37c \ubc30\uce58), HCl \uc138\uc815 \ub178\ucd9c, \uadf8\ub9ac\uace0 \uc5c4\uaca9\ud55c \uc624\uc5fc \uae30\uc900\uc774 \uacb0\ud569\ub418\uc5b4 \uc774 \uc751\uc6a9 \ubd84\uc57c\ub294 \ubcf4\ud638 \ud29c\ube0c\uc758 \uc131\ub2a5\uc744 \uac00\uc7a5 \ud3ec\uad04\uc801\uc73c\ub85c \uac80\uc99d\ud558\ub294 \uc2dc\ud5d8\uc774 \ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc0b0\ud654\ub85c<\/strong> \uc2b5\ud558\uac70\ub098 \uac74\uc870\ud55c \uc0b0\uc18c(O\u2082) \ubd84\uc704\uae30\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uacbd\uc6b0, \ubaa8\ub4e0 \uc6a9\uad11\ub85c \uad6c\uc131 \uc694\uc18c\uc5d0 \ub300\ud574 \ud654\ud559\uc801 \ubd80\uc2dd\uc131\uc774 \uac15\ud55c \ud658\uacbd\uc774 \uc870\uc131\ub418\uc9c0\ub9cc, \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uacf5\uc815 \uc628\ub3c4\uc5d0\uc11c \uc21c\uc218\ud55c \uc0b0\ud654 \uc870\uac74 \ud558\uc5d0\uc11c\ub3c4 \ud0c1\uc6d4\ud55c \uc131\ub2a5\uc744 \ubc1c\ud718\ud569\ub2c8\ub2e4. <strong>\ubc00\ud3d0\ud615 \ud22c\uba85 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c<\/strong> \uc774\ub294 \uc0b0\ud654\ub85c\uc6a9 \uc5f4\uc804\ub300 \uc5b4\uc148\ube14\ub9ac\uc5d0 \ub300\ud55c \ubc94\uc6a9 \uc0ac\uc591\uc73c\ub85c, \uc721\uc548 \uac80\uc0ac\ub97c \uc704\ud55c \uc811\uadfc\uc131\uc744 \ud655\ubcf4\ud560 \ubfd0\ub9cc \uc544\ub2c8\ub77c \uc99d\uae30\uac00 \ud3ec\ud568\ub41c \ud658\uacbd\uacfc \uc644\ubcbd\ud55c \ud654\ud559\uc801 \ud638\ud658\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>LPCVD \uc6a9\uad11\ub85c<\/strong> \ub610 \ub2e4\ub978 \ubcc0\uc218\ub97c \ub3c4\uc785\ud574 \ubcf4\uaca0\uc2b5\ub2c8\ub2e4. \ubc14\ub85c 0.1~2.0 Torr\uc758 \uc800\uc555 \uc870\uac74\uc5d0\uc11c \ubc18\uc751\uc131 \uc804\uad6c\uccb4 \uac00\uc2a4(SiH\u2084, NH\u2083, Si\u2082H\u2086, WF\u2086)\ub97c \uc0ac\uc6a9\ud558\ub294 \uac83\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc555\ub825 \uc870\uac74\uc5d0\uc11c\ub294 \uae30\uc0c1 \ud655\uc0b0 \uc18d\ub3c4\uac00 \ub192\uc544\uc9c0\ubbc0\ub85c, \ud29c\ube0c\uc758 \uae30\ubc00\uc131\uc774 \ub354\uc6b1 \uc911\uc694\ud574\uc9d1\ub2c8\ub2e4. <strong>\ubcbd \ub450\uaed8\uac00 1.5 mm \uc774\uc0c1\uc778 \ud3d0\uc1c4\ud615 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c<\/strong> \uc804\uad6c\uccb4 \uac00\uc2a4\uc758 \uc720\uc785\uc744 \ucd5c\uc18c\ud654\ud558\uae30 \uc704\ud574 \uc9c0\uc815\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. LPCVD \ud658\uacbd\uc5d0\uc11c\ub294 \ud29c\ube0c \uc678\ubd80 \ud45c\uba74\uc5d0 \uce68\ucc29\ubb3c\uc774 \uc0dd\uae30\ub294 \uac83\uc774 \uc608\uc0c1\ub418\ub294 \ud604\uc0c1\uc785\ub2c8\ub2e4. \ud76c\uc11d\ub41c HF\uac00 \ud3ec\ud568\ub418\uc9c0 \uc54a\uc740 \uc5d0\uce6d\uc81c(\uc608: HNO\u2083\/H\u2082O\u2082 \uc6a9\uc561)\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc8fc\uae30\uc801\uc73c\ub85c \uc138\ucc99\ud558\uba74, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcf8\uccb4\ub97c \uc190\uc0c1\uc2dc\ud0a4\uc9c0 \uc54a\uc73c\uba74\uc11c \ud29c\ube0c\uc758 \ud22c\uba85\ub3c4\ub97c \ud68c\ubcf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc5b4\ub2d0\ub9c1\ub85c<\/strong> \u2014 \uae30\uc874\uc758 \ubc30\uce58\uc2dd \uc6a9\uad11\ub85c\uc640 \ub7a8 \uac00\uc5f4 \ubc29\uc2dd\uc744 \uc0ac\uc6a9\ud558\ub294 \uae09\uc18d \uc5f4\ucc98\ub9ac(RTA) \uc2dc\uc2a4\ud15c\uc744 \ubaa8\ub450 \ud3ec\ud568\ud558\uc5ec \u2014 \uae30\uc874\uc758 \ubc30\uce58\uc2dd \ud615\uc2dd\uc5d0\uc11c\ub294 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. RTA \uc7a5\ube44\uc758 \uacbd\uc6b0, \uc5f4 \uc0ac\uc774\ud074\ub9c1 \uc18d\ub3c4(50\u2013200\u00b0C\/s\uc758 \uc0c1\uc2b9 \uc18d\ub3c4)\ub85c \uc778\ud574 \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131\uc5d0 \ub300\ud55c \uc694\uad6c\uac00 \uadf9\ub300\ud654\ub418\ubbc0\ub85c, \ub2e4\uacb0\uc815 \ub300\uccb4\uc7ac\ubcf4\ub2e4 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ub354 \uc801\ud569\ud558\ub2e4\ub294 \uc810\uc774 \uc785\uc99d\ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \ud0c8\uc720\ub9ac\ud654 \ud604\uc0c1 \ubc0f \uc774\uac83\uc774 \uc218\uba85\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/h2>\n<p>\uc9c0\uc18d\uc801\uc778 \uace0\uc628 \uc0ac\uc6a9 \ud658\uacbd\uc5d0\uc11c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uac00\uc7a5 \uc911\uc694\ud55c \uace0\uc7a5 \uba54\ucee4\ub2c8\uc998 \uc911 \ud558\ub098\ub294 \ube44\uacb0\uc815\ud654, \uc989 \ube44\uacb0\uc815\uc9c8 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uacb0\uc815\uc9c8 \ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\ub85c \ube44\uac00\uc5ed\uc801\uc73c\ub85c \ubcc0\ud558\ub294 \ud604\uc0c1\uc785\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\uae30\uc804 \ubc0f \ubc1c\ubcd1 \uc870\uac74:<\/strong> \ud0c8\uc720\ub9ac\ud654\ub294 \ud45c\uba74\uc758 \uacb0\ud568, \uc624\uc5fc \ubd80\uc704 \ub610\ub294 \uad6d\ubd80\uc801\uc73c\ub85c \uc751\ub825\uc774 \ub192\uc740 \uc601\uc5ed\uc5d0\uc11c \uc2dc\uc791\ub418\uba70, \uc628\ub3c4\uc640 \uc2dc\uac04\uc5d0 \ub530\ub77c \uacb0\uc815\ub418\ub294 \uc18d\ub3c4\ub85c \ub0b4\ubd80\ub85c \uc804\ud30c\ub429\ub2c8\ub2e4. \uc774 \uacfc\uc815\uc740 \ub300\ub7b5 <strong>\ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0 1000\u00b0C<\/strong> \uadf8\ub9ac\uace0 <strong>\uace0\uc21c\ub3c4 \ud569\uc131 \ub4f1\uae09\uc758 \uacbd\uc6b0 1050\u00b0C<\/strong>. \uc721\uc548\uc73c\ub85c \ubcfc \ub54c, \ud0c8\uc720\ub9ac\ud654\ub294 \ud770\uc0c9\uc758 \ubd88\ud22c\uba85\ud55c \uacb0\uc815\uc9c8 \ud45c\uba74\uce35\uc73c\ub85c \ub098\ud0c0\ub098\uba70, \ud754\ud788 \ud29c\ube0c\uac00 \u201c\uc720\ubc31\uc0c9\uc73c\ub85c \ubcc0\ud55c\ub2e4\u201d\uace0 \ud45c\ud604\ub429\ub2c8\ub2e4. \uad6c\uc870\uc801\uc73c\ub85c, \ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8 \uc0c1\uc740 \ube44\uc815\uc9c8 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc640 \ubc00\ub3c4\uac00 \ub2e4\ub974\uba70(2.33 g\/cm\u00b3 \ub300 2.20 g\/cm\u00b3), \uc0c1\ubcc0\ud654\uc5d0 \ub530\ub978 \ubd80\ud53c \ubcc0\ud654\ub294 \ub0b4\ubd80 \uc751\ub825\uc744 \uc720\ubc1c\ud558\uc5ec <strong>\ud29c\ube0c\uc758 \uae30\uacc4\uc801 \ubb34\uacb0\uc131\uc744 \uc810\uc9c4\uc801\uc73c\ub85c \uc800\ud558\uc2dc\ud0b5\ub2c8\ub2e4<\/strong>. \uc57d 220\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\ub294 2\u20133%\uc758 \ubd80\ud53c \ubcc0\ud654\ub97c \ub3d9\ubc18\ud558\ub294 \uac00\uc5ed\uc801\uc778 \u03b1-\u03b2 \uc0c1\ubcc0\ud0dc\ub97c \uacaa\uc73c\uba70, \uc774\ub85c \uc778\ud574 \uc720\ub9ac\ud654\uac00 \uc2ec\ud558\uac8c \uc9c4\ud589\ub41c \uc601\uc5ed\uc5d0\uc11c \uc8fc\uae30\uc801\uc778 \uade0\uc5f4\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \uad11\ubc94\uc704\ud55c \ube44\uc720\ub9ac\ud654\uac00 \uc9c4\ud589\ub41c \ud29c\ube0c\ub294 \ud30c\uc190 \uc704\ud5d8\uc774 \uc6a9\uad11\ub85c \uc548\uc804\uc774\ub098 \uacf5\uc815 \uc5f0\uc18d\uc131\uc744 \uc704\ud611\ud558\ub294 \uc0c1\ud0dc\uc5d0 \uc774\ub974\uae30 \uc804\uc5d0 \uad50\uccb4\ud574\uc57c \ud55c\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uac00\uc18d \uc694\uc778:<\/strong> \uba87 \uac00\uc9c0 \uc870\uac74\uc740 \uae30\uc900 \uc628\ub3c4 \uc758\uc874\uc801 \uc18d\ub3c4\ubcf4\ub2e4 \ub354 \ube60\ub974\uac8c \ud0c8\uc720\ub9ac\ud654\ub97c \ucd09\uc9c4\ud569\ub2c8\ub2e4. <strong>\uc54c\uce7c\ub9ac \uae08\uc18d \ud45c\uba74 \uc624\uc5fc<\/strong> \u2014 \ud074\ub9b0\ub8f8 \uc7a5\uac11\uc744 \ucc29\uc6a9\ud558\uc9c0 \uc54a\uc740 \ucc44 \ucde8\uae09\ud560 \ub54c, \uacf5\uc815 \uac00\uc2a4\uc758 \ubd88\uc21c\ubb3c, \ub610\ub294 \uc778\uc811\ud55c \uc6a9\uad11\ub85c \ubd80\ud488\uc5d0\uc11c \ube44\ub86f\ub41c \u2014 \ub098\ud2b8\ub968 \uc624\uc5fc\uc740 \uacb0\uc815\ud654 \ud65c\uc131\ud654 \uc5d0\ub108\uc9c0\ub97c \ub0ae\ucd94\uace0 \ube44\uacb0\uc815\ud654 \uc2dc\uc791\uc744 \uadf9\uc801\uc73c\ub85c \uac00\uc18d\ud654\ud558\ub294 \ud50c\ub7ed\uc2a4 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \ub098\ud2b8\ub968 \uc624\uc5fc\uc774 \uc124\ub839 <strong>1\u20135 ppm \ud45c\uba74 \ub18d\ub3c4<\/strong> \uc2e4\uc9c8\uc801\uc778 \ud0c8\uc720\ub9ac\ud654 \uc784\uacc4\uc628\ub3c4\ub97c 50\u2013100\u00b0C \ub0ae\ucd9c \uc218 \uc788\ub2e4. <strong>\uace0\uc628\uc5d0\uc11c\uc758 \uc218\uc99d\uae30<\/strong> \ub610\ud55c ~\uc758 \ud615\uc131\uc744 \ud1b5\ud574 \uc774 \uacfc\uc815\uc744 \uac00\uc18d\ud654\ud558\uba70 <a href=\"https:\/\/en.wikipedia.org\/wiki\/Silanol\">\uc2e4\ub77c\ub180 (Si-OH)<\/a><sup id=\"fnref1:3\"><a href=\"#fn:3\" class=\"footnote-ref\">3<\/a><\/sup> \uad6c\uc870\uc801 \uc7ac\uad6c\uc131\uc744 \ucd09\uc9c4\ud558\ub294 \ud45c\uba74 \uae30\ub2e8. \uc801\uc808\ud55c \uc218\uba85 \ubaa8\ub2c8\ud130\ub9c1 \uc5c6\uc774 1050\u00b0C \uadfc\ucc98 \ub610\ub294 \uadf8 \uc774\uc0c1\uc758 \uc2b5\uc2dd \uc0b0\ud654 \ubd84\uc704\uae30\uc5d0\uc11c \ud29c\ube0c\ub97c \uac00\ub3d9\ud558\ub294 \uac83\uc740 \ubc18\ub3c4\uccb4 \ud339\uc5d0\uc11c \uc870\uae30 \ube44\uc720\ud654 \ud604\uc0c1\uc758 \uc6d0\uc778\uc73c\ub85c \uc798 \uc54c\ub824\uc838 \uc788\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc218\uba85 \uad00\ub9ac:<\/strong> \ud0c8\uc720\ub9ac\ud654 \uad00\ub9ac\uc5d0 \ub300\ud55c \uc2e4\uc6a9\uc801\uc778 \uc811\uadfc \ubc29\uc2dd\uc740 \ub2e4\uc74c\uc744 \uc218\ub9bd\ud558\ub294 \uac83\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4. <strong>\uad00 \uac80\uc0ac \uc8fc\uae30<\/strong> \uacf5\uc815 \uc628\ub3c4\uc640 \ubd84\uc704\uae30\uc5d0 \ub530\ub77c \ub2e4\ub985\ub2c8\ub2e4. \uc0b0\ud654\uc131 \ubd84\uc704\uae30\uc5d0\uc11c 1000\u00b0C \uc774\uc0c1\uc73c\ub85c \uc9c0\uc18d\uc801\uc73c\ub85c \uc9c4\ud589\ub418\ub294 \uacf5\uc815\uc758 \uacbd\uc6b0, \uc6a9\uad11\ub85c \uc608\ubc29 \uc815\ube44 \uc8fc\uae30\ub9c8\ub2e4(\uc77c\ubc18\uc801\uc73c\ub85c \ub9e4 <strong>4~8\uc8fc<\/strong> \u2014\uc744 \uad8c\uc7a5\ud569\ub2c8\ub2e4. \ube44\uc720\ub9ac\ud654 \ubc94\uc704\uac00 <strong>\uac00\uc5f4 \uad6c\uac04\uc758 \uae38\uc774 \uc911 20\u201330%<\/strong> \uace0\uc7a5\uc774 \ub0a0 \ub54c\uae4c\uc9c0 \uc0ac\uc6a9\ud558\ub2e4\uac00 \uad50\uccb4\ud558\uae30\ubcf4\ub2e4\ub294 \uc120\uc81c\uc801\uc73c\ub85c \uad50\uccb4\ud574\uc57c \ud569\ub2c8\ub2e4. \ud074\ub9b0\ub8f8 \uc7a5\uac11 \uc0ac\uc6a9, \ubc00\ubd09\ub41c \ud3f4\ub9ac\uc5d0\ud2f8\ub80c \ubd09\ud22c\uc5d0 \ubcf4\uad00, \ud53c\ubd80\uc640\uc758 \uc9c1\uc811\uc801\uc778 \uc811\ucd09\uc744 \ud53c\ud558\ub294 \ub4f1 \uae68\ub057\ud55c \ud29c\ube0c \ucde8\uae09 \uc808\ucc28\ub97c \uc900\uc218\ud558\uba74 \uc8fc\uc694 \ud45c\uba74 \uc624\uc5fc\uc6d0\uc744 \uc81c\uac70\ud568\uc73c\ub85c\uc368 \uc0ac\uc6a9 \uc218\uba85\uc744 \ud604\uc800\ud788 \uc5f0\uc7a5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\uc54c\ub8e8\ubbf8\ub098 \ubc0f \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ub300\uccb4\uc7ac\uc640 \ube44\uad50\ud55c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c<\/h2>\n<p>\ubc18\ub3c4\uccb4 \uc5f4 \uacc4\uce21 \ubd84\uc57c\uc5d0\uc11c \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ubcf4\ud638\uad00 \uc18c\uc7ac\ub85c \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\uc9c0\ub9cc, \uc2dc\uc2a4\ud15c \uc0ac\uc591\uc744 \ud3c9\uac00\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub4e4\uc740 \ud544\uc5f0\uc801\uc73c\ub85c \uc54c\ub8e8\ubbf8\ub098\uc640 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc640 \uac19\uc740 \ub300\uccb4 \uc18c\uc7ac\ub97c \uc811\ud558\uac8c \ub429\ub2c8\ub2e4. \uac01 \uc18c\uc7ac\ub294 \uc11c\ub85c \ub2e4\ub978 \uc131\ub2a5 \ubc94\uc704\ub97c \uac00\uc9c0\uace0 \uc788\uc73c\uba70, \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uc5b4\ub5a4 \ubd80\ubd84\uc5d0\uc11c \uc6b0\uc218\ud558\uace0 \uc5b4\ub5a4 \ubd80\ubd84\uc5d0\uc11c\ub294 \uadf8\ub807\uc9c0 \uc54a\uc740\uc9c0 \uc774\ud574\ud558\ub294 \uac83\uc774 \uac74\uc804\ud55c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\uc801 \ud310\ub2e8\uc744 \ub4b7\ubc1b\uce68\ud569\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\uc54c\ub8e8\ubbf8\ub098(Al\u2082O\u2083, 99.7%) \ubcf4\ud638\uad00<\/strong> \uae30\uacc4\uc801 \uac15\ub3c4\uac00 \ud6e8\uc52c \ub354 \ub192\uc73c\uba70(\ucd5c\ub300 \ud30c\ub2e8 \uac15\ub3c4(MOR) ~350 MPa, \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0 ~55 MPa), \ub2e4\uc74c \uc870\uac74\uae4c\uc9c0 \uc9c0\uc18d\uc801\uc778 \uc0ac\uc6a9\uc744 \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>1700\u00b0C<\/strong> \u2014 1100\u00b0C\ub77c\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ud55c\uacc4 \uc628\ub3c4\ub97c \ud6e8\uc52c \ub6f0\uc5b4\ub118\uc2b5\ub2c8\ub2e4. \uacf5\uc815 \uc628\ub3c4\uac00 1100\u00b0C\ub97c \ucd08\uacfc\ud558\ub294 \ubc18\ub3c4\uccb4 \uc751\uc6a9 \ubd84\uc57c\uc758 \uacbd\uc6b0, \uc54c\ub8e8\ubbf8\ub098\ub97c \ub300\uccb4\uc7ac\ub85c \uc0ac\uc6a9\ud574\uc57c \ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc54c\ub8e8\ubbf8\ub098\uc758 <strong>7.2 \u00d7 10\u207b\u2076\/\u00b0C\uc758 CTE<\/strong> \uc774\ub85c \uc778\ud574 \ubc18\ub3c4\uccb4 \ubc30\uce58\ub85c(batch furnace) \uc801\uc7ac \uc2dc \ub098\ud0c0\ub098\ub294 \uae09\uaca9\ud55c \uc628\ub3c4 \ubcc0\ud654\ub85c \uc778\ud55c \uc5f4\ucda9\uaca9\uc5d0 \ucde8\uc57d\ud574\uc9c0\uba70, \ub610\ud55c <strong>\uace0\uc628\uc5d0\uc11c\uc758 \uc5fc\uc0b0 \ubd80\uc2dd<\/strong> \u2014 \uc785\uacc4 \uc5d0\uce6d \uacfc\uc815\uc5d0\uc11c Al\u2082O\u2083 \ubbf8\ub9bd\uc790 \uc624\uc5fc\uc774 \ubc1c\uc0dd\ud558\uae30 \ub54c\ubb38\uc5d0 \u2014 \uc815\uae30\uc801\uc778 HCl \uc138\uc815 \uc8fc\uae30\uac00 \uc788\ub294 \uc6a9\uad11\ub85c\uc5d0\uc11c\ub294 \uc774 \uacf5\ubc95\uc758 \uc801\uc6a9\uc774 \uc81c\ud55c\ub41c\ub2e4. <strong>\uc54c\ub8e8\ubbf8\ub098\uc758 \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\ub3c4 \ub354 \ub192\uc2b5\ub2c8\ub2e4.<\/strong> (\uc77c\ubc18\uc801\uc73c\ub85c 200~500 ppm\uc778 \ubc18\uba74, \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 50 ppb \ubbf8\ub9cc\uc784), \uc774\ub85c \uc778\ud574 \ucca8\ub2e8 CMOS \ub610\ub294 \uba54\ubaa8\ub9ac \uc81c\uc870 \uacf5\uc815\uc758 \uc624\uc5fc\uc5d0 \ubbfc\uac10\ud55c \uad6c\uc5ed\uc5d0\uc11c\ub294 \uc774\ub97c \uc0ac\uc6a9\ud560 \uc218 \uc5c6\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \ubcf4\ud638\uad00<\/strong> \ud0c1\uc6d4\ud55c \uae30\uacc4\uc801 \uac15\ub3c4(MOR ~450 MPa)\ub97c \uc81c\uacf5\ud558\uba70, \ucd5c\ub300 \uc0ac\uc6a9 \uc628\ub3c4\ub294 <strong>1600\u00b0C<\/strong>. SiC\ub294 \uace0\uc628 \uacf5\uc815\uc5d0\uc11c \uc6a9\uad11\ub85c \uad00 \uc7ac\ub8cc\ub85c \ub110\ub9ac \uc0ac\uc6a9\ub418\uc9c0\ub9cc, \ud2b9\ud788 \uc5f4\uc804\ub300 \ubcf4\ud638\uad00\uc73c\ub85c \uc0ac\uc6a9\ub420 \uacbd\uc6b0 \ubc18\ub3c4\uccb4 \ud658\uacbd\uc5d0\uc11c \uba87 \uac00\uc9c0 \ubb38\uc81c\ub97c \uc57c\uae30\ud55c\ub2e4. <strong>SiC\ub294 \uc804\ub3c4\uc131\uc774 \uc788\ub2e4<\/strong>, \uc774\ub85c \uc778\ud574 \uc720\ub3c4 \uae30\uc804\ub825\uc774\ub098 \uc811\uc9c0 \ub8e8\ud504\ub85c \uc778\ud55c \uce21\uc815 \uc624\ub958\ub97c \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uc5f4\uc804\ub300 \uc5b4\uc148\ube14\ub9ac\ub97c \uc2e0\uc911\ud558\uac8c \uc804\uae30\uc801\uc73c\ub85c \uc808\uc5f0\ud574\uc57c \ud569\ub2c8\ub2e4. \ub610\ud55c, SiC\ub294 <strong>O\u2082 \ubd84\uc704\uae30\uc5d0\uc11c 800\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc77c\uc5b4\ub098\ub294 \uc218\ub3d9 \uc0b0\ud654<\/strong>, \uc774\ub85c \uc778\ud574 \uce58\uc218 \ud3b8\ucc28\ub97c \uc720\ubc1c\ud558\ub294 SiO\u2082 \ud45c\uba74\uce35\uc774 \ud615\uc131\ub420 \ubfd0\ub9cc \uc544\ub2c8\ub77c, \ub354 \uc911\uc694\ud55c \uc810\uc740 \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \uce68\ucc29\ub420 \uc218 \uc788\ub294 \uc2e4\ub9ac\ucf58 \uc0b0\ud654\ubb3c \uc99d\uae30\uac00 \ubc1c\uc0dd\ud55c\ub2e4\ub294 \uac83\uc785\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c SiC\ub97c \uad6c\uc870\uc6a9 \uc6a9\uad11\ub85c \ubd80\ud488\uc73c\ub85c \ub110\ub9ac \uc0ac\uc6a9\ud558\uace0 \uc788\ub2e4\uace0 \ud574\uc11c, \uc624\uc5fc\uc5d0 \ubbfc\uac10\ud55c \uacf5\uc815 \uad6c\uc5ed\uc5d0\uc11c \uc5f4\uc804\ub300 \ubcf4\ud638\uad00 \uc7ac\ub8cc\ub85c \uc801\ud569\ud558\ub2e4\ub294 \uc758\ubbf8\ub294 \uc544\ub2d9\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc735\ud569 \uc2e4\ub9ac\uce74 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \uacbd\uc7c1\uc801 \uc704\uce58<\/strong> \ub530\ub77c\uc11c 1100\u00b0C \ubbf8\ub9cc\uc758 \ubc18\ub3c4\uccb4 \uacf5\uc815 \uc601\uc5ed\uc5d0\uc11c \ud4e8\uc988\ub4dc \uc2e4\ub9ac\uce74\uc758 \uc785\uc9c0\ub294 \ud655\uace0\ud569\ub2c8\ub2e4. \ucd08\uc800\uc624\uc5fc \uac00\ub2a5\uc131, \ubaa8\ub4e0 \ud45c\uc900 \uacf5\uc815 \ubd84\uc704\uae30\uc5d0\uc11c \ub098\ud0c0\ub098\ub294 \ud654\ud559\uc801 \ubd88\ud65c\uc131, \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131, \uadf8\ub9ac\uace0 \uad11\ud559\uc801 \ud22c\uba85\uc131\uc744 \ubaa8\ub450 \uac16\ucd98 \uacbd\uc7c1 \uc18c\uc7ac\ub294 \uc5c6\uc2b5\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \ud655\uc0b0, \uc0b0\ud654 \ubc0f LPCVD \uc6a9\uad11\ub85c \uc628\ub3c4 \uce21\uc815\uacfc \uac19\uc740 \ud2b9\uc815 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ub2e8\uc21c\ud788 \ud3b8\ub9ac\ud55c \uc120\ud0dd\uc9c0\uac00 \uc544\ub2c8\ub77c, \uc7ac\ub8cc\uc801 \uad00\uc810\uc5d0\uc11c \ubcfc \ub54c \ucd5c\uc801\uc758 \uc120\ud0dd\uc785\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294 TOQUARTZ \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c<\/h2>\n<p>\ubcf8 \uae30\uc0ac\uc5d0\uc11c \uc124\uba85\ud55c \ubaa8\ub4e0 \uc0ac\uc591 \uc694\uac74\uc744 \ucda9\uc871\ud558\ub294 \ubcf4\ud638 \ud29c\ube0c\uac00 \ud544\uc694\ud55c \ubc18\ub3c4\uccb4 \ud339 \ubc0f \uc7a5\ube44 \uc81c\uc870\uc5c5\uccb4\uc758 \uacbd\uc6b0, \uc18c\uc7ac \uc778\uc99d, \uce58\uc218 \uc815\ubc00\ub3c4, \uc21c\ub3c4 \ucd94\uc801 \uac00\ub2a5\uc131\uc740 \uc808\ub300 \uc591\ubcf4\ud560 \uc218 \uc5c6\ub294 \ud544\uc218 \uc870\uac74\uc785\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\ud1a0\ucffc\uce20<\/strong> \ub2e4\uc74c \uc18c\uc7ac\ub85c \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub97c \uc81c\uc870\ud569\ub2c8\ub2e4. <strong>SiO\u2082 \uc21c\ub3c4\uac00 99.991% \uc774\uc0c1\uc778 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74TP3T<\/strong> \ub610\ud55c ICP-MS \ubd84\uc11d\uc744 \ud1b5\ud574 \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 50 ppb \ubbf8\ub9cc\uc73c\ub85c \ud655\uc778\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uac01 \uc0dd\uc0b0 \ubc30\uce58\uc5d0\ub294 \ubc18\ub3c4\uccb4 \uc18c\uc131\ub85c \ud658\uacbd\uc5d0\uc11c \uac00\uc7a5 \uc8fc\uc694\ud55c \ubbf8\ub7c9 \uc6d0\uc18c\uc778 Na, K, Fe, Cu, Ni \ubc0f Al\uc758 \ud568\ub7c9\uc744 \ud3ec\ud568\ud558\ub294 \uc7ac\ub8cc \uc778\uc99d \ubcf4\uace0\uc11c\uac00 \ucca8\ubd80\ub429\ub2c8\ub2e4. \uc774 \ubb38\uc11c\ub294 \ubc18\ub3c4\uccb4 \uacf5\uc815 \ubd80\ud488 \uc778\uc99d\uc5d0 \uc801\uc6a9\ub418\ub294 ISO\/TS 16949 \ubc0f SEMI \ud45c\uc900\uc758 \uc7ac\ub8cc \ucd94\uc801\uc131 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>TOQUARTZ\uc758 \uce58\uc218 \uac00\uacf5 \uc5ed\ub7c9<\/strong> \uc678\uacbd 