{"id":11352,"date":"2026-06-29T02:00:29","date_gmt":"2026-06-28T18:00:29","guid":{"rendered":"https:\/\/toquartz.com\/?p=11352"},"modified":"2026-02-28T08:23:05","modified_gmt":"2026-02-28T00:23:05","slug":"what-is-quartz-glassware","status":"publish","type":"post","link":"https:\/\/toquartz.com\/ko\/what-is-quartz-glassware\/","title":{"rendered":"\uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc774 \ubb34\uc5c7\uc778\uac00? \uc6d0\ub8cc, \ud2b9\uc131 \ubc0f \uc6a9\ub3c4"},"content":{"rendered":"<p>\uc804 \uc138\uacc4\uc758 \uc5f0\uad6c\uc18c\uc640 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc124\uc740 \ub300\ub2e4\uc218\uc758 \uc0ac\ub78c\ub4e4\uc774 \uac04\uacfc\ud558\ub294 \ud55c \uac00\uc9c0 \uc18c\uc7ac\uc5d0 \uc758\uc874\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \uc774 \uc18c\uc7ac\uac00 \uc5c6\ub2e4\uba74, \uc815\ubc00 \uacfc\ud559\uc740 \uac00\uc7a5 \uc911\uc694\ud55c \uc21c\uac04\uc5d0 \ubc1c\ubaa9\uc774 \uc7a1\ud790 \uac83\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc735\ud569 \uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc740 \ube44\uc815\uc9c8 \uc774\uc0b0\ud654\uaddc\uc18c\ub85c \uc81c\uc870\ub41c \uc6a9\uae30, \ud29c\ube0c, \ub3c4\uac00\ub2c8 \ubc0f \uad11\ud559 \ubd80\ud488\uc744 \ud3ec\uad04\ud558\uba70, \ub6f0\uc5b4\ub09c \uc5f4\uc801 \uc548\uc815\uc131, \ub113\uc740 \uc2a4\ud399\ud2b8\ub7fc \ud22c\uacfc\uc728, \uadf8\ub9ac\uace0 \ud0c0\uc758 \ucd94\uc885\uc744 \ubd88\ud5c8\ud558\ub294 \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc774\ub77c\ub294 \ud2b9\uc9d5\uc73c\ub85c \uc77c\ubc18 \uc720\ub9ac\uc640 \uad6c\ubcc4\ub429\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc81c\uc870, \ubd84\uc11d \ud654\ud559, \uace0\uc628 \uc5f0\uad6c \ubc0f \uad11\ud559 \uc2dc\uc2a4\ud15c\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0, \uc774 \uc18c\uc7ac\uad70\uc740 \uc0c1\uc5c5\uc801\uc73c\ub85c \uc2e4\uc6a9\uc801\uc778 \ub300\uccb4\uc7ac\uac00 \uc874\uc7ac\ud558\uc9c0 \uc54a\ub294 \ubd84\uc57c\uc5d0\uc11c \uadf8 \uc5ed\ud560\uc744 \uc218\ud589\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc6d0\ub8cc\uc758 \uc6d0\uc0b0\uc9c0\ub294 \uc6a9\uc735 \uc11d\uc601\uc758 \uc131\ub2a5\uc5d0 \uc788\uc5b4 \uac00\uc7a5 \uacb0\uc815\uc801\uc778 \uc694\uc778\uc785\ub2c8\ub2e4. \ud655\uc0b0\ub85c \ud29c\ube0c\uac00 1,100 \u00b0C\uc758 \uc628\ub3c4 \uc0ac\uc774\ud074\uc744 \uacac\ub51c \uc218 \uc788\ub294\uc9c0, \ub610\ub294 UV \ud050\ubcb3\uc774 200 nm\uc5d0\uc11c \uc548\uc815\uc801\uc73c\ub85c \ube5b\uc744 \ud22c\uacfc\ud560 \uc218 \uc788\ub294\uc9c0\ub294, \uc720\ub9ac \uae30\uad6c\uac00 \uc2e4\ud5d8\uc2e4 \uc791\uc5c5\ub300\uc5d0 \ub3c4\ucc29\ud558\uae30 \ud6e8\uc52c \uc804\uc778 \uc2e4\ub9ac\uce74 \uc870\ub2ec \ubc0f \uc6a9\uc735 \ub2e8\uacc4\uc5d0\uc11c \ub0b4\ub824\uc9c4 \uacb0\uc815\uc5d0 \uac70\uc758 \uc804\uc801\uc73c\ub85c \ub2ec\ub824 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glassware-Raw-Material-Comparison-on-Laboratory-Stone-Bench.webp\" alt=\"\uc2e4\ud5d8\uc2e4 \uc11d\uc7ac \uc791\uc5c5\ub300 \uc704\uc5d0\uc11c \uc9c4\ud589\ub41c \uc11d\uc601 \uc720\ub9ac \uae30\uad6c \uc6d0\ub8cc \ube44\uad50\" title=\"\uc2e4\ud5d8\uc2e4 \uc11d\uc7ac \uc791\uc5c5\ub300 \uc704\uc5d0\uc11c \uc9c4\ud589\ub41c \uc11d\uc601 \uc720\ub9ac \uae30\uad6c \uc6d0\ub8cc \ube44\uad50\" \/><\/p>\n<h2>\uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc758 \ub450 \uac00\uc9c0 \uc6d0\ub8cc<\/h2>\n<p>\uc735\ud569 \uc11d\uc601\uc758 \uc131\ub2a5\uc744 \uc88c\uc6b0\ud558\ub294 \ubaa8\ub4e0 \ubcc0\uc218 \uc911\uc5d0\uc11c\ub3c4 \uc6d0\ub8cc\uc758 \uc0b0\uc9c0\ub294 \uac00\uc7a5 \uacb0\uc815\uc801\uc778 \uc694\uc778\uc73c\ub85c, \uc131\ud615\uc774\ub098 \ub9c8\uac10 \uacf5\uc815\uc774 \uc2dc\uc791\ub418\uae30 \uc804\ubd80\ud130 \uc21c\ub3c4, \uad11\ud559\uc801 \ud2b9\uc131 \ubc0f \ub0b4\uc5f4\uc131\uc5d0 \ub300\ud55c \uc808\ub300\uc801\uc778 \uc0c1\ud55c\uc120\uc744 \uc815\ud574\uc90d\ub2c8\ub2e4.<\/p>\n<p>~\uc758 \uc804\uccb4 \ubc94\uc8fc <a href=\"https:\/\/toquartz.com\/ko\/quartz-labware\/\">\uc6a9\uc735 \uc11d\uc601 \uc720\ub9ac \uae30\uad6c<\/a> \uc774\ub294 \uadfc\ubcf8\uc801\uc73c\ub85c \uc11c\ub85c \ub2e4\ub978 \ub450 \uac00\uc9c0 \uc6d0\ub8cc \uacf5\uae09 \uacbd\ub85c, \uc989 \ucc9c\uc5f0 \uc11d\uc601 \uacb0\uc815\uacfc \ud569\uc131 \uc774\uc0b0\ud654\uaddc\uc18c\ub85c \uac70\uc2ac\ub7ec \uc62c\ub77c\uac11\ub2c8\ub2e4. \ub450 \uc6d0\ub8cc \ubaa8\ub450 \uc6a9\uc735 \uc2dc \ube44\uacb0\uc815\uc9c8 SiO\u2082 \uad6c\uc870\ub97c \ud615\uc131\ud558\uc9c0\ub9cc, \ubd88\uc21c\ubb3c \uad6c\uc131, \ud558\uc774\ub4dc\ub85d\uc2e4 \ud568\ub7c9, \ub2ec\uc131 \uac00\ub2a5\ud55c \uc21c\ub3c4 \uc218\uc900\uc5d0\uc11c \ub098\ud0c0\ub098\ub294 \ucc28\uc774\ub294 \ub9e4\uc6b0 \ucee4\uc11c, \uae4c\ub2e4\ub85c\uc6b4 \uc6a9\ub3c4\uc5d0\uc11c\ub294 \uc11c\ub85c \ub2e4\ub978 \uc131\ub2a5 \ub4f1\uae09\uc73c\ub85c \ubd84\ub958\ub429\ub2c8\ub2e4.<\/p>\n<h3>\ucc9c\uc5f0 \uc11d\uc601 \uacb0\uc815 \u2014 \uae30\uc6d0, \uc21c\ub3c4 \ubc0f \uad6c\uc870\uc801 \uc81c\uc57d \uc870\uac74<\/h3>\n<p>\ucc9c\uc5f0 \uc11d\uc601 \uacb0\uc815\uc740 \uc9c0\uc9c8\ud559\uc801 \uc2dc\uac04 \uaddc\ubaa8\uc5d0 \uac78\uccd0 \uc5f4\uc218 \uc791\uc6a9\uc744 \ud1b5\ud574 \ud615\uc131\ub418\uba70, \ucd5c\uace0\uae09 \uad11\uc0c1\uc740 \ube0c\ub77c\uc9c8, \ub9c8\ub2e4\uac00\uc2a4\uce74\ub974, \uadf8\ub9ac\uace0 \uc911\uad6d \uc77c\ubd80 \uc9c0\uc5ed\uc5d0 \uc9d1\uc911\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \uad11\ud559 \ubc0f \uc0b0\uc5c5\uc6a9\uc73c\ub85c \uc120\ubcc4\ub41c \ucc44\uad74 \uacb0\uc815\uc740 \u2018\ub77c\uc2a4\uce74(lascas)\u2019\ub85c \ubd84\ub958\ub418\ub294\ub370, \uc774\ub294 \ub0b4\ud3ec\ubb3c\uc774 \uac70\uc758 \uc5c6\uace0 \ud06c\uae30\uac00 \ud06c\uba70 \uc721\uc548\uc73c\ub85c \ubcfc \ub54c \ud22c\uba85\ud55c \ud30c\ud3b8\uc744 \uc758\ubbf8\ud558\uba70, \uc804\uccb4 \uc11d\uc601 \uad11\uc11d \uc0dd\uc0b0\ub7c9 \uc911 \uadf9\ud788 \uc77c\ubd80\uc5d0 \ubd88\uacfc\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc720\ub9ac \uae30\uad6c \uc81c\uc870\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ucc9c\uc5f0 \uc11d\uc601\uc758 SiO\u2082 \uc21c\ub3c4\ub294 \uc77c\ubc18\uc801\uc73c\ub85c <strong>99.9% \ubc0f 99.99%<\/strong>, \ub098\uba38\uc9c0 \ubd80\ubd84\uc740 \uc54c\ub8e8\ubbf8\ub284(Al\u00b3\u207a), \ucca0(Fe\u00b2\u207a\/Fe\u00b3\u207a), \ud2f0\ud0c0\ub284(Ti\u2074\u207a), \ub9ac\ud2ac(Li\u207a) \ub4f1\uc758 \ubbf8\ub7c9 \uce58\ud658 \ubd88\uc21c\ubb3c\ub85c \ucc44\uc6cc\uc838 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc6d0\uc18c\ub4e4\uc740 \uc9c0\uc9c8\ud559\uc801 \uacb0\uc815\ud654 \uacfc\uc815\uc5d0\uc11c \uacb0\uc815 \uaca9\uc790\uc5d0 \uce68\ud22c\ud558\uac8c \ub418\uba70, \ubb3c\ub9ac\uc801 \uc120\ubcc4\uc774\ub098 \uc77c\ubc18\uc801\uc778 \uc0b0 \uc138\ucc99\ub9cc\uc73c\ub85c\ub294 \uc644\uc804\ud788 \uc81c\uac70\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. <strong>\uc54c\ub8e8\ubbf8\ub284 \ubc0f \uc54c\uce7c\ub9ac \uae08\uc18d \ubd88\uc21c\ubb3c\uc740 \ubc31\ub9cc \ubd84\uc758 \uba87\uc5d0 \ubd88\uacfc\ud55c \ub0ae\uc740 \ub18d\ub3c4\uc5d0\uc11c\ub3c4 \uace0\uc628\uc5d0\uc11c \uc810\ub3c4\ub97c \ub0ae\ucd94\uace0 \uc790\uc678\uc120(UV) \uc601\uc5ed\uc5d0 \ud761\uc218\ub300\ub97c \uc720\ubc1c\ud569\ub2c8\ub2e4.<\/strong>, \uc774\ub85c \uc778\ud574 \uace0\uc21c\ub3c4 \ubc0f \uad11\ud559 \ubd84\uc57c\uc5d0\uc11c \ucc9c\uc5f0 \uc6a9\uc735 \uc11d\uc601\uc758 \uc131\ub2a5 \uc0c1\ud55c\uc120\uc774 \uc9c1\uc811\uc801\uc73c\ub85c \uc81c\ud55c\ub41c\ub2e4.<\/p>\n<p>\ucc9c\uc5f0 \uc11d\uc601\uc740 \ub610\ud55c \uad6c\uc870\uc801\uc73c\ub85c \uc911\uc694\ud55c \ud2b9\uc9d5\uc778 \u2018\uacb0\uc815\uc131\u2019\uc744 \uc9c0\ub2c8\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ucc44\uad74\ub41c \uc0c1\ud0dc\uc758 \uc11d\uc601\uc740 Si\u2013O\u2013Si \uaca9\uc790\uac00 \uc815\uc5f0\ud558\uac8c \ubc30\uc5f4\ub41c \uacb0\uc815\uc9c8 \uace0\uccb4\uc785\ub2c8\ub2e4. \uc774 \uacb0\uc815\uc9c8 \uad6c\uc870\ub97c 1,710 \u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc6a9\uc735\uc2dc\ud0a4\uba74, \uc6a9\uc735 \uc11d\uc601\uc744 \ud2b9\uc9d5\uc9d3\ub294 \ubb34\uc9c8\uc11c\ud55c \ube44\uacb0\uc815\uc9c8 \uc720\ub9ac \ub124\ud2b8\uc6cc\ud06c\ub85c \ubcc0\ud658\ub418\ub294\ub370, \uc774\ub294 \uc77c\ubc18\uc801\uc778 \uac00\uacf5 \uc870\uac74 \ud558\uc5d0\uc11c\ub294 \ub418\ub3cc\ub9b4 \uc218 \uc5c6\ub294 \ubcc0\ud654\uc785\ub2c8\ub2e4.<\/p>\n<h3>\ud569\uc131 \uc2e4\ub9ac\uce74 \u2014 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\uacfc \ud654\uc5fc \uc735\ud569 \ubc29\uc2dd \uc124\uba85<\/h3>\n<p>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uace0\uc21c\ub3c4 \ud654\ud559 \uc804\uad6c\uccb4\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc774\uc0b0\ud654\uaddc\uc18c\ub97c \uc81c\uc870\ud568\uc73c\ub85c\uc368 \uc9c0\uc9c8\ud559\uc801 \ubd88\uc21c\ubb3c\ub85c \uc778\ud55c \uc81c\uc57d\uc744 \uc644\uc804\ud788 \uadf9\ubcf5\ud569\ub2c8\ub2e4. \uc0b0\uc5c5 \uaddc\ubaa8\uc5d0\uc11c\ub294 \ub450 \uac00\uc9c0 \uc8fc\uc694 \uc81c\uc870 \uacf5\uc815\uc774 \uc0ac\uc6a9\ub418\uba70, \uac01 \uacf5\uc815\uc5d0\uc11c \uc0dd\uc0b0\ub418\ub294 \uc18c\uc7ac\ub294 \uc218\uc0b0\uae30(OH) \ud568\ub7c9\uc774 \uc11c\ub85c \ub2ec\ub77c \uad11\ud559\uc801 \ubc0f \uc5f4\uc801 \uc131\ub2a5\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p>\uadf8\ub9ac\uace0 <strong>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uacf5\uc815<\/strong> \u2014 \ud2b9\ud788 \ud654\uc5fc \uac00\uc218\ubd84\ud574 \u2014\ub294 \uc0b0\uc18c-\uc218\uc18c \ud654\uc5fc \ub0b4\uc5d0\uc11c \uc0ac\uc5fc\ud654\uaddc\uc18c(SiCl\u2084) \ub610\ub294 \uc625\ud0c0\uba54\ud2f8\uc0ac\uc774\ud074\ub85c\ud14c\ud2b8\ub77c\uc2e4\ub85d\uc0b0(OMCTS)\uacfc \uac19\uc740 \uc720\uae30\uaddc\uc18c \ud654\ud569\ubb3c\uc744 \uc5f0\uc18c\uc2dc\ud0a4\ub294 \uacfc\uc815\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4. \uc774 \ubc18\uc751\uc744 \ud1b5\ud574 \uc0dd\uc131\ub41c \ucd08\ubbf8\uc138 SiO\u2082 \uadf8\uc744\uc74c \uc785\uc790\ub294 \ud68c\uc804\ud558\ub294 \ub9e8\ub4dc\ub9b4\uc5d0 \uce68\ucc29\ub41c \ud6c4 \uc18c\uacb0\ub418\uc5b4 \ud22c\uba85\ud55c \uc720\ub9ac \ube14\ub7ad\ud06c\ub85c \ub9cc\ub4e4\uc5b4\uc9d1\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc744 \ud1b5\ud574 \uc21c\ub3c4\uac00 <strong>99.9999% SiO\u2082<\/strong>, \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc740 10\uc5b5 \ubd84\uc758 1 \ubbf8\ub9cc\uc758 \uc218\uc900\uc73c\ub85c \uce21\uc815\ub429\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc218\uc18c \ud654\uc5fc\uc740 \uc720\ub9ac \ub124\ud2b8\uc6cc\ud06c\uc5d0 \uc0c1\ub2f9\ud55c \uc591\uc758 OH\ub97c \ub3c4\uc785\ud558\uc5ec, \ub2e4\uc74c\uacfc \uac19\uc774 \ubd84\ub958\ub418\ub294 \ubb3c\uc9c8\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. <strong>\u201c\uc2b5\uc2dd\u201d \ud569\uc131 \uc2e4\ub9ac\uce74<\/strong> OH \ub18d\ub3c4\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 800~1,200 ppm \uc0ac\uc774\uc785\ub2c8\ub2e4.<\/p>\n<p>\uadf8\ub9ac\uace0 <strong>\ud654\uc5fc \uc735\ud569(\ubca0\ub974\ub204\uc774\ud615) \uacf5\uc815<\/strong> \uc0b0\uc18c-\uc218\uc18c \ubc84\ub108\uc5d0\uc11c \uace0\uc21c\ub3c4 SiO\u2082 \ubd84\ub9d0\uc744 \uc9c1\uc811 \uc6a9\uc735\uc2dc\ucf1c, \uc7ac\ub8cc\ub97c \ubd88\ub85c \uc751\uc9d1\uc2dc\ud0b5\ub2c8\ub2e4. \uc9c4\uacf5 \ub610\ub294 \ubd88\ud65c\uc131 \ubd84\uc704\uae30\uc5d0\uc11c\uc758 \uc804\uae30 \uc6a9\uc735 \u2014 \ub2e4\uc74c\uc744 \uc0dd\uc0b0\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. <strong>\u201c\uac74\uc870\u201d \ud569\uc131 \uc2e4\ub9ac\uce74<\/strong> \u2014 \uc218\uc18c \ub178\ucd9c\uc744 \uc81c\uac70\ud558\uace0 OH \ud568\ub7c9\uc744 1 ppm \ubbf8\ub9cc\uc73c\ub85c \ub0ae\ucda5\ub2c8\ub2e4. \uc774\ub7ec\ud55c OH \ud568\ub7c9\uc758 \ucc28\uc774\ub294 \ub2e8\uc21c\ud55c \uac89\uce58\ub808\uac00 \uc544\ub2d9\ub2c8\ub2e4: <strong>OH \ud568\ub7c9\uc774 \ub192\uc740 \uc2e4\ub9ac\uce74\ub294 \uc57d 2,730 nm \ud30c\uc7a5\uc758 \uc801\uc678\uc120\uc744 \ud761\uc218\ud55c\ub2e4<\/strong>, \uc774\ub85c \uc778\ud574 \uadfc\uc801\uc678\uc120 \uad11\ud559 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c\ub294 \uac74\uc2dd \ub4f1\uae09\uc758 \uc0ac\uc6a9\uc774 \ud544\uc218\uc801\uc778 \ubc18\uba74, \uc2b5\uc2dd \ub4f1\uae09\uc740 \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 \ub0ae\uc544 \uc790\uc678\uc120 \ud22c\uacfc\uc131\uc774 \ub354 \uc6b0\uc218\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc735\ud569 \uc11d\uc601 \ub300 \uc735\ud569 \uc2e4\ub9ac\uce74 \u2014 \uc2e4\uc81c\ub85c \uc911\uc694\ud55c \ucc28\uc774\uc810<\/h3>\n<p>\u201c\uc735\ud569 \uc11d\uc601\u201d\uacfc \u201c\uc735\ud569 \uc2e4\ub9ac\uce74\u201d\ub77c\ub294 \uc6a9\uc5b4\ub294 \ub9ce\uc740 \uc81c\ud488 \uce74\ud0c8\ub85c\uadf8\uc5d0\uc11c \ud63c\uc6a9\ub418\uc5b4 \uc0ac\uc6a9\ub418\uc9c0\ub9cc, \uc7ac\ub8cc \uacfc\ud559 \ubc0f \uc815\ubc00 \uc81c\uc870 \ubd84\uc57c\uc5d0\uc11c\ub294 \ud654\ud559\uc801\uc73c\ub85c\ub098 \uc131\ub2a5 \uba74\uc5d0\uc11c \uc11c\ub85c \ub2e4\ub978 \ub450 \uac00\uc9c0 \uc18c\uc7ac\ub97c \uac00\ub9ac\ud0b5\ub2c8\ub2e4. \uae4c\ub2e4\ub85c\uc6b4 \uc6a9\ub3c4\uc5d0 \uc0ac\uc6a9\ud560 \ubd80\ud488\uc744 \uc120\uc815\ud558\uae30 \uc804\uc5d0 \uc774\ub7ec\ud55c \ucc28\uc774\ub97c \uba85\ud655\ud788 \ud30c\uc545\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\ud4e8\uc988\ub4dc \ucffc\uce20<\/strong> \ucc9c\uc5f0 \uc11d\uc601 \uacb0\uc815\uccb4\ub97c \ub179\uc5ec \uc81c\uc870\ub429\ub2c8\ub2e4. \uc774 \ubb3c\uc9c8\uc758 \uc21c\ub3c4\ub294 \uc9c0\uc9c8\ud559\uc801 \ubd88\uc21c\ubb3c \ud568\ub7c9\uc5d0 \uc758\ud574 \uc81c\ud55c\ub418\uba70, OH \ud568\ub7c9\uc740 \uc911\uac04 \uc218\uc900(\uc77c\ubc18\uc801\uc73c\ub85c 150\u2013300 ppm)\uc774\uace0, \uc790\uc678\uc120 \ud22c\uacfc \ucc28\ub2e8\uc810\uc740 \ub300\ub7b5 <strong>250nm<\/strong> \uc794\ub958 \uae08\uc18d \ud761\uc218\uccb4 \ub54c\ubb38\uc5d0. <strong>\uc735\ud569 \uc2e4\ub9ac\uce74<\/strong>\ubc18\uba74, \uc774 \ubb3c\uc9c8\uc740 \ud569\uc131 SiO\u2082 \uc804\uad6c\uccb4\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc870\ub418\uba70, ppb \ubbf8\ub9cc\uc758 \uae08\uc18d\uae09 \uc21c\ub3c4\ub97c \ub2ec\uc131\ud558\uace0, \uc790\uc678\uc120 \ucc28\ub2e8 \ubc94\uc704\ub294 <strong>150\u2013180 nm<\/strong> OH \ud568\ub7c9 \ubc0f \ub4f1\uae09\uc5d0 \ub530\ub77c \ub2e4\ub985\ub2c8\ub2e4.