{"id":11144,"date":"2026-03-30T02:00:28","date_gmt":"2026-03-29T18:00:28","guid":{"rendered":"https:\/\/toquartz.com\/?p=11144"},"modified":"2026-02-25T10:00:18","modified_gmt":"2026-02-25T02:00:18","slug":"fused-silica-vs-quartz-capillary-tube","status":"publish","type":"post","link":"https:\/\/toquartz.com\/ko\/fused-silica-vs-quartz-capillary-tube\/","title":{"rendered":"\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub300 \uc11d\uc601 \ubaa8\uc138\uad00: \uc21c\ub3c4, \uad11\ud559 \ubc0f \uc5f4"},"content":{"rendered":"<p>\ub300\ubd80\ubd84\uc758 \uc2e4\ud5d8\uc2e4\uacfc \uc870\ub2ec \ud300\uc740 \uc774 \ub450 \uc7ac\ub8cc\ub97c \uc11c\ub85c \uad50\ud658 \uac00\ub2a5\ud55c \uac83\uc73c\ub85c \uac04\uc8fc\ud558\ub294\ub370, \uc774\ub7ec\ud55c \uac00\uc815\uc740 \ubd84\uc11d \uc624\ub958, \uc870\uae30 \ud29c\ube0c \uace0\uc7a5, \uc790\uc6d0 \ub0ad\ube44\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4.<\/p>\n<p>\uc11d\uc601 \ubaa8\uc138\uad00\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubaa8\uc138\uad00\uc740 \ub3d9\uc77c\ud55c \ud654\ud559\uc2dd(SiO\u2082)\uc744 \uacf5\uc720\ud558\uc9c0\ub9cc \uc6d0\ub8cc \uae30\uc6d0, \uc21c\ub3c4, \uad11 \ud22c\uacfc\uc728, \uc5f4 \ucc9c\uc7a5 \ubc0f \ud45c\uba74 \ud654\ud559\uc5d0\uc11c \uadfc\ubcf8\uc801\uc73c\ub85c \ucc28\uc774\uac00 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ubb38\uc11c\uc5d0\uc11c\ub294 \ubaa8\ub4e0 \uae30\uc220\uc801 \ucc28\uc774\uc810\uc744 \uc815\ub7c9\ud654\ub41c \ub370\uc774\ud130\ub85c \ud574\uacb0\ud558\uc5ec \uc7ac\ub8cc \uc120\ud0dd\uc774 \ucd94\uce21\uc774 \uc544\ub2cc \ubc29\uc5b4 \uac00\ub2a5\ud55c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uacb0\uc815\uc774 \ub420 \uc218 \uc788\ub3c4\ub85d \ud569\ub2c8\ub2e4.<\/p>\n<p>\uc774 \ub450 \uc18c\uc7ac\uc758 \uc131\ub2a5 \ucc28\uc774\ub294 \ud06c\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc790\uc678\uc120 \ud22c\uacfc\uc728, \ud0c8\uc11d\ud654 \uc800\ud56d\uc131, \ud45c\uba74 \ubc18\uc751\uc131 \uc804\ubc18\uc5d0 \uac78\uccd0 \uadf8 \ucc28\uc774\ub294 \uce21\uc815 \uac00\ub2a5\ud558\uace0, \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud558\uba70, \uc798\ubabb\ub41c \uc7ac\ub8cc\ub97c \uc9c0\uc815\ud558\uba74 \ub418\ub3cc\ub9b4 \uc218 \uc5c6\ub294 \uc5ec\ub7ec \uac00\uc9c0 \uc911\uc694\ud55c \uc0c1\ud669\uc5d0 \ucc98\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc544\ub798 \uc139\uc158\uc5d0\uc11c\ub294 \uad6c\uc131\ubd80\ud130 \ud1b5\ud569\ub41c \uc120\ud0dd \ud504\ub808\uc784\uc6cc\ud06c\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uac01 \uc131\ub2a5 \ucc28\uc6d0\uc744 \uc21c\ucc28\uc801\uc73c\ub85c \ub2e4\ub8f9\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Transparent-quartz-capillary-tube-for-UV-detection-laboratory-bench-analysis.webp\" alt=\"UV \uac80\ucd9c \uc2e4\ud5d8\uc2e4 \ubca4\uce58 \ubd84\uc11d\uc6a9 \ud22c\uba85 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" title=\"UV \uac80\ucd9c \uc2e4\ud5d8\uc2e4 \ubca4\uce58 \ubd84\uc11d\uc6a9 \ud22c\uba85 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" \/><\/p>\n<h2>\uc11d\uc601 \ubaa8\uc138\uad00\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubaa8\uc138\uad00\uc740 \uc11c\ub85c \ub2e4\ub978 \uc6d0\ub8cc\ub85c \uc2dc\uc791\ub429\ub2c8\ub2e4.<\/h2>\n<p>\uc6d0\uc790\uc7ac \uc6d0\uc0b0\uc9c0\ub294 \uc774 \ub450 \uac00\uc9c0 \ud29c\ube0c \uc720\ud615\uc744 \uad6c\ubd84\ud558\ub294 \uac00\uc7a5 \uc911\uc694\ud55c \ubcc0\uc218\uc774\uba70, \uc774\ub97c \uc774\ud574\ud558\uba74 \ubaa8\ub4e0 \ub2e4\uc6b4\uc2a4\ud2b8\ub9bc \uc0ac\uc591 \uc624\ub958\ub97c \ubc29\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ucc9c\uc5f0 \uacb0\uc815\uc9c8 \uc11d\uc601\uacfc \ud569\uc131\uc73c\ub85c \uc0dd\uc0b0\ub41c \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ubaa8\ub450 \uc6a9\uc735 \ud6c4 \ube44\uc815\uc9c8 SiO\u2082 \uc720\ub9ac\ub97c \uc0dd\uc131\ud558\uc9c0\ub9cc, \uc774 \uc720\ub9ac\uc5d0 \ud3ec\ud568\ub41c \ubd88\uc21c\ubb3c \ud504\ub85c\ud544\uc740 \uc644\uc804\ud788 \ub2e4\ub985\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc774 \ub450 \uac00\uc9c0 \uacf5\uae09 \uc6d0\ub8cc\ub85c \uc0dd\uc0b0\ub41c \ub3d9\uc77c\ud55c \ud29c\ube0c \ud615\uc0c1\uc740 \uad11\ud559, \uc5f4 \ubc0f \ud654\ud559\uc801 \uc131\ub2a5\uc774 \ud604\uc800\ud788 \ub2e4\ub974\uba70, \uc774\ub294 \uc81c\uc870 \ud6c4 \ucc98\ub9ac\ub85c\ub3c4 \uc644\uc804\ud788 \uc9c0\uc6b8 \uc218 \uc5c6\ub294 \ucc28\uc774\uc810\uc785\ub2c8\ub2e4.<\/p>\n<h3>\ucc9c\uc5f0 \uc11d\uc601 \uacb0\uc815\uc774 \ubaa8\uc138\uad00 \ud29c\ube0c\uac00 \ub418\ub294 \ubc29\ubc95<\/h3>\n<p>\ucc9c\uc5f0 \uc11d\uc601\uc740 \uc804 \uc138\uacc4 \ud398\uadf8\ub9c8\ud0c0\uc774\ud2b8 \uad11\ub9e5\uacfc \uc5f4\uc218 \ud1f4\uc801\ubb3c\uc5d0\uc11c \ucc44\uad74\ub41c \uacb0\uc815\uc9c8 \uc774\uc0b0\ud654\uaddc\uc18c(\u03b1-SiO\u2082)\ub85c\ubd80\ud130 \uc720\ub798\ud569\ub2c8\ub2e4. <strong>\uad11\ubb3c\uc5d0\uc11c \ubaa8\uc138\uad00\uc73c\ub85c\uc758 \uc804\ud658\uc5d0\ub294 \ubd84\uc1c4, \uc0b0 \uce68\ucd9c, \uc815\uc804\uae30 \ubd84\ub9ac \ubc0f \uad6c\uc5ed \uc815\uc81c\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/strong> - \uc6d0\uc790 \uc218\uc900\uc5d0\uc11c \uacb0\uc815 \uaca9\uc790 \uc548\uc5d0 \uac07\ud600 \uc788\ub294 \uae08\uc18d \uc624\uc5fc \ubb3c\uc9c8\uc744 \uc904\uc774\uae30\ub294 \ud558\uc9c0\ub9cc \uc644\uc804\ud788 \uc81c\uac70\ud558\uc9c0\ub294 \ubabb\ud558\ub3c4\ub85d \uc124\uacc4\ub41c \uc2dc\ud000\uc2a4\uc785\ub2c8\ub2e4.<\/p>\n<p>\uad11\ubb3c\uc740 1,700\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \ub179\uc544 \ud751\uc5f0 \ub610\ub294 \ud145\uc2a4\ud150 \ub9e8\ub4dc\ub9b4\uc744 \uc0ac\uc6a9\ud558\uc5ec \ubaa8\uc138\uad00 \ud615\uc0c1\uc73c\ub85c \uadf8\ub824\uc9d1\ub2c8\ub2e4. <strong>\uc77c\ubc18\uc801\uc778 \ub4dc\ub85c\uc789 \uc18d\ub3c4\ub294 \ub300\uc0c1 \ub0b4\uacbd\uc5d0 \ub530\ub77c 0.5m\uc5d0\uc11c 5m\/\ubd84\uc785\ub2c8\ub2e4.<\/strong>\ubcf4\uc5b4\uac00 \uc881\uc744\uc218\ub85d \uce58\uc218 \uc77c\uad00\uc131\uc744 \uc720\uc9c0\ud558\uae30 \uc704\ud574 \ub354 \ub290\ub9ac\uac8c \uc778\ubc1c\ud574\uc57c \ud569\ub2c8\ub2e4. \uc0dd\uc131\ub41c \uc720\ub9ac\ub294 \uc9c0\uc9c8\ud559\uc801 \uacf5\uae09\uc6d0\uc758 \ubd88\uc21c\ubb3c \ud2b9\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. \uc0c1\uc5c5\uc6a9 \ucc9c\uc5f0 \uc11d\uc601 \uacf5\uae09 \uc6d0\ub8cc\uc5d0\ub294 \uc54c\ub8e8\ubbf8\ub284 \ub18d\ub3c4\uac00 10~50ppm, \ucca0\uc740 0.5~5ppm, \ud2f0\ud0c0\ub284\uc740 1~10ppm\uc778 \uac83\uc774 \uc77c\ubc18\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\uc774\ub7ec\ud55c \ubbf8\ub7c9 \uae08\uc18d\uc740 \uc720\ub9ac\ud654 \ud6c4\uc5d0\ub294 \uc81c\uac70\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/strong> \uc11d\uc601 \ubaa8\uc138\uad00\uc740 \uc2e4\ub9ac\uce74 \ub124\ud2b8\uc6cc\ud06c\uc5d0 \ud654\ud559\uc801\uc73c\ub85c \uacb0\ud569\ub418\uc5b4 \uc788\uc5b4 \uc81c\uc870\ubd80\ud130 \uc218\uba85\uc774 \ub2e4\ud560 \ub54c\uae4c\uc9c0 \ubd88\uc21c\ubb3c \ud504\ub85c\ud544\uc774 \uadf8\ub300\ub85c \uc720\uc9c0\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc9c0\uc9c8\ud559\uc801 \uc720\uc804\uc740 \uc11d\uc601\uacfc \ud569\uc131 \uc11d\uc601\uc744 \uad6c\ubd84\ud558\ub294 \uae30\ubcf8 \ubcc0\uc218\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ud569\uc131 \uacbd\ub85c\uc640 \uc774\uac83\uc774 \uc911\uc694\ud55c \uc774\uc720<\/h3>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ucc44\uad74\ub418\ub294 \uac83\uc774 \uc544\ub2c8\ub77c \ud654\ud559\uc801\uc73c\ub85c \ub9cc\ub4e4\uc5b4\uc9d1\ub2c8\ub2e4. <strong>\ub450 \uac00\uc9c0 \uc8fc\uc694 \ud569\uc131 \uacbd\ub85c\ub294 \uc0ac\uc5fc\ud654\uaddc\uc18c(SiCl\u2084)\uc758 \ud654\uc5fc \uac00\uc218\ubd84\ud574\uc640 \ud654\ud559\uae30\uc0c1\uc99d\ucc29(CVD)\uc785\ub2c8\ub2e4.