4mm\ubd80\ud130 100mm\uae4c\uc9c0\ub97c \uc9c0\uc6d0\ud558\uba70, \uc678\uacbd \uacf5\ucc28\ub294 <strong>\u00b10.10 mm<\/strong>, \ubcbd \ub450\uaed8 \uacf5\ucc28\ub294 <strong>\u00b10.10 mm<\/strong>, \ubc0f \ub0b4\ubd80\uc758 \ub3d9\uc2ec\ub3c4 <strong>\u00b10.05 mm<\/strong> \u2014 \ubcf8 \ubb38\uc11c\uc758 \uc55e\ubd80\ubd84\uc5d0\uc11c \uc124\uba85\ud55c \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uce58\uc218 \uc0ac\uc591\uc744 \ucda9\uc871\ud558\uac70\ub098 \uc774\ub97c \uc0c1\ud68c\ud569\ub2c8\ub2e4. \ud074\ub85c\uc988\ub4dc \uc5d4\ub4dc \ubc0f \uc624\ud508 \uc5d4\ub4dc \uad6c\uc131 \ubaa8\ub450 \ub2e8\uc77c \ubcf4\uc5b4 \ubc0f \ub2e4\uc911 \ubcf4\uc5b4 \ud615\uc0c1\uc73c\ub85c \uc81c\uacf5\ub418\uba70, \u00b11.0 mm \uc624\ucc28 \ubc94\uc704 \ub0b4\uc5d0\uc11c \ub9de\ucda4\ud615 \uae38\uc774\ub85c \uc81c\uc791\ub429\ub2c8\ub2e4. \uacf5\uc815\ubcc4 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\ucdb0 \ud654\uc5fc \uc5f0\ub9c8 \ucc98\ub9ac\ub41c \ub2e8\ubd80, \uc815\ubc00 \uc5f0\ub9c8\ub41c \ud50c\ub79c\uc9c0, \uadf8\ub9ac\uace0 \ube44\uc720\ud654 \uc800\ud56d\uc131\uc744 \ub192\uc774\uae30 \uc704\ud55c \ud45c\uba74 \ucc98\ub9ac\ub41c \uc81c\ud488\ub3c4 \uc81c\uacf5\ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uae30\uc220 \uc9c0\uc6d0<\/strong> \ud2b9\uc815 \ubc18\ub3c4\uccb4 \uacf5\uc815 \uc870\uac74\uc5d0 \uc801\ud569\ud55c \uc21c\ub3c4 \ub4f1\uae09, \ubcbd \ub450\uaed8, \ub0b4\uacbd \uad6c\uc131 \ubc0f \ub2e8\uba74 \ud615\ud0dc \uc120\ud0dd\uc744 \ud3ec\ud568\ud55c \ud29c\ube0c \uc0ac\uc591\uc5d0 \ub300\ud55c \uc815\ubcf4\ub294 TOQUARTZ \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ubd80\uc11c\ub97c \ud1b5\ud574 \uc9c1\uc811 \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubcf8 \uae30\uc0ac\uc5d0\uc11c \uc0c1\uc138\ud788 \uc124\uba85\ud55c \ubc14\uc640 \uac19\uc774, \uc628\ub3c4, \ub300\uae30 \uc870\uac74 \ubc0f \uc624\uc5fc \uc81c\uc57d \uc870\uac74\uc774 \ubcf5\ud569\uc801\uc73c\ub85c \uc791\uc6a9\ud558\ub294 \uc81c\uc870 \uacf5\uc815\uc758 \uacbd\uc6b0, \ucd08\uae30 \ub2e8\uacc4\uc5d0\uc11c \uc0ac\uc591\uc744 \uc815\ud655\ud558\uac8c \uc124\uc815\ud568\uc73c\ub85c\uc368 \ud6c4\uc18d \uacf5\uc815\uc5d0\uc11c \ud29c\ube0c\ub85c \uc778\ud55c \uacf5\uc815 \ucc28\uc9c8\uc744 \ubc29\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\uacb0\ub860<\/h2>\n<p>\uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\ub294 \ubc18\ub3c4\uccb4 \uc5f4 \uac00\uacf5 \uacf5\uc815\uc5d0\uc11c \uae30\uc220\uc801\uc73c\ub85c \uba85\ud655\ud788 \uc815\uc758\ub41c, \uae30\ub2a5\uc801\uc73c\ub85c \ub300\uccb4 \ubd88\uac00\ub2a5\ud55c \uc5ed\ud560\uc744 \ub2f4\ub2f9\ud569\ub2c8\ub2e4. \uc774\ub4e4\uc758 \ucd08\uc800 \uc5f4\ud33d\ucc3d\ub960, \ubaa8\ub4e0 \ud45c\uc900 \uacf5\uc815 \ubd84\uc704\uae30\uc5d0\uc11c \ub098\ud0c0\ub098\ub294 \ud654\ud559\uc801 \ubd88\ud65c\uc131, 50 ppb \ubbf8\ub9cc\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9, \uadf8\ub9ac\uace0 \ud0c1\uc6d4\ud55c \uc5f4\ucda9\uaca9 \ub0b4\uc131\uc740 \ub2e4\ub978 \uc5b4\ub5a4 \ub2e8\uc77c \uc18c\uc7ac\ub3c4 \ub2ec\uc131\ud560 \uc218 \uc5c6\ub294 \ubc29\uc2dd\uc73c\ub85c \ud655\uc0b0, \uc0b0\ud654, LPCVD \ubc0f \uc5b4\ub2d0\ub9c1\ub85c \ud658\uacbd\uc758 \ubcf5\ud569\uc801\uc778 \uc694\uad6c \uc0ac\ud56d\uc744 \uc885\ud569\uc801\uc73c\ub85c \ucda9\uc871\uc2dc\ud0b5\ub2c8\ub2e4. \ube44\uc720\ud654 \ud55c\uacc4, \uae30\uacc4\uc801 \uac15\ub3c4 \uc81c\uc57d, \uc218\uc18c \ud22c\uacfc\uc131 \uac70\ub3d9 \ubc0f \uc5f4\uc804\ub300 \uc720\ud615 \ud638\ud658\uc131\uc744 \ud3ec\ud568\ud55c \uc131\ub2a5 \ubc94\uc704\ub97c \uc774\ud574\ud568\uc73c\ub85c\uc368, \uc5d4\uc9c0\ub2c8\uc5b4\ub4e4\uc740 \ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c \uc7a5\ube44\uc758 \uc804\uccb4 \uc218\uba85 \uae30\uac04 \ub3d9\uc548 \uc2e0\ub8b0\ud560 \uc218 \uc788\uace0 \uc624\uc5fc\uc774 \uc5c6\ub294 \uc628\ub3c4 \uce21\uc815\uc744 \uc81c\uacf5\ud558\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00 \uc2dc\uc2a4\ud15c\uc744 \uc9c0\uc815, \uc124\uce58 \ubc0f \uc720\uc9c0 \uad00\ub9ac\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n<p><strong>\ubc18\ub3c4\uccb4 \uc6a9\uad11\ub85c\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uc758 \ucd5c\ub300 \uc628\ub3c4\ub294 \uc5bc\ub9c8\uc785\ub2c8\uae4c?