<\/p>\n<p>\ub450 \uc7ac\ub8cc \ubaa8\ub450 \ub3d9\uc77c\ud55c \ube44\uc815\uc9c8 SiO\u2082 \ub124\ud2b8\uc6cc\ud06c \uad6c\uc870\ub97c \uac00\uc9c0\uba70, \uc5f0\ud654\uc810\uc774 \uc57d 1,665 \u00b0C\ub85c \ube44\uc2b7\ud558\uace0, \uc5f4\ud33d\ucc3d \uacc4\uc218\ub3c4 \uc57d 0.55 \u00d7 10\u207b\u2076\/\u00b0C\ub85c \ub3d9\uc77c\ud569\ub2c8\ub2e4. \ucc28\uc774\uc810\uc740 \ubd84\uad11 \uc131\ub2a5\uacfc \uc624\uc5fc \uc704\ud5d8\uc5d0 \uc788\ub294\ub370, \uc774\ub294 \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc6e8\uc774\ud37c \uac00\uacf5 \ubc0f \uc790\uc678\uc120 \ubd84\uad11 \uce21\uc815\uc5d0\uc11c \uacb0\uc815\uc801\uc778 \uc694\uc18c\uac00 \ub418\ub294 \ub9e4\uac1c\ubcc0\uc218\ub4e4\ub85c, \ubbf8\ub7c9\uc758 \uae08\uc18d \uc624\uc5fc\uc774\ub098 \uc790\uc678\uc120 \ucef7\uc624\ud504\uc758 \ud3b8\ucc28\ub9cc\uc73c\ub85c\ub3c4 \ud574\ub2f9 \ubd80\ud488\uc774 \ubd88\ud569\uaca9 \ucc98\ub9ac\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h4>\uc735\ud569 \uc11d\uc601 \ub300 \uc735\ud569 \uc2e4\ub9ac\uce74 \u2014 \ud575\uc2ec \ucc28\ubcc4\ud654 \uc694\uc18c<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc18d\uc131<\/th>\n<th>\uc735\ud569 \uc11d\uc601 (\ucc9c\uc5f0)<\/th>\n<th>\uc6a9\uc735 \uc2e4\ub9ac\uce74(\ud569\uc131)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>SiO\u2082 \uc21c\ub3c4(%)<\/td>\n<td>99.9 \u2013 99.99<\/td>\n<td>99.9999+<\/td>\n<\/tr>\n<tr>\n<td>OH \ud568\ub7c9(ppm)<\/td>\n<td>150 - 300<\/td>\n<td>&lt;1 (\uac74\uc2dd) \/ 800\u20131,200 (\uc2b5\uc2dd)<\/td>\n<\/tr>\n<tr>\n<td>UV \ucc28\ub2e8(nm)<\/td>\n<td>~250<\/td>\n<td>~150-180<\/td>\n<\/tr>\n<tr>\n<td>\uae08\uc18d \ubd88\uc21c\ubb3c<\/td>\n<td>\ub0ae\uc74c (ppm \ubc94\uc704)<\/td>\n<td>\ucd08\uc800\ub18d\ub3c4 (ppb \ubbf8\ub9cc)<\/td>\n<\/tr>\n<tr>\n<td>\uc8fc\uc694 \uc6d0\ub8cc<\/td>\n<td>\ucc44\uad74\ub41c \uc11d\uc601 \uacb0\uc815<\/td>\n<td>SiCl\u2084 \/ \uc720\uae30\uc2e4\ub780<\/td>\n<\/tr>\n<tr>\n<td>\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uacc4\uce35<\/td>\n<td>\uc0b0\uc5c5\uc6a9, \uc77c\ubc18 \uc2e4\ud5d8\uc2e4<\/td>\n<td>\ubc18\ub3c4\uccb4, \uc790\uc678\uc120 \uad11\ud559<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc744 \ucc28\ubcc4\ud654\ud558\ub294 \ubb3c\ub9ac\uc801\u00b7\ud654\ud559\uc801 \ud2b9\uc131<\/h2>\n<p>\uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc774 \ubb34\uc5c7\uc73c\ub85c \ub9cc\ub4e4\uc5b4\uc84c\ub294\uc9c0 \ud30c\uc545\ud558\ub294 \uac83\ub9cc\uc73c\ub85c\ub294 \uc804\uccb4 \uadf8\ub9bc\uc758 \uc808\ubc18\uc5d0 \ubd88\uacfc\ud569\ub2c8\ub2e4. \ube44\uacb0\uc815\uc9c8 SiO\u2082 \uad6c\uc870\uc5d0\uc11c \ube44\ub86f\ub418\ub294 \uce21\uc815 \uac00\ub2a5\ud55c \ubb3c\ub9ac\uc801\u00b7\ud654\ud559\uc801 \ud2b9\uc131\uc744 \uc774\ud574\ud574\uc57c\ub9cc, \uc720\ub9ac \uae30\ubc18 \uc18c\uc7ac\uac00 \uc131\ub2a5\uc758 \ud55c\uacc4\uc5d0 \ub3c4\ub2ec\ud558\ub294 \ubaa8\ub4e0 \uc0c1\ud669\uc5d0\uc11c \uc11d\uc601\uc774 \ub300\uccb4\ud560 \uc218 \uc5c6\ub294 \uc704\uce58\ub97c \ucc28\uc9c0\ud558\ub294 \uc774\uc720\ub97c \uc815\ud655\ud788 \uc124\uba85\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc735\ud569 \uc11d\uc601\uc774 \uc774\ucc98\ub7fc \ub2e4\uc591\ud55c \uc0b0\uc5c5 \ubd84\uc57c\uc5d0\uc11c \ub110\ub9ac \ucc44\ud0dd\ub41c \ub370\uc5d0\ub294 \uc5b4\ub5a4 \ub2e8\uc77c \ud2b9\uc131 \ud558\ub098\ub9cc\uc73c\ub85c\ub294 \uc124\uba85\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uc624\ud788\ub824 \uadf9\ub3c4\uc758 \uc5f4\uc801 \uc548\uc815\uc131, \uc790\uc678\uc120(UV)\ubd80\ud130 \uadfc\uc801\uc678\uc120(NIR)\uc5d0 \uc774\ub974\ub294 \uad11\ubc94\uc704\ud55c \uad11 \ud22c\uacfc\uc728, \uadf8\ub9ac\uace0 \ud654\ud559\uc801\uc73c\ub85c \uacf5\uaca9\uc801\uc778 \ub9e4\uccb4\uc5d0 \ub300\ud55c \ub0b4\uc131\uc774 \ub3d9\uc2dc\uc5d0 \uacb0\ud569\ub418\uc5b4 \uc788\uae30 \ub54c\ubb38\uc5d0, \uc774 \uc18c\uc7ac\uad70\uc740 \uace0\uc131\ub2a5 \ud658\uacbd\uc5d0\uc11c \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8\ub098 \uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac \ub300\uccb4\uc7ac\ubcf4\ub2e4 \uc555\ub3c4\uc801\uc73c\ub85c \ub6f0\uc5b4\ub09c \uc131\ub2a5\uc744 \ubc1c\ud718\ud569\ub2c8\ub2e4. \uac01 \ud2b9\uc131\uc740 \ub2e4\ub978 \ud2b9\uc131\ub4e4\uc758 \uc7a5\uc810\uc744 \ub354\uc6b1 \ub4b7\ubc1b\uce68\ud558\uba70, \uc774 \ubaa8\ub4e0 \ud2b9\uc131\uc774 \uacb0\ud569\ub418\uc5b4 \uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc774 \uc791\ub3d9\ud558\ub294 \uc131\ub2a5 \ubc94\uc704\ub97c \uc815\uc758\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc5f4\uc801 \uc131\ub2a5 \u2014 \uc0ac\uc6a9 \uc628\ub3c4 \ubc0f \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131<\/h3>\n<p>\uc735\ud569 \uc11d\uc601\uc740 \ucd5c\ub300 \uc57d <strong>1,100 \u00b0C<\/strong>, \ub179\ub294\uc810\uc740 <strong>1,665 \u00b0C<\/strong> \u2014 \uc774\ub7ec\ud55c \ud2b9\uc131 \ub355\ubd84\uc5d0 \uc774 \uc18c\uc7ac\ub294 \uc57d 820 \u00b0C\uc5d0\uc11c \uc5f0\ud654\ub418\ub294 \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\ubcf4\ub2e4 \ud6e8\uc52c \ub192\uc740 \uc628\ub3c4 \ubc94\uc704\uc5d0\uc11c \uc0ac\uc6a9\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uae30\uacc4\uc801 \ud558\uc911\uc774 \ubbf8\ubbf8\ud55c \uacbd\uc6b0, 1,300 \u00b0C\uae4c\uc9c0\uc758 \ub2e8\uae30\uc801\uc778 \uc628\ub3c4 \uc0c1\uc2b9\ub3c4 \uce58\uba85\uc801\uc778 \ubcc0\ud615 \uc5c6\uc774 \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc735\ud569 \uc11d\uc601\uc758 \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131\uc740 \uc57d <strong>0.55 \u00d7 10-\u2076\/\u00b0C<\/strong> \u2014 \uc774\ub294 3.3 \u00d7 10\u207b\u2076\/\u00b0C\uc778 \ubd95\uaddc\uc0b0 \uc720\ub9ac\ubcf4\ub2e4 \uc57d 6\ubc30 \ub0ae\uace0, 7.5 \u00d7 10\u207b\u2076\/\u00b0C\uc778 \ud45c\uc900 \uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ubcf4\ub2e4 \uac70\uc758 14\ubc30 \ub0ae\uc740 \uc218\uce58\uc785\ub2c8\ub2e4. 1,000 \u00b0C\ub85c \uac00\uc5f4\ub41c \uc6a9\uad11\ub85c\uc5d0\uc11c \uc6a9\uc735 \uc11d\uc601\uad00\uc744 \uaebc\ub0b4 \uc8fc\ubcc0 \uacf5\uae30\uc5d0 \ub178\ucd9c\uc2dc\ud0ac \ub54c, \ubcbd\uba74\uc744 \uac00\ub85c\uc9c0\ub974\ub294 \uc5f4 \uad6c\ubc30\ub85c \uc778\ud574 \ubc1c\uc0dd\ud558\ub294 \uc778\uc7a5 \uc751\ub825\uc740 \ub2e4\ub978 \uc5b4\ub5a4 \uc0c1\uc6a9 \uc720\ub9ac \ub300\uccb4\uc7ac\uc5d0 \ube44\ud574 \ube44\ub840\uc801\uc73c\ub85c \ub354 \uc791\uae30 \ub54c\ubb38\uc5d0, \uae09\uaca9\ud55c \uc5f4 \uc0ac\uc774\ud074\ub9c1 \ud558\uc5d0\uc11c \ud30c\uc190\ub420 \uac00\ub2a5\uc131\uc774 \ud6e8\uc52c \ub0ae\uc2b5\ub2c8\ub2e4. <strong>\uc774\ub7ec\ud55c \ub0ae\uc740 \uc5f4\ud33d\ucc3d\uacc4\uc218(CTE) \ud604\uc0c1\uc740 \ube44\uc815\uc9c8 Si\u2013O\u2013Si \ub124\ud2b8\uc6cc\ud06c\uc758 \uad6c\uc870\uc801 \uacb0\uacfc\ub85c, \uc774 \ub124\ud2b8\uc6cc\ud06c\ub294 \uaca9\uc790 \ud33d\ucc3d\uc774 \uc544\ub2cc \ub124\ud2b8\uc6cc\ud06c\uc758 \ubcc0\ud615\uc744 \ud1b5\ud574 \uc628\ub3c4 \ubcc0\ud654\ub97c \uc0c1\uc1c4\ud569\ub2c8\ub2e4.<\/strong><\/p>\n<p>\ud29c\ube0c\ub85c \uc6a9\uad11\ub85c \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c, \uc11d\uc601 \ubc18\uc751\uad00\uc740 \uc218\ub144\uc5d0 \ub2ec\ud558\ub294 \uc0ac\uc6a9 \uc218\uba85 \ub3d9\uc548 \ub9e4\uc77c \uc5ec\ub7ec \ucc28\ub840 \uc2e4\uc628\uacfc 1,000 \u00b0C \uc0ac\uc774\ub97c \ubc18\ubcf5\uc801\uc73c\ub85c \uc624\uac00\uac8c \ub418\ub294\ub370, \uc774\ub7ec\ud55c \uc0ac\uc6a9 \uc870\uac74\uc774\ub77c\uba74 \ubd95\uaddc\uc0b0 \uc720\ub9ac \ubd80\ud488\uc740 \uba70\uce60 \ub9cc\uc5d0 \ud30c\uc190\ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uc790\uc678\uc120, \uac00\uc2dc\uad11\uc120 \ubc0f \uc801\uc678\uc120 \ud30c\uc7a5 \ub300\uc5ed \uc804\ubc18\uc5d0 \uac78\uce5c \uad11\ud559\uc801 \ud22c\uba85\ub3c4<\/h3>\n<p>\uc735\ud569 \uc11d\uc601\uc758 \ubd84\uad11 \ud22c\uacfc \ub300\uc5ed\uc740 \ub300\ub7b5 <strong>\uc9c4\uacf5 \uc790\uc678\uc120 \uc601\uc5ed\uc758 150 nm\ubd80\ud130 \uc911\uc801\uc678\uc120 \uc601\uc5ed\uc758 3,500 nm\uae4c\uc9c0<\/strong>, \uc77c\ubc18 \uc0b0\ud654\ubb3c \uc720\ub9ac\uac00 \ub3c4\uc800\ud788 \ub530\ub77c\uc62c \uc218 \uc5c6\ub294 \ubc94\uc704\ub97c \uc544\uc6b0\ub985\ub2c8\ub2e4. \uc774\uc5d0 \ube44\ud574 \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\ub294 \ub300\ub7b5 <strong>310nm<\/strong>, \uc774\ub85c \uc778\ud574 \uc790\uc678\uc120 \ubd84\uad11\ud559, \uc790\uc678\uc120 \uad11\ud654\ud559 \ubc0f \uc2ec\uc790\uc678\uc120 \ub808\uc774\uc800 \uad11\ud559 \ubd84\uc57c\uc5d0\uc11c\ub294 \uc0ac\uc6a9\ud560 \uc218 \uc5c6\uac8c \ub41c\ub2e4.<\/p>\n<p>\uc774 \ubc94\uc704 \ub0b4\uc5d0\uc11c \uc804\ub2ec \ud6a8\uc728\uc740 OH \ud568\ub7c9\uc5d0 \ud06c\uac8c \uc88c\uc6b0\ub41c\ub2e4. <strong>\uc2b5\uc2dd \ud569\uc131 \uc2e4\ub9ac\uce74 \ub4f1\uae09\uc740 160\u2013180 nm\uae4c\uc9c0\uc758 \uc790\uc678\uc120(UV) \ud30c\uc7a5\ub300\uc5d0\uc11c \ud6a8\uc728\uc801\uc73c\ub85c \ud22c\uacfc\ud569\ub2c8\ub2e4.<\/strong>, \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 \uadf9\ud788 \ub0ae\uae30 \ub54c\ubb38\uc774\uc9c0\ub9cc, \ub300\ub7b5 <strong>2,730 nm<\/strong> \uc774\ub294 Si\u2013OH \uc2e0\ucd95 \uc9c4\ub3d9\uc5d0 \uc758\ud574 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \uac74\uc870 \ud569\uc131 \uc2e4\ub9ac\uce74 \ub4f1\uae09\uc740 OH \ud568\ub7c9\uc744 1 ppm \ubbf8\ub9cc\uc73c\ub85c \ub0ae\ucda4\uc73c\ub85c\uc368 \uc774 \ub300\uc5ed\uc744 \uc5b5\uc81c\ud558\uba70, \uadf8 \ub300\uac00\ub85c \uc790\uc678\uc120 \ucc28\ub2e8 \ud30c\uc7a5\uc774 \uc57d\uac04 \ub192\uc544\uc9c0\ub294 \ub300\uc2e0 \uad11\ub300\uc5ed \uadfc\uc801\uc678\uc120 \ud22c\uacfc\ub97c \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud2b9\uc815 \ud30c\uc7a5 \ubc94\uc704\uc5d0 \uc801\ud569\ud55c OH \ud568\ub7c9 \ub4f1\uae09\uc744 \uc120\ud0dd\ud558\ub294 \uac83\uc740 \ub2e8\uc21c\ud55c \ubbf8\uc138 \uc870\uc815\uc774 \uc544\ub2c8\ub77c, \uadfc\ubcf8\uc801\uc778 \uc0ac\uc591 \uacb0\uc815\uc785\ub2c8\ub2e4. <strong>250 nm \ubbf8\ub9cc\uc758 UV-Vis \ubd84\uad11\uad11\ub3c4 \uce21\uc815\uc5d0\uc11c\ub294, \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 \uc801\uc740 \uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub9cc\uc774 \uc2e0\ub8b0\ud560 \uc218 \uc788\uace0 \uc7ac\ud604\uc131 \uc788\ub294 \uae30\uc900\uc120 \ud22c\uacfc\uc728\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/strong><\/p>\n<p>\ucc9c\uc5f0 \uc6a9\uc735 \uc11d\uc601\uc740 \uac00\uc2dc\uad11\uc120 \uc601\uc5ed\uacfc \uadfc\uc790\uc678\uc120 \uc601\uc5ed\uae4c\uc9c0 \uc801\uc808\ud788 \ud22c\uacfc\ud558\ub294 \uc911\uac04 \uc218\uc900\uc758 \ud2b9\uc131\uc744 \uc9c0\ub2c8\uace0 \uc788\uc5b4, \uad11\ud559\uc801 \uc131\ub2a5\ubcf4\ub2e4\ub294 \ub0b4\uc5f4\uc131\uacfc \ub0b4\ud654\ud559\uc131\uc774 \ub354 \uc911\uc694\ud55c \uace0\uc628 \uc2e4\ud5d8\uc2e4 \uc791\uc5c5\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc0b0, \uc6a9\ub9e4 \ubc0f \uace0\uc21c\ub3c4 \uacf5\uc815 \uc720\uccb4\uc5d0 \ub300\ud55c \ud654\ud559\uc801 \ub0b4\uad6c\uc131<\/h3>\n<p>\uc6a9\uc735 \uc11d\uc601\uc740 \uace0\uc628\uc5d0\uc11c \uac70\uc758 \ubaa8\ub4e0 \ubb34\uae30\uc0b0\uc5d0 \ub300\ud574 \ud0c1\uc6d4\ud55c \ub0b4\uc131\uc744 \ubcf4\uc785\ub2c8\ub2e4. <strong>\uc5fc\uc0b0(HCl), \ud669\uc0b0(H\u2082SO\u2084), \uc9c8\uc0b0(HNO\u2083), \uc778\uc0b0(H\u2083PO\u2084)<\/strong> \u2014 300 \u00b0C\uc5d0 \uc721\ubc15\ud558\ub294 \uc628\ub3c4\uc5d0\uc11c \ub18d\ucd95\ub41c \ud615\ud0dc\ub97c \ud3ec\ud568\ud558\uc5ec \u2014 \uc11d\uc601 \uc6a9\uae30\uc5d0\uc11c \ud45c\uba74 \uc6a9\ud574\ub098 \uc624\uc5fc \ubb3c\uc9c8\uc758 \uc6a9\ucd9c\uc744 \uac70\uc758 \uc77c\uc73c\ud0a4\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc740 \uc644\uc804\ud788 \uac00\uad50 \uacb0\ud569\ub41c Si\u2013O\u2013Si \ub124\ud2b8\uc6cc\ud06c\uc5d0\uc11c \ube44\ub86f\ub41c \uac83\uc73c\ub85c, \uc774 \ub124\ud2b8\uc6cc\ud06c\ub294 \ub300\ubd80\ubd84\uc758 \uc2e4\ud5d8\uc2e4 \uc870\uac74\uc5d0\uc11c \uc0b0\uc131 \uc218\uc131 \ub9e4\uccb4\uc5d0 \ub300\ud574 \uc27d\uac8c \uac00\uc218\ubd84\ud574\ub418\ub294 \uacb0\ud569\uc744 \ub098\ud0c0\ub0b4\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc735\ud569 \uc11d\uc601\uc758 \uc8fc\uc694 \ud654\ud559\uc801 \ucde8\uc57d\uc810\uc740 \ub2e4\uc74c\uc758 \ubd80\uc2dd\uc5d0 \uc758\ud55c \uac83\uc785\ub2c8\ub2e4. <strong>\ubd88\ud654\uc218\uc18c\uc0b0 (HF)<\/strong> \uadf8\ub9ac\uace0 \uc57d 100 \u00b0C \uc774\uc0c1\uc758 \uace0\uc628 \ub18d\ucd95 \uc54c\uce7c\ub9ac \uc6a9\uc561(NaOH, KOH)\uc5d0 \uc758\ud574. HF\ub294 \uc2e4\ub9ac\uce74\uc640 \uc9c1\uc811 \ubc18\uc751\ud558\uc5ec \uc218\uc6a9\uc131 \ud654\ud569\ubb3c\uc744 \ud615\uc131\ud55c\ub2e4. <a href=\"https:\/\/en.wikipedia.org\/wiki\/Hexafluorosilicic_acid\">\ud5e5\uc0ac\ud50c\ub8e8\uc624\ub85c\uc2e4\ub9ac\uc2e4\uc0b0 (H\u2082SiF\u2086)<\/a><sup id=\"fnref1:1\"><a href=\"#fn:1\" class=\"footnote-ref\">1<\/a><\/sup>, \ubc18\uba74 \ub728\uac70\uc6b4 \uc54c\uce7c\ub9ac\ub294 \uc218\uc0b0\ud654\ubb3c \ucd09\ub9e4\uc5d0 \uc758\ud55c \ub124\ud2b8\uc6cc\ud06c \uc6a9\ud574\ub97c \ucd09\uc9c4\ud569\ub2c8\ub2e4. \uc774 \ub450 \uac00\uc9c0 \ubd80\uc2dd \uba54\ucee4\ub2c8\uc998\uc740 \uc798 \uc54c\ub824\uc838 \uc788\uc73c\uba70 \uc2e4\ud5d8\uc2e4 \ud504\ub85c\ud1a0\ucf5c\uc5d0 \ubc18\uc601\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \uc989, HF\uac00 \ud3ec\ud568\ub41c \uc720\uccb4\ub098 \uac15\uc54c\uce7c\ub9ac\uc131 \ubd84\ud574 \uc808\ucc28\uc5d0\ub294 \uc808\ub300\ub85c \uc11d\uc601\uc744 \uc0ac\uc6a9\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ubbf8\ub7c9 \uc6d0\uc18c \ubd84\uc11d\uc5d0\uc11c, \uc11d\uc601 \uc6a9\uae30 \ubcbd\uba74\uc5d0\uc11c \ube44\ub86f\ub418\ub294 \uc624\uc5fc \uae30\uc5ec\ub3c4\ub294 \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\uc5d0\uc11c \ube44\ub86f\ub418\ub294 \uac83\ubcf4\ub2e4 \uba87 \ucc28\uc6d0 \ub354 \ub0ae\ub2e4.<\/strong>, \uc5ec\uae30\uc11c \ubd95\uc18c, \ub098\ud2b8\ub968, \uc54c\ub8e8\ubbf8\ub284\uc774 \uce21\uc815 \uac00\ub2a5\ud55c \ub18d\ub3c4\ub85c \uc0b0\uc131 \uc6a9\uc561\uc73c\ub85c \uc6a9\ucd9c\ub429\ub2c8\ub2e4. ICP-MS \ubc0f ICP-OES \uc2dc\ub8cc \uc804\ucc98\ub9ac \uacfc\uc815\uc5d0\uc11c, \uc774\ub7ec\ud55c \ubc30\uacbd \ube14\ub7ad\ud06c \uae30\uc5ec\ub3c4\uc758 \ucc28\uc774\ub294 \uc9c1\uc811 \uce21\uc815 \uac00\ub2a5\ud558\uba70 \ubd84\uc11d\uc801\uc73c\ub85c \uc720\uc758\ubbf8\ud569\ub2c8\ub2e4.<\/p>\n<h4>\uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc758 \uc5f4\uc801 \ubc0f \ud654\ud559\uc801 \ud2b9\uc131<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc18d\uc131<\/th>\n<th>\ud4e8\uc988\ub4dc \ucffc\uce20<\/th>\n<th>\ubd95\uaddc\uc0b0 \uc720\ub9ac<\/th>\n<th>\uc18c\ub2e4 \ub77c\uc784 \uc720\ub9ac<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4(\u00b0C)<\/td>\n<td>1,100<\/td>\n<td>500<\/td>\n<td>300<\/td>\n<\/tr>\n<tr>\n<td>\uc5f0\ud654\uc810(\u00b0C)<\/td>\n<td>1,665<\/td>\n<td>820<\/td>\n<td>730<\/td>\n<\/tr>\n<tr>\n<td>CTE(\u00d710-\u2076\/\u00b0C)<\/td>\n<td>0.55<\/td>\n<td>3.3<\/td>\n<td>7.5<\/td>\n<\/tr>\n<tr>\n<td>UV \ucc28\ub2e8(nm)<\/td>\n<td>~250 (\ucc9c\uc5f0) \/ ~150 (\ud569\uc131)<\/td>\n<td>~310<\/td>\n<td>~320<\/td>\n<\/tr>\n<tr>\n<td>HF \uc800\ud56d<\/td>\n<td>Poor<\/td>\n<td>Poor<\/td>\n<td>Poor<\/td>\n<\/tr>\n<tr>\n<td>\uace0\uc628 \ub0b4\uc0b0\uc131<\/td>\n<td>\uc6b0\uc218<\/td>\n<td>Good<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<\/tr>\n<tr>\n<td>\uace0\uc628 \uc54c\uce7c\ub9ac \ub0b4\uc131<\/td>\n<td>Poor<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<td>Poor<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\uc11d\uc601 \uc720\ub9ac \uc81c\ud488 \ub300 \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac \u2014 \ud2b9\uc131\ubcc4 \ube44\uad50<\/h2>\n<p>\ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\ub294 \ubd80\ud53c \uae30\uc900\uc73c\ub85c \uc77c\ubc18 \uc2e4\ud5d8\uc2e4 \uc720\ub9ac \uae30\uad6c\uc758 \ub300\ubd80\ubd84\uc744 \ucc28\uc9c0\ud558\uc9c0\ub9cc, \uc628\ub3c4, \ubd84\uad11 \ud22c\uacfc\uc728 \ub610\ub294 \uc624\uc5fc \ud5c8\uc6a9 \ud55c\uacc4\uac00 \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8\uc758 \uc131\ub2a5 \ubc94\uc704\ub97c \ucd08\uacfc\ud558\ub294 \ubd84\uc57c\uc5d0\uc11c\ub294 \uc6a9\uc735 \uc11d\uc601\uc774 \uafb8\uc900\ud788 \uadf8 \uc790\ub9ac\ub97c \ub300\uccb4\ud558\uace0 \uc788\ub2e4.<\/p>\n<p><strong>\uc5f4\uc801 \uc0c1\ud55c\uc120<\/strong> \uc774\uac83\uc774 \uac00\uc7a5 \uc9c1\uc811\uc801\uc778 \ucc28\ubcc4\ud654 \uc694\uc18c\uc785\ub2c8\ub2e4. \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \uc57d 820 \u00b0C\uc5d0\uc11c \uc5f0\ud654\ub418\uba70, \ud45c\uc900 \uc2e4\ud5d8\uc2e4 \ub4f1\uae09\uc758 \uacbd\uc6b0 \ucd5c\ub300 \uc57d 500 \u00b0C\uae4c\uc9c0 \uc5f0\uc18d \uc0ac\uc6a9\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4. \ubc18\uba74, \uc11d\uc601 \uc720\ub9ac \uae30\uad6c\ub294 1,100 \u00b0C\uc5d0\uc11c \uc5f0\uc18d \uc0ac\uc6a9\uc774 \uac00\ub2a5\ud558\uba70, 1,300 \u00b0C\uae4c\uc9c0\uc758 \ub2e8\uae30 \ub178\ucd9c\uc5d0\ub3c4 \uacac\ub51c \uc218 \uc788\uc5b4, \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\ubcf4\ub2e4 \uc5f4\uc801 \uc5ec\uc720\uac00 \ub450 \ubc30 \uc774\uc0c1 \ud07d\ub2c8\ub2e4. <strong>\uc774 \uaca9\ucc28\ub294 \uc810\uc9c4\uc801\uc778 \uac83\uc774 \uc544\ub2c8\ub77c \uadfc\ubcf8\uc801\uc778 \uac83\uc785\ub2c8\ub2e4.<\/strong>, 600 \u00b0C \uc774\uc0c1\uc5d0\uc11c \uc9c4\ud589\ub418\ub294 \ubaa8\ub4e0 \uacf5\uc815\uc5d0\uc11c \uc774 \ub450 \uc7ac\ub8cc\ub97c \uc11c\ub85c \ub2e4\ub978 \uc801\uc6a9 \uc601\uc5ed\uc73c\ub85c \uad6c\ubd84\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\ubd84\uad11 \ud22c\uacfc\uc728<\/strong> \uc774\ub294 \ub9c8\ucc2c\uac00\uc9c0\ub85c \uacb0\uc815\uc801\uc778 \ucc28\uc774\ub97c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\ub294 \uac00\uc2dc\uad11\uc120\uacfc \uadfc\uc790\uc678\uc120\uc744 \uc801\uc808\ud788 \ud22c\uacfc\ud558\uc9c0\ub9cc, \uc57d 310 nm \uc774\ud558\uc5d0\uc11c\ub294 \ubd88\ud22c\uba85\ud574\uc9d1\ub2c8\ub2e4. \uc790\uc678\uc120 \ud22c\uacfc\uac00 \ud544\uc694\ud55c \ubaa8\ub4e0 \uc751\uc6a9 \ubd84\uc57c\u2014300 nm \ubbf8\ub9cc\uc758 \ubd84\uad11\uad11\ub3c4\ubc95, \uc790\uc678\uc120 \uad11\ucd09\ub9e4, \uc5d1\uc2dc\uba38 \ub808\uc774\uc800 \uad11\ud559 \ub4f1\u2014\uc5d0\uc11c\ub294 \uc6a9\uc735 \uc11d\uc601\uc774\ub098 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \ubc18\ub4dc\uc2dc \uc0ac\uc6a9\ud574\uc57c \ud558\uba70, \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8\ub294 \uc774\uc5d0 \ub300\ud55c \uae30\ub2a5\uc801\uc778 \ub300\uccb4\uc7ac\uac00 \ub420 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ud654\ud559\uc801 \uc21c\ub3c4 \ubc0f \uc6a9\ucd9c \ud2b9\uc131<\/strong> \ube44\uad50\ub97c \ub9c8\ubb34\ub9ac\ud558\uc790\uba74, \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \uace0\uc628\uc758 \uc0b0\uc131 \uc6a9\uc561\uc5d0 \uce21\uc815 \uac00\ub2a5\ud55c \ub18d\ub3c4\uc758 \ubd95\uc18c, \ub098\ud2b8\ub968, \uc2e4\ub9ac\ucf58\uc744 \ubc29\ucd9c\ud558\ub294\ub370, \uc774\ub294 ppb \ubbf8\ub9cc\uc758 \ub18d\ub3c4 \uc218\uc900\uc5d0\uc11c \uc774\ub8e8\uc5b4\uc9c0\ub294 \ubbf8\ub7c9 \uc6d0\uc18c \ubd84\uc11d\uc5d0\uc11c\ub294 \uc6a9\ub0a9\ub420 \uc218 \uc5c6\ub294 \uc624\uc5fc\uc6d0\uc785\ub2c8\ub2e4. \uc735\ud569 \uc11d\uc601\uc740 \uac00\uc7a5 \uac15\ub825\ud55c \uc0b0\uc131 \ub9e4\uccb4\uc5d0\uc11c\ub3c4 \ubb34\uc2dc\ud560 \uc218 \uc788\uc744 \uc815\ub3c4\uc758 \uc774\uc628 \uc624\uc5fc\ub9cc\uc744 \uc720\ubc1c\ud558\ubbc0\ub85c, \ubc30\uacbd \uacf5\ubc31 \uc5b5\uc81c\uac00 \uc8fc\uc694 \ubd84\uc11d \ubaa9\ud45c\uc778 \ubd84\uc11d \uc6cc\ud06c\ud50c\ub85c\uc6b0\uc5d0\uc11c \uc2dc\ub8cc\uc758 \ubb34\uacb0\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc77c\ubc18\uc801\uc778 \uc11d\uc601 \uc720\ub9ac \uc6a9\uae30\uc758 \uc885\ub958\uc640 \uad6c\uc870\uc801 \ud2b9\uc9d5<\/h2>\n<p>\uc735\ud569 \uc11d\uc601\uc740 \ub2e4\uc591\ud55c \ud45c\uc900\ud654\ub41c \uc6a9\uae30 \ubc0f \ubd80\ud488 \ud615\uc0c1\uc73c\ub85c \uac00\uacf5\ub418\uba70, \uac01 \ud615\uc0c1\uc740 \ubbf8\uc801 \uad00\uc2b5\ubcf4\ub2e4\ub294 \ud2b9\uc815 \uae30\ub2a5\uc801 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub3c4\ub85d \uc124\uacc4\ub429\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\uc11d\uc601 \ub3c4\uac00\ub2c8<\/strong> \uace0\uc628 \uc6a9\uc735, \uc18c\uc131 \ubc0f \uc7ac\ub8cc \uc6a9\ud574\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ub450\uaebc\uc6b4 \ubcbd\uc744 \uac00\uc9c4 \uc6d0\ud1b5\ud615 \ub610\ub294 \ud14c\uc774\ud37c\ud615 \uac1c\ubc29\ud615 \uc6a9\uae30\uc785\ub2c8\ub2e4. \ubcbd \ub450\uaed8\ub294 \uc6a9\uc801\uacfc \uc5f4 \ubd80\ud558\uc5d0 \ub530\ub77c \uc77c\ubc18\uc801\uc73c\ub85c 2~5mm\uc774\uba70, \uc2e4\ud5d8\uc2e4\uc6a9 \uc81c\ud488\uc758 \uc6a9\uc801\uc740 10mL\uc5d0\uc11c \uc218 \ub9ac\ud130\uc5d0 \uc774\ub985\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc11d\uc601 \ube44\ucee4 \ubc0f \ud50c\ub77c\uc2a4\ud06c<\/strong> \ud45c\uc900 \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc2e4\ud5d8\uc6a9 \uae30\uad6c\uc758 \ud615\ud0dc\ub97c \ub530\ub974\uc9c0\ub9cc, \uc785\uc790 \ud0c8\ub77d\uc744 \ucd5c\uc18c\ud654\ud558\uae30 \uc704\ud574 \ubcbd \ub450\uaed8 \uade0\uc77c\ub3c4 \uacf5\ucc28\ub97c \ub354\uc6b1 \uc5c4\uaca9\ud558\uac8c \uad00\ub9ac\ud558\uace0, \uac00\uc7a5\uc790\ub9ac\ub97c \ud654\uc5fc \uc5f0\ub9c8 \ucc98\ub9ac\ud558\uc5ec \ub9c8\uac10\ud588\uc2b5\ub2c8\ub2e4. \ud3c9\uc800\ud615\uacfc \ub465\uadfc \ubc14\ub2e5\ud615 \uc81c\ud488\uc740 \uc0b0 \ubd84\ud574 \ubc0f \uc6a9\uc561 \uc870\uc81c\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ucffc\uce20 \ud29c\ube0c<\/strong> \uc774 \uc81c\ud488\uc740 \uc0dd\uc0b0\ub7c9\uc774 \uac00\uc7a5 \ub9ce\uc740 \uc81c\ud488 \ud615\ud0dc \uc911 \ud558\ub098\ub85c, \uc678\uacbd\uc774 1mm\uc5d0\uc11c 300mm \uc774\uc0c1\uc5d0 \uc774\ub974\ub294 \ub2e4\uc591\ud55c \uaddc\uaca9\uc73c\ub85c \uc0dd\uc0b0\ub418\uba70, \uc555\ub825 \ubc0f \uc5f4 \ubd80\ud558\uc5d0 \ub9de\ucdb0 \ubcbd \ub450\uaed8\uac00 \uc870\uc815\ub429\ub2c8\ub2e4. \uc9c1\uad00, \uad7d\ud798 \ubd80\uc7ac \ubc0f \ud50c\ub79c\uc9c0 \uc870\ub9bd\ud488\uc740 \ubaa8\ub450 \uc778\ubc1c \ub610\ub294 \uc6d0\uc2ec \uc8fc\uc870\ub41c \ud29c\ube0c \uc6d0\uc7ac\uc5d0\uc11c \uac00\uacf5\ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc11d\uc601 \ub9c9\ub300, \uc6d0\ubc18 \ubc0f \ud310<\/strong> \uc6a9\uae30\ub77c\uae30\ubcf4\ub2e4\ub294 \uad6c\uc870\uc801, \uad11\ud559\uc801, \uc804\uae30\uc801 \uc808\uc5f0 \ubd80\ud488\uc758 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \ub9c9\ub300\ub294 \uad50\ubc18 \uc694\uc18c\ub098 \uc11c\uc2a4\ud399\ud130 \uc9c0\uc9c0\ub300\ub85c \uae30\ub2a5\ud558\uba70, \uc6d0\ubc18\uacfc \ud310\uc740 \uc6a9\uad11\ub85c \ubc0f \ubc18\uc751\uae30 \uc870\ub9bd\uccb4\uc5d0\uc11c \ucc3d, \uae30\ud310, \ub36e\uac1c\ud310\uc73c\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc11d\uc601 \uc99d\ubc1c \uc811\uc2dc<\/strong> \uc774 \uc81c\ud488\uc740 \uace0\uc628\uc5d0\uc11c \uace0\uccb4 \uc2dc\ub8cc\uc758 \uc6a9\ub9e4 \uc99d\ubc1c \ubc0f \uc0b0 \uc6a9\ud574\uc5d0 \ucd5c\uc801\ud654\ub41c \uc595\uace0 \uc9c1\uacbd\uc774 \ub113\uc740 \ub2e8\uba74 \ud615\ud0dc\ub97c \ud2b9\uc9d5\uc73c\ub85c \ud569\ub2c8\ub2e4. \ud45c\uba74\uc801 \ub300 \ubd80\ud53c \ube44\uc728\uc774 \ub192\uc544, \uc81c\uc5b4\ub41c \uac00\uc5f4 \uc870\uac74 \ud558\uc5d0\uc11c \uc99d\ubc1c \uc18d\ub3c4\ub97c \ub192\uc5ec\uc90d\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<p>\uc774\ub7ec\ud55c \ud615\ud0dc\ub4e4\uc740 \uc720\ub9ac \ub9e4\ud2b8\ub9ad\uc2a4 \ub0b4\uc5d0 \uacb0\uc815\uc9c8 \uc9c8\uc11c\uac00 \uc804\ud600 \uc5c6\ub2e4\ub294 \uacf5\ud1b5\ub41c \uad6c\uc870\uc801 \ud2b9\uc9d5\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud615\ud0dc\uc640 \uad00\uacc4\uc5c6\uc774 \ubaa8\ub4e0 \uc6a9\uc735 \uc11d\uc601 \uad6c\uc131 \uc694\uc18c\ub294 \ube44\uacb0\uc815\uc9c8\uc774\uba70 \ub4f1\ubc29\uc131\uc774\uba70, \uc5f4\uc801\u00b7\ud654\ud559\uc801 \uc120\ud0dd\uc801 \ubd80\uc2dd\uc744 \uc720\ubc1c\ud560 \uc218 \uc788\ub294 \uc785\uacc4\ub3c4 \uc874\uc7ac\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glassware-Components-in-Semiconductor-Cleanroom-Fabrication.webp\" alt=\"\ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 \uc81c\uc870 \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uc11d\uc601 \uc720\ub9ac \ubd80\ud488\" title=\"\ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 \uc81c\uc870 \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uc11d\uc601 \uc720\ub9ac \ubd80\ud488\" \/><\/p>\n<h2>\ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \uae30\uad6c\uc758 \ud65c\uc6a9<\/h2>\n<p>\ubc18\ub3c4\uccb4 \uc81c\uc870 \uacfc\uc815\uc5d0\uc11c\ub294 \uadf9\ud55c\uc758 \uc628\ub3c4, \ucd08\uace0\uc21c\ub3c4 \uc694\uad6c \uc0ac\ud56d, \uadf8\ub9ac\uace0 \ubd80\uc2dd\uc131\uc774 \uac15\ud55c \ud654\ud559 \ubb3c\uc9c8\uc5d0\uc758 \ub178\ucd9c\uc774 \ubcf5\ud569\uc801\uc73c\ub85c \uc791\uc6a9\ud558\uae30 \ub54c\ubb38\uc5d0 \uc0ac\uc2e4\uc0c1 \ub2e4\ub978 \uc5b4\ub5a4 \uc720\ub9ac \ub300\uccb4\uc7ac\ub3c4 \uc0ac\uc6a9\ud560 \uc218 \uc5c6\uac8c \ub418\uba70, \uc774\ub85c \uc778\ud574 \uc6a9\uc735 \uc11d\uc601\uc740 \ud604\ub300 \uc6e8\uc774\ud37c \uac00\uacf5 \uc778\ud504\ub77c\uc758 \uad6c\uc870\uc801\u00b7\ud654\ud559\uc801 \ud575\uc2ec \uc18c\uc7ac\ub85c \uc790\ub9ac\ub9e4\uae40\ud558\uace0 \uc788\ub2e4.