<\/strong>\ub450 \uc81c\ud488 \ubaa8\ub450 0.1ppm \uc774\ud558\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c \uc218\uc900\uc73c\ub85c \uc815\uc81c\ub41c \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc804\uad6c\uccb4\ub85c \uc2dc\uc791\ud569\ub2c8\ub2e4. \uc774 \uc2dc\uc791\uc810\uc740 \ucc9c\uc5f0 \uc11d\uc601 \uacf5\uae09\uc6d0\ub8cc\ubcf4\ub2e4 3~4\ubc30 \ub354 \uae68\ub057\ud569\ub2c8\ub2e4.<\/p>\n<p>\ud654\uc5fc \uac00\uc218\ubd84\ud574 \uacbd\ub85c\uc5d0\uc11c SiCl\u2084 \uc99d\uae30\ub294 \uc0b0\uc18c\uc218\uc18c \ud654\uc5fc\uacfc \ubc18\uc751\ud558\uc5ec SiO\u2082 \uadf8\uc744\uc74c\uc744 \uc0dd\uc131\ud55c \ub2e4\uc74c \ud22c\uba85\ud55c \uc720\ub9ac\ub85c \ud1b5\ud569\ub429\ub2c8\ub2e4. <strong>\uacb0\uacfc\ubb3c\uc758 OH \ud568\ub7c9\uc740 \ud654\uc5fc\uc758 \uc218\uc18c \ub300 \uc0b0\uc18c \ube44\uc728\uc5d0 \uc758\ud574 \uc9c1\uc811 \uc81c\uc5b4\ub429\ub2c8\ub2e4.<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc751\uc6a9 \ubd84\uc57c \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub530\ub77c \ub192\uc740 OH \uc720\ub9ac(&gt;800ppm, \"\uc2b5\uc2dd\" \uacf5\uc815) \ub610\ub294 \ub0ae\uc740 OH \uc720\ub9ac(&lt;10ppm, &quot;\uac74\uc2dd&quot; \uacf5\uc815)\ub97c \uc0dd\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc870\uc815 \uac00\ub2a5\uc131\uc740 \ucc9c\uc5f0 \uc11d\uc601 \uac00\uacf5\uc5d0\uc11c\ub294 \ucc3e\uc544\ubcfc \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ud569\uc131 \uae30\uc6d0\uc740 \uc21c\ub3c4\uac00 \uc9c0\uc9c8\ud559\uc801 \ubcf5\uad8c\uc774 \uc544\ub2c8\ub77c \uacf5\ud559\uc801\uc778 \uc0ac\uc591\uc774\ub77c\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4.<\/strong> \uae08\uc18d \ubd88\uc21c\ubb3c, OH \ud568\ub7c9 \ubc0f \uad74\uc808\ub960\uc758 \ub85c\ud2b8 \uac04 \uc77c\uad00\uc131\uc740 \ucc9c\uc5f0 \uc11d\uc601\uacfc \ube44\uad50\ud560 \uc218 \uc5c6\ub294 \uc218\uc900\uc73c\ub85c \ub2ec\uc131 \uac00\ub2a5\ud558\uba70, \uc774\ub7ec\ud55c \uc77c\uad00\uc131 \ub355\ubd84\uc5d0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ubd84\uc11d \uc7ac\ud604\uc131\uc774 \ud0c0\ud611\ud560 \uc218 \uc5c6\ub294 \ubaa8\ub4e0 \ubd84\uc57c\uc5d0\uc11c \uc120\ud0dd\ub418\ub294 \uc7ac\ub8cc\uac00 \ub429\ub2c8\ub2e4.<\/p>\n<h3>\uc5c5\uacc4\uc5d0\uc11c \uc5ec\uc804\ud788 \ub450 \uc6a9\uc5b4\ub97c \ud63c\uc6a9\ud558\uc5ec \uc0ac\uc6a9\ud558\ub294 \uc774\uc720<\/h3>\n<p>'\uc11d\uc601'\uacfc '\uc6a9\uc735 \uc2e4\ub9ac\uce74'\uc758 \uba85\uce6d \ud63c\ub3d9\uc740 \uc5ed\uc0ac\uc801\uc73c\ub85c \uadf8 \uae30\uc6d0\uc744 \ucd94\uc801\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>ISO\/DIS 10629\uc640 \uadf8 \uc774\uc804 \ubc84\uc804\uc740 \ubaa8\ub4e0 \ube44\uc815\uc9c8 SiO\u2082 \uc720\ub9ac\ub97c \uad11\ubc94\uc704\ud55c \ubc94\uc8fc\ub85c \ubd84\ub958\ud588\uc2b5\ub2c8\ub2e4.<\/strong> \uc0c1\uc5c5\uc801 \uacf5\uae09\uc5c5\uccb4\uac00 \uc81c\ud488 \ub77c\ubca8\ub9c1 \uc218\uc900\uc5d0\uc11c \ucc9c\uc5f0 \uacf5\uae09 \uc6d0\ub8cc\uc640 \ud569\uc131 \uacf5\uae09 \uc6d0\ub8cc\ub97c \uad6c\ubd84\ud558\ub3c4\ub85d \uc758\ubb34\ud654\ud558\uc9c0 \uc54a\uc558\uc2b5\ub2c8\ub2e4. \uadf8 \uacb0\uacfc 1970\ub144\ub300\uc640 1980\ub144\ub300\uc758 \ub9c8\ucf00\ud305 \uad00\uc2b5\uc5d0 \ub530\ub77c \uacf5\uae09 \uc6d0\ub8cc\uc758 \ucd9c\ucc98\uc640 \uad00\uacc4\uc5c6\uc774 \ubaa8\ub4e0 \ud22c\uba85 SiO\u2082 \ud29c\ube0c\uc5d0 \ub300\ud574 \"\uc11d\uc601\"\uc744 \uc77c\ubc18\uc801\uc778 \uc124\uba85\uc5b4\ub85c \uc0ac\uc6a9\ud558\uac8c \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uba87\uba87 \uc8fc\uc694 \uc81c\uc870\uc5c5\uccb4\ub294 \uc5ec\uc804\ud788 \uc0c1\uc5c5\uc6a9 \uce74\ud0c8\ub85c\uadf8\uc5d0 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub97c '\uc11d\uc601 \uc720\ub9ac \ud29c\ube0c'\ub85c \ud45c\uc2dc\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4, <strong>\ud2b9\ud788 '\ucffc\uce20'\uac00 \ud504\ub9ac\ubbf8\uc5c4 \uc778\uc2dd\uc744 \uac00\uc9c0\uace0 \uc788\ub294 \uc2dc\uc7a5\uc5d0\uc11c<\/strong>. \uc2e4\uc81c\ub85c, \ud29c\ube0c\uac00 \ucc9c\uc5f0 \uc720\ub798\uc778\uc9c0 \ud569\uc131\uc778\uc9c0 \ud655\uc778\ud558\ub294 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uc720\uc77c\ud55c \ubc29\ubc95\uc740 OH \ud568\ub7c9(ppm), \uae08\uc18d \ubd88\uc21c\ubb3c \ubd84\uc11d(ppm \uae30\uc900)\uc774 \uba85\uc2dc\ub41c \ubd84\uc11d \uc99d\uba85\uc11c\ub97c \uc694\uccad\ud558\ub294 \uac83\uc785\ub2c8\ub2e4. <a href=\"https:\/\/en.wikipedia.org\/wiki\/Inductively_coupled_plasma_mass_spectrometry\">ICP-MS<\/a><sup id=\"fnref1:1\"><a href=\"#fn:1\" class=\"footnote-ref\">1<\/a><\/sup>), \uacf5\uae09 \uc6d0\ub8cc \ud569\uc131 \uacbd\ub85c. \uc774\ub7ec\ud55c \ubb38\uc11c\uac00 \uc5c6\ub294 \uacbd\uc6b0 \uc81c\ud488 \ub77c\ubca8\uc758 \"\uc11d\uc601 \ubaa8\uc138\uad00\"\uc774\ub77c\ub294 \uc6a9\uc5b4\ub294 \ubaa8\ud638\ud558\ubbc0\ub85c \ud655\uc778\uc774 \ud544\uc694\ud55c \uac83\uc73c\ub85c \uac04\uc8fc\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0\uc11c \uc11d\uc601 \ubaa8\uc138\uad00\uc744 \ubd84\ub9ac\ud558\ub294 \uc21c\ub3c4 \uc218\uc900<\/h2>\n<p>\uc21c\ub3c4\ub294 \ub2e8\uc21c\ud55c \ud488\uc9c8 \uc9c0\ud45c\uac00 \uc544\ub2c8\ub77c \uad11\ud559 \ucc28\ub2e8 \ud30c\uc7a5\uc5d0\uc11c \ud0c8\uc11d\ud654 \uc2dc\uc791 \uc628\ub3c4\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uc774 \ubb38\uc11c\uc5d0\uc11c \uc124\uba85\ud558\ub294 \ubaa8\ub4e0 \uc131\ub2a5 \ucc28\uc774\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \ubcc0\uc218\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc11d\uc601 \ubaa8\uc138\uad00 \ub0b4\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c \ub18d\ub3c4\uc640 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc758 OH \ud568\ub7c9\uc740 \ub3c5\ub9bd\uc801\uc778 \uc81c\ud488 \ud2b9\uc131\uc774 \uc544\ub2d9\ub2c8\ub2e4. \uc774\ub294 \uacf5\uae09 \uc6d0\ub8cc\uc758 \uc9c1\uc811\uc801\uc778 \ud654\ud559\uc801 \uacb0\uacfc\uc774\uba70, \ubb3c\ub9ac\uc801\uc73c\ub85c \uc608\uce21 \uac00\ub2a5\ud55c \ubc29\uc2dd\uc73c\ub85c \ubaa8\ub4e0 \ub2e4\uc6b4\uc2a4\ud2b8\ub9bc \uc131\ub2a5 \ud30c\ub77c\ubbf8\ud130\ub97c \ud1b5\ud574 \uc804\ud30c\ub429\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc774\ub7ec\ud55c \uc218\uce58\ub97c \uc815\ub7c9\uc801\uc73c\ub85c \uc124\uc815\ud558\ub294 \uac83\uc740 \ubaa8\ub4e0 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uae30\ubc18 \uc7ac\ub8cc \uc120\ud0dd\uc758 \uc804\uc81c \uc870\uac74\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc5d0 \ub0b4\uc7ac\ub41c \uae08\uc18d \ubd88\uc21c\ubb3c \ud504\ub85c\ud30c\uc77c<\/h3>\n<p><strong>\uc0c1\uc5c5\uc6a9 \ucc9c\uc5f0 <a href=\"https:\/\/toquartz.com\/ko\/capillary-quartz-glass-tube\/\">\uc11d\uc601 \ubaa8\uc138\uad00<\/a> \uc77c\ubc18\uc801\uc73c\ub85c \uc54c\ub8e8\ubbf8\ub284 \ub18d\ub3c4\ub294 10~60ppm\uc785\ub2c8\ub2e4.<\/strong>\ucca0\uc740 0.3~8ppm, \ud2f0\ud0c0\ub284\uc740 1~12ppm, \uce7c\ub968\uc740 5~30ppm\uc785\ub2c8\ub2e4. \ube0c\ub77c\uc9c8 \ub610\ub294 \ub178\ub974\uc6e8\uc774\uc0b0 \ub77c\uc2a4\uce74\uc2a4 \uc11d\uc601\uc5d0\uc11c \uc0dd\uc0b0\ub418\ub294 \uace0\uc21c\ub3c4 \ub4f1\uae09\uc740 \uc774\ub7ec\ud55c \uc218\uce58\ub97c \uc57d 1\ubc30 \uc815\ub3c4 \uc904\uc774\uc9c0\ub9cc \ud569\uc131 \uc6d0\ub8cc\ub85c \ub2ec\uc131\ud560 \uc218 \uc788\ub294 0.1ppm \ubbf8\ub9cc\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c \uc218\uc900\uc5d0\ub294 \ub3c4\ub2ec\ud558\uc9c0 \ubabb\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc774\ub7ec\ud55c \ubd88\uc21c\ubb3c\uc740 \uc720\ub9ac \ub9e4\ud2b8\ub9ad\uc2a4 \uc804\uccb4\uc5d0 \uade0\uc77c\ud558\uac8c \ubd84\ud3ec\ub418\uc5b4 \uc788\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. <strong>\ucca0\uacfc \ud2f0\ud0c0\ub284\uc740 \uc720\ub9ac\ud654 \ucd08\uae30 \ub2e8\uacc4\uc5d0\uc11c \uacb0\uc815\ub9bd \uacbd\uacc4\uc5d0 \ubb49\uce58\ub294 \uacbd\ud5a5\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/strong>\uc744 \uacb0\ud569\ud558\uc5ec \uc790\uc678\uc120 \ubc94\uc704\uc5d0\uc11c \ud30c\uc7a5\ubcc4 \uac10\uc1e0\ub97c \uc0dd\uc131\ud558\ub294 \uad6d\uc18c \ud761\uc218 \uc13c\ud130\ub97c \ub9cc\ub4ed\ub2c8\ub2e4. \uc2e4\ub9ac\uce74 \ub124\ud2b8\uc6cc\ud06c\uc5d0\uc11c \uc2e4\ub9ac\ucf58\uc744 \ub3d9\ud615\uc801\uc73c\ub85c \ub300\uccb4\ud558\ub294 \uc54c\ub8e8\ubbf8\ub284\uc740 \ub124\ud2b8\uc6cc\ud06c \uc5f0\uacb0\uc131\uc744 \uc218\uc815\ud558\uc5ec \uc720\ud6a8 \uc5f0\ud654\uc810\uc744 \ubbf8\ubb18\ud558\uac8c \ub192\uc774\ub294 \ub3d9\uc2dc\uc5d0 \ubc29\uc0ac\uc120 \uc720\ub3c4 \uceec\ub7ec \uc13c\ud130\uc5d0 \ub300\ud55c \ubbfc\uac10\uc131\uc744 \ub192\uc774\ub294 \ubc29\uc2dd\uc73c\ub85c \ub124\ud2b8\uc6cc\ud06c \uc5f0\uacb0\uc131\uc744 \uc218\uc815\ud569\ub2c8\ub2e4(\uc7a5\uc2dc\uac04 \uace0\ud50c\ub7ed\uc2a4 UV \ub178\ucd9c \ud6c4 \uc2f1\ud06c\ub85c\ud2b8\ub860 \ube54\ub77c\uc778 \uad6c\uc131 \uc694\uc18c\uc5d0\uc11c \uad00\ucc30\ub418\ub294 \ud604\uc0c1).