<\/strong><\/p>\n<p>\ud22c\uba85\ud55c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 \uc57d 1100\u00b0C\uc758 \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4 \ub4f1\uae09\uc744 \uac00\uc9c0\uba70, 1\uc2dc\uac04 \ubbf8\ub9cc\uc758 \ub2e8\uae30\uac04 \ub3d9\uc548 1250\u00b0C\uae4c\uc9c0\uc758 \uc628\ub3c4 \uc0c1\uc2b9\uc744 \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc218\uba85\uc744 \uc81c\ud55c\ud558\ub294 \uc8fc\uc694 \uc694\uc778\uc778 \ube44\uc720\ud654 \ud604\uc0c1\uc740 \uace0\uc21c\ub3c4 \ud569\uc131 \ub4f1\uae09\uc758 \uacbd\uc6b0 \uc57d 1050\u00b0C\uc5d0\uc11c 1100\u00b0C \uc0ac\uc774\uc5d0\uc11c \uc2dc\uc791\ub429\ub2c8\ub2e4. \ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc758 \uacbd\uc6b0 \uc5f0\uc18d \uc0ac\uc6a9 \uc0c1\ud55c \uc628\ub3c4\uac00 1000\u00b0C\uc5d0\uc11c 1050\u00b0C\ub85c \ub2e4\uc18c \ub0ae\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ubc18\ub3c4\uccb4 \ud655\uc0b0\ub85c\uc5d0\uc11c \uc5f4\uc804\ub300 \ubcf4\ud638\uc6a9\uc73c\ub85c \uc54c\ub8e8\ubbf8\ub098\ubcf4\ub2e4 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uc120\ud638\ub418\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><\/p>\n<p>\uc735\ud569 \uc2e4\ub9ac\uce74\ub294 \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 50 ppb \ubbf8\ub9cc\uc73c\ub85c, \uc54c\ub8e8\ubbf8\ub098\ubcf4\ub2e4 3\ucc28\uc218 \uc774\uc0c1 \ub0ae\uae30 \ub54c\ubb38\uc5d0, \uac00\uacf5\ub41c \uc6e8\uc774\ud37c\uc5d0 \uc54c\uce7c\ub9ac \uae08\uc18d \ubc0f \uc804\uc774 \uae08\uc18d\uc774 \ud63c\uc785\ub420 \uc704\ud5d8\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4. \ub610\ud55c, \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uc5f4\ud33d\ucc3d \uacc4\uc218(CTE)\ub294 0.55 \u00d7 10\u207b\u2076\/\u00b0C\ub85c, \uc54c\ub8e8\ubbf8\ub098\ub97c \ud6e8\uc52c \ub2a5\uac00\ud558\ub294 \ub0b4\uc5f4\ucda9\uaca9\uc131\uc744 \uac16\ucd94\uace0 \uc788\uc5b4, HCl \uc138\uc815 \uc8fc\uae30\uc640 \ube48\ubc88\ud55c \ubc30\uce58 \uc801\uc7ac\uac00 \uc774\ub8e8\uc5b4\uc9c0\ub294 \uc6a9\uad11\ub85c\uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc0ac\uc6a9 \uc911\uc5d0 \uc11d\uc601 \uc5f4\uc804\ub300 \ud29c\ube0c\uac00 \ud558\uc597\uac8c \ubcc0\ud558\uac70\ub098 \ubd88\ud22c\uba85\ud574\uc9c0\ub294 \uc6d0\uc778\uc740 \ubb34\uc5c7\uc785\ub2c8\uae4c?<\/strong><\/p>\n<p>\ud45c\uba74 \ubd88\ud22c\uba85\ub3c4\ub294 \ube44\uc815\uc9c8 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uacb0\uc815\uc9c8 \ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\ub85c \ubcc0\ud558\ub294 \uacfc\uc815\uc778 \ud0c8\uc720\ub9ac\ud654\uc758 \uc2dc\uac01\uc801 \uc9d5\ud6c4\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubcc0\ud658\uc740 1050\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uac00 \uc9c0\uc18d\uc801\uc73c\ub85c \uc720\uc9c0\ub418\uac70\ub098, \uc54c\uce7c\ub9ac \uae08\uc18d \ud45c\uba74 \uc624\uc5fc(\uc7a5\uac11\uc744 \ucc29\uc6a9\ud558\uc9c0 \uc54a\uc740 \ucc44 \ucde8\uae09\ud560 \ub54c \ubc1c\uc0dd\ud558\ub294 \uacbd\uc6b0 \ud3ec\ud568), \uc0b0\ud654\uc131 \ub300\uae30 \uc911\uc758 \uc218\uc99d\uae30\uc5d0 \uc758\ud574 \uac00\uc18d\ud654\ub429\ub2c8\ub2e4. \ud45c\uba74\uc5d0 \uad11\ubc94\uc704\ud55c \ubd88\ud22c\uba85 \ud604\uc0c1\uc774 \ub098\ud0c0\ub098\ub294 \ud29c\ube0c\ub294 \uad00\ub828 \ubd80\ud53c \ubcc0\ud654\ub85c \uc778\ud574 \ub0c9\uac01 \uacfc\uc815\uc5d0\uc11c \uc8fc\uae30\uc801 \uade0\uc5f4 \uc704\ud5d8\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc73c\ubbc0\ub85c \uc120\uc81c\uc801\uc73c\ub85c \uad50\uccb4\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uace0\uc628 \ubc18\ub3c4\uccb4 \uc0b0\ud654 \uacf5\uc815\uc5d0\uc11c \uc11d\uc601 \ubcf4\ud638\uad00\uacfc \uac00\uc7a5 \ud638\ud658\uc131\uc774 \ub192\uc740 \uc5f4\uc804\ub300 \uc720\ud615\uc740 \ubb34\uc5c7\uc785\ub2c8\uae4c?