<\/p>\n<p>\uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \uc81c\uc870 \uc2dc\uc124 \ub0b4\uc5d0\uc11c\ub294 \uac70\uc758 \ubaa8\ub4e0 \uc5f4\ucc98\ub9ac \ubc0f \uc2b5\uc2dd \ud654\ud559 \uacf5\uc815 \ub2e8\uacc4\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \uae30\uad6c\uc640 \uc11d\uc601 \uae30\ubc18 \ubd80\ud488\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774 \uacbd\uc6b0 \uc694\uad6c\ub418\ub294 \uc21c\ub3c4 \uae30\uc900\uc740 \uc2e4\ud5d8\uc2e4 \ub4f1\uae09\uc774 \uc544\ub2c8\ub77c \ubc18\ub3c4\uccb4 \ub4f1\uae09\uc785\ub2c8\ub2e4: <strong>1\uc870 \ubd84\uc758 1 \ub2e8\uc704 \uc218\uc900\uc758 \ub18d\ub3c4\uc5d0\uc11c\ub3c4 \ubc1c\uc0dd\ud558\ub294 \uae08\uc18d \uc624\uc5fc<\/strong> \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \uc874\uc7ac\ud558\ub294 \uc774\ubb3c\uc9c8\uc740 \uc804\ud558 \uc6b4\ubc18\uccb4\uc758 \uc218\uba85\uc744 \ubcc0\ud654\uc2dc\ud0a4\uace0, \uac8c\uc774\ud2b8 \uc0b0\ud654\ub9c9 \uacb0\ud568\uc744 \uc720\ubc1c\ud558\uba70, \uc18c\uc790\uc758 \uc218\uc728\uc744 \uc800\ud558\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc6e8\uc774\ud37c\ub098 \uacf5\uc815 \uac00\uc2a4\uc640 \uc811\ucd09\ud558\ub294 \ubaa8\ub4e0 \uc11d\uc601 \ubd80\ud488\uc740 \ud45c\uc900 \uc0b0\uc5c5\uc6a9 \uc6a9\uc735 \uc11d\uc601\uc744 \ub118\uc5b4 \ubc18\ub3c4\uccb4 \ub4f1\uae09 \ubc0f \uc804\uc790 \ub4f1\uae09 \ubd84\ub958\uc5d0 \ud574\ub2f9\ud558\ub294 \uc5c4\uaca9\ud55c \uc0ac\uc591\uc744 \ucda9\uc871\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc6e8\uc774\ud37c \uacf5\uc815\uc6a9 \ud655\uc0b0\ub85c \ud29c\ube0c \ubc0f \ubcf4\ud2b8 \uc5b4\uc148\ube14\ub9ac<\/h3>\n<p>\ud655\uc0b0\ub85c \ud29c\ube0c\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ubd84\uc57c\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \uc81c\ud488 \uc911 \uc0dd\uc0b0\ub7c9\uc774 \uac00\uc7a5 \ub9ce\uace0 \uc5f4\uc801 \uc694\uad6c \uc0ac\ud56d\uc774 \uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 \uc6a9\ub3c4\uc785\ub2c8\ub2e4. \uc774 \ub300\uad6c\uacbd \ud29c\ube0c(\uc77c\ubc18\uc801\uc73c\ub85c \uc678\uacbd 150mm~300mm, \uae38\uc774 \ucd5c\ub300 1,500mm)\ub294 \uc5f4 \uc0b0\ud654, \ub3c4\ud380\ud2b8 \ud655\uc0b0, \uc5b4\ub2d0\ub9c1 \uacf5\uc815 \ub3d9\uc548 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub97c \uc218\uc6a9\ud558\uba70, \uc774 \uacf5\uc815\ub4e4\uc740 \uc0b0\uc18c, \uc9c8\uc18c \ub610\ub294 \uc218\uc18c\ub85c \uad6c\uc131\ub41c \uc81c\uc5b4\ub41c \ubd84\uc704\uae30 \ud558\uc5d0\uc11c 800 \u00b0C\uc5d0\uc11c 1,200 \u00b0C \uc0ac\uc774\uc758 \uc628\ub3c4\uc5d0\uc11c \uc218\ud589\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\ubc18\ub3c4\uccb4 \ud655\uc0b0\uad00\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc11d\uc601\uc740 \uc804\uc790 \ub4f1\uae09 \uc21c\ub3c4 \uaddc\uaca9\uc744 \ucda9\uc871\ud574\uc57c \ud569\ub2c8\ub2e4.<\/strong>, \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc740 20 ppb \ubbf8\ub9cc\uc774\uba70, \ucd5c\ucca8\ub2e8 \ud339\uc758 \uacbd\uc6b0 \ucca0, \uad6c\ub9ac, \ub2c8\ucf08, \uc54c\ub8e8\ubbf8\ub284 \ub4f1 \uc8fc\uc694 \uc6d0\uc18c\uc5d0 \ub300\ud574\uc11c\ub294 5 ppb \ubbf8\ub9cc\uc774\uc5b4\uc57c \ud569\ub2c8\ub2e4. 1,000\u00b0C\uc5d0\uc11c \uc624\uc5fc\ub41c \uc6a9\uad11\ub85c \uad00 \ubcbd\uba74\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub85c \ud655\uc0b0\ub418\ub294 \ub2e8 \ud558\ub098\uc758 \ucca0 \uc6d0\uc790\ub9cc\uc73c\ub85c\ub3c4 \uc2ec\uce35 \ud2b8\ub7a9 \uc0c1\ud0dc\uac00 \uc0dd\uc131\ub418\uc5b4 \uc18c\uc218 \uce90\ub9ac\uc5b4 \uc218\uba85\uc744 \ud604\uc800\ud788 \uc800\ud558\uc2dc\ud0a4\uba70, \uc774\ub294 \uc7ac\ub8cc \ud488\uc9c8\uacfc \uc9c1\uc811\uc801\uc73c\ub85c \uc5f0\uad00\ub41c \uacb0\ud568\uc785\ub2c8\ub2e4. \uc6e8\uc774\ud37c \ubcf4\ud2b8(\uad00 \ub0b4\ubd80\uc5d0\uc11c \uc6e8\uc774\ud37c\ub97c \uc218\uc9c1 \ub610\ub294 \uc218\ud3c9 \ubc30\uc5f4\ub85c \uace0\uc815\ud558\ub294 \uc6b4\ubc18\ub300) \uc5ed\uc2dc \uace0\uc21c\ub3c4 \uc6a9\uc735 \uc11d\uc601\uc73c\ub85c \uc81c\uc870\ub418\uba70, \uc6e8\uc774\ud37c \uac04 \uac04\uaca9\uc744 \uade0\uc77c\ud558\uac8c \uc720\uc9c0\ud558\uace0 \uc7ac\ud604 \uac00\ub2a5\ud55c \uac00\uc2a4 \ud750\ub984 \ubd84\ud3ec\ub97c \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 \uc2ac\ub86f \ud615\uc0c1\uc774 \ub9c8\uc774\ud06c\ub860 \uc218\uc900\uc758 \uacf5\ucc28\ub85c \uac00\uacf5\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc0dd\uc0b0 \ud339\uc5d0\uc11c \uc6a9\uad11\ub85c \ud29c\ube0c\uc758 \uc218\uba85\uc740 \uc138\uc2ec\ud558\uac8c \ucd94\uc801\ub429\ub2c8\ub2e4. \uc7a5\uae30\uac04\uc758 \uc5f4 \uc0ac\uc774\ud074\ub9c1\uc740 \uc810\ucc28\uc801\uc73c\ub85c \ube44\uc720\ud654(\ud45c\uba74 \uacb0\uc815\ud654 \ud604\uc0c1\uc73c\ub85c, \uc720\ubc31\uc0c9\uc758 \ud0c1\ud55c \ubaa8\uc2b5\uc73c\ub85c \uad00\ucc30\ub428)\ub97c \uc720\ubc1c\ud558\uae30 \ub54c\ubb38\uc778\ub370, \uc774\ub85c \uc778\ud574 \ubbf8\ub9bd\uc790 \ud0c8\ub77d \uc704\ud5d8\uc774 \uc99d\uac00\ud558\uace0 \ud29c\ube0c\uc758 \uc815\uae30 \uad50\uccb4\uac00 \ud544\uc694\ud574\uc9d1\ub2c8\ub2e4.<\/p>\n<h3>\uc2b5\uc2dd \uc5d0\uce6d \ud2b8\ub808\uc774 \ubc0f \ub0b4\ud654\ud559\uc131 \uacf5\uc815 \uc6a9\uae30<\/h3>\n<p>\ubc18\ub3c4\uccb4 \uc81c\uc870 \ubd84\uc57c\uc5d0\uc11c \u2018\uc6e8\ud2b8 \ubca4\uce58(wet bench)\u2019\ub85c \uc54c\ub824\uc9c4 \uc2b5\uc2dd \ud654\ud559 \ucc98\ub9ac \uc2a4\ud14c\uc774\uc158\uc740 \uc6a9\uc735 \uc11d\uc601\uc73c\ub85c \uc81c\uc791\ub41c \uce68\uc9c0 \ud0f1\ud06c, \uc624\ubc84\ud50c\ub85c \uc704\uc5b4, \uc774\uc1a1 \ud2b8\ub808\uc774\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6e8\uc774\ud37c\ub97c \uc77c\ub828\uc758 \ud654\ud559 \uc6a9\uc561\uc5d0 \uc21c\ucc28\uc801\uc73c\ub85c \ub178\ucd9c\uc2dc\ud0b5\ub2c8\ub2e4. \uc774 <a href=\"https:\/\/fabweb.ece.illinois.edu\/recipe\/rca.aspx\">RCA \uccad\uc18c<\/a><sup id=\"fnref1:2\"><a href=\"#fn:2\" class=\"footnote-ref\">2<\/a><\/sup> RCA \uc5f0\uad6c\uc18c\uc5d0\uc11c \uac1c\ubc1c\ub418\uc5b4 \ud604\uc7ac\uae4c\uc9c0\ub3c4 \uc2e4\ub9ac\ucf58 \ud45c\uba74 \ucc98\ub9ac\uc758 \uae30\ucd08\uac00 \ub418\uace0 \uc788\ub294 \uc774 \uacf5\uc815\uc740, \uc6e8\uc774\ud37c\ub97c SC-1(NH\u2084OH\/H\u2082O\u2082\/H\u2082O), SC-2(HCl\/H\u2082O\u2082\/H\u2082O) \ubc0f \ud76c\uc11d HF \uc6a9\uc561\uc744 25 \u00b0C\uc5d0\uc11c 80 \u00b0C \uc0ac\uc774\uc758 \uc628\ub3c4\uc5d0\uc11c \uc21c\ucc28\uc801\uc73c\ub85c \ucc98\ub9ac\ud558\ub294 \uacfc\uc815\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \ud0f1\ud06c\uc640 \uce90\ub9ac\uc5b4\ub294 \uc774\uc628 \uc624\uc5fc\uc744 \uc720\ubc1c\ud558\uc9c0 \uc54a\uc73c\uba74\uc11c RCA \ud654\ud559 \ucc98\ub9ac \uacf5\uc815 \uc804\uccb4\ub97c \uacac\ub38c\ub0c5\ub2c8\ub2e4.<\/strong> \uc138\uc815\uc561\uc5d0 \ub300\ud55c \ub0b4\uc131 \u2014 \uc774\ub294 \uace0\uc628\uc5d0\uc11c \uac00\uc2a4 \ubc29\ucd9c \ubc0f \uae08\uc18d \ucca8\uac00\uc81c\uc758 \uc6a9\ucd9c\ub85c \uc778\ud574 \ub300\ubd80\ubd84\uc758 \ud3f4\ub9ac\uba38 \ud0f1\ud06c \uc7ac\uc9c8\uc774 \uc0ac\uc6a9 \uc694\uac74\uc744 \ucda9\uc871\ud558\uc9c0 \ubabb\ud558\uac8c \ub9cc\ub4dc\ub294 \uc694\uac74\uc785\ub2c8\ub2e4. 120\u00b0C\ub97c \ucd08\uacfc\ud558\ub294 \uc628\ub3c4\uc758 \ud669\uc0b0\/\uacfc\uc0b0\ud654\uc218\uc18c \ud63c\ud569\ubb3c(SPM \ub610\ub294 \ud53c\ub77c\ub0d0 \uc6a9\uc561)\uc5d0\uc11c, \uc11d\uc601\uc740 \uc774\ub7ec\ud55c \uc870\uac74\uc5d0\uc11c \uc9c0\uc18d\uc801\uc778 \uc5f4 \ubc0f \uc0b0\ud654 \uc2a4\ud2b8\ub808\uc2a4 \ud558\uc5d0 \uc5f0\ud654 \ubc0f \ubcc0\ud615\ub418\ub294 PTFE\uc5d0 \ube44\ud574 \ub6f0\uc5b4\ub09c \ub0b4\ud654\ud559\uc131\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \ub610\ud55c \uc791\ub3d9 \uc628\ub3c4\uc5d0\uc11c \uc11d\uc601\uc758 \uae30\uacc4\uc801 \uac15\uc131\uc740 \uc6e8\uc774\ud37c \uce90\ub9ac\uc5b4 \uc2ac\ub86f \ud615\uc0c1\uc758 \uce58\uc218 \uc815\ubc00\ub3c4\ub97c \uc720\uc9c0\ud558\uc5ec, \ud654\ud559 \uc6a9\uc561\uc5d0 \uce68\uc9c0\ud558\ub294 \ub3d9\uc548 \uc6e8\uc774\ud37c \uac04 \uc811\ucd09\uc744 \ubc29\uc9c0\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc811\ucd09\uc740 \uad50\ucc28 \uc624\uc5fc\uacfc \uc218\uc728 \uc190\uc2e4\uc744 \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ud074\ub9b0\ub8f8 \ub4f1\uae09\uc758 \uc11d\uc601 \uc2b5\uc2dd \ubca4\uce58 \ubd80\ud488\uc740 \uc785\uc790 \ubd80\ucc29\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \uacf5\uc815 \ub2e8\uacc4 \uac04\uc5d0 \ud654\ud559 \ubb3c\uc9c8\uc744 \uc644\uc804\ud788 \ud5f9\uad74 \uc218 \uc788\ub3c4\ub85d, \uc77c\ubc18\uc801\uc73c\ub85c 0.8 \u03bcm \ubbf8\ub9cc\uc758 Ra \uac12\uc73c\ub85c \uc9c0\uc815\ub41c \ud45c\uba74 \ub9c8\uac10 \ucc98\ub9ac\ub85c \uc81c\uc791\ub429\ub2c8\ub2e4.<\/p>\n<h3>CVD \ubc0f \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \ucc54\ubc84\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc11d\uc601 \ubd80\ud488<\/h3>\n<p>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \ubc0f \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \uacf5\uc815\uc5d0\ub294 \uace0\uc628\uacfc \ubd80\uc2dd\uc131 \uc99d\ucc29 \uc804\uad6c\uccb4 \uac00\uc2a4\ub97c \uacac\ub514\uba74\uc11c\ub3c4, \uc131\uc7a5\ud558\ub294 \ubc15\ub9c9\uc5d0 \uae08\uc18d \uc624\uc5fc\uc774 \uc804\ud600 \uc5c6\uc5b4\uc57c \ud558\ub294 \uc694\uac74\uc744 \ub3d9\uc2dc\uc5d0 \ucda9\uc871\ud558\ub294 \uc11d\uc601 \ubd80\ud488\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc11d\uc601 \ubc18\uc751\uad00, \ub77c\uc774\ub108 \ud29c\ube0c \ubc0f \uc11c\uc149\ud130 \ubd80\ud488\uc740 600 \u00b0C\uc5d0\uc11c 1,200 \u00b0C \uc0ac\uc774\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uc800\uc555 CVD(LPCVD), \ub300\uae30\uc555 CVD(APCVD) \ubc0f \uc2e4\ub9ac\ucf58 \uc5d0\ud53c\ud0dd\uc2dc \ubc18\uc751\uae30\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p>\ub514\ud074\ub85c\ub85c\uc2e4\ub780(SiH\u2082Cl\u2082)\uacfc \uc554\ubaa8\ub2c8\uc544(NH\u2083)\ub97c \uc774\uc6a9\ud558\uc5ec \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c\uc744 \uc99d\ucc29\ud558\uac70\ub098, \uc2e4\ub780(SiH\u2084)\uc744 \uc774\uc6a9\ud558\uc5ec \ud3f4\ub9ac\uc2e4\ub9ac\ucf58\uc744 \uc99d\ucc29\ud558\ub294 LPCVD \uc2dc\uc2a4\ud15c\uc5d0\uc11c, \uc11d\uc601\uad00\uc740 \uc8fc\uc694 \ubc18\uc751 \uc6a9\uae30\ub85c \uc0ac\uc6a9\ub41c\ub2e4. <strong>\uc774 \ud29c\ube0c\ub294 \uc99d\ucc29 \uc804\uad6c\uccb4, \uc6b4\ubc18 \uac00\uc2a4 \ubc0f \uc5d0\uce6d\ubc31 \ud654\ud559 \ubb3c\uc9c8\uc5d0 \ub300\ud574 \ud654\ud559\uc801 \ubd88\ud65c\uc131 \uc0c1\ud0dc\ub97c \uc720\uc9c0\ud574\uc57c \ud569\ub2c8\ub2e4.