<\/p>\n<p><strong>\ubd84\uc11d \uc751\uc6a9 \ubd84\uc57c\uc758 \uc2e4\uc9c8\uc801\uc778 \uacb0\uacfc\ub294 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uac00 \ubc30\uce58\ub9c8\ub2e4 \uac00\ubcc0\uc131\uc744 \ubcf4\uc778\ub2e4\ub294 \uac83\uc785\ub2c8\ub2e4.<\/strong> \uc9c0\uc9c8\ud559\uc801 \ucd9c\ucc98\uc758 \ubcc0\ub3d9\uc131\uc744 \uc9c1\uc811\uc801\uc73c\ub85c \ucd94\uc801\ud560 \uc218 \uc788\ub294 \uc790\uc678\uc120 \ud22c\uacfc\uc728\uc785\ub2c8\ub2e4. \ub3d9\uc77c\ud55c \uacf5\uae09\uc5c5\uccb4\uc5d0\uc11c \ub3d9\uc77c\ud558\uac8c \ub77c\ubca8\uc774 \ubd80\ucc29\ub41c \ub450 \uac1c\uc758 \ud29c\ube0c\ub294 \uc11c\ub85c \ub2e4\ub978 \ucc44\uad11 \ub85c\ud2b8\uc5d0\uc11c \uacf5\uae09\ub418\ub294 \uacbd\uc6b0 200nm\uc5d0\uc11c \ud761\uad11\ub3c4\uac00 5-15% \uc815\ub3c4 \ub2e4\ub97c \uc218 \uc788\uc73c\uba70, \uc774\ub7ec\ud55c \ucc28\uc774\ub294 \uc815\ub7c9 \ubd84\uad11\uad11\ub3c4 \uce21\uc815\uc5d0 \uccb4\uacc4\uc801\uc778 \uc624\ub958\ub97c \uc720\ubc1c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacb0\uc815\uc801 \ubcc0\uc218\ub85c\uc11c\uc758 OH \ub18d\ub3c4<\/h3>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ud558\uc774\ub4dc \ub85d\uc2e4 \ud568\ub7c9\uc740 \uc804\ud1b5\uc801\uc778 \uc758\ubbf8\uc758 \uc624\uc5fc \ubb3c\uc9c8\uc774 \uc544\ub2d9\ub2c8\ub2e4. <strong>\ud569\uc131 \uacfc\uc815\uc5d0\uc11c \uc758\ub3c4\uc801\uc73c\ub85c \uc124\uacc4\ub41c \uad6c\uc870 \ubcc0\uc218<\/strong>. \uc218\ubd84\uc774 \ud48d\ubd80\ud55c \ubd88\uaf43\uc73c\ub85c \ud654\uc5fc \uac00\uc218\ubd84\ud574\ub97c \ud1b5\ud574 \uc0dd\uc0b0\ub418\ub294 \uace0 OH \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 800~1,200ppm\uc758 OH\ub97c \ud568\uc720\ud569\ub2c8\ub2e4. \ud50c\ub77c\uc988\ub9c8 CVD \ub610\ub294 SiCl\u2084\uc758 \uc804\uae30 \uc735\ud569\uc73c\ub85c \uc0dd\uc0b0\ub418\ub294 \uc800 OH \ub4f1\uae09\uc740 10ppm \ubbf8\ub9cc\uc744 \ud568\uc720\ud558\uace0 \uc788\uc73c\uba70, \ub525 UV \uad11\ud559\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ucd08\uc800 OH \ub4f1\uae09\uc740 1ppm \ubbf8\ub9cc\uc744 \ud568\uc720\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>OH \uadf8\ub8f9\uc740 \uac01\uac01 \uc57d 50 \ubc0f 5 L-mol-\u00b9-cm-\u00b9\uc758 \uc18c\uba78 \uacc4\uc218\ub85c 2.73 \u03bcm \ubc0f 3.5 \u03bcm\uc5d0\uc11c \uc801\uc678\uc120\uc744 \ud761\uc218\ud569\ub2c8\ub2e4.<\/strong>\ub530\ub77c\uc11c \ub192\uc740 OH \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc790\uc678\uc120 \ud22c\uba85\ub3c4\ub294 \uc6b0\uc218\ud558\uc9c0\ub9cc \uadfc\uc801\uc678\uc120 \ub808\uc774\uc800 \ud22c\uacfc \uc751\uc6a9 \ubd84\uc57c\uc5d0\ub294 \ubd80\uc801\ud569\ud569\ub2c8\ub2e4. \ubc18\ub300\ub85c \uc800-OH \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 1dB\/m \ubbf8\ub9cc\uc758 \uac10\uc1e0\ub85c 2~4\u03bcm \ubc94\uc704\uc5d0\uc11c \ud22c\uacfc\ud558\ubbc0\ub85c Er:YAG \ub808\uc774\uc800 \uc804\ub2ec \uad11\uc12c\uc720 \ubc0f FTIR \uad11\ud30c\uc774\ud504\uc758 \ud45c\uc900 \uc7ac\ub8cc\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\ucc9c\uc5f0 \uc11d\uc601 \uc720\ub9ac\ub294 \uc774\ub7ec\ud55c \uc870\uc815 \uae30\ub2a5\uc744 \uc81c\uacf5\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/strong> OH \ud568\ub7c9\uc740 \ucc44\uad74 \ubc0f \uc815\uc81c \uc870\uac74\uc758 \uc794\ub958 \uc544\ud2f0\ud329\ud2b8\uc774\uba70, \uc77c\ubc18\uc801\uc73c\ub85c \uc0c1\uc5c5\uc6a9 \ub4f1\uae09\uc5d0\uc11c 150~400ppm\uc73c\ub85c UV\ub098 IR \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ucd5c\uc801\ud654\ub418\uc9c0 \uc54a\uc740 \ubc94\uc704\ub85c, \uac01\uac01\uc758 \ubaa9\ud45c \uc2a4\ud399\ud2b8\ub7fc \ucc3d\uc5d0\uc11c \uace0 OH \ubc0f \uc800 OH \ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74\uc758 \uc131\ub2a5\uc774 \ubaa8\ub450 \ub5a8\uc5b4\uc9c0\ub294 \uc911\uac04 \uc601\uc5ed\uc5d0 \uc18d\ud569\ub2c8\ub2e4.<\/p>\n<h3>\ubc18\ub3c4\uccb4 \ubc0f \ubd84\uc11d \uacc4\uce21\uc5d0 \uc694\uad6c\ub418\ub294 \uc21c\ub3c4 \uc784\uacc4\uac12<\/h3>\n<p>SEMI \ud45c\uc900 F47\uc5d0\uc11c\ub294 \ud655\uc0b0\ub85c \ubc0f CVD \ubc18\uc751\ub85c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc11d\uc601 \uc131\ubd84\uc740 \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 20ppm \ubbf8\ub9cc\uc774\uc5b4\uc57c \ud558\uba70, \ucca0\uc740 1ppm \ubbf8\ub9cc, \uc54c\ub8e8\ubbf8\ub284\uc740 5ppm \ubbf8\ub9cc\uc774\uc5b4\uc57c \ud55c\ub2e4\uace0 \uaddc\uc815\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. <strong>\uace0\uc21c\ub3c4 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\ub294 \uc774\ub7ec\ud55c \uc784\uacc4\uac12\uc744 \ucda9\uc871\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong>\ud558\uc9c0\ub9cc \ubb38\uc11c\ud654\ub41c ICP-MS \ubd84\uc11d \uc778\uc99d\uc744 \ubc1b\uc740 \uc5c4\uc120\ub41c \uc9c0\uc9c8\ud559\uc801 \ucd9c\ucc98\uc758 \uc7ac\ub8cc\ub9cc \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 0.5ppm \ubbf8\ub9cc\uc758 \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \uc218\uc900\uc744 \ub2ec\uc131\ud558\uba70 \uc0c1\ub2f9\ud55c \ub9c8\uc9c4\uc73c\ub85c SEMI F47\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4.<\/p>\n<p>\ubaa8\uc138\uad00 \uc804\uae30\uc601\ub3d9 \uae30\uae30\uc758 \uacbd\uc6b0, \uc560\uc9c8\ub7f0\ud2b8, \ubca0\ud06c\ub9cc \ucf5c\ud130, \uc6cc\ud130\uc2a4 \ub4f1\uc758 \uae30\uae30 \uc81c\uc870\uc5c5\uccb4\ub294 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub85c\ub9cc \ub2ec\uc131\ud560 \uc218 \uc788\ub294 \ub0b4\ubcbd \ud45c\uba74 \ud654\ud559 \uacf5\ucc28\ub97c \uc9c0\uc815\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. <strong>CE \ubaa8\uc138\uad00\uc758 \uc804\uae30 \uc0bc\ud22c \ud750\ub984(EOF)\uc740 \ud45c\uba74 \uc2e4\ub77c\ub180 \ubc00\ub3c4\uc5d0 \uc758\ud574 \uacb0\uc815\ub429\ub2c8\ub2e4.<\/strong>\ucc9c\uc5f0 \uc11d\uc601 \ud29c\ube0c\uc758 \uacbd\uc6b0 \ud45c\uba74 \uc544\ub798 \uc54c\ub8e8\ubbf8\ub284\uc5d0 \uc758\ud574 \uc608\uce21\ud560 \uc218 \uc5c6\uc774 \ubcc0\uc870\ub418\ub294\ub370, \uc774 \ud604\uc0c1\uc740 20ppm \ubc8c\ud06c \uc54c\ub8e8\ubbf8\ub284\uc758 \ub0ae\uc740 \ub18d\ub3c4\uc5d0\uc11c \"\uc54c\ub8e8\ubbf8\ub284\uc5d0 \uc758\ud55c EOF \uc5b5\uc81c\"\ub85c \ub3d9\ub8cc \uac80\ud1a0 CE \ubb38\ud5cc\uc5d0 \ubb38\uc11c\ud654\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ub808\uc774\uc800 \uad11\ud559\uc758 \uc21c\ub3c4 \uae30\uc900\uc740 \ud6e8\uc52c \ub354 \uc5c4\uaca9\ud569\ub2c8\ub2e4.