<\/strong><\/p>\n<p>1050\u00b0C\uc5d0\uc11c 1200\u00b0C \uc0ac\uc774\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \ubc18\ub3c4\uccb4 \uc0b0\ud654\ub85c\uc5d0\ub294, S\ud615(Pt-10%Rh\/Pt) \ubc0f R\ud615(Pt-13%Rh\/Pt) \uc5f4\uc804\ub300\uac00 \ud45c\uc900\uc73c\ub85c \uc0ac\uc6a9\ub418\uba70, IEC Class 1 \ub4f1\uae09\uc758 \uc815\ud655\ub3c4\uc778 \u00b11.0\u00b0C \ub610\ub294 \u00b10.25%\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc735\ud569 \uc2e4\ub9ac\uce74 \ubcf4\ud638\uad00\uc740 \ud655\uc0b0 \ubd84\uc704\uae30 \ub0b4\uc5d0 \uc874\uc7ac\ud558\ub294 \ubd95\uc18c, \uc778, \uc2e4\ub9ac\ucf58 \uc99d\uae30\ub85c\ubd80\ud130 \ubc31\uae08-\ub85c\ub4d0 \uc120\uc744 \uaca9\ub9ac\uc2dc\ucf1c \uc90d\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc624\uc5fc \ubb3c\uc9c8\uc5d0 \uc9c1\uc811 \ub178\ucd9c\ub420 \uacbd\uc6b0, \uba87 \uc2dc\uac04 \ub0b4\uc5d0 \uc5f4\uc804\ub300 \ucd9c\ub825\uc774 \uc800\ud558\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p>\ucc38\uc870:<\/p>\n<div class=\"footnotes\">\n<hr \/>\n<ol>\n<li id=\"fn:1\">\n<p>\uc81c\ubca0\ud06c \uacc4\uc218\ub294 \uc5f4\uc804\ub300 \uc811\ud569\ubd80\uc5d0\uc11c \ub2e8\uc704 \uc628\ub3c4 \ucc28\uc774\uc5d0 \ub530\ub77c \uc0dd\uc131\ub418\ub294 \uc5f4\uc804 \uc804\uc555\uc758 \ud06c\uae30\ub97c \ub098\ud0c0\ub0b4\uba70, \ub370\uc774\ud130 \uc218\uc9d1 \uc2dc\uc2a4\ud15c \ub0b4\uc5d0\uc11c \ud2b9\uc815 \uc5f4\uc804\ub300 \uc720\ud615\uc758 \uc2e0\ud638 \ubd84\ud574\ub2a5\uacfc \uce21\uc815 \uac10\ub3c4\ub97c \uc9c1\uc811\uc801\uc73c\ub85c \uacb0\uc815\ud569\ub2c8\ub2e4.<a href=\"#fnref1:1\" rev=\"footnote\" class=\"footnote-backref\">\u21a9<\/a><\/p>\n<\/li>\n<li id=\"fn:2\">\n<p>\ub2e8\uba74 \ud615\uc0c1\uc758 \uad00\uc131 \ubaa8\uba58\ud2b8\ub294 \uad6c\uc870 \ubd80\uc7ac\uac00 \uad7d\ud798 \ubcc0\uc704\uc5d0 \uc800\ud56d\ud558\ub294 \ub2a5\ub825\uc744 \uc218\uce58\ud654\ud55c \uae30\ud558\ud559\uc801 \ud2b9\uc131\uc73c\ub85c, \uc790\uc911 \ud558\uc911\uc744 \ubc1b\ub294 \uc218\ud3c9\uc73c\ub85c \uc124\uce58\ub41c \ubcf4\ud638\uad00\uc758 \ucc98\uc9d0 \uac70\ub3d9\uc744 \uc608\uce21\ud558\ub294 \ub370 \uc9c1\uc811\uc801\uc778 \uad00\ub828\uc774 \uc788\ub2e4.<a href=\"#fnref1:2\" rev=\"footnote\" class=\"footnote-backref\">\u21a9<\/a><\/p>\n<\/li>\n<li id=\"fn:3\">\n<p>\uc2e4\ub77c\ub180\uc740 \uc218\uc99d\uae30\uc640\uc758 \uc0c1\ud638\uc791\uc6a9\uc744 \ud1b5\ud574 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud45c\uba74\uc5d0 \ud615\uc131\ub418\ub294 \uc2e4\ub9ac\ucf58 \ud558\uc774\ub4dc\ub85d\uc2e4\uae30(Si-OH)\ub97c \uc758\ubbf8\ud558\uba70, \uace0\uc628\uc5d0\uc11c \uc774 \ubb3c\uc9c8\uc774 \uc874\uc7ac\ud560 \uacbd\uc6b0 \uad6c\uc870 \uc7ac\ud3b8\uc131\uacfc \ube44\uc720\ub9ac\ud654\ub97c \uac00\uc18d\ud654\ud558\ub294 \ucd09\ub9e4\uc801 \uc694\uc778\uc73c\ub85c \uc54c\ub824\uc838 \uc788\ub2e4.<a href=\"#fnref1:3\" rev=\"footnote\" class=\"footnote-backref\">\u21a9<\/a><\/p>\n<\/li>\n<\/ol>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>Semiconductor fabrication demands measurement precision that most industrial environments never encounter. When temperature deviates by even a few degrees, entire [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":11372,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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