<\/strong> \uc5ec\uae30\uc5d0\ub294 \uc99d\ucc29 \uc0ac\uc774\ud074 \uc0ac\uc774\uc5d0 \ud604\uc7a5 \uc138\ucc99\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc5fc\uc18c\uc640 HCl\ub3c4 \ud3ec\ud568\ub429\ub2c8\ub2e4. \ud29c\ube0c \ubcbd\uba74\uacfc \uacf5\uc815 \ud654\ud559 \ubb3c\uc9c8 \uac04\uc5d0 \ubc18\uc751\uc774 \ubc1c\uc0dd\ud558\uba74 \uc131\uc7a5 \uc911\uc778 \ubc15\ub9c9\uc5d0 \uc2e4\ub9ac\ucf58 \uc0b0\ud654\ubb3c\uc774\ub098 \uc624\uc5fc \ubb3c\uc9c8\uc774 \uc720\uc785\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \ucc54\ubc84\uc5d0\uc11c\ub294 \uc11d\uc601 \ub77c\uc774\ub108 \ud29c\ube0c\uc640 \ubca8 \uc790(bell jar)\uac00 \uc11c\uc149\ud130\uc640 \uae30\ud310 \uc8fc\uc704\ub97c \uae68\ub057\ud558\uace0 \uc5f4 \ud22c\uacfc\uc131\uc774 \ub6f0\uc5b4\ub09c \ubc00\ud3d0 \uacf5\uac04\uc73c\ub85c \ub458\ub7ec\uc2f8\uace0 \uc788\uc5b4, \uc801\uc678\uc120 \uac00\uc5f4 \ub7a8\ud504(\uc77c\ubc18\uc801\uc73c\ub85c \ud145\uc2a4\ud150 \ud560\ub85c\uac90 \ub7a8\ud504)\uac00 \ud761\uc218 \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud558\uba74\uc11c \uc11d\uc601 \ubcbd\uc744 \ud1b5\ud574 \uc5d0\ub108\uc9c0\ub97c \uc804\ub2ec\ud560 \uc218 \uc788\uac8c \ud569\ub2c8\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4 \uacf5\uc815 \ubd84\uc57c\uc758 \uc11d\uc601 \uc720\ub9ac \uc81c\ud488<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ud504\ub85c\uc138\uc2a4<\/th>\n<th>\uc11d\uc601 \ubd80\ud488<\/th>\n<th>\uc791\ub3d9 \uc628\ub3c4 (\u00b0C)<\/th>\n<th>\uc21c\ub3c4 \ub4f1\uae09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc5f4 \uc0b0\ud654<\/td>\n<td>\ud655\uc0b0 \ud29c\ube0c<\/td>\n<td>900-1,100<\/td>\n<td>\uc804\uc790\uc6a9 \ub4f1\uae09<\/td>\n<\/tr>\n<tr>\n<td>\ub3c4\ud310\ud2b8 \ud655\uc0b0<\/td>\n<td>\ub85c\uad00 + \uc6e8\uc774\ud37c \ubcf4\ud2b8<\/td>\n<td>800-1,200<\/td>\n<td>\uc804\uc790\uc6a9 \ub4f1\uae09<\/td>\n<\/tr>\n<tr>\n<td>RCA \uc2b5\uc2dd \uc138\ucc99<\/td>\n<td>\uce68\uc9c0 \ud0f1\ud06c, \uce90\ub9ac\uc5b4<\/td>\n<td>25\u201380<\/td>\n<td>\ubc18\ub3c4\uccb4 \ub4f1\uae09<\/td>\n<\/tr>\n<tr>\n<td>SPM \uc2a4\ud2b8\ub9bd<\/td>\n<td>\uacf5\uc815 \uc6a9\uae30<\/td>\n<td>120-150<\/td>\n<td>\ubc18\ub3c4\uccb4 \ub4f1\uae09<\/td>\n<\/tr>\n<tr>\n<td>LPCVD<\/td>\n<td>\ubc18\uc751\uad00<\/td>\n<td>600-900<\/td>\n<td>\uace0\uc21c\ub3c4 \ub4f1\uae09<\/td>\n<\/tr>\n<tr>\n<td>\uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5<\/td>\n<td>\ubca8 \uc790, \ub77c\uc774\ub108 \ud29c\ube0c<\/td>\n<td>900\u20131,200<\/td>\n<td>\uc804\uc790\uc6a9 \ub4f1\uae09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glassware-Cuvettes-and-Digestion-Flask-in-Analytical-Chemistry-Laboratory.webp\" alt=\"\ubd84\uc11d\ud654\ud559 \uc2e4\ud5d8\uc2e4\uc758 \uc11d\uc601 \uc720\ub9ac \uae30\uad6c: \ud050\ubcb3 \ubc0f \ubd84\ud574 \ud50c\ub77c\uc2a4\ud06c\" title=\"\ubd84\uc11d\ud654\ud559 \uc2e4\ud5d8\uc2e4\uc758 \uc11d\uc601 \uc720\ub9ac \uae30\uad6c: \ud050\ubcb3 \ubc0f \ubd84\ud574 \ud50c\ub77c\uc2a4\ud06c\" \/><\/p>\n<h2>\ubd84\uc11d \ud654\ud559 \ubc0f \ubd84\uad11 \uce21\uc815\uc744 \uc704\ud55c \uc11d\uc601 \uc720\ub9ac \uae30\uad6c<\/h2>\n<p>\ubd84\uc11d \ud654\ud559 \ubd84\uc57c\uc5d0\uc11c\ub294 \uc720\ub9ac \uae30\uad6c\uc5d0 \ub450 \uac00\uc9c0 \uc694\uac74\uc744 \uc694\uad6c\ud569\ub2c8\ub2e4. \ubc14\ub85c \uce21\uc815 \ud30c\uc7a5 \ubc94\uc704 \uc804\ubc18\uc5d0 \uac78\uce5c \ubd84\uad11 \ud22c\uacfc\uc131\uacfc, \ubd84\uc11d\ubb3c\uc758 \ub18d\ub3c4\ub97c \ucd08\ubbf8\ub7c9 \uc218\uc900\uc73c\ub85c \uc720\uc9c0\ud560 \uc218 \uc788\uc744 \ub9cc\ud07c \ucda9\ubd84\ud55c \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub450 \uac00\uc9c0 \uc694\uac74\uc774 \uacb0\ud569\ub418\uc5b4 \uae30\uae30 \uc124\uacc4\uc790\uc640 \ubd84\uc11d\ubc95 \uac1c\ubc1c\uc790\ub4e4\uc740 \ud56d\uc0c1 \uc6a9\uc735 \uc11d\uc601\uc744 \uc120\ud0dd\ud558\uac8c \ub429\ub2c8\ub2e4.<\/p>\n<p>\uad11\ud559\uc801 \ud2b9\uc131\uacfc \ubd84\uc11d \uc131\ub2a5 \uac04\uc758 \uad00\uacc4\ub294 \uc9c1\uc811\uc801\uc774\uba70 \uc815\ub7c9\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uce21\uc815 \ud30c\uc7a5\uc5d0\uc11c \uc790\uc678\uc120\uc744 \ud761\uc218\ud558\ub294 \uc6a9\uae30\ub294 \ubaa8\ub4e0 \ud761\uad11\ub3c4 \uce21\uc815\uac12\uc5d0 \uccb4\uacc4\uc801 \uc624\ucc28\ub97c \uc720\ubc1c\ud558\uba70, \uc0b0 \ub9e4\uc9c8\ub85c \uc2e4\ub9ac\ucf58, \ubd95\uc18c \ub610\ub294 \ub098\ud2b8\ub968\uc744 \uc6a9\ucd9c\uc2dc\ud0a4\ub294 \ubd84\ud574 \ud50c\ub77c\uc2a4\ud06c\ub294 \ubd84\uc11d \ube14\ub7ad\ud06c \uac12\uc744 \ub192\uc774\uace0 \uac80\ucd9c \ud55c\uacc4\ub97c \uc800\ud558\uc2dc\ud0b5\ub2c8\ub2e4. \uc735\ud569 \uc11d\uc601\uc740 \uc774\ub7ec\ud55c \ub450 \uac00\uc9c0 \ubb38\uc81c\uc810\uc744 \ub3d9\uc2dc\uc5d0 \ud574\uacb0\ud574 \uc8fc\uba70, \uc774\ub294 \ubd84\uc11d\uc758 \uc2e0\ub8b0\uc131\uc774 \uc2dc\ub8cc\uc640 \uc811\ucd09\ud558\ub294 \ubaa8\ub4e0 \ubb3c\uc9c8\uc758 \uac70\ub3d9\uc5d0 \uc88c\uc6b0\ub418\ub294 \uc790\uc678\uc120 \ubd84\uad11\uad11\ub3c4\ubc95 \ubc0f \ubbf8\ub7c9 \uc6d0\uc18c \uc2dc\ub8cc \uc804\ucc98\ub9ac \ubd84\uc57c\uc5d0\uc11c \uc735\ud569 \uc11d\uc601\uc774 \ud544\uc218\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \uc774\uc720\ub97c \uc124\uba85\ud574 \uc90d\ub2c8\ub2e4.<\/p>\n<h3>UV-Vis \ubd84\uad11\uad11\ub3c4\uacc4 \ud050\ubcb3 \u2014 \uad11\ud559 \ub4f1\uae09 \uc11d\uc601\uc774 \ud544\uc218\uc801\uc778 \uc774\uc720<\/h3>\n<p>UV-Vis \ubd84\uad11\uad11\ub3c4\ubc95\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 190 nm\uc5d0\uc11c 900 nm\uc5d0 \uc774\ub974\ub294 \ud30c\uc7a5 \ubc94\uc704\uc5d0\uc11c \uc2dc\ub8cc \uc6a9\uc561\uc744 \ud1b5\uacfc\ud558\ub294 \ube5b\uc758 \uac10\uc1e0\ub97c \uce21\uc815\ud558\uc5ec \ud761\uad11 \ubb3c\uc9c8\uc758 \ub18d\ub3c4\ub97c \uc815\ub7c9\ud654\ud569\ub2c8\ub2e4. \uad11\uc120\uc774 \ud1b5\uacfc\ud558\ub294 \uc2dc\ub8cc \uc140\uc778 \ud050\ubcb3\uc740 \uc774 \uc804\uccb4 \ud30c\uc7a5 \ubc94\uc704\uc5d0\uc11c \ud22c\uba85\ud574\uc57c \ud569\ub2c8\ub2e4. \ud050\ubcb3 \uc7ac\uc9c8 \uc790\uccb4\uc5d0 \uc758\ud55c \ud761\uc218\uac00 \ubc1c\uc0dd\ud558\uba74 \uae30\uc900\uc120 \uc624\ucc28\uac00 \ubc1c\uc0dd\ud558\uba70, \uc774\ub294 \ubaa8\ub4e0 \ub18d\ub3c4 \uacc4\uc0b0\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p>\ud45c\uc900 \uad11\ud559 \uc720\ub9ac \ud050\ubcb3\uc740 \uc57d 340 nm \uc774\uc0c1\uc758 \ud30c\uc7a5\ub300\uc5d0\uc11c \ucda9\ubd84\ud55c \ud22c\uacfc\uc728\uc744 \ubcf4\uc774\uba70, \uac00\uc2dc\uad11\uc120 \uc601\uc5ed\uacfc \uc7a5\ud30c\uc7a5 \uadfc\uc790\uc678\uc120 \uc601\uc5ed\uc744 \ud3ec\uad04\ud569\ub2c8\ub2e4. <strong>310 nm \ubbf8\ub9cc\uc5d0\uc11c\ub294 \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\uac00 \ube5b\uc744 \ub9e4\uc6b0 \uac15\ud558\uac8c \ud761\uc218\ud558\uc5ec \uc0ac\uc2e4\uc0c1 \ubd88\ud22c\uba85\ud574\uc9d1\ub2c8\ub2e4.<\/strong>, \uc774\ub85c \uc778\ud574 \uc720\ub9ac \ud050\ubcb3\uc740 \ubc29\ud5a5\uc871 \ud654\ud569\ubb3c, \ud575\uc0b0(260 nm\uc5d0\uc11c \ucd5c\ub300 \ud761\uad11\ub3c4), \ub2e8\ubc31\uc9c8(280 nm\uc5d0\uc11c \ucd5c\ub300 \ud761\uad11\ub3c4), \uadf8\ub9ac\uace0 \uc790\uc678\uc120 \uc804\ud558 \uc774\ub3d9 \ud761\uad11 \ud604\uc0c1\uc744 \ubcf4\uc774\ub294 \uad11\ubc94\uc704\ud55c \ubb34\uae30 \uc774\uc628\uc758 \uce21\uc815\uc5d0 \uc801\ud569\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc6a9\uc735 \uc11d\uc601 \ud050\ubcb3\uc740 <strong>200 nm\uc5d0\uc11c\uc758 80% \ud22c\uacfc\uc728<\/strong> \uace0\uc21c\ub3c4 \ud569\uc131 \ub4f1\uae09\uc73c\ub85c \uc81c\uc791\ub418\uc5b4, \uc2ec\uc790\uc678\uc120(deep UV) \uc601\uc5ed \uc804\ubc18\uc5d0 \uac78\uccd0 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uce21\uc815\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/p>\n<p>\ud45c\uc900 \ubd84\uc11d\uc6a9 \uc11d\uc601 \ud050\ubcb3\uc740 \uad11\uacbd\ub85c\uac00 <strong>10.000 \u00b1 0.010 mm<\/strong>, \uc774\ub294 \uad11\ud559 \ucc3d\uc744 \uc815\ubc00 \uc5f0\ub9c8 \ubc0f \uad11\ud0dd \ucc98\ub9ac\ud568\uc73c\ub85c\uc368 \uc720\uc9c0\ub418\ub294 \uacf5\ucc28\uc785\ub2c8\ub2e4. \uc774 \uacbd\ub85c \uae38\uc774\uc640\uc758 \ud3b8\ucc28\ub294 \ube44\uc5b4-\ub78c\ubca0\ub974\ud2b8 \ubc95\uce59 \uacc4\uc0b0 \uc2dc \ube44\ub840\uc801\uc778 \uc624\ucc28\ub85c \uc9c1\uc811 \uc774\uc5b4\uc9d1\ub2c8\ub2e4. <strong>\uad11\ud559 \ub4f1\uae09\uc758 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud050\ubcb3\uc740 \ucc3d \uac1c\uad6c\ubd80 \uc804\uccb4\uc5d0 \uac78\uccd0 \uad74\uc808\ub960 \uade0\uc77c\uc131\uc744 \ucd94\uac00\ub85c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/strong>, \uc774\ub97c \ud1b5\ud574 \ube54 \uc870\ud5a5\uc5d0 \ub530\ub978 \uc778\uacf5 \uc2e0\ud638\uac00 \uac89\ubcf4\uae30 \ud761\uad11\ub3c4\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\uc9c0 \uc54a\ub3c4\ub85d \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \uc774 \uc0ac\uc591\uc740 \uc720\ub9ac \ud050\ubcb3\uc5d0\ub294 \ud574\ub2f9\ub418\uc9c0 \uc54a\uc9c0\ub9cc, \uace0\ud718\ub3c4 \uc790\uc678\uc120 \uad11\uc6d0\uc744 \uc0ac\uc6a9\ud558\uac70\ub098 \uc815\ub7c9\uc801 \uad6c\uc870 \uc0dd\ubb3c\ud559 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \ud050\ubcb3\uc758 \uacbd\uc6b0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h3>\ubbf8\ub7c9 \uc6d0\uc18c \ubd84\uc11d\uc6a9 \uc18c\ud654 \uc6a9\uae30 \ubc0f \uc0b0 \uc6a9\ud574 \ud50c\ub77c\uc2a4\ud06c<\/h3>\n<p>ICP-MS \ubc0f ICP-OES\ub97c \uc774\uc6a9\ud55c \ubbf8\ub7c9 \uc6d0\uc18c \ubd84\uc11d\uc740 80 \u00b0C\uc5d0\uc11c 250 \u00b0C \uc0ac\uc774\uc758 \uc628\ub3c4\uc5d0\uc11c, \uc218 \ubd84\uc5d0\uc11c \uc218 \uc2dc\uac04\uc5d0 \uc774\ub974\ub294 \uae30\uac04 \ub3d9\uc548 \uc2dc\ub8cc\ub97c \ubb34\uae30\uc0b0(\uc77c\ubc18\uc801\uc73c\ub85c \ub18d\ucd95 HNO\u2083, HCl \ub610\ub294 HNO\u2083\/HCl \ud63c\ud569\ubb3c)\uc5d0 \uc6a9\ud574\uc2dc\ucf1c\uc57c \ud569\ub2c8\ub2e4. \uc774 \ubd84\ud574 \ub2e8\uacc4\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc6a9\uae30\ub294 \uc804\uccb4 \ubd84\uc11d \uc6cc\ud06c\ud50c\ub85c\uc6b0\uc5d0\uc11c \uc624\uc5fc\uc5d0 \uac00\uc7a5 \ucde8\uc57d\ud55c \uc694\uc18c\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac \ubd84\ud574 \uc6a9\uae30\ub294 50\u2013500 \u03bcg\/L \ub18d\ub3c4\uc758 \ubd95\uc18c\ub97c \ubc29\ucd9c\ud569\ub2c8\ub2e4.<\/strong> \ub728\uac70\uc6b4 \uc9c8\uc0b0 \uc6a9\uc561\uc73c\ub85c \uc720\uc785\ub418\ub294\ub370, \uc774\ub294 \ubd95\uc18c \uc790\uccb4\uac00 \ubd84\uc11d \ub300\uc0c1\uc778 \ud658\uacbd \ubc0f \uc0dd\ubb3c\ud559\uc801 \uc2dc\ub8cc\uc5d0\uc11c \ubd84\uc11d\uc801\uc73c\ub85c \uc720\uc758\ubbf8\ud55c \uc218\uc900\uc758 \uc624\uc5fc\uc785\ub2c8\ub2e4. \uc720\ub9ac \uc6a9\uae30\uc5d0\uc11c \uc6a9\ucd9c\ub418\ub294 \ub098\ud2b8\ub968\uacfc \uc54c\ub8e8\ubbf8\ub284\uc740 \ub9e4\ud2b8\ub9ad\uc2a4\uc758 \ubcf5\uc7a1\uc131\uc744 \ub354\uc6b1 \uac00\uc911\uc2dc\ud0a4\uace0, \uc774\ub7ec\ud55c \uc6d0\uc18c\ub4e4\uc5d0 \ub300\ud55c \ubd84\uc11d \ube14\ub7ad\ud06c \uac12\uc744 \ub192\uc785\ub2c8\ub2e4. \uc735\ud569 \uc11d\uc601 \uc6a9\uae30\ub294 \uace0\uc628\uc758 HF\uac00 \ud3ec\ud568\ub418\uc9c0 \uc54a\uc740 \uc0b0\uc131 \ub9e4\uc9c8\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \ub18d\ub3c4\uc758 \uc2e4\ub9ac\ucf58(\uaddc\uc0b0 \ud615\ud0dc)\uc744 \uc6a9\uc561\uc5d0 \ubc29\ucd9c\ud558\uc9c0\ub9cc, \uc2e4\ub9ac\ucf58\uc740 \ub300\ubd80\ubd84\uc758 ICP \ubd84\uc11d \uc6cc\ud06c\ud50c\ub85c\uc6b0\uc5d0\uc11c \ubd84\uc11d \ub300\uc0c1\uc774 \uc544\ub2c8\uba70 \uc27d\uac8c \uacc4\uc0c1\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\uadf8 \uc678 \ubaa8\ub4e0 \uc6d0\uc18c\uc758 \uacbd\uc6b0, \uc11d\uc601 \ub9e4\ud2b8\ub9ad\uc2a4 \ube14\ub7ad\ud06c\uc758 \uae30\uc5ec\ub3c4\ub294 \u03bcg\/L \ubbf8\ub9cc\uc758 \uc218\uc900\uc5d0\uc11c \ubb34\uc2dc\ud560 \uc218 \uc788\uc744 \uc815\ub3c4\ub85c \ubbf8\ubbf8\ud569\ub2c8\ub2e4.<\/strong>, \uc774\ub97c \ud1b5\ud574 PTFE \ucca8\uac00\uc81c\ub85c \uc778\ud574 \uc624\uc5fc\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\ub294 \uc6d0\uc18c\uc758 \uacbd\uc6b0, \uc720\ub9ac \uc6a9\uae30\ub098 \uc2ec\uc9c0\uc5b4 \uace0\ud488\uc9c8 PTFE \uc6a9\uae30\ub85c\ub294 \ub2ec\uc131\ud560 \uc218 \uc5c6\ub294 \uac80\ucd9c \ud55c\uacc4\ub97c \uc2e4\ud604\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc554\uc11d \ubc0f \uad11\ubb3c \uc2dc\ub8cc\uc758 \uc9c0\uad6c\ud654\ud559\uc801 \ubd84\uc11d \ubd84\uc57c\uc5d0\uc11c\ub294 \u2014 ng\/g \ub18d\ub3c4\uc758 \ud76c\ud1a0\ub958 \uc6d0\uc18c, \uc804\uc774 \uae08\uc18d \ubc0f \ubc31\uae08\uc871 \uc6d0\uc18c\ub97c \uc815\ud655\ud558\uac8c \uce21\uc815\ud558\ub294 \uac83\uc774 \ud45c\uc900\uc73c\ub85c \uc5ec\uaca8\uc9c0\ub294 \ubd84\uc57c \u2014 \uc11d\uc601 \uc6a9\ud574 \uc6a9\uae30\uac00 \ub300\uae30\uc555 \ud558\uc5d0\uc11c \uac1c\ubc29\ud615 \uc6a9\uae30 \uc0b0 \uc6a9\ud574\uc5d0 \uc0ac\uc6a9\ub420 \uc218 \uc788\ub294 \ucd5c\uc18c\ud55c\uc758 \ud5c8\uc6a9 \uac00\ub2a5\ud55c \uc6a9\uae30 \uc7ac\uc9c8\ub85c \uac04\uc8fc\ub41c\ub2e4.<\/p>\n<h4>\ubd84\uc11d \uce21\uc815 \ubd84\uc57c\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \uae30\uae30\uc758 \uc131\ub2a5<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<th>\uc8fc\uc694 \uc694\uad6c \uc0ac\ud56d<\/th>\n<th>\uc11d\uc601 \uc0ac\uc591<\/th>\n<th>\ub300\uccb4 \uc7ac\ub8cc\uc5d0 \ub300\ud55c \uc81c\ud55c \uc0ac\ud56d<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>200\u2013280 nm \ud30c\uc7a5 \ubc94\uc704\uc5d0\uc11c\uc758 UV-Vis \ubd84\uad11\ubc95<\/td>\n<td>\ubcc0\uc18d\uae30 &gt;80%<\/td>\n<td>\ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74<\/td>\n<td>\ubd88\uaddc\uc0b0\uc5fc \ubd88\ud22c\uba85 &lt;310 nm<\/td>\n<\/tr>\n<tr>\n<td>280\u2013900 nm \ud30c\uc7a5 \ubc94\uc704\uc758 UV-Vis \ubd84\uad11\ubc95<\/td>\n<td>\ubcc0\uc18d\uae30 &gt;90%<\/td>\n<td>\ucc9c\uc5f0 \uc735\ud569 \uc11d\uc601<\/td>\n<td>\uc720\ub9ac\ub294 \uc801\ub2f9\ud558\uc9c0\ub9cc \uc790\uc678\uc120 \ucc28\ub2e8 \uae30\ub2a5\uc740 \uc5c6\uc74c<\/td>\n<\/tr>\n<tr>\n<td>ICP-MS \ubd84\ud574<\/td>\n<td>\uacf5\ubc31 &lt;0.1 \u03bcg\/L<\/td>\n<td>\uace0\uc21c\ub3c4 \uc11d\uc601 \ud50c\ub77c\uc2a4\ud06c<\/td>\n<td>\ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8\ub294 B, Na, Al\uc744 \ubc29\ucd9c\ud55c\ub2e4<\/td>\n<\/tr>\n<tr>\n<td>ICP-OES \ubd84\ud574<\/td>\n<td>\uacf5\ub780 &lt;1 \u03bcg\/L<\/td>\n<td>\uc11d\uc601 \uc5d0\ub97c\ub80c\ub9c8\uc774\uc5b4 \ud50c\ub77c\uc2a4\ud06c<\/td>\n<td>PTFE\ub294 \uc801\ud569\ud558\uc9c0\ub9cc \uc628\ub3c4 \uc81c\ud55c\uc774 \uc788\uc74c<\/td>\n<\/tr>\n<tr>\n<td>300 nm \ubbf8\ub9cc\uc758 \ud615\uad11<\/td>\n<td>\ubc30\uacbd \ud615\uad11\uc774 \uc804\ud600 \uc5c6\uc74c<\/td>\n<td>UV \ub4f1\uae09 \uc6a9\uc735 \uc2e4\ub9ac\uce74<\/td>\n<td>\uc720\ub9ac\ub294 \uc790\uc678\uc120 \uc601\uc5ed\uc5d0\uc11c \ud615\uad11\uc744 \ub764\ub2e4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glassware-Crucible-and-Reaction-Tube-in-High-Temperature-Tube-Furnace-Setting.webp\" alt=\"\uace0\uc628 \ud29c\ube0c\ub85c \ub0b4\ubd80\uc758 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8 \ubc0f \ubc18\uc751\uad00\" title=\"\uace0\uc628 \ud29c\ube0c\ub85c \ub0b4\ubd80\uc758 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8 \ubc0f \ubc18\uc751\uad00\" \/><\/p>\n<h2>\uace0\uc628 \ud569\uc131 \ubc0f \uc5f4 \uc5f0\uad6c \ubd84\uc57c\uc758 \uc11d\uc601 \uc720\ub9ac \uae30\uad6c<\/h2>\n<p>\ubc18\ub3c4\uccb4 \ubc0f \ubd84\uc11d \ubd84\uc57c \uc678\uc5d0\ub3c4, \uace0\uc628 \ud569\uc131, \uc5f4 \ubd84\uc11d, \uad11\ud654\ud559 \uc5f0\uad6c\uc640 \uac19\uc740 \ubd84\uc57c\uc5d0\uc11c\ub3c4 \ub9c8\ucc2c\uac00\uc9c0\ub85c \uae4c\ub2e4\ub85c\uc6b4 \uc77c\ub828\uc758 \uc7ac\ub8cc \uc694\uad6c \uc0ac\ud56d\uc774 \ub300\ub450\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud658\uacbd\uc5d0\uc11c\ub294 \uadf9\ud55c\uc758 \uc628\ub3c4, \ubc18\uc751\uc131 \ub300\uae30, \uad11\ud559\uc801 \uc811\uadfc \uc81c\ud55c\uc774 \ubcf5\ud569\uc801\uc73c\ub85c \uc791\uc6a9\ud558\uc5ec \uae30\uc874\uc758 \uc720\ub9ac \ub300\uccb4\uc7ac\ub4e4\uc744 \ub2e8\ud638\ud558\uac8c \ubc30\uc81c\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc7ac\ub8cc \ud569\uc131, \uc5f4\uc801 \ud2b9\uc131 \ubd84\uc11d \ubc0f \uad11\ud654\ud559 \uc2e4\ud5d8\uc744 \uc218\ud589\ud558\ub294 \uc5f0\uad6c\uc2e4\uc5d0\uc11c\ub294 \ubc18\ub3c4\uccb4 \ubc0f \ubd84\uc11d \ubd84\uc57c\uc758 \ud45c\uc900\uacfc\ub294 \ub2e4\ub974\uc9c0\ub9cc \uadf8 \uac15\ub3c4\uac00 \uacb0\ucf54 \ub4a4\uc9c0\uc9c0 \uc54a\ub294 \ubd80\ud558 \uc870\uac74\uc744 \uc720\ub9ac \uae30\uad6c\uc5d0 \uac00\ud569\ub2c8\ub2e4. \ub2e8\uc77c \uc2e4\ud5d8 \ud504\ub85c\ud1a0\ucf5c \ub0b4\uc5d0\uc11c \uc628\ub3c4\uac00 \uadf9\uc800\uc628\uacfc 1,200 \u00b0C \uc0ac\uc774\ub97c \ubc18\ubcf5\uc801\uc73c\ub85c \uc624\uac08 \uc218 \uc788\uc73c\uba70, \ub300\uae30 \uc870\uc131\uc740 \ubd88\ud65c\uc131 \uc544\ub974\uace4 \ubc0f \uc9c8\uc18c\ubd80\ud130 \uc0b0\ud654\uc131 \uc0b0\uc18c, \uc57d\ud55c \ud658\uc6d0\uc131\uc744 \ub764 \uc218\uc18c \ud63c\ud569\ubb3c\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \ub2e4\uc591\ud569\ub2c8\ub2e4. \ub610\ud55c \uad11\ud654\ud559 \ubc18\uc751\uae30\ub294 \uc5f4\uc801 \ubc0f \ud654\ud559\uc801 \uc751\ub825\uc744 \ub3d9\uc2dc\uc5d0 \uacac\ub514\uba74\uc11c \uc790\uc678\uc120\uc744 \ud22c\uacfc\ud558\ub294 \uc6a9\uae30 \ubcbd\uc744 \ud544\uc694\ub85c \ud569\ub2c8\ub2e4. \uc735\ud569 \uc11d\uc601\uc740 \uc774 \uc138 \uac00\uc9c0 \uc0c1\ud669 \ubaa8\ub450\uc5d0\uc11c \uc774\ub7ec\ud55c \ubcf5\ud569\uc801\uc778 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<h3>\uc7ac\ub8cc \ud569\uc131 \ubd84\uc57c\uc758 \ud29c\ube0c\ub85c \ubc0f \ub3c4\uac00\ub2c8 \uc751\uc6a9<\/h3>\n<p>\uad00\ud615\ub85c(Tube furnaces)\ub294 \uace0\uccb4 \ud654\ud559, \uc138\ub77c\ubbf9 \uacfc\ud559 \ubc0f \ub098\ub178\ubb3c\uc9c8 \ud569\uc131 \ubd84\uc57c\uc5d0\uc11c \uc8fc\uc694 \uc5f4\ucc98\ub9ac \uc7a5\ube44\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ud45c\uc900 \uc218\ud3c9\ud615 \uad00\ud615\ub85c\ub294 \uc678\uacbd 50~100 mm, \uac00\uc5f4 \uae38\uc774 600~1,200 mm\uc758 \uc6a9\uc735 \uc11d\uc601 \ubc18\uc751\uad00\uc744 \uc218\uc6a9\ud558\uba70, \ud569\uc131, \uc77c\ubc18\uc801\uc73c\ub85c 400 \u00b0C\uc5d0\uc11c 1,100 \u00b0C \uc0ac\uc774\uc758 \uc628\ub3c4\uc5d0\uc11c \ud569\uc131, \uc5b4\ub2d0\ub9c1 \ub610\ub294 \uc0c1\ubcc0\ud0dc \uc2e4\ud5d8\uc774 \uc218\ud589\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \ubc18\uc751\uad00\uc740 \uc0b0\ud654\uc131(O\u2082, \uacf5\uae30), \ubd88\ud65c\uc131(Ar, N\u2082) \ubc0f \uc57d\ud55c \ud658\uc6d0\uc131(5% H\u2082\/N\u2082) \ubd84\uc704\uae30\uc5d0\uc11c 1,100 \u00b0C\uc758 \uc628\ub3c4\uc5d0\uc11c \uc5f0\uc18d \uac00\ub3d9\uc5d0 \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong> \uae30\uccb4\uc0c1\uacfc \uce21\uc815 \uac00\ub2a5\ud55c \ubc18\uc751\uc774 \uc77c\uc5b4\ub098\uc9c0 \uc54a\uae30 \ub54c\ubb38\uc5d0, \ub300\ubd80\ubd84\uc758 \uace0\uccb4 \uc0c1\ud0dc \ud569\uc131 \ud504\ub85c\ud1a0\ucf5c\uacfc \ud638\ud658\ub429\ub2c8\ub2e4. \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29\ubc95\uc73c\ub85c \uc131\uc7a5\uc2dc\ud0a8 \ud0c4\uc18c \ub098\ub178\ud29c\ube0c, \uc5f4\ubd84\ud574\ub85c \ud569\uc131\ud55c \uae08\uc18d \uc0b0\ud654\ubb3c \ubd84\ub9d0, \uadf8\ub9ac\uace0 \uc81c\uc5b4\ub41c \ubd84\uc555 \ud558\uc5d0\uc11c \uc5b4\ub2d0\ub9c1\ub41c \ubc15\ub9c9 \uc7ac\ub8cc\ub294 \ubaa8\ub450 \uc774\ub7ec\ud55c \uc870\uac74\uc5d0\uc11c \uc11d\uc601\uad00\uc758 \ubb34\uacb0\uc131\uc5d0 \uc758\uc874\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud29c\ube0c \ub0b4\ubd80\uc5d0 \ubc30\uce58\ub41c \uc11d\uc601 \ub3c4\uac00\ub2c8\ub294 \ubc18\uc751\uc131 \uc6d0\ub8cc \ubb3c\uc9c8\uc744 \uc9c1\uc811 \ub2f4\ub294 \uc6a9\uae30 \uc5ed\ud560\uc744 \ud558\uba70, \uc2dc\ub8cc\ub97c \ud29c\ube0c \ubcbd\uba74\uc73c\ub85c\ubd80\ud130 \uaca9\ub9ac\uc2dc\ucf1c \uc5f4\uc5d0 \uc758\ud574 \uc9c4\ud589\ub418\ub294 \ubc18\uc751 \uc911 \uc9c8\ub7c9 \ubcc0\ud654\ub97c \uc911\ub7c9\ubc95\uc73c\ub85c \ucd94\uc801\ud560 \uc218 \uc788\uac8c \ud574\uc90d\ub2c8\ub2e4.<\/p>\n<p>\uace0\uc628 \ud569\uc131\uc6a9 \uc11d\uc601 \ub3c4\uac00\ub2c8\ub294 \ubcbd \ub450\uaed8\uac00 2~4 mm\ub85c \uc9c0\uc815\ub418\uba70, \uc6a9\uc801\uc740 10 mL\uc5d0\uc11c 500 mL\uae4c\uc9c0 \uc81c\uc870\ub429\ub2c8\ub2e4. 1,100 \u00b0C\uae4c\uc9c0\uc758 \uc628\ub3c4 \ubc94\uc704\ub97c \uacac\ub51c \uc218 \uc788\uc5b4 \ub300\ubd80\ubd84\uc758 \uc804\uc774\uae08\uc18d \uc0b0\ud654\ubb3c, \uc778\uc0b0\uc5fc \ubc0f \uaddc\uc0b0\uc5fc\uc758 \uc6a9\uc735 \ubc0f \uc18c\uacb0 \ubc94\uc704\ub97c \ud3ec\uad04\ud569\ub2c8\ub2e4. \ub2e4\ub9cc, \uc6a9\uc735\ub41c \uc54c\uce7c\ub9ac \uae08\uc18d \uc0b0\ud654\ubb3c\uacfc \ubd88\ud654\ubb3c\uc740 \uc11d\uc601\uc744 \uac15\ub825\ud558\uac8c \ubd80\uc2dd\uc2dc\ud0a4\ubbc0\ub85c, \uc774 \uacbd\uc6b0 \ubc31\uae08\uc774\ub098 \uc54c\ub8e8\ubbf8\ub098 \uc7ac\uc9c8\uc758 \ub300\uccb4\uc7ac\ub97c \uc0ac\uc6a9\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc5f0\uad6c \ud604\uc7a5\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uc5f4\ubd84\uc11d \uc7a5\ube44 \ubc0f \ubc18\uc751 \uc6a9\uae30<\/h3>\n<p>\uc5f4\uc911\ub7c9 \ubd84\uc11d(TGA) \ubc0f \ucc28\ub3d9 \uc8fc\uc0ac \uc5f4\ub7c9\uacc4(DSC) \uc7a5\ube44\uc5d0\ub294 \uc7a5\ube44\uc758 \uc804\uccb4 \uc791\ub3d9 \ubc94\uc704, \ud2b9\ud788 \uace0\uc628 \uad6c\uc131\uc758 \uacbd\uc6b0 \uc77c\ubc18\uc801\uc73c\ub85c \u2212150 \u00b0C\uc5d0\uc11c 1,600 \u00b0C\uc5d0 \uc774\ub974\ub294 \ubc94\uc704\uc5d0\uc11c \uce58\uc218\uc801 \ubc0f \ud654\ud559\uc801 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\ub294 \uc2dc\ub8cc \ud640\ub354\uc640 \ubcf4\ud638 \ubd80\ud488\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc6a9\uc735 \uc11d\uc601 \uc2dc\ub8cc \ud29c\ube0c, \ud589\ub2e4\uc6b4 \ud29c\ube0c \ubc0f \uc800\uc6b8 \ucc28\ud3d0\ud310\uc740 \uace0\uc628 TGA \uae30\uae30 \uc804\ubc18\uc5d0 \uac78\uccd0 \uad6c\uc870\uc801 \ubc0f \ubcf4\ud638\uc6a9 \ubd80\ud488\uc73c\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p>TGA \uc2dc\uc2a4\ud15c\uc5d0\uc11c\ub294 \uc11d\uc601 \ud589\ub2e4\uc6b4 \ud29c\ube0c\uac00 \uc2dc\ub8cc \ub3c4\uac00\ub2c8\ub97c \uac00\ub9c8 \uad6c\uc5ed \ub0b4\uc5d0 \ub9e4\ub2ec\uc544 \ub450\ub294 \ub3d9\uc2dc\uc5d0, \uc815\ubc00 \uc800\uc6b8 \uc7a5\uce58\ub97c \uace0\uc628 \uac00\uc2a4 \ud750\ub984\uc73c\ub85c\ubd80\ud130 \uaca9\ub9ac\ud569\ub2c8\ub2e4. <strong>\uc774 \ud29c\ube0c\ub294 \uc791\ub3d9 \uc628\ub3c4\uc5d0\uc11c \ud06c\ub9ac\ud504 \ud604\uc0c1\uc774 \uc804\ud600 \ub098\ud0c0\ub098\uc9c0 \uc54a\uc544\uc57c \ud569\ub2c8\ub2e4.<\/strong> \u2014 \uc774\ub294 500 \u00b0C \uc774\uc0c1\uc5d0\uc11c\ub294 \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub97c \uc0ac\uc6a9\ud560 \uc218 \uc5c6\ub3c4\ub85d \ud558\ub294 \uc694\uac74\uc774\uba70 \u2014 \ubc18\uc751 \uc5c6\uc774 \uac00\uc2a4 \ubd84\uc704\uae30\ub97c \uc2dc\ub8cc\uc5d0 \uade0\uc77c\ud558\uac8c \uc804\ub2ec\ud574\uc57c \ud569\ub2c8\ub2e4. SO\u2082, HCl \uc99d\uae30 \ub610\ub294 \uc99d\uae30\ub97c \ud3ec\ud568\ud55c \ubc18\uc751\uc131 \ubd84\uc704\uae30\uc5d0\uc11c \uace0\uc628\uc73c\ub85c \uc218\ud589\ub418\ub294 TGA \uc2e4\ud5d8\uc758 \uacbd\uc6b0, \uc774\ub7ec\ud55c \ubb3c\uc9c8\uc5d0 \ub300\ud55c \uc11d\uc601\uc758 \ud654\ud559\uc801 \ubd88\ud65c\uc131(\uc57d 1,000 \u00b0C \uc774\ud558, HF \uc81c\uc678) \ub355\ubd84\uc5d0 \uc11d\uc601\uc740 \uae30\uae30 \uc124\uacc4 \uc2dc \uae30\ubcf8\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \ud29c\ube0c \uc7ac\ub8cc\uac00 \ub429\ub2c8\ub2e4.<\/p>\n<p>\uace0\uc628 \uc624\ud1a0\ud074\ub808\uc774\ube0c \ubc0f \ubc00\ud3d0 \uc570\ud480 \uc2e4\ud5d8 \u2014 \uc989, \uc804\uad6c\uccb4 \ubb3c\uc9c8\uc744 \ubd80\ubd84 \uc555\ub825 \ud558\uc5d0\uc11c \ubc00\ud3d0\ub41c \uc11d\uc601 \ud29c\ube0c\uc5d0 \ub123\uace0 \uac00\uc5f4\ud558\uc5ec \uacb0\uc815 \uc131\uc7a5\uc774\ub098 \uc0c1\ubcc0\ud0dc\ub97c \ucd09\uc9c4\ud558\ub294 \uc2e4\ud5d8 \u2014 \uc5d0\uc11c, \uc2e4\ud5d8\uc5d0 \ud604\uc7a5 \ubaa8\ub2c8\ud130\ub9c1\uc774 \ud544\uc694\ud55c \uacbd\uc6b0 \uc11d\uc601 \uc570\ud480\uc740 \uc555\ub825 \uc6a9\uae30, \ubc18\uc751\uc2e4, \uadf8\ub9ac\uace0 \uad11\ud559 \uad00\ucc30 \uc140\uc758 \uc5ed\ud560\uc744 \ub3d9\uc2dc\uc5d0 \uc218\ud589\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uad11\ud654\ud559\uc801 \ubc0f \uc790\uc678\uc120 \ubcf4\uc870 \ubc18\uc751 \uc2dc\uc2a4\ud15c\uc5d0\uc11c\uc758 \uc11d\uc601 \uc720\ub9ac \uae30\uad6c<\/h3>\n<p>\uad11\ud654\ud559 \uc5f0\uad6c\uc5d0\ub294 \ubc18\uc751 \uc6a9\uc561\uc774\ub098 \uae30\uc0c1 \uc0c1\ud0dc\uc5d0 \uc790\uc678\uc120 \ub610\ub294 \uac00\uc2dc\uad11\uc120 \uad11\uc6d0\uc774 \ubc18\uc751\uae30 \ubcbd\uc5d0 \uc758\ud55c \uac10\uc1e0\ub97c \ucd5c\uc18c\ud654\ud558\uba74\uc11c \uc870\uc0ac\ub420 \uc218 \uc788\ub294 \ubc18\uc751\uae30\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc6a9\uc735 \uc11d\uc601 \ubc18\uc751\uae30(\uc6d0\ud1b5\ud615 \uc6a9\uae30, \uce68\uc9c0\ud615 \ubc18\uc751\uae30, \ud3c9\uba74 \ucc3d \uc720\ub3d9 \uc140 \ub4f1)\ub294 \uad11\ucd09\ub9e4 \ubc18\uc751, \uc790\uc678\uc120 \ubcf4\uc870 \ud569\uc131 \ubc0f <a href=\"https:\/\/www.sciencedirect.com\/topics\/chemistry\/actinometry\">\uad11\ub3c4 \uce21\uc815\ubc95<\/a><sup id=\"fnref1:3\"><a href=\"#fn:3\" class=\"footnote-ref\">3<\/a><\/sup> \ubc18\uc751 \ubd80\ud53c\uc5d0 \uc804\ub2ec\ub418\ub294 \uc815\ud655\ud55c \uad11\uc790 \uc120\ub7c9\uc744 \ud30c\uc545\ud558\uac70\ub098 \uc81c\uc5b4\ud574\uc57c \ud558\ub294 \uc2e4\ud5d8.<\/p>\n<p><strong>\uc735\ud569 \uc11d\uc601\uc73c\ub85c \uc81c\uc791\ub41c \uce68\uc9c0\ud615 \ubc18\uc751\uae30\ub97c \uc0ac\uc6a9\ud558\uba74, 254 nm, 313 nm \ubc0f 365 nm \ud30c\uc7a5\uc5d0\uc11c \ube5b\uc744 \ubc29\ucd9c\ud558\ub294 \uc218\uc740 \uc99d\uae30 \ub7a8\ud504\uac00 \ubcbd\uba74\uc758 \ud761\uc218\ub97c \uac70\uc758 \uc77c\uc73c\ud0a4\uc9c0 \uc54a\uc73c\uba74\uc11c \uc8fc\ubcc0 \ubc18\uc751 \ud658\ud615 \uacf5\uac04\uc744 \ube44\ucd9c \uc218 \uc788\ub2e4.<\/strong> \u2014 254 nm \ud30c\uc7a5\uc5d0\uc11c 2 mm \ub450\uaed8\uc758 \uc11d\uc601 \ubcbd\uc744 \ud1b5\uacfc\ud560 \ub54c\uc758 \ud22c\uacfc \uc190\uc2e4\uc740 \uace0\uc21c\ub3c4 \ub4f1\uae09\uc758 \uacbd\uc6b0 \uc77c\ubc18\uc801\uc73c\ub85c 5% \ubbf8\ub9cc\uc774\ub2e4. \ub3d9\uc77c\ud55c \ub7a8\ud504 \ud558\uc5d0\uc11c \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac \ubc18\uc751\uae30\ub294 254 nm\uc5d0\uc11c \uc0ac\uc2e4\uc0c1 \uc5d0\ub108\uc9c0\ub97c \ud22c\uacfc\uc2dc\ud0a4\uc9c0 \uc54a\uc73c\ubbc0\ub85c, 310 nm \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \ucef7\uc624\ud504\ub97c \ud1b5\uacfc\ud558\ub294 \uad11\uc790\uc5d0 \ud55c\ud574 \ubc18\uc751\uc774 \uc81c\ud55c\ub41c\ub2e4. 365 nm \ubbf8\ub9cc\uc758 \uad11\uc790\uc5d0 \uc758\ud574 TiO\u2082 \ucd09\ub9e4\uac00 \ud65c\uc131\ud654\ub418\ub294 \uad11\ucd09\ub9e4 \ubd84\ud574 \uc2e4\ud5d8\uc5d0\uc11c, \uc11d\uc601 \ubc18\uc751\uae30\uc640 \uc720\ub9ac \ubc18\uc751\uae30 \uc911 \uc5b4\ub290 \uac83\uc744 \uc120\ud0dd\ud558\ub290\ub0d0\uc5d0 \ub530\ub77c \ucd09\ub9e4 \ud45c\uba74\uc758 \uad11\uc790 \ud50c\ub8e8\uc5b8\uc2a4\uc728\uc774 \uadfc\ubcf8\uc801\uc73c\ub85c \ub2ec\ub77c\uc9c0\uba70, \uc774 \ubcc0\uc218\ub294 \ubc18\uc751 \uc18d\ub3c4 \ub370\uc774\ud130\ub97c \uc644\uc804\ud788 \uc88c\uc6b0\ud569\ub2c8\ub2e4.