<\/strong> 193nm\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \ub525 UV \uad11\ud559 \ubd80\ud488\uc740 ArF \ub3d9\uc548 \ubc29\uc0ac\uc120 \uc720\ub3c4 \ud761\uc218(RIA) \uc131\uc7a5\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 0.05ppm \ubbf8\ub9cc\uc758 \ucca0\uacfc 0.01ppm \ubbf8\ub9cc\uc758 \ud2f0\ud0c0\ub284\uc774 \ud3ec\ud568\ub41c \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. <a href=\"https:\/\/en.wikipedia.org\/wiki\/Excimer_laser\">\uc5d1\uc2dc\uba38 \ub808\uc774\uc800<\/a><sup id=\"fnref1:2\"><a href=\"#fn:2\" class=\"footnote-ref\">2<\/a><\/sup> \ub178\ucd9c. \ud604\uc7ac \uc774 \uc0ac\uc591\uc5d0 \ub300\ud574 \uc778\uc99d\ub41c \ucc9c\uc5f0 \uc11d\uc601 \uc18c\uc2a4\ub294 \uc0c1\uc5c5\uc801\uc73c\ub85c \uacf5\uae09\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<h4>\uc7ac\ub8cc \ub4f1\uae09 \uac04 \uc21c\ub3c4 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\ucc9c\uc5f0 \uc11d\uc601(\ud45c\uc900)<\/th>\n<th>\ucc9c\uc5f0 \uc11d\uc601(\uace0\uc21c\ub3c4)<\/th>\n<th>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c(ppm)<\/td>\n<td>50-200<\/td>\n<td>5-25<\/td>\n<td>&lt; 0.5<\/td>\n<\/tr>\n<tr>\n<td>\uc54c\ub8e8\ubbf8\ub284(ppm)<\/td>\n<td>10-60<\/td>\n<td>2-8<\/td>\n<td>&lt; 0.1<\/td>\n<\/tr>\n<tr>\n<td>\ucca0(ppm)<\/td>\n<td>0.3-8<\/td>\n<td>0.1-1<\/td>\n<td>&lt; 0.05<\/td>\n<\/tr>\n<tr>\n<td>\ud2f0\ud0c0\ub284(ppm)<\/td>\n<td>1-12<\/td>\n<td>0.2-2<\/td>\n<td>&lt; 0.01<\/td>\n<\/tr>\n<tr>\n<td>OH \ud568\ub7c9(ppm)<\/td>\n<td>150-400<\/td>\n<td>150-400<\/td>\n<td>1-1,200(\uc870\uc815 \uac00\ub2a5)<\/td>\n<\/tr>\n<tr>\n<td>\uacf5\uae09 \uc6d0\ub8cc \uc77c\uad00\uc131<\/td>\n<td>\uc9c0\uc9c8\ud559\uc801 \ubc30\uce58 \ubcc0\ud654<\/td>\n<td>\uc9c0\uc9c8\ud559\uc801 \ubc30\uce58 \ubcc0\ud654<\/td>\n<td>\uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc0ac\uc591<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/High-purity-quartz-capillary-tube-for-capillary-electrophoresis-separation-systems.webp\" alt=\"\ubaa8\uc138\uad00 \uc804\uae30\uc601\ub3d9 \ubd84\ub9ac \uc2dc\uc2a4\ud15c\uc6a9 \uace0\uc21c\ub3c4 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" title=\"\ubaa8\uc138\uad00 \uc804\uae30\uc601\ub3d9 \ubd84\ub9ac \uc2dc\uc2a4\ud15c\uc6a9 \uace0\uc21c\ub3c4 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" \/><\/p>\n<h2>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0 \ub300\ud574 \uce21\uc815\ub41c \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \uc2a4\ud399\ud2b8\ub7fc \ud22c\uacfc\uc728<\/h2>\n<p>\uad11\ud559 \uc131\ub2a5\uc740 \uc2e4\ud5d8\uc2e4 \ud658\uacbd\uc5d0\uc11c \ub450 \ubb3c\uc9c8 \uac04\uc758 \uc21c\ub3c4 \ucc28\uc774\ub97c \uc9c1\uc811 \uce21\uc815\ud560 \uc218 \uc788\uace0, \uc798\ubabb \uc9c0\uc815\ub41c \ud29c\ube0c\uac00 \uc815\ub7c9\uc801\uc73c\ub85c \uc800\ud558\ub41c \ubd84\uc11d \uacb0\uacfc\ub97c \uc0dd\uc131\ud558\ub294 \uacf3\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc2e4\ub9ac\uce74 \uae30\ubc18 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \ud22c\uacfc \uc2a4\ud399\ud2b8\ub7fc\uc740 \ubd88\uc21c\ubb3c \ubc0f OH \ud568\ub7c9\uc744 \uc9c1\uc811 \ud310\ub3c5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uae08\uc18d \uc624\uc5fc \ubb3c\uc9c8\uc740 \uc790\uc678\uc120\uc5d0\uc11c \uac1c\ubcc4 \ud761\uc218 \ub300\uc5ed\uc744 \uc0dd\uc131\ud558\ub294 \ubc18\uba74 OH \uadf8\ub8f9\uc740 \uc801\uc678\uc120\uc5d0\uc11c \ud2b9\uc9d5\uc801\uc778 \ud761\uc218 \ud2b9\uc9d5\uc744 \uc0dd\uc131\ud558\uba70, \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uc791\ub3d9 \ud30c\uc7a5\uc5d0 \ub300\ud55c \uc774\ub7ec\ud55c \ud2b9\uc9d5\uc758 \uc704\uce58\uc5d0 \ub530\ub77c \ud29c\ube0c\uac00 \ubaa9\uc801\uc5d0 \uc801\ud569\ud55c\uc9c0 \uc544\ub2c8\uba74 \uc808\ub300\uc801\uc73c\ub85c \ubd80\uc801\ud569\ud55c\uc9c0 \uc5ec\ubd80\uac00 \uacb0\uc815\ub429\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601 \ubaa8\uc138\uad00\uc5d0\uc11c\uc758 \uc790\uc678\uc120 \ud22c\uacfc\uc640 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uc55e\uc11c\uac00\ub294 \uacf3<\/h3>\n<p><strong>\ubcbd \ub450\uaed8\uac00 1mm\uc778 \ud45c\uc900 \uc0c1\uc5c5\uc6a9 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\ub294 250nm\uc5d0\uc11c \uc57d 50-70%\uc758 \uc785\uc0ac \ubc29\uc0ac\uc120\uc744 \ud22c\uacfc\ud569\ub2c8\ub2e4.<\/strong>\ub294 SiO\u2082 \ub124\ud2b8\uc6cc\ud06c\uc758 \uace0\uc720\ud55c \ud761\uc218 \uc5d0\uc9c0\ub85c \uc778\ud574 160nm \uc774\ud558\uc5d0\uc11c \uac70\uc758 0\uc5d0 \uac00\uae5d\uac8c \uac10\uc18c\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ud22c\uacfc \uace1\uc120\uc740 \ub9e4\ub044\ub7fd\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ucca0 \ubd88\uc21c\ubb3c\uc740 220nm \ubd80\uadfc\uc744 \uc911\uc2ec\uc73c\ub85c \ub113\uc740 \ud761\uc218 \ub300\uc5ed\uc744 \uc0dd\uc131\ud558\uace0 380nm\uc5d0\uc11c \uc774\ucc28\uc801 \ud2b9\uc9d5\uc744 \ubcf4\uc774\ub294 \ubc18\uba74 Ti\u00b3\u207a\ub294 300nm \uc774\ud558\uc5d0\uc11c \ud761\uc218\uc5d0 \uae30\uc5ec\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc9d5\uc740 \ubd84\uad11\uad11\ub3c4\uacc4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c\ub294 \uae30\uc900 \ud761\uad11\ub3c4 \uc0c1\uc2b9\uc73c\ub85c, \uc790\uc678\uc120 \uac10\uc9c0 CE \uc2dc\uc2a4\ud15c\uc5d0\uc11c\ub294 \uc2e0\ud638 \ub300 \uc7a1\uc74c\ube44 \uac10\uc18c\ub85c \ub098\ud0c0\ub0a9\ub2c8\ub2e4.<\/p>\n<p><strong>\ucca0\ubd84\uc774 0.05ppm \ubbf8\ub9cc\uc778 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 200nm\uc5d0\uc11c 90% \uc774\uc0c1\uc744 \ud22c\uacfc\ud569\ub2c8\ub2e4.<\/strong> (1mm \uacbd\ub85c \uae38\uc774), \ub3d9\uc77c\ud55c \ud30c\uc7a5\uc5d0\uc11c \uc77c\ubc18\uc801\uc778 \ucc9c\uc5f0 \uc11d\uc601 \uc2dc\ub8cc\uc758 \uacbd\uc6b0 40-60%\uc640 \ube44\uad50\ub429\ub2c8\ub2e4. \uadf8 \uacb0\uacfc \ucc9c\uc5f0 \uc11d\uc601\uc5d0\uc11c \uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubaa8\uc138\uad00\uc73c\ub85c \uc804\ud658\ud560 \ub54c \uceec\ub7fc \ub0b4 UV \uac80\ucd9c\uc5d0\uc11c \uc57d 0.3-0.5 \ud761\uad11\ub3c4 \ub2e8\uc704\uc758 \uac80\ucd9c \ud55c\uacc4\uac00 \uac1c\uc120\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ucc28\ub2e8 \ud30c\uc7a5(\ud22c\uacfc\uc728\uc774 10% \uc774\ud558\ub85c \ub5a8\uc5b4\uc9c0\ub294 \ud30c\uc7a5\uc73c\ub85c \uc815\uc758\ub428)\uc740 \uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0 \uc57d 160nm\uc785\ub2c8\ub2e4.<\/strong> \ubc0f \uc0c1\uc5c5\uc6a9 \ucc9c\uc5f0 \uc11d\uc601\uc758 \uacbd\uc6b0 170-180nm\ub85c, 10-20nm\uc758 \ub2e8\uc810\uc774 \uc788\uc5b4 \uc2ec\uc790\uc678\uc120 \ubc0f VUV \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ucc9c\uc5f0 \uc11d\uc601\uc744 \uc644\uc804\ud788 \ubc30\uc81c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601\uc758 \uc801\uc678\uc120 \ud761\uc218 \ub300 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 OH \uc8fc\ub3c4 \uac10\uc1e0<\/h3>\n<p>\uadfc\uc801\uc678\uc120 \ubc0f \uc911\uc801\uc678\uc120 \uc2a4\ud399\ud2b8\ub7fc \uc601\uc5ed\uc5d0\uc11c \uc9c0\ubc30\uc801\uc778 \ud761\uc218\uccb4\uac00 \uae08\uc18d \ubd88\uc21c\ubb3c\uc5d0\uc11c \uc218\uc0b0\uae30\ub85c \ubc14\ub00c\uace0 \uc11d\uc601\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ube44\uad50\ub294 \uc9c1\uad00\uc801\uc774\uc9c0 \uc54a\uc740 \ubc29\uc2dd\uc73c\ub85c \ubc18\uc804\ub429\ub2c8\ub2e4. <strong>OH \ud568\ub7c9\uc774 150-400ppm\uc778 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc740 2.73\u03bcm\uc5d0\uc11c \uc911\uac04 \uc815\ub3c4\uc758 IR \ud761\uc218\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/strong> - IR \ub808\uc774\uc800 \uc804\uc1a1\uc758 \uc720\uc6a9\uc131\uc744 \uc81c\ud55c\ud560 \ub9cc\ud07c \uc911\uc694\ud558\uc9c0\ub9cc \ub2e8\uacbd\ub85c \uc751\uc6a9\uc774 \uac00\ub2a5\ud560 \uc815\ub3c4\ub85c \uc801\ub2f9\ud569\ub2c8\ub2e4.<\/p>\n<p>\uace0-OH \ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74(&gt;800ppm OH)\ub294 2.73\u03bcm\uc5d0\uc11c \ud6e8\uc52c \ub354 \uac15\ud558\uac8c \ud761\uc218\ud558\uba70, \ud761\uc218 \uacc4\uc218\ub294 \ucc9c\uc5f0 \uc11d\uc601\ubcf4\ub2e4 \uc57d 3~4\ubc30 \ub192\uc2b5\ub2c8\ub2e4. <strong>\ubc18\ub300\ub85c, \ub0ae\uc740 OH \uc6a9\uc735 \uc2e4\ub9ac\uce74(&lt;10 ppm OH)\ub294 2.73 \u03bcm\uc5d0\uc11c 0.001 cm-\u00b9 \ubbf8\ub9cc\uc758 \ud761\uc218\ub97c \ubcf4\uc785\ub2c8\ub2e4.<\/strong>\uc774 \ubc34\ub4dc\uc5d0\uc11c \ubcf8\uc9c8\uc801\uc73c\ub85c \ud22c\uba85\ud558\uba70 \ubaa8\uc138\uad00 \ub3c4\ud30c\uad00\uc744 \ud1b5\ud55c Er:YAG(2.94\u03bcm) \ubc0f CO \ub808\uc774\uc800(5.4\u03bcm) \uc804\ub2ec\uc5d0 \uc720\uc77c\ud558\uac8c \uc2e4\ud589 \uac00\ub2a5\ud55c \uc7ac\ub8cc\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\ub530\ub77c\uc11c IR \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uc2e4\uc9c8\uc801\uc778 \uc120\ud0dd \uaddc\uce59\uc740 \ub2e8\uc21c\ud788 \"\uc11d\uc601 \uc704\uc5d0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\"\uac00 \uc544\ub2c8\ub77c \"\ub2e4\ub978 \ubaa8\ub4e0 \uac83 \uc704\uc5d0 \uc800-OH \uc6a9\uc735 \uc2e4\ub9ac\uce74\"\uc785\ub2c8\ub2e4.