<\/p>\n<h4>\uace0\uc628 \ubc0f \uad11\ud654\ud559 \uc5f0\uad6c \ubd84\uc57c\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uc11d\uc601 \uc720\ub9ac \uae30\uad6c<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<th>\uc11d\uc601 \ubd80\ud488<\/th>\n<th>\uc628\ub3c4 \ubc94\uc704(\u00b0C)<\/th>\n<th>\uc8fc\uc694 \ud65c\uc6a9 \uc18d\uc131<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uace0\uccb4 \uc0c1\ud0dc \ud569\uc131<\/td>\n<td>\ubc18\uc751\uad00<\/td>\n<td>400\u20131,100<\/td>\n<td>\uc5f4\uc801 \uc548\uc815\uc131, \uae30\uccb4 \ubd88\ud65c\uc131<\/td>\n<\/tr>\n<tr>\n<td>\uc0b0\ud654\ubb3c \ub3c4\uac00\ub2c8 \uc6a9\uc735<\/td>\n<td>\ud06c\ub8e8\uc2dc\ube14<\/td>\n<td>800\u20131,100<\/td>\n<td>\ud654\ud559\uc801 \ubd88\ud65c\uc131, \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131<\/td>\n<\/tr>\n<tr>\n<td>TGA \ubd84\uc11d<\/td>\n<td>\ud558\ub2e8 \ud29c\ube0c, \ubc38\ub7f0\uc2a4 \uc2e4\ub4dc<\/td>\n<td>25\u20131,500<\/td>\n<td>\ud06c\ub9ac\ud504 \ud604\uc0c1 \uc5c6\uc74c, \ud654\ud559\uc801 \ubd88\ud65c\uc131<\/td>\n<\/tr>\n<tr>\n<td>\ubc00\ubd09 \uc570\ud50c \ud569\uc131<\/td>\n<td>\uc735\ud569 \uc570\ud480<\/td>\n<td>200\u2013900<\/td>\n<td>\uc555\ub825 \ub0b4\uc131, \uad11\ud559 \uc811\uadfc<\/td>\n<\/tr>\n<tr>\n<td>\uc790\uc678\uc120 \uad11\ucd09\ub9e4 \ubc18\uc751<\/td>\n<td>\uce68\uc9c0\uc2dd \ubc18\uc751\uae30<\/td>\n<td>10-80<\/td>\n<td>254\u2013365 nm \ud30c\uc7a5\ub300\uc758 \uc790\uc678\uc120 \ud22c\uacfc\uc728<\/td>\n<\/tr>\n<tr>\n<td>\uad11\ud654\ud559 \ud569\uc131<\/td>\n<td>\uc720\ub3d9 \uc140, \ud3c9\uba74 \ucc3d\uc774 \uc788\ub294 \uc6a9\uae30<\/td>\n<td>0\u2013100<\/td>\n<td>\uad11\ub300\uc5ed \uc790\uc678\uc120 \ud22c\uacfc\uc131<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glassware-Optical-Windows-Mounted-in-Photonics-Laser-Laboratory.webp\" alt=\"\ud3ec\ud1a0\ub2c9\uc2a4 \ub808\uc774\uc800 \uc2e4\ud5d8\uc2e4\uc5d0 \uc124\uce58\ub41c \uc11d\uc601 \uc720\ub9ac \uae30\ud310 \ubc0f \uad11\ud559 \ucc3d\" title=\"\ud3ec\ud1a0\ub2c9\uc2a4 \ub808\uc774\uc800 \uc2e4\ud5d8\uc2e4\uc5d0 \uc124\uce58\ub41c \uc11d\uc601 \uc720\ub9ac \uae30\ud310 \ubc0f \uad11\ud559 \ucc3d\" \/><\/p>\n<h2>\uc815\ubc00 \uc11d\uc601 \uc720\ub9ac \uae30\uad6c\uc758 \uad11\ud559 \ubc0f \uad11\uc790\ud559 \ubd84\uc57c \ud65c\uc6a9<\/h2>\n<p>\ud30c\uc7a5\uc774 \uc2ec\uc790\uc678\uc120(deep UV) \uc601\uc5ed\uae4c\uc9c0 \ud655\uc7a5\ub418\uace0, \ucd9c\ub825 \ubc00\ub3c4\uac00 \ubaa8\ub4e0 \uc7ac\ub8cc\uc758 \uc190\uc0c1 \uc784\uacc4\uce58\ub97c \uc2dc\ud5d8\uc5d0 \ub4e4\uac8c \ud558\ub294 \uad11\ud559 \uacf5\ud559\uc758 \ucd5c\uc804\uc120\uc5d0\uc11c, \uc815\ubc00 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubd80\ud488\uc740 \ub2e4\ub978 \uc5b4\ub5a4 \uc0b0\ud654\ubb3c \uc720\ub9ac\ub3c4 \uc218\ud589\ud560 \uc218 \uc5c6\ub294 \uc5ed\ud560\uc744 \ub9e1\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ubc14\ub85c \uad74\uc808\ub960 \uade0\uc77c\uc131, \uc790\uc678\uc120 \ud22c\uacfc\uc728, \ub808\uc774\uc800\ub85c \uc778\ud55c \uc190\uc0c1 \uc800\ud56d\uc131\uc774 \ubc31\ub9cc \ubd84\uc758 \uc77c \ub2e8\uc704\ub85c \uce21\uc815\ub418\ub294 \ud5c8\uc6a9 \uc624\ucc28 \ubc94\uc704 \ub0b4\uc5d0\uc11c \ucda9\uc871\ub418\uc5b4\uc57c \ud558\ub294 \uc5ed\ud560\ub4e4\uc785\ub2c8\ub2e4.<\/p>\n<p>\uad11\ud559 \ubc0f \ub808\uc774\uc800 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c\ub294 \uc77c\ubc18\uc801\uc778 \uc2e4\ud5d8\uc2e4 \ub4f1\uae09\uc744 \ub6f0\uc5b4\ub118\ub294 \uc7ac\ub8cc \ud2b9\uc131\uc774 \uc694\uad6c\ub429\ub2c8\ub2e4. <strong>\uad74\uc808\ub960 \uade0\uc77c\uc131<\/strong> \uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 \ub9ac\uc18c\uadf8\ub798\ud53c \ubc0f \uac04\uc12d\uacc4 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c\ub294 100 mm \uad6c\uacbd \uc804\ubc18\uc5d0 \uac78\uccd0 1 \u00d7 10\u207b\u2076\ubcf4\ub2e4 \ub354 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4; <strong>\ubcf5\uad74\uc808<\/strong> \u2014 \uc751\ub825\uc5d0 \uc758\ud574 \uc720\ubc1c\ub418\ub294 \uad74\uc808\ub960 \uc774\ubc29\uc131 \u2014\uc740 \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ud3b8\uad11 \uc5f4\ud654\ub97c \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uad11\ud559 \ub4f1\uae09 \ubd80\ud488\uc5d0\uc11c 2 nm\/cm \ubbf8\ub9cc\uc73c\ub85c \uc5b5\uc81c\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc0ac\uc591\uc740 \uc5c4\uaca9\ud558\uac8c \uc81c\uc5b4\ub41c \ud654\uc5fc \uac00\uc218\ubd84\ud574 \ub610\ub294 \ud50c\ub77c\uc988\ub9c8 CVD \uacf5\uc815\uc744 \ud1b5\ud574 \uc0dd\uc0b0\ub41c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \uc0ac\uc6a9\ud558\uace0, \uc720\ub9ac \ub124\ud2b8\uc6cc\ud06c \ub0b4\uc758 \uc794\ub958 \uc751\ub825\uc744 \uc644\ud654\ud558\uae30 \uc704\ud574 \uc124\uacc4\ub41c \uc5b4\ub2d0\ub9c1 \uacf5\uc815\uc744 \uac70\uce5c \uacbd\uc6b0\uc5d0\ub9cc \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\uace0\ucd9c\ub825 \uc2dc\uc2a4\ud15c\uc6a9 UV \ub808\uc774\uc800 \uc708\ub3c4\uc6b0 \ubc0f \ube54 \uc804\ub2ec \uad11\ud559 \uc18c\uc790<\/h3>\n<p>ArF(193 nm) \ubc0f KrF(248 nm) \ud30c\uc7a5\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uc5d1\uc2dc\uba38 \ub808\uc774\uc800\ub294 \uc9d1\uc801 \ud68c\ub85c \uc81c\uc870\ub97c \uc704\ud55c \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c\uc640 \uc790\uc678\uc120(UV) \ubbf8\uc138 \uac00\uacf5 \ubd84\uc57c\uc5d0\uc11c \uc8fc\uc694 \uad11\uc6d0\uc73c\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ube54 \uc804\ub2ec \uacbd\ub85c\uc5d0 \uc788\ub294 \ubaa8\ub4e0 \uad11\ud559 \uc694\uc18c(\uc708\ub3c4\uc6b0, \ube54 \uc2a4\ud50c\ub9ac\ud130, \ub80c\uc988, \uade0\uc9c8\ud654\uae30 \ub4f1)\ub294 \uc774\ub7ec\ud55c \ud30c\uc7a5\ub300\uc5d0\uc11c \ud761\uc218, \uc0b0\ub780 \ub610\ub294 \uc774\uc804 \uc790\uc678\uc120 \ub178\ucd9c\ub85c \uc778\ud55c \uc720\ub3c4 \ud761\uc218\ub97c \ucd5c\uc18c\ud654\ud558\uba74\uc11c \ube5b\uc744 \ud22c\uacfc\uc2dc\ucf1c\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p><strong>OH \ud568\ub7c9\uc774 800 ppm\uc744 \ucd08\uacfc\ud558\ub294 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74<\/strong> 193 nm \ubc0f 248 nm \uad11\ud559 \ubd80\ud488\uc5d0\ub294 \uace0-OH \ub4f1\uae09\uc774 \uc9c0\uc815\ub418\ub294\ub370, \uc774\ub294 \uace0-OH \ub4f1\uae09\uc774 \ub808\uc774\uc800 \uc720\ub3c4 \uce58\ubc00\ud654(laser-induced compaction)\uc5d0 \ub300\ud574 \ub6f0\uc5b4\ub09c \ub0b4\uc131\uc744 \ubcf4\uc774\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \ub808\uc774\uc800 \uc720\ub3c4 \uce58\ubc00\ud654\ub780 \uc2ec\uc790\uc678\uc120(deep-UV) \uad11\uc790 \ud761\uc218\ub85c \uc778\ud574 \uc720\ub9ac \ub124\ud2b8\uc6cc\ud06c\uac00 \uc601\uad6c\uc801\uc73c\ub85c \uce58\ubc00\ud654\ub418\ub294 \ud604\uc0c1\uc73c\ub85c, \uc774\ub85c \uc778\ud574 \uad74\uc808\ub960\uc774 \ubcc0\ud654\ud558\uace0 \uc218\ubc31\ub9cc \ubc88\uc758 \ub808\uc774\uc800 \ud384\uc2a4 \ub3d9\uc548 \ucd08\uc810 \uc704\uce58\uac00 \uc774\ub3d9\ud558\uac8c \ub429\ub2c8\ub2e4. \uc0dd\uc0b0\uc6a9 \ub9ac\uc18c\uadf8\ub798\ud53c \uc2a4\uce90\ub108\uc5d0\uc11c \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \ud384\uc2a4 \uc5d0\ub108\uc9c0(\ubc18\ubcf5 \uc8fc\ud30c\uc218 4,000\u20136,000 Hz\uc5d0\uc11c \ud384\uc2a4\ub2f9 \uc57d 5\u201310 mJ\/cm\u00b2)\ub97c \uae30\uc900\uc73c\ub85c \ud560 \ub54c, \ub80c\uc988 \uc694\uc18c\ub294 \uc791\ub3d9 \uc218\uba85 \ub3d9\uc548 10\u2079 J\/cm\u00b2\ub97c \ucd08\uacfc\ud558\ub294 \ub204\uc801 \ud50c\ub8e8\uc5b8\uc2a4\ub97c \ubc1b\uac8c \ub429\ub2c8\ub2e4. <strong>\uc774\ub7ec\ud55c \ub178\ucd9c \uc218\uc900\uc5d0\uc11c\ub3c4 \uad74\uc808\ub960 \uc548\uc815\uc131\uacfc \ud22c\uacfc\uc728\uc744 \uc720\uc9c0\ud558\ub294 \uac83\uc740 \uace0-OH \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ubfd0\uc785\ub2c8\ub2e4.<\/strong> \u2014 \uc774\ub7ec\ud55c \uc694\uad6c \uc0ac\ud56d\uc73c\ub85c \uc778\ud574, \ud45c\uc900 \uad11\ud559 \ub4f1\uae09\uacfc\ub294 \ub2ec\ub9ac \ubd88\uc21c\ubb3c \ubc0f OH \ud568\ub7c9 \uaddc\uaca9\uc774 \uc5c4\uaca9\ud558\uac8c \uad00\ub9ac\ub418\ub294 \ud2b9\uc218 \ub9ac\uc18c\uadf8\ub798\ud53c \ub4f1\uae09 \uc2e4\ub9ac\uce74 \uc18c\uc7ac\uc758 \uac1c\ubc1c\uc774 \ucd09\uc9c4\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<p>532 nm, 355 nm \ubc0f 266 nm\uc5d0\uc11c \uace0\uc870\ud30c \ucd9c\ub825\uc744 \uc0dd\uc131\ud558\ub294 \ud384\uc2a4\ud615 Nd:YAG \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c\uc758 \uacbd\uc6b0, \uc790\uc678\uc120(UV) \uace0\uc870\ud30c \uc0dd\uc131 \ubc0f \uc804\ub2ec \ub2e8\uacc4\uc5d0\uc11c \ud45c\uc900 \uc720\ub9ac \ubd80\ud488 \ub300\uc2e0 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ucc3d\uacfc \ub80c\uc988\uac00 \uc0ac\uc6a9\ub418\uba70, \uc774 \ub2e8\uacc4\uc5d0\uc11c\ub294 \uade0\uc77c\uc131\ubcf4\ub2e4\ub294 \uc190\uc0c1 \uc784\uacc4\uac12\uc774 \uc8fc\uc694 \uc120\uc815 \uae30\uc900\uc774 \ub429\ub2c8\ub2e4.<\/p>\n<h3>\uad11\uc12c\uc720 \ud504\ub9ac\ud3fc \uc81c\uc870 \ubc0f \uc2e4\ub9ac\uce74 \uae30\ubc18 \ub3c4\ud30c\uad00<\/h3>\n<p>\uc804 \uc138\uacc4 \ud1b5\uc2e0 \uc778\ud504\ub77c\uc758 \uae30\ubc18\uc774 \ub418\ub294 \uc804\uc1a1 \ub9e4\uccb4\uc778 \uad11\uc12c\uc720\ub294 CVD \uacf5\uc815\uc744 \ud1b5\ud574 \uc0dd\uc0b0\ub41c \ucd08\uace0\uc21c\ub3c4 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud504\ub9ac\ud3fc\uc73c\ub85c \uc81c\uc870\ub429\ub2c8\ub2e4. \ud504\ub9ac\ud3fc\uc740 \uad74\uc808\ub960 \ud504\ub85c\ud30c\uc77c\uc774 \uc815\ubc00\ud558\uac8c \uc124\uacc4\ub41c \uc6d0\ud1b5\ud615 \uc720\ub9ac \ub9c9\ub300\ub85c, \uc57d 2,000 \u00b0C\uc758 \uc628\ub3c4\uc5d0\uc11c \uad11\uc12c\uc720\ub85c \uc778\ubc1c\ub418\uc5b4 \uad11\uc12c\uc720 \uc720\ud615\uc5d0 \ub530\ub77c \ucf54\uc5b4 \uc9c1\uacbd\uc774 8\u201362.5 \u03bcm\uc774\uace0 \uc678\uacbd\uc774 125 \u03bcm\uc778 \ud544\ub77c\uba58\ud2b8\uac00 \uc0dd\uc0b0\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\ud1b5\uc2e0\uc6a9 \uad11\uc12c\uc720 \ud504\ub9ac\ud3fc\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 1,550 nm \ud30c\uc7a5\uc5d0\uc11c 0.18 dB\/km \ubbf8\ub9cc\uc758 \uac10\uc1e0\ub3c4\ub97c \ucda9\uc871\ud574\uc57c \ud55c\ub2e4.<\/strong> \u2014 \ucf54\uc5b4 \uc601\uc5ed\uc5d0\uc11c \ucd1d OH \ud568\ub7c9\uc774 0.1 ppb \ubbf8\ub9cc\uc774\uc5b4\uc57c \ud55c\ub2e4\ub294 \uc0ac\uc591\uc73c\ub85c, 2,730 nm \ud30c\uc7a5\uc758 OH \ud761\uc218 \uace0\uc870\ud30c\uac00 1,383 nm(\u201c\ubb3c \ud53c\ud06c\u201d)\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \uac10\uc1e0\ub97c \uc77c\uc73c\ucf1c \uae30\uc874 \uad11\uc12c\uc720 \ub4f1\uae09\uc5d0\uc11c \uace0\ubc00\ub3c4 \ud30c\uc7a5 \ubd84\ud560 \ub2e4\uc911\ud654 (DWDM) \uc131\ub2a5\uc744 \uc800\ud558\uc2dc\ud0a4\uae30 \ub54c\ubb38\uc774\ub2e4. IEC 60793-2-50 Type B1.3 \uaddc\uaca9\uc5d0 \ub530\ub77c \uc9c0\uc815\ub41c \ucd5c\uc2e0 \uc800\uc218\ubd84 \ud53c\ud06c \uad11\uc12c\uc720 \ub4f1\uae09\uc740, \uadf8\uc744\uc74c \uc99d\ucc29 \ubc0f \uc18c\uacb0 \uacfc\uc815\uc5d0\uc11c \uc218\ubd84\uc744 \ucca0\uc800\ud788 \ubc30\uc81c\ud558\ub294 \uc678\ubd80 \uc99d\ucc29(OVD) \uacf5\uc815\uc744 \ud1b5\ud574 1,383 nm\uc5d0\uc11c OH \uad00\ub828 \uac10\uc1e0\ub97c 0.4 dB\/km \ubbf8\ub9cc\uc73c\ub85c \uc5b5\uc81c\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc11d\uc601 \uae30\ud310 \ud29c\ube0c(\ucd08\uc21c\ub3c4 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub85c \ub9cc\ub4e4\uc5b4\uc9c4 \uc911\uacf5 \uc6d0\ud1b5)\ub294 \uac1c\ub7c9\ud615 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(MCVD) \ubc0f \ud50c\ub77c\uc988\ub9c8 CVD(PCVD) \ud504\ub9ac\ud3fc \uc81c\uc870\uc758 \ucd08\uae30 \ub9e8\ub4dc\ub9b4 \uc5ed\ud560\uc744 \ud558\uba70, \uc774 \uacf5\uc815\uc5d0\uc11c\ub294 \ud29c\ube0c \ub0b4\ubcbd\uc5d0 \ub3c4\ud551\ub41c SiO\u2082 \uce35\uc744 \ucc28\ub840\ub85c \uc99d\ucc29\ud55c \ud6c4 \uc774\ub97c \uc555\ucd95\ud558\uc5ec \uace0\uccb4 \ud504\ub9ac\ud3fc \ubd09\uc73c\ub85c \ub9cc\ub4ed\ub2c8\ub2e4. <strong>\uc774 \uae30\ud310 \ud29c\ube0c\uc758 \uce58\uc218 \uacf5\ucc28\ub294 \uc644\uc131\ub41c \uad11\uc12c\uc720\uc758 \ucf54\uc5b4-\ud074\ub798\ub4dc \ud615\uc0c1\uc744 \uc9c1\uc811\uc801\uc73c\ub85c \uacb0\uc815\ud569\ub2c8\ub2e4.<\/strong>, \uc678\uacbd \uacf5\ucc28\ub294 \u00b10.5 mm \uc774\ub0b4\ub85c \uc720\uc9c0\ub418\uba70, \ud29c\ube0c \uc804 \uae38\uc774\uc5d0 \uac78\uccd0 \ubcbd \ub450\uaed8 \uade0\uc77c\ub3c4\ub294 1%\ubcf4\ub2e4 \uc6b0\uc218\ud55c \uc218\uc900\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n<h4>\uad11\ud559 \ubd84\uc57c\uc5d0\uc11c\uc758 \uc11d\uc601 \uc720\ub9ac \uc81c\ud488 \ubc0f \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc0ac\uc591<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<th>\ud30c\uc7a5 \ubc94\uc704<\/th>\n<th>OH \ucf58\ud150\uce20 \ud544\uc218<\/th>\n<th>\uc8fc\uc694 \uad11\ud559 \uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ArF \ub9ac\uc18c\uadf8\ub798\ud53c \ub80c\uc988<\/td>\n<td>193 nm<\/td>\n<td>&gt;800 ppm (\uc2b5\uc2dd \ub4f1\uae09)<\/td>\n<td>\u0394n &lt; 1\u00d710\u207b\u2076, \ubcf5\uad74\uc808\ub960 &lt; 2 nm\/cm<\/td>\n<\/tr>\n<tr>\n<td>KrF \ub808\uc774\uc800 \uad11\ud559 \ubd80\ud488<\/td>\n<td>248 nm<\/td>\n<td>&gt;600 ppm<\/td>\n<td>\ub808\uc774\uc800 \uc190\uc0c1 \uc784\uacc4\uac12 &gt;5 J\/cm\u00b2<\/td>\n<\/tr>\n<tr>\n<td>Nd:YAG 4\ucc28 \uace0\uc870\ud30c<\/td>\n<td>266 nm<\/td>\n<td>&gt;400ppm \ucd08\uacfc<\/td>\n<td>\uc790\uc678\uc120 \ud22c\uacfc\uc728 &gt;85%<\/td>\n<\/tr>\n<tr>\n<td>UV-Vis \uc2e4\ud5d8\uc2e4 \uad11\ud559 \uc7a5\ube44<\/td>\n<td>200\u2013800 nm<\/td>\n<td>150-400ppm<\/td>\n<td>\uc804\uc1a1 \uade0\uc77c\ub3c4 \u00b11%<\/td>\n<\/tr>\n<tr>\n<td>\ud1b5\uc2e0\uc6a9 \uad11\uc12c\uc720 \ucf54\uc5b4<\/td>\n<td>1,310\u20131,550 nm<\/td>\n<td>&lt;0.1 ppb<\/td>\n<td>1,550 nm\uc5d0\uc11c \uac10\uc1e0 &lt;0.18 dB\/km<\/td>\n<\/tr>\n<tr>\n<td>MCVD \uae30\ud310 \ud29c\ube0c<\/td>\n<td>\ud574\ub2f9 \uc5c6\uc74c (\uad6c\uc870\uc801)<\/td>\n<td>&lt;1 ppm (\uac74\uc870 \ub4f1\uae09)<\/td>\n<td>\uc678\uacbd \uacf5\ucc28 \u00b10.5 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\uc911\uc694\ud55c \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc774 \uc5ec\uc804\ud788 \ub300\uccb4 \ubd88\uac00\ub2a5\ud55c \uc774\uc720<\/h2>\n<p>\uc628\ub3c4, \uad11\ud559\uc801, \ud654\ud559\uc801 \uce21\uba74\uc5d0\uc11c \uc735\ud569 \uc11d\uc601\uc758 \ubaa8\ub4e0 \uc131\ub2a5 \ud2b9\uc131\uc744 \ub3d9\uc2dc\uc5d0 \uc7ac\ud604\ud560 \uc218 \uc788\ub294 \ub300\uccb4 \uc18c\uc7ac\ub294 \ub2e8 \ud558\ub098\ub3c4 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ud3f4\ub9ac\uba38\uc640 \ubd88\uc18c\uc218\uc9c0(\ud50c\ub8e8\uc624\ub85c\ud50c\ub77c\uc2a4\ud2f1)\ub294 \ub9ce\uc740 \uc0b0\uc131 \ud658\uacbd\uc5d0\uc11c \uc11d\uc601\uacfc \ub3d9\ub4f1\ud558\uac70\ub098 \uadf8 \uc774\uc0c1\uc758 \ud654\ud559\uc801 \ubd88\ud65c\uc131 \ud2b9\uc131\uc744 \ubcf4\uc774\uc9c0\ub9cc, 260 \u00b0C \uc774\uc0c1\uc5d0\uc11c\ub294 \uc131\ub2a5\uc774 \uc800\ud558\ub418\uba70 \uc790\uc678\uc120(UV)\uc5d0 \ub300\ud574 \ubd88\ud22c\uba85\ud569\ub2c8\ub2e4. \uc54c\ub8e8\ubbf8\ub098 \ubc0f \uc9c0\ub974\ucf54\ub2c8\uc544 \uc138\ub77c\ubbf9\uc740 \ub354 \ub192\uc740 \uc791\ub3d9 \uc628\ub3c4\ub97c \uacac\ub51c \uc218 \uc788\uc9c0\ub9cc, \ubaa8\ub4e0 \uad00\ub828 \uad11\ud559 \ud30c\uc7a5\ub300\uc5d0\uc11c \ubd88\ud22c\uba85\ud558\uba70, \ud29c\ube0c \ubc0f \uc6a9\uae30 \ud615\uc0c1\uc5d0 \ud544\uc694\ud55c \ubcbd \ub450\uaed8\uc5d0\uc11c\ub294 \uae30\uacc4\uc801 \ucde8\uc131\uc744 \ubcf4\uc785\ub2c8\ub2e4. \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\ub294 \uc77c\uc0c1\uc801\uc778 \uc2e4\ud5d8\uc2e4 \uc6a9\ub3c4\uc758 \ub300\ubd80\ubd84\uc744 \ud6cc\ub96d\ud558\uac8c \ucda9\uc871\uc2dc\ud0a4\uc9c0\ub9cc, 500 \u00b0C, 310 nm \ubc0f \ubbf8\ub7c9 \uc624\uc5fc \uc784\uacc4\uce58\uc5d0\uc11c \uc131\ub2a5 \ud55c\uacc4\uc5d0 \ub3c4\ub2ec\ud558\ub294 \ubc18\uba74, \uc11d\uc601\uc740 \uc774\ub7ec\ud55c \uc870\uac74\uc5d0\uc11c\ub3c4 \uc131\ub2a5 \uc800\ud558 \uc5c6\uc774 \uc774\ub97c \ucda9\uc871\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<p><strong>1,100 \u00b0C\uc758 \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4, 150 nm\uc5d0\uc11c 3,500 nm\uc5d0 \uc774\ub974\ub294 \uc2a4\ud399\ud2b8\ub7fc \ud22c\uacfc\uc728, ppb \ubbf8\ub9cc\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9, \uadf8\ub9ac\uace0 HF\ub97c \uc81c\uc678\ud55c \ubaa8\ub4e0 \ubb34\uae30\uc0b0\uc5d0 \ub300\ud55c \ub0b4\uc131\uc744 \ubaa8\ub450 \uac16\ucd98 \uc18c\uc7ac\ub294, \uc2e4\uc6a9\uc801\uc778 \ud06c\uae30\uc758 \ud29c\ube0c, \uc6a9\uae30 \ubc0f \uad11\ud559 \ucc3d\uc73c\ub85c \uac00\uacf5\ud560 \uc218 \uc788\ub294 \ub2e4\ub978 \uc5b4\ub5a4 \uc18c\uc7ac\uc5d0\uc11c\ub3c4 \ucc3e\uc544\ubcfc \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/strong> \ub2e8\uc77c \ud2b9\uc131\uc774 \uc544\ub2cc \uc774\ub7ec\ud55c \ud2b9\uc131\ub4e4\uc758 \ubcf5\ud569\uc801\uc778 \uc870\ud569 \ub355\ubd84\uc5d0, \uc6a9\uc735 \uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc740 \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \uacf5\uc815, \uc790\uc678\uc120(UV) \ubd84\uc11d \uce21\uc815, \uace0\uc628 \uc7ac\ub8cc \uc5f0\uad6c, \uc815\ubc00 \uad11\ud559 \uc2dc\uc2a4\ud15c \ubd84\uc57c\uc5d0\uc11c \uc808\ub300\uc801\uc73c\ub85c \ud544\uc218\uc801\uc778 \uc704\uce58\ub97c \ucc28\uc9c0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131\ub4e4\uc774 \uc885\ud569\uc801\uc73c\ub85c \uc694\uad6c\ub418\ub294 \ubd84\uc57c\uc5d0\uc11c\ub294 \uc6a9\uc735 \uc11d\uc601\uc774 \ub2e8\uc21c\ud788 \uc120\ud638\ub418\ub294 \uc18c\uc7ac\uac00 \uc544\ub2c8\ub77c, \uc18c\uc7ac \uc120\ud0dd\uc758 \ud544\uc218 \uc870\uac74\uc785\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uacb0\ub860<\/h2>\n<p>\uc735\ud569 \uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc758 \uc131\ub2a5\uc740 \ube44\uc815\uc9c8 SiO\u2082 \ub124\ud2b8\uc6cc\ud06c\uc5d0\uc11c \ube44\ub86f\ub418\ub294\ub370, \uc774 \uad6c\uc870\ub294 \ucc9c\uc5f0 \uc11d\uc601\uc744 \uc6a9\uc735\ud558\uac70\ub098 \ud569\uc131 \uc2e4\ub9ac\uce74 CVD \uacf5\uc815\uc744 \ud1b5\ud574 \uc5bb\uc744 \uc218 \uc788\uc73c\uba70, \uac01\uac01 \uc11c\ub85c \ub2e4\ub978 \uc751\uc6a9 \ubd84\uc57c\uc5d0 \uc801\ud569\ud55c \uace0\uc720\ud55c \uc21c\ub3c4\uc640 \uad11\ud559\uc801 \ud2b9\uc131\uc744 \uc9c0\ub2d9\ub2c8\ub2e4. 1,100 \u00b0C\uc5d0 \uc774\ub974\ub294 \uc5f4\uc801 \uc548\uc815\uc131, \uc790\uc678\uc120\uc5d0\uc11c \uc801\uc678\uc120\uc5d0 \uc774\ub974\ub294 \uc2a4\ud399\ud2b8\ub7fc \ubc94\uc704, \uadf8\ub9ac\uace0 \ubb34\uae30\uc0b0\uc5d0 \ub300\ud55c \ud654\ud559\uc801 \ubd88\ud65c\uc131 \ub4f1 \uc774\ub7ec\ud55c \ud2b9\uc131\ub4e4\uc740 \uc885\ud569\uc801\uc73c\ub85c \uc2dc\uc911\uc5d0\uc11c \uad6c\ud560 \uc218 \uc788\ub294 \uadf8 \uc5b4\ub5a4 \ub300\uccb4 \uc720\ub9ac \uc18c\uc7ac\ub3c4 \ub530\ub77c\uc62c \uc218 \uc5c6\ub294 \uc131\ub2a5 \ubc94\uc704\ub97c \uc815\uc758\ud569\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc81c\uc870, \ubd84\uc11d \ubd84\uad11\ud559, \uace0\uc628 \ud569\uc131 \ubc0f \ub808\uc774\uc800 \ud3ec\ud1a0\ub2c9\uc2a4 \ubd84\uc57c\uc5d0 \uac78\uccd0, \uc774\ub7ec\ud55c \ud2b9\uc131\ub4e4\uc740 \ub300\uccb4 \uc7ac\ub8cc\uac00 \ub3d9\uc2dc\uc5d0 \ucda9\uc871\uc2dc\ud0ac \uc218 \uc5c6\ub294 \uae30\ub2a5\uc801 \uc694\uad6c \uc0ac\ud56d\uc73c\ub85c \uc774\uc5b4\uc9c0\uba70, \uc815\ubc00\ub3c4, \uc21c\ub3c4 \ubc0f \uc5f4\uc801 \uc5ec\uc720\uac00 \ubaa8\ub450 \uc694\uad6c\ub418\ub294 \ubaa8\ub4e0 \ubd84\uc57c\uc5d0\uc11c \uc6a9\uc735 \uc11d\uc601\uc744 \ub300\uccb4 \ubd88\uac00\ub2a5\ud55c \uc18c\uc7ac\uad70\uc73c\ub85c \uc790\ub9ac\ub9e4\uae40\ud558\uac8c \ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n<p><strong>\uc6a9\uc735 \uc11d\uc601\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ucc28\uc774\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><br \/>\n\uc735\ud569 \uc11d\uc601\uc740 \ucc9c\uc5f0 \uc11d\uc601 \uacb0\uc815\uccb4\ub97c \uc6a9\uc735\ud558\uc5ec \uc81c\uc870\ub418\uba70, SiO\u2082 \uc21c\ub3c4 99.9\u201399.99%, OH \ud568\ub7c9 150\u2013300 ppm, \uc790\uc678\uc120 \ucc28\ub2e8 \ud30c\uc7a5 250 nm \ubd80\uadfc\uc758 \ud2b9\uc131\uc744 \uac16\uc2b5\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 SiCl\u2084\uc640 \uac19\uc740 \ud569\uc131 \ud654\ud559 \uc804\uad6c\uccb4\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc870\ub418\uba70, 99.9999% \uc774\uc0c1\uc758 \uc21c\ub3c4\ub97c \ub2ec\uc131\ud558\uace0 \uc790\uc678\uc120 \ucc28\ub2e8 \ud30c\uc7a5\uc740 150\u2013180 nm\uae4c\uc9c0 \ud655\uc7a5\ub429\ub2c8\ub2e4. \ub450 \ubb3c\uc9c8 \ubaa8\ub450 \ub3d9\uc77c\ud55c \uc5f0\ud654\uc810\uacfc \uc5f4\ud33d\ucc3d \uacc4\uc218\ub97c \uac00\uc9c4 \ube44\uc815\uc9c8 SiO\u2082\uc774\uc9c0\ub9cc, \ubd84\uad11 \uc131\ub2a5\uacfc \uc624\uc5fc \ud2b9\uc131\uc740 \uc0c1\ub2f9\ud788 \ub2e4\ub985\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac \uc81c\ud488\uc740 \uba87 \ub3c4\uc5d0\uc11c \ud30c\uc190\ub418\ub098\uc694?<\/strong><br \/>\n\uc735\ud569 \uc11d\uc601\uc740 \ucd5c\ub300 1,100 \u00b0C\uc5d0\uc11c \uc5f0\uc18d \uc0ac\uc6a9\uc774 \uac00\ub2a5\ud558\uba70, \uce58\uba85\uc801\uc778 \ubcc0\ud615 \uc5c6\uc774 \uc57d 1,300 \u00b0C\uae4c\uc9c0\uc758 \ub2e8\uae30 \ub178\ucd9c\uc744 \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ubb3c\uc9c8\uc758 \uc5f0\ud654\uc810\uc740 1,665 \u00b0C\uc785\ub2c8\ub2e4. 1,100 \u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc7a5\uae30\uac04 \uc0ac\uc6a9\ud558\uba74 \ube44\uc720\ud654 \ud604\uc0c1(\ud45c\uba74 \uacb0\uc815\ud654\ub85c \uc778\ud574 \ucde8\uc131\uc774 \uc99d\uac00\ud558\uace0 \ubbf8\ub9bd\uc790\uac00 \uc0dd\uc131\ub418\ub294 \ud604\uc0c1)\uc774 \ucd09\uc9c4\ub418\ubbc0\ub85c, \ubc18\ub3c4\uccb4 \ubc0f \uc5f0\uad6c \ubd84\uc57c\uc5d0\uc11c\ub294 \uc721\uc548\uc73c\ub85c \ud655\uc778 \uac00\ub2a5\ud55c \ube44\uc720\ud654 \ud604\uc0c1\uc774 \uc9c4\ud589\ub418\uae30 \uc804\uc5d0 \ud29c\ube0c\uc640 \uc6a9\uae30\ub97c \uad50\uccb4\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac \uc6a9\uae30\ub97c \ubd88\ud654\uc218\uc18c\uc640 \ud568\uaed8 \uc0ac\uc6a9\ud560 \uc218 \uc788\ub098\uc694?<\/strong><br \/>\n\uc11d\uc601 \uc720\ub9ac \uc6a9\uae30\ub294 \ub18d\ub3c4\uc5d0 \uc0c1\uad00\uc5c6\uc774 \ubd88\ud654\uc218\uc18c\uc0b0(HF)\uacfc \ud638\ud658\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. HF\ub294 \uc2e4\ub9ac\uce74\uc640 \uc9c1\uc811 \ubc18\uc751\ud558\uc5ec \uc218\uc6a9\uc131\uc778 \ud5e5\uc0ac\ud50c\ub8e8\uc624\ub85c\uc2e4\ub9ac\uc2dc\uc0b0\uc744 \ud615\uc131\ud558\uba70, \uc774\ub85c \uc778\ud574 \uc11d\uc601 \uc6a9\uae30\uc758 \ubcbd\uba74\uc774 \ube60\ub974\uac8c \ubd80\uc2dd\ub418\uc5b4 \uc587\uc544\uc9d1\ub2c8\ub2e4. HF\uac00 \ud3ec\ud568\ub41c \uacf5\uc815\uc5d0\uc11c\ub294 PTFE, \ud37c\ud50c\ub8e8\uc624\ub85c\uc54c\ucf55\uc2dc(PFA) \ub610\ub294 \ubd88\uc18c\ud654 \uc5d0\ud2f8\ub80c \ud504\ub85c\ud544\ub80c(FEP) \uc6a9\uae30\uac00 \ud45c\uc900 \ub300\uccb4\uc7ac\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\uc790\uc678\uc120 \ubd84\uad11\uad11\ub3c4\ubc95\uc5d0\uc11c\ub294 \uc65c \ubc18\ub4dc\uc2dc \uc11d\uc601 \ud050\ubcb3\uc744 \uc0ac\uc6a9\ud574\uc57c \ud560\uae4c\uc694?<\/strong><br \/>\n\ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \ubc0f \uad11\ud559 \uc720\ub9ac \ud050\ubcb3\uc740 \uc57d 310 nm \uc774\ud558\uc5d0\uc11c \uc0ac\uc2e4\uc0c1 \ubd88\ud22c\uba85\ud574\uc838 \uce21\uc815 \ube54\uc744 \ud761\uc218\ud558\uace0, \ud06c\uace0 \ubd88\uc548\uc815\ud55c \uae30\uc900\uc120 \uc624\ucc28\ub97c \uc720\ubc1c\ud569\ub2c8\ub2e4. \uc735\ud569 \uc11d\uc601 \ud050\ubcb3\uc740 200 nm\uc5d0\uc11c 80% \uc774\uc0c1\uc758 \ud30c\uc7a5\uc744 \ud22c\uacfc\ud558\ubbc0\ub85c, 260 nm\uc5d0\uc11c \ud575\uc0b0, 280 nm\uc5d0\uc11c \ub2e8\ubc31\uc9c8, \uadf8\ub9ac\uace0 \uc2ec\uc790\uc678\uc120(deep UV) \ubc94\uc704 \uc804\ubc18\uc5d0 \uac78\uccd0 \ubc29\ud5a5\uc871 \ud654\ud569\ubb3c\uc5d0 \ub300\ud55c \uc815\ud655\ud55c \ud761\uad11\ub3c4 \uce21\uc815\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4. \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub4f1\uae09\uc740 \uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 UV \ubd84\uad11 \ubd84\uc11d \uc751\uc6a9 \ubd84\uc57c\ub97c \uc704\ud574 \uc57d 180 nm\uae4c\uc9c0 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \ud22c\uacfc\uc728\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p>\ucc38\uc870:<\/p>\n<div class=\"footnotes\">\n<hr \/>\n<ol>\n<li id=\"fn:1\">\n<p>\ud5e5\uc0ac\ud50c\ub8e8\uc624\ub85c\uc2e4\ub9ac\uc2e4\uc0b0\uc740 \ubd88\ud654\uc218\uc18c\uac00 \uc774\uc0b0\ud654\uaddc\uc18c\uc640 \ubc18\uc751\ud560 \ub54c \uc0dd\uc131\ub418\ub294 \uc218\uc6a9\uc131 \ubd88\ud654\uaddc\uc18c \ud654\ud569\ubb3c\ub85c, \uc774\uac83\uc774 \ubc14\ub85c HF\uac00 \uc11d\uc601 \uc720\ub9ac \uae30\uad6c \ud45c\uba74\uc744 \ube60\ub974\uace0 \ub3cc\uc774\ud0ac \uc218 \uc5c6\uac8c \ubd80\uc2dd\uc2dc\ud0a4\ub294 \uc774\uc720\uc785\ub2c8\ub2e4.<a href=\"#fnref1:1\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:2\">\n<p>RCA \uc138\uc815\uc740 RCA \uc5f0\uad6c\uc18c\uc5d0\uc11c \uac1c\ubc1c\ub41c \ud45c\uc900\ud654\ub41c \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ud45c\uba74 \uc804\ucc98\ub9ac \uacf5\uc815\uc73c\ub85c, \uc18c\uc790 \uc81c\uc870 \ub2e8\uacc4\uc5d0 \uc55e\uc11c \uc720\uae30 \uc624\uc5fc \ubb3c\uc9c8, \uc785\uc790 \ubc0f \uae08\uc18d \uc794\ub958\ubb3c\uc744 \uc81c\uac70\ud558\uae30 \uc704\ud574 SC-1 \ubc0f SC-2 \ud654\ud559 \uc6a9\uc561\uc5d0 \uc21c\ucc28\uc801\uc73c\ub85c \uce68\uc9c0\ud558\ub294 \uacfc\uc815\uc73c\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4.<a href=\"#fnref1:2\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:3\">\n<p>\uc561\ud2f0\ub178\uba54\ud2b8\ub9ac\ub294 \uc591\uc790 \uc218\uc728\uc774 \uc54c\ub824\uc9c4 \ud654\ud559\uc801 \ub610\ub294 \ubb3c\ub9ac\uc801 \uae30\uc900 \ubc18\uc751\uc744 \uc774\uc6a9\ud558\uc5ec \uad11\ud654\ud559 \uc2dc\uc2a4\ud15c \ub0b4\uc758 \uad11\uc790 \ud50c\ub7ed\uc2a4\ub97c \uc815\ub7c9\uc801\uc73c\ub85c \uce21\uc815\ud558\ub294 \ubc29\ubc95\uc73c\ub85c, \uc774\ub97c \uc704\ud574\uc11c\ub294 \uc790\uc678\uc120\uc744 \ud22c\uacfc\ud558\ub294 \ubc18\uc751 \uc6a9\uae30\uac00 \ud544\uc694\ud558\uba70, \uc774 \uc6a9\uae30\ub97c \ud1b5\ud574 \uc870\uc0ac\uc6d0\uc774 \uc815\ubc00\ud558\uac8c \ud2b9\uc131\ud654\ub41c \uad11\uc790 \uc120\ub7c9\uc744 \uc804\ub2ec\ud574\uc57c \ud55c\ub2e4.<a href=\"#fnref1:3\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<\/ol>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>Laboratories and fabs worldwide depend on a material most people overlook \u2014 yet without it, precision science would stall at [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":11354,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center 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