<\/strong> \ucc9c\uc5f0 \uc11d\uc601\uc740 \uc911\uac04 OH \ubc94\uc704\ub97c \ucc28\uc9c0\ud558\uc5ec \uc815\ubc00\ud55c IR \uc791\uc5c5\uc5d0\ub294 \ub108\ubb34 \ud761\uc218\ub418\uc9c0\ub9cc, \ub192\uc740 OH \ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74\uc758 \uc790\uc678\uc120 \uc774\uc810\uc774 \ubd80\uc871\ud558\uc5ec \uad11\ud559\uc801 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c\ub294 \uc2a4\ud399\ud2b8\ub7fc \ubd88\ubaa8\uc9c0\uc5d0 \uc18d\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uac00 \ud55c\uacc4\uc5d0 \ub3c4\ub2ec\ud558\ub294 \uc9c4\uacf5 \uc790\uc678\uc120 \ud22c\uacfc<\/h3>\n<p>200nm \uc774\ud558\uc5d0\uc11c\ub294 \ucc9c\uc5f0 \uc11d\uc601\uacfc \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc0ac\uc774\uc758 \ud22c\uacfc \uacc4\uce35 \uad6c\uc870\uac00 \uadf8\ub77c\ub370\uc774\uc158\uc774 \uc544\ub2cc \uc808\ub300\uc801\uc778 \uac83\uc774 \ub429\ub2c8\ub2e4. <strong>\ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\ub294 \uc57d 170nm\uc5d0\uc11c \uc2e4\uc9c8\uc801\uc778 \ud22c\uacfc \ucc28\ub2e8\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/strong>\ud0dc\uc591\ud654\ub77c\uace0 \uc54c\ub824\uc9c4 \uacfc\uc815\uc744 \ud1b5\ud574 \uc7a5\uae30\uac04\uc758 VUV \uc870\uc0ac\uc5d0\uc11c \uc120\ub7c9 \uc758\uc874\uc801 \ud761\uc218\uac00 \ucd95\uc801\ub418\ub294 Fe\u00b3\u207a, Al\u00b3\u207a \ubc0f Ti\u2074\u207a \ubd88\uc21c\ubb3c \uc13c\ud130\uc758 \uacb0\ud569 \ud761\uc218\ub85c \uc778\ud574 \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/p>\n<p>0.01ppm \ubbf8\ub9cc\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 \ud3ec\ud568\ub41c \ud50c\ub77c\uc988\ub9c8 CVD\ub85c \uc0dd\uc0b0\ub41c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 90nm \ub178\ub4dc \ubc18\ub3c4\uccb4 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 \uc0ac\uc6a9\ub418\ub294 F\u2082 \uc5d1\uc2dc\uba38 \ub808\uc774\uc800\uc758 \uc791\ub3d9 \ud30c\uc7a5\uc778 157nm\uae4c\uc9c0 \uce21\uc815 \uac00\ub2a5\ud558\uac8c \ud22c\uacfc\ud569\ub2c8\ub2e4. <strong>193nm(ArF \uc5d1\uc2dc\uba38 \ub808\uc774\uc800)\uc5d0\uc11c \uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 cm\ub2f9 99.5% \uc774\uc0c1\uc758 \ucd08\uae30 \ud22c\uacfc\uc728\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/strong>\ub3d9\uc77c\ud55c \ud30c\uc7a5\uc758 \ucc9c\uc5f0 \uc11d\uc601\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 85-92%\ub97c \ud22c\uacfc\ud558\uba70, \ubc29\uc0ac\uc120\uc5d0 \uc758\ud55c \uc0c9 \uc911\uc2ec \ud615\uc131\uc73c\ub85c \uc778\ud574 10\u2078 \ub808\uc774\uc800 \ud384\uc2a4\ub2f9 3-8%\uc529 \ucd94\uac00\ub85c \uc800\ud558\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\uc2f1\ud06c\ub85c\ud2b8\ub860 \ube54\ub77c\uc778 \uad11\ud559 \ubd80\ud488, \uc2ec\ubd80 \uc790\uc678\uc120 \ud604\ubbf8\uacbd \ub300\ubb3c\ub80c\uc988, 193nm \uce68\uc9c0 \ub9ac\uc18c\uadf8\ub798\ud53c \ud504\ub85c\uc81d\uc158 \uc2dc\uc2a4\ud15c\uc740 \ubaa8\ub450 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \ud544\uc218\ub85c \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/strong> \uc778\uc99d\ub41c \ubc29\uc0ac\uc120 \uacbd\ub3c4 \ub370\uc774\ud130\uc640 \ud568\uaed8 - \uc0c1\uc5c5\uc801\uc73c\ub85c \uc5b4\ub5a4 \ucc9c\uc5f0 \uc11d\uc601 \uc18c\uc2a4\ub3c4 \ub9cc\uc871\uc2dc\ud0a4\uc9c0 \ubabb\ud558\ub294 \uc0ac\uc591 \ubc94\uc8fc\uc785\ub2c8\ub2e4. 200nm \uc774\ud558\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \ubaa8\ub4e0 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0, \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc740 \ud22c\uacfc \ubc0f \ubc29\uc0ac\uc120 \uc548\uc815\uc131\uc744 \uc774\uc720\ub85c \uc808\ub300\uc801\uc73c\ub85c \uc81c\uc678\ub429\ub2c8\ub2e4.<\/p>\n<h4>\ud30c\uc7a5 \uc601\uc5ed\ubcc4 \uc2a4\ud399\ud2b8\ub7fc \uc804\uc1a1 \uc694\uc57d<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc2a4\ud399\ud2b8\ub7fc \uc601\uc5ed<\/th>\n<th>\ud30c\uc7a5 \ubc94\uc704<\/th>\n<th>\ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00<\/th>\n<th>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74(\uace0-OH)<\/th>\n<th>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74(\uc800-OH)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc9c4\uacf5 \uc790\uc678\uc120(VUV)<\/td>\n<td>150-200nm<\/td>\n<td>\ubd88\ub7c9(\ucef7\uc624\ud504 ~170nm)<\/td>\n<td>\uc6b0\uc218(\ucef7\uc624\ud504 ~155nm)<\/td>\n<td>\uc6b0\uc218(\ucef7\uc624\ud504 ~155nm)<\/td>\n<\/tr>\n<tr>\n<td>\ub525 UV<\/td>\n<td>200-250nm<\/td>\n<td>\ubcf4\ud1b5(50-70%)<\/td>\n<td>\uc6b0\uc218(&gt;90%)<\/td>\n<td>\uc6b0\uc218(&gt;90%)<\/td>\n<\/tr>\n<tr>\n<td>\uc790\uc678\uc120 \uadfc\ucc98 \/ \uac00\uc2dc\uad11\uc120<\/td>\n<td>250-800nm<\/td>\n<td>\uc591\ud638(&gt;85%)<\/td>\n<td>\uc6b0\uc218(&gt;92%)<\/td>\n<td>\uc6b0\uc218(&gt;92%)<\/td>\n<\/tr>\n<tr>\n<td>IR \uadfc\ucc98<\/td>\n<td>800-2,500nm<\/td>\n<td>Good<\/td>\n<td>Good<\/td>\n<td>\uc6b0\uc218<\/td>\n<\/tr>\n<tr>\n<td>\uc911\uc801\uc678\uc120(2.7\u03bcm \ub300\uc5ed)<\/td>\n<td>2,500-3,500nm<\/td>\n<td>\uc911\uac04 \uc815\ub3c4\uc758 \ud761\uc218<\/td>\n<td>\ub192\uc740 \ud761\uc218\ub825<\/td>\n<td>\ub9e4\uc6b0 \ub0ae\uc740 \ud761\uc218\uc728<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub300\ube44 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \uc5f4 \uc131\ub2a5<\/h2>\n<p>\ubaa8\ub4e0 \uc131\ub2a5 \ucc28\uc6d0 \uc911\uc5d0\uc11c \uc5f4 \uac70\ub3d9\uc740 \uac00\uc7a5 \uce58\uba85\uc801\uc778 \uc0ac\uc591 \uc624\ub958\ub97c \ubc1c\uc0dd\uc2dc\ud0a4\ub294\ub370, \uace0\uc628 \ud658\uacbd\uc5d0\uc11c\uc758 \uace0\uc7a5\uc740 \uc885\uc885 \uac11\uc791\uc2a4\ub7fd\uace0 \ub3cc\uc774\ud0ac \uc218 \uc5c6\uc73c\uba70 \uc8fc\ubcc0 \uacf5\uc815 \uc7a5\ube44\uc5d0 \uc624\uc5fc\uc744 \uc77c\uc73c\ud0a4\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/p>\n<p>\ubd88\uc21c\ubb3c \ud568\ub7c9\uc740 \ub2e8\uc21c\ud788 \uad11\ud559\uc801 \uc120\uba85\ub3c4\ub9cc \uc800\ud558\uc2dc\ud0a4\ub294 \uac83\uc774 \uc544\ub2c8\ub77c \uc720\ub9ac \ub124\ud2b8\uc6cc\ud06c\uac00 \uc7ac\uad6c\uc131, \ud0c8\uc11d\ud654 \ub610\ub294 \uae30\uacc4\uc801 \ud56d\ubcf5\uc774 \uc2dc\uc791\ub418\ub294 \uc628\ub3c4\ub97c \uc9c1\uc811\uc801\uc73c\ub85c \ub0ae\ucda5\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc11d\uc601\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc0ac\uc774\uc758 \uc5f4 \uc131\ub2a5 \ucc28\uc774\ub294 \uc774\uc804 \uc139\uc158\uc5d0\uc11c \uc124\uba85\ud55c \uc21c\ub3c4 \ucc28\uc774\uc758 \uc9c1\uc811\uc801\uc778 \uc5f4\uc5ed\ud559\uc801 \uacb0\uacfc\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \uc5f0\ud654\uc810 \ubc0f \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4<\/h3>\n<p><strong>\uc0c1\uc5c5\uc6a9 \ucc9c\uc5f0 \uc11d\uc601 \uc720\ub9ac\uc758 \uc5b4\ub2d0\ub9c1 \ud3ec\uc778\ud2b8\ub294 \uc57d 1,120\u00b0C\uc785\ub2c8\ub2e4.<\/strong>\uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0 1,140\u00b0C\uc778\ub370 \ube44\ud574 \ucc9c\uc5f0 \uc11d\uc601\uc758 \uacbd\uc6b0 20\u00b0C\uc758 \ucc28\uc774\uac00 \uc788\ub294\ub370, \uc774\ub294 \ucc9c\uc5f0 \uc11d\uc601\uc5d0 \ud3ec\ud568\ub41c \uc54c\ub8e8\ubbf8\ub284 \ubc0f \uc54c\uce7c\ub9ac \uae08\uc18d \ubd88\uc21c\ubb3c\uc758 \ub124\ud2b8\uc6cc\ud06c \uc57d\ud654 \ud6a8\uacfc\ub97c \ubc18\uc601\ud55c \uac83\uc785\ub2c8\ub2e4. \uc5f0\ud654\uc810(\uc810\ub3c4\uac00 10\u2077-\u2076 Pa-s\uc5d0 \ub3c4\ub2ec\ud558\ub294 \uc628\ub3c4)\uc740 \ucc9c\uc5f0 \uc11d\uc601\uc758 \uacbd\uc6b0 \uc57d 1,665\u00b0C, \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0 1,683\u00b0C\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \uc2e4\uc81c \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4 \uc0c1\ud55c\uc740 1,050~1,100\u00b0C\uc785\ub2c8\ub2e4.<\/strong> \uc0b0\ud654 \ub300\uae30 \ubc0f \uc57d 950~1,000\u00b0C\uc5d0\uc11c \ud0c8\ub9ac\ud654 \uc704\ud5d8\uc744 \uc81c\uc5b4\ud574\uc57c \ud569\ub2c8\ub2e4. \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ub3d9\uc77c\ud55c \ub300\uae30 \uc870\uac74\uc5d0\uc11c 1,100-1,150\u00b0C\uc5d0\uc11c \uc5f0\uc18d\uc801\uc73c\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. 1,050\u00b0C\uc758 \ud655\uc0b0\ub85c \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ucc9c\uc5f0 \uc11d\uc601 \uc6a9\uad11\ub85c \ud29c\ube0c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uce58\uc218 \uc65c\uace1\uc774 \uce21\uc815 \uac00\ub2a5\ud558\uae30 \uc804\uc5d0 150-250\ud68c\uc758 \uc5f4 \uc0ac\uc774\ud074\uc744 \uacac\ub514\ub294 \ubc18\uba74, \ub3d9\uc77c\ud55c \uc870\uac74\uc758 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 500\ud68c \uc0ac\uc774\ud074 \ud6c4\uc5d0 \uce21\uc815 \uac00\ub2a5\ud55c \ud06c\ub9ac\ud504\uac00 \ub098\ud0c0\ub098\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\uc5f0\uc18d \uc0ac\uc6a9 \ud55c\ub3c4\ub97c \ucd08\uacfc\ud558\ub294 \ub2e8\uae30 \uc0ac\uc6a9\uc740 \ud5c8\uc6a9\ub418\uc9c0\ub9cc \ub204\uc801\ub41c \uad6c\uc870\uc801 \uc704\ud5d8\uc744 \uc218\ubc18\ud569\ub2c8\ub2e4.<\/strong> 1,150\u00b0C\uc5d0\uc11c \ucc9c\uc5f0 \uc11d\uc601 \uc720\ub9ac\ub294 \ube44\uc2b7\ud55c \ud615\uc0c1\uc758 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ubcf4\ub2e4 \uc57d 3\ubc30 \ube60\ub978 \uc18d\ub3c4\ub85c \ud06c\ub9ac\ud551\ub418\uba70, \ubcbd\uc774 \ubd95\uad34\ub418\uac70\ub098 \ud0c0\uc6d0\ud615\uc73c\ub85c \ubc1c\ub2ec\ud558\uc5ec \ud750\ub984 \ud2b9\uc131\uc774\ub098 \uad11 \uacbd\ub85c \uae38\uc774\uac00 \uc190\uc0c1\ub420 \uc218 \uc788\ub294 \uc587\uc740 \ubcbd\uc758 \ubaa8\uc138\uad00\uc5d0\uc11c\ub294 \uc774 \ucc28\uc774\uac00 \ud06c\uac8c \ub098\ud0c0\ub0a9\ub2c8\ub2e4.<\/p>\n<h3>\uc5f4\ud33d\ucc3d \uacc4\uc218 \ubc0f \uc815\ubc00 \uce58\uc218 \uc694\uad6c \uc0ac\ud56d<\/h3>\n<p>\ucc9c\uc5f0 \uc11d\uc601 \uc720\ub9ac\uc640 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ubaa8\ub450 \ub9e4\uc6b0 \ub0ae\uc740 \uc5f4\ud33d\ucc3d \uacc4\uc218(CTE)\ub97c \ub098\ud0c0\ub0b4\uba70, \uc774\ub294 \ub450 \uc7ac\ub8cc\uac00 \uba85\ubaa9\uc0c1 \ub3d9\ub4f1\ud558\uac8c \ubcf4\uc774\ub294 \uba87 \uc548 \ub418\ub294 \ub9e4\uac1c\ubcc0\uc218 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4. <strong>\ucc9c\uc5f0 \uc11d\uc601 \uc720\ub9ac\uc758 CTE\ub294 0.54-0.58 \u00d7 10-\u2076\/\u00b0C\uc785\ub2c8\ub2e4.<\/strong>\ubc18\uba74 \uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 0.52-0.55 \u00d7 10-\u2076\/\u00b0C\ub85c \uc57d 0.03-0.05 \u00d7 10-\u2076\/\u00b0C\uc758 \ucc28\uc774\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ud45c\uc900 \ubaa8\uc138\uad00 \ud29c\ube0c(\uc608: 350 \u03bcm OD, 250 \u03bcm \ubcbd \ub450\uaed8)\uc758 \uaddc\ubaa8\uc5d0\uc11c \uc774 CTE \ucc28\uc774\ub294 \ud29c\ube0c \uae38\uc774 1\ubc00\ub9ac\ubbf8\ud130\ub2f9 \uc12d\uc528 1\ub3c4\ub2f9 \uc57d 0.002 \u03bcm\uc758 \uce58\uc218 \ud3b8\ucc28\ub97c \ubc1c\uc0dd\uc2dc\ud0b5\ub2c8\ub2e4. <strong>200\u00b0C\uc758 \uc628\ub3c4 \ubcc0\ud654\uc5d0 \ub178\ucd9c\ub41c 300mm \ubaa8\uc138\uad00 \uc774\uc0c1<\/strong>\uc11d\uc601\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc0ac\uc774\uc758 \ub204\uc801 \uae38\uc774 \ucc28\uc774\ub294 \uc57d 1.2\u03bcm\ub85c \ub300\ubd80\ubd84\uc758 \uc0b0\uc5c5 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c\ub294 \ubb34\uc2dc\ud560 \uc218 \uc788\uc9c0\ub9cc \uc784\uacc4 \uce58\uc218\uac00 \u00b10.5\u03bcm \ud5c8\uc6a9 \uc624\ucc28\ub85c \uc9c0\uc815\ub41c \ubbf8\uc138 \uc720\uccb4 \ucc44\ub110 \ud615\uc0c1\uc5d0\uc11c\ub294 \uc7a0\uc7ac\uc801\uc73c\ub85c \uc911\uc694\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\uc774 CTE \ucc28\uc774\uc758 \uc6b4\uc601\uc0c1 \ub354 \uc911\uc694\ud55c \uacb0\uacfc\ub294 \ubcf8\ub529\ub41c \uc5b4\uc148\ube14\ub9ac\uc5d0\uc11c \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/strong> \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uac00 \uc720\ub9ac \ud504\ub9bf \ub610\ub294 \uc811\ucc29\uc81c\ub97c \uc0ac\uc6a9\ud558\uc5ec \uae08\uc18d \ub610\ub294 \uc138\ub77c\ubbf9 \ud398\ub8f0\uc5d0 \uc811\ucc29\ub418\uba74 \uc5f4 \uc21c\ud658 \uc911\uc5d0 \ud29c\ube0c\uc640 \ud53d\uc2a4\ucc98 \uc0ac\uc774\uc758 CTE \ubd88\uc77c\uce58\ub85c \uc778\ud574 \uacc4\uba74 \uc751\ub825\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \uace0\uc815\uad6c CTE\uc640 \uad00\ub828\ud558\uc5ec \uc798\ubabb\ub41c \ud29c\ube0c \uc7ac\ub8cc\ub97c \uc120\ud0dd\ud558\ub294 \uac83\uc740 \uace0\uc628 \ubd84\uc11d \uae30\uae30\uc5d0\uc11c \ud398\ub8f0 \uc530\ub9c1 \uc2e4\ud328\uc758 \ubb38\uc11c\ud654\ub41c \uc6d0\uc778\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uc5f4 \uc21c\ud658\uc5d0 \ub530\ub978 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \ud0c8\uc11d\ud654 \uc704\ud5d8<\/h3>\n<p>\ube44\uc815\uc9c8 \uc2e4\ub9ac\uce74 \uc720\ub9ac \ub0b4\uc5d0\uc11c \uacb0\uc815\uc9c8 \ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\uac00 \ud575\uc744 \ud615\uc131\ud558\uace0 \uc131\uc7a5\ud558\ub294 \ub370\ube44\ud2b8\ub9ac\ud53c\ucf00\uc774\uc158\uc740 \uace0\uc628 \uc21c\ud658 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \uc218\uba85\uc744 \uc81c\ud55c\ud558\ub294 \uc8fc\uc694 \uace0\uc7a5 \uba54\ucee4\ub2c8\uc998 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4. <strong>\ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc5d0\uc11c \uae08\uc18d \ubd88\uc21c\ubb3c(\ud2b9\ud788 \ucca0\uacfc \uc54c\ub8e8\ubbf8\ub284)\uc740 \ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\uc758 \uc774\uc9c8\uc801\uc778 \ud575 \ud615\uc131 \ubd80\uc704\ub85c \uc791\uc6a9\ud569\ub2c8\ub2e4.<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc0c1\uc6a9 \ub4f1\uae09\uc758 \uc7ac\ub8cc\uc5d0\uc11c \ud0c8\uc11d\ud654 \uc2dc\uc791 \uc628\ub3c4\ub97c \uc57d 1,050~1,100\u00b0C\ub85c \ub0ae\ucda5\ub2c8\ub2e4.<\/p>\n<p>\ud6a8\uacfc\uc801\uc778 \ud575 \uc0dd\uc131 \ubd80\uc704\uac00 \uc5c6\ub294 \uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ub3d9\uc77c\ud55c \ub300\uae30 \ubc0f \uc2dc\uac04 \uc628\ub3c4 \uc870\uac74\uc5d0\uc11c \uc57d 1,200~1,250\u00b0C\uae4c\uc9c0 \ud0c8\uc11d\ud654\uc5d0 \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\uc2e4\uc628\uacfc 1,100\u00b0C \uc0ac\uc774\ub97c \uc21c\ud658\ud558\ub294 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\ub294 \ub208\uc5d0 \ubcf4\uc774\ub294 \ud45c\uba74 \ud0c8\uc11d\ud654 \ud328\uce58\ub97c \uc0dd\uc131\ud55c\ub2e4\ub294 \uc2e4\uc9c8\uc801\uc778 \uc758\ubbf8\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/strong> (\ud770\uc0c9\uc758 \ubd88\ud22c\uba85\ud55c \uacb0\uc815 \uce68\uc804\ubb3c\ub85c \ub098\ud0c0\ub098\ub294)\uc774 20~50\ud68c \uc5f4 \uc8fc\uae30 \ub0b4\uc5d0 \ubc1c\uc0dd\ud558\ub294 \ubc18\uba74, \ub3d9\uc77c\ud55c \uc870\uac74\uc758 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 200\ud68c \uc774\uc0c1 \ub3d9\uc548 \ud0c8\uc11d\ud654\uac00 \ub098\ud0c0\ub098\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\ub294 \uc77c\ub2e8 \ud575\uc744 \ud615\uc131\ud558\uba74 \ub3cc\uc774\ud0ac \uc218 \uc5c6\uc744 \uc815\ub3c4\ub85c \ube60\ub974\uac8c \ubc88\uc2dd\ud569\ub2c8\ub2e4.<\/strong> \ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\uc640 \uc720\ub9ac\uc758 \ubd80\ud53c \ubd88\uc77c\uce58\ub294 \ub0c9\uac01 \uc911\uc5d0 \uc8fc\ubcc0 \ube44\uc815\uc9c8 \ub9e4\ud2b8\ub9ad\uc2a4\uc5d0 \uc778\uc7a5 \uc751\ub825\uc744 \ubc1c\uc0dd\uc2dc\ucf1c \ud0c8\uc11d\ud654 \uc601\uc5ed \uacbd\uacc4\uc5d0\uc11c \uade0\uc5f4 \uc2dc\uc791\uc744 \uac00\uc18d\ud654\ud569\ub2c8\ub2e4. \ubcbd \ub450\uaed8\uac00 0.1-0.5mm\uc778 \ubaa8\uc138\uad00 \ud615\uc0c1\uc5d0\uc11c\ub294 \ub0b4\ubcbd \ud45c\uba74\uc801\uc758 5%\ub97c \ub36e\ub294 \ud0c8\uc11d\ud654 \ud328\uce58\ub85c \ud30c\uc5f4 \uc555\ub825\uc744 30-40%\uae4c\uc9c0 \ub0ae\ucd94\uae30\uc5d0 \ucda9\ubd84\ud569\ub2c8\ub2e4.<\/p>\n<h4>\uc5f4\uc801 \ud2b9\uc131 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc5f4 \ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00<\/th>\n<th>\ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74 \ubaa8\uc138\uad00 \ud29c\ube0c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc5b4\ub2d0\ub9c1 \ud3ec\uc778\ud2b8(\u00b0C)<\/td>\n<td>~1,120<\/td>\n<td>~1,140<\/td>\n<\/tr>\n<tr>\n<td>\uc5f0\ud654\uc810(\u00b0C)<\/td>\n<td>~1,665<\/td>\n<td>~1,683<\/td>\n<\/tr>\n<tr>\n<td>\ucd5c\ub300 \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4(\u00b0C)<\/td>\n<td>1,050-1,100<\/td>\n<td>1,100-1,150<\/td>\n<\/tr>\n<tr>\n<td>CTE(\u00d7 10-\u2076\/\u00b0C)<\/td>\n<td>0.54-0.58<\/td>\n<td>0.52-0.55<\/td>\n<\/tr>\n<tr>\n<td>\ub370\ube44\ud2b8\ub9ac\ud53c\ucf00\uc774\uc158 \uc2dc\uc791(\u00b0C)<\/td>\n<td>1,050-1,100<\/td>\n<td>1,200-1,250<\/td>\n<\/tr>\n<tr>\n<td>\uc5f4 \uc0ac\uc774\ud074\uc5d0\uc11c \ud0c8\ud654\uae4c\uc9c0<\/td>\n<td>20-50(1,100\u00b0C \uae30\uc900)<\/td>\n<td>&gt;200(1,100\u00b0C \uae30\uc900)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Low-OH-quartz-capillary-tube-for-optical-breadboard-laser-transmission-testing.webp\" alt=\"\uad11\ud559 \ube0c\ub808\ub4dc\ubcf4\ub4dc \ub808\uc774\uc800 \ud22c\uacfc \ud14c\uc2a4\ud2b8\uc6a9 \uc800-OH \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" title=\"\uad11\ud559 \ube0c\ub808\ub4dc\ubcf4\ub4dc \ub808\uc774\uc800 \ud22c\uacfc \ud14c\uc2a4\ud2b8\uc6a9 \uc800-OH \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" \/><\/p>\n<h2>\uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \uae30\uacc4\uc801 \ubb34\uacb0\uc131 \ubc0f \ud45c\uba74 \ud2b9\uc131<\/h2>\n<p>\uad11\ud559 \ubc0f \uc5f4 \uc131\ub2a5 \uc678\uc5d0\ub3c4 \uc774\ub7ec\ud55c \ud29c\ube0c\uc758 \uae30\uacc4\uc801 \ubc0f \ud45c\uba74 \ud2b9\uc131\uc740 \uc2dc\uc2a4\ud15c \uc2e0\ub8b0\uc131, \ubd84\uc11d \uacb0\uacfc\uc758 \uc7ac\ud604\uc131, \ubbfc\uac10\ud55c \uae30\uae30\uc5d0\uc11c \ud29c\ube0c\uc758 \uc2e4\uc81c \uc0ac\uc6a9\uc131\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p>\ucc9c\uc5f0 \uc11d\uc601\uacfc \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ubaa8\ub450 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \uc7ac\ub8cc\uc774\uc9c0\ub9cc \ubaa8\uc138\uad00 \uc804\uae30\uc601\ub3d9, \ubbf8\uc138 \uc720\uccb4 \uc81c\uc870 \ubc0f \uace0\uc555 \ud06c\ub85c\ub9c8\ud1a0\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc911\uc694\ud55c \ud30c\ub2e8 \uac70\ub3d9\uacfc \ud45c\uba74 \ud654\ud559\uc774 \uc11c\ub85c \ub2e4\ub985\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\ud30c\uc5f4 \uacc4\uc218:<\/strong> \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc740 4\uc810 \uad7d\ud798 \ud14c\uc2a4\ud2b8\uc5d0\uc11c \uc57d 50-65 MPa\uc758 \ud30c\uc5f4 \uacc4\uc218\ub97c \ubcf4\uc774\ub294 \ubc18\uba74, \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ub3d9\uc77c\ud55c \uc870\uac74\uc5d0\uc11c 55-70 MPa\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 ~10% \uc7a5\uc810\uc740 \ucc9c\uc5f0 \uc11d\uc601\uc758 \uae08\uc18d \ub0b4\ud3ec\ubb3c\uc774 \ub0ae\uc740 \ud558\uc911\uc5d0\uc11c \ud30c\ub2e8\uc744 \uc2dc\uc791\ud558\ub294 \uc751\ub825 \uc9d1\uc911 \uc7a5\uce58 \uc5ed\ud560\uc744 \ud558\uae30 \ub54c\ubb38\uc5d0 \ud45c\uba74 \uacb0\ud568 \ubc00\ub3c4\uac00 \ub0ae\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \uc2e4\uc81c\ub85c \uc774\ub7ec\ud55c \ucc28\uc774\ub294 \ub0b4\ubd80 \uc555\ub825\uc774 600bar\ub97c \ucd08\uacfc\ud558\ub294 \uace0\uc555 \uce90\ud544\ub7ec\ub9ac LC \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ud06c\uac8c \ub098\ud0c0\ub0a9\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ud45c\uba74 \uac70\uce60\uae30 \ubc0f \ub0b4\ubcbd \ud488\uc9c8:<\/strong> \uadf8\ub824\uc9c4 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \ub0b4\ubcbd Ra(\uc0b0\uc220 \ud3c9\uade0 \uac70\uce60\uae30)\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0 1~5nm, \ucc9c\uc5f0 \uc11d\uc601\uc758 \uacbd\uc6b0 5~15nm\uc774\uba70, \uc808\ub2e8\ub41c \ub2e8\uba74\uc744 \uc6d0\uc790\ub825 \ud604\ubbf8\uacbd\uc73c\ub85c \uce21\uc815\ud569\ub2c8\ub2e4. <strong>\uc774\ub7ec\ud55c \uac70\uce60\uae30 \ucc28\uc774\ub294 \ubaa8\uc138\uad00 \uc804\uae30\uc601\ub3d9\uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/strong>\ubcbd \uac70\uce60\uae30\uac00 \ubd84\uc11d\ubb3c \ud53c\ud06c\ub97c \ub113\ud788\uace0 \ud50c\ub808\uc774\ud2b8 \uc218\ub97c \uc800\ud558\uc2dc\ud0a4\ub294 \uc774\uc9c8\uc801\uc778 \ud45c\uba74 \uc804\uc704\ub97c \uc720\ubc1c\ud569\ub2c8\ub2e4. \ub2e8\ubc31\uc9c8 \ubd84\ub9ac\uc5d0 \ucd5c\uc801\ud654\ub41c CE \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ucc9c\uc5f0 \uc11d\uc601 \ud29c\ube0c\uc5d0\uc11c \ub0b4\uacbd\uc774 \ub3d9\uc77c\ud55c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\ub85c \uc804\ud658\ud558\uba74 \uc774\ub860\uc801 \ud50c\ub808\uc774\ud2b8 \uc218\uac00 15-25%\uae4c\uc9c0 \ud5a5\uc0c1\ub418\ub294 \uac83\uc73c\ub85c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ud45c\uba74 \uc2e4\ub77c\ub180 \ubc00\ub3c4 \ubc0f \ud3f4\ub9ac\uc774\ubbf8\ub4dc \ucf54\ud305:<\/strong> \ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74 \ub0b4\ubcbd\uc758 \ud45c\uba74 Si-OH(\uc2e4\ub77c\ub180) \ubc00\ub3c4\ub294 nm\u00b2\ub2f9 \uc57d 4.6~5.0 Si-OH \uadf8\ub8f9\uc73c\ub85c, \uc644\uc804\ud788 \uc218\uc0b0\ud654 \ucc98\ub9ac\ub41c \ube44\uc815\uc9c8 \uc2e4\ub9ac\uce74 \ud45c\uba74\uacfc \uc77c\uce58\ud569\ub2c8\ub2e4. <strong>\ucc9c\uc5f0 \uc11d\uc601 \ub0b4\ubcbd\uc740 3.5-4.2 Si-OH\/nm\u00b2\uc758 \uc2e4\ub77c\ub180 \ubc00\ub3c4\ub97c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4.<\/strong>\uc740 \uad6d\ubd80\uc801\uc778 \ub124\ud2b8\uc6cc\ud06c \uc65c\uace1\uc744 \ud1b5\ud574 \uc2e4\ub77c\ub180 \ud615\uc131\uc744 \ucc28\ub2e8\ud558\ub294 \ud45c\uba74 \uc544\ub798 \uc54c\ub8e8\ubbf8\ub284\uc5d0 \uc758\ud574 \uac10\uc18c\ud569\ub2c8\ub2e4. \ucc9c\uc5f0 \uc11d\uc601\uc758 \uc2e4\ub77c\ub180 \ubc00\ub3c4\uac00 \ub0ae\uc744\uc218\ub85d CE \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c EOF\uac00 \uc57d\ud558\uace0 \uc7ac\ud604\uc131\uc774 \ub5a8\uc5b4\uc9d1\ub2c8\ub2e4. \uc678\ubd80\uc801\uc73c\ub85c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 12\u03bcm \ub610\ub294 24\u03bcm \ub450\uaed8\uc758 \uc720\uc5f0\ud55c \ubaa8\uc138\uad00 \ud29c\ube0c\uc5d0 \uc801\uc6a9\ub418\ub294 \ud3f4\ub9ac\uc774\ubbf8\ub4dc \ucf54\ud305\uc774 \ub450 \uc7ac\ub8cc \uc720\ud615\uc5d0 \ub3d9\uc77c\ud558\uac8c \uc801\uc6a9\ub418\uc5b4 \uc720\uc5f0\uc131(350\u03bcm OD \ud29c\ube0c\uc758 \uacbd\uc6b0 \uad7d\ud798 \ubc18\uacbd 2cm\uae4c\uc9c0)\uacfc \ucd5c\ub300 360\u00b0C \uc5f0\uc18d \uc628\ub3c4\uc5d0\uc11c \ubcf4\ud638 \uae30\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\uacf5\uaca9\uc801\uc778 \ubd84\uc11d \ub9e4\uc9c8\uc5d0\uc11c \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \ub0b4\ud654\ud559\uc131<\/h2>\n<p>\ubd84\uc11d \uc2e4\ud5d8\uc2e4\uacfc \uc0b0\uc5c5\uc6a9 \uc6d0\uc790\ub85c\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ubd80\uc2dd\uc131 \uc870\uac74\uc5d0\uc11c\uc758 \ud654\ud559\uc801 \ub0b4\uad6c\uc131\uc740 \ud2b9\ud788 \uc2dc\ub8cc \ubb34\uacb0\uc131\uc774\ub098 \uc2dc\uc2a4\ud15c \uc218\uba85\uc774 \ud0c0\ud611\ud560 \uc218 \uc5c6\ub294 \uacbd\uc6b0 \uacb0\uc815\uc801\uc778 \uc120\ud0dd \uae30\uc900\uc785\ub2c8\ub2e4.<\/p>\n<p>\ucc9c\uc5f0 \uc11d\uc601\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ub300\ubd80\ubd84\uc758 \uc2e4\ud5d8\uc2e4 \uc870\uac74\uc5d0\uc11c \ud654\ud559\uc801\uc73c\ub85c \ubd88\ud65c\uc131\uc774\uc9c0\ub9cc, \ucc9c\uc5f0 \uc11d\uc601\uc5d0 \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 \uc874\uc7ac\ud558\uba74 \uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0\ub294 \uc5c6\ub294 \ubc18\uc751\uc131 \uacbd\ub85c\uac00 \uc0dd\uaca8 \uc2dc\ub8cc \uc624\uc5fc, \ucd09\ub9e4 \ubd80\ubc18\uc751, \ud45c\uba74 \ubd84\ud574 \uac00\uc18d\ud654\ub85c \ub098\ud0c0\ub098\ub294 \uacbd\ub85c\uac00 \uc0dd\uae41\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\uc0b0\uc131 \ubc0f \uc54c\uce7c\ub9ac\uc131 \ub9e4\uc9c8\uc5d0\uc11c\uc758 \ubd80\uc2dd \uc18d\ub3c4:<\/strong> \ub450 \ubb3c\uc9c8 \ubaa8\ub450 \ubd88\uc0b0\uc5d0 \ube44\uc2b7\ud55c \uc18d\ub3c4(40% HF\uc5d0\uc11c \uc2e4\uc628\uc5d0\uc11c \uc57d 0.3-0.5 \u03bcm\/min)\ub85c \uc6a9\ud574\ub429\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uac15\uc54c\uce7c\ub9ac\uc131 \uc6a9\uc561(1M NaOH, 80\u00b0C)\uc5d0\uc11c\ub294 \uadf8\ub807\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4, <strong>\ucc9c\uc5f0 \uc11d\uc601\uc740 0.8-1.2 \u03bcm\/h\uc5d0\uc11c \uc6a9\ud574\ub429\ub2c8\ub2e4.<\/strong>0.6-0.9 \u03bcm\/h\uc758 \uace0\uc21c\ub3c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ubcf4\ub2e4 \uc57d 20-30% \ub354 \ube60\ub985\ub2c8\ub2e4. \ucc9c\uc5f0 \uc11d\uc601\uc5d0\uc11c \uc774\ub7ec\ud55c \uac00\uc18d \uc6a9\ud574\ub294 \uc54c\uce7c\ub9ac\uc131 \uac00\uc218\ubd84\ud574 \uc870\uac74\uc5d0\uc11c Al\u00b3\u207a \uce58\ud658 \ubd80\uc704\uc5d0 \uc778\uc811\ud55c Si-O-Si \uacb0\ud569\uc744 \ubd88\uc548\uc815\ud558\uac8c \ub9cc\ub4dc\ub294 \uc54c\ub8e8\ubbf8\ub284\uc758 \ub124\ud2b8\uc6cc\ud06c \uc57d\ud654 \ud6a8\uacfc\uc5d0 \uae30\uc778\ud569\ub2c8\ub2e4. \uace0\uc628 \uc99d\uae30 \ud658\uacbd(600\u00b0C \uc774\uc0c1)\uc5d0\uc11c\ub294 \ub450 \uc7ac\ub8cc \ubaa8\ub450 \uc218\uc0b0\ud654\ud654\uac00 \uac00\uc18d\ud654\ub418\uc9c0\ub9cc \ucc9c\uc5f0 \uc11d\uc601\uc740 \ubbf8\ub7c9 \uae08\uc18d \ud074\ub7ec\uc2a4\ud130\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \uc785\uc790 \uacbd\uacc4 \uacf5\uaca9\uc774 \ubc1c\uc0dd\ud558\uc5ec \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0\ub294 \ub098\ud0c0\ub098\uc9c0 \uc54a\ub294 \uad6d\uc18c\uc801\uc778 \ud53c\ud305\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uae08\uc18d \ubd88\uc21c\ubb3c\ub85c \uc778\ud55c \ucd09\ub9e4 \ubd80\ubc18\uc751:<\/strong> \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc5d0 \uc788\ub294 \ucca0 \ubd88\uc21c\ubb3c\uc774 \ucd09\ub9e4 \uc5ed\ud560\uc744 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <a href=\"https:\/\/www.sciencedirect.com\/topics\/earth-and-planetary-sciences\/fenton-reaction\">\ud39c\ud1a4\ud615 \ubc18\uc751<\/a><sup id=\"fnref1:3\"><a href=\"#fn:3\" class=\"footnote-ref\">3<\/a><\/sup> \uc0b0\ud654 \uc2dc\ub8cc \ubd84\ud574 \ubc0f \ud2b9\uc815 CE \ubc84\ud37c \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc77c\uc0c1\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \uc2dc\uc57d\uc778 \uacfc\uc0b0\ud654\uc218\uc18c\uac00 \uc788\ub294 \uacbd\uc6b0. <strong>\ud29c\ube0c \ubcbd\uc5d0\uc11c Fe\u00b2\u207a\/Fe\u00b3\u207a \uc0ac\uc774\ud074\ub9c1\uc740 \ud558\uc774\ub4dc\ub85d\uc2e4 \ub77c\ub514\uce7c\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4.<\/strong> \uc720\uae30 \ubd84\uc11d\ubb3c\uc744 \ubd84\ud574\ud558\uc5ec \ubbfc\uac10\ud55c \uc0dd\uccb4 \ubd84\uc790\uc758 \ud68c\uc218\uc728\uc744 5-20%\uae4c\uc9c0 \uac10\uc18c\uc2dc\ud0a8\ub2e4\ub294 \uc5f0\uad6c \uacb0\uacfc\uac00 \ubcf4\uace0\ub41c \ubc14 \uc788\uc2b5\ub2c8\ub2e4. \ud2f0\ud0c0\ub284 \ubd88\uc21c\ubb3c\uc740 \uc790\uc678\uc120 \uc870\uba85 \uc544\ub798\uc5d0\uc11c \uad11\ud658\uc6d0 \ubc18\uc751\uc744 \uc720\uc0ac\ud558\uac8c \ucd09\ub9e4\ud558\uc5ec 1ppb \ubbf8\ub9cc\uc758 \ubbf8\ub7c9 \ubd84\uc11d\ubb3c \ub18d\ub3c4\uc5d0\uc11c \uc790\uc678\uc120 \uac80\ucd9c \ud06c\ub85c\ub9c8\ud1a0\uadf8\ub798\ud53c\uc5d0 \uc544\ud2f0\ud329\ud2b8 \ud53c\ud06c\ub97c \uc720\ubc1c\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ub2e8\ubc31\uc9c8 \ud761\ucc29 \ubc0f \ud45c\uba74 \ubcc0\ud615 \ud638\ud658\uc131:<\/strong> \ucc9c\uc5f0 \uc11d\uc601 \ub0b4\ubcbd\uc758 \ub0ae\uc740 \uc2e4\ub77c\ub180 \ubc00\ub3c4(\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0 3.5-4.2 Si-OH\/nm\u00b2 \ub300 4.6-5.0 Si-OH\/nm\u00b2)\ub294 \uc77c\ubd80 CE \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc5ed\uc124\uc801\uc73c\ub85c \ube44\ud2b9\uc774\uc801 \ub2e8\ubc31\uc9c8 \ud761\ucc29\uc744 \uc99d\uac00\uc2dc\ud0b5\ub2c8\ub2e4. <strong>\ud45c\uba74 \uc544\ub798 \uc54c\ub8e8\ubbf8\ub284\uc5d0 \uc758\ud574 \ucc28\ub2e8\ub41c \uc2e4\ub77c\ub180 \uadf8\ub8f9\uc740 \uc774\uc628\ud654 \uac00\ub2a5\ud55c \uc2e4\ub77c\ub180 \ub300\uc2e0 \uc911\uc131 \uc2e4\ub85d\uc0b0 \ube0c\ub9bf\uc9c0\ub85c \uc874\uc7ac\ud569\ub2c8\ub2e4.<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc815\uc804\uae30\uc801 \ubc18\ubc1c\uc774 \uc544\ub2cc \uc18c\uc218\uc131 \uc0c1\ud638\uc791\uc6a9\uc744 \ud1b5\ud574 \ub2e8\ubc31\uc9c8\uc744 \ud761\ucc29\ud558\ub294 \uc18c\uc218\uc131 \ud328\uce58\ub97c \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc625\ud0c0\ub370\uc2e4\uc2e4\ub780(ODS) \ub610\ub294 \ud3f4\ub9ac\uc544\ud06c\ub9b4\uc544\ubbf8\ub4dc \uadf8\ub798\ud504\ub97c \uc0ac\uc6a9\ud55c \uc2e4\ub780\ud654\ub294 \uc0ac\uc6a9 \uac00\ub2a5\ud55c \uc2e4\ub77c\ub180 \ubc00\ub3c4\uac00 \uac10\uc18c\ud558\uae30 \ub54c\ubb38\uc5d0 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0 \ube44\ud574 \ucc9c\uc5f0 \uc11d\uc601\uc5d0\uc11c \uc57d 15% \ub0ae\uc740 \ud45c\uba74 \ucee4\ubc84\ub9ac\uc9c0\ub85c \uc9c4\ud589\ub418\ubbc0\ub85c \ud45c\uba74 \ud328\uc2dc\ubca0\uc774\uc158\uc758 \ud6a8\uacfc\uac00 \uac10\uc18c\ud558\uace0 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ucf54\ud305-\uce90\ud544\ub7ec\ub9ac CE \ubc29\ubc95\uc5d0 \uc120\ud638\ub418\ub294 \uae30\ud310\uc774 \ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Fine-bore-quartz-capillary-tube-for-spectroscopic-analytical-instrumentation.webp\" alt=\"\ubd84\uad11 \ubd84\uc11d \uae30\uae30\uc6a9 \ubbf8\uc138 \uad6c\uba4d \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" title=\"\ubd84\uad11 \ubd84\uc11d \uae30\uae30\uc6a9 \ubbf8\uc138 \uad6c\uba4d \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" \/><\/p>\n<h2>\uc11d\uc601 \ubaa8\uc138\uad00 \ub610\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \ud2b9\uc815 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\ucd94\ub294 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc2dc\ub098\ub9ac\uc624<\/h2>\n<p>\uc774\uc804 \uc139\uc158\uc5d0\uc11c \ub17c\uc758\ud55c \ubaa8\ub4e0 \uc131\ub2a5 \ub9e4\uac1c \ubcc0\uc218\ub294 \uc5ec\uae30\uc11c \uc2e4\ud589 \uac00\ub2a5\ud55c \uc7ac\ub8cc \uc120\ud0dd \uacb0\uc815, \uc989 \uc798\ubabb\ub41c \ud29c\ube0c \uc7ac\ub8cc\ub97c \uc120\ud0dd\ud558\uba74 \uce21\uc815 \uac00\ub2a5\ud55c \ubd84\uc11d \uc131\ub2a5 \uc800\ud558 \ub610\ub294 \uc870\uae30 \uae30\uacc4\uc801 \uace0\uc7a5\uc774 \ubc1c\uc0dd\ud558\ub294 \uc2dc\ub098\ub9ac\uc624\ub85c \uc218\ub834\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc7ac\ub8cc \ud2b9\uc131\uacfc \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc694\uad6c \uc0ac\ud56d \uac04\uc758 \ub9e4\ud551\uc774 \ud56d\uc0c1 \uc9c1\uad00\uc801\uc778 \uac83\uc740 \uc544\ub2c8\uba70, \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uac00 \uae30\uc220\uc801\uc73c\ub85c \uc815\ud655\ud558\uace0 \uacbd\uc81c\uc801\uc73c\ub85c \ud569\ub9ac\uc801\uc778 \uc120\ud0dd\uc774 \ub420 \uc218 \uc788\ub294 \uc5ec\ub7ec \uc2dc\ub098\ub9ac\uc624\uac00 \uc874\uc7ac\ud569\ub2c8\ub2e4. \uc544\ub798 \uc139\uc158\uc5d0\uc11c\ub294 \uac01 \uc8fc\uc694 \uc751\uc6a9 \ubd84\uc57c\ub97c \uc815\ub7c9\uc801 \uae30\uc900\uacfc \ud568\uaed8 \uc124\uba85\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uac00 \uc2e4\uc6a9\uc801\uc778 \uc7ac\ub8cc\ub85c \ub0a8\uc544 \uc788\ub294 \uacf3<\/h3>\n<p><strong>1,050\u00b0C \uc774\ud558\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uace0\uc628 \uc0b0\uc5c5\uc6a9 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\ub294 \uc801\uc808\ud55c \uc5f4 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/strong> \ub4f1\uac00 \uae30\ud558\ud559 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ubcf4\ub2e4 \uc77c\ubc18\uc801\uc73c\ub85c 30~50% \ub0ae\uc740 \uc7ac\ub8cc \ube44\uc6a9\uc73c\ub85c \uc0dd\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. CVD \ubc18\uc751\uae30 \uc720\uc785\uad00, 900~1,000\u00b0C\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \ub300\uae30 \ud655\uc0b0\ub85c \ub77c\uc774\ub108, \ud654\uc5fc \uad11\ub3c4\uacc4 \uc2dc\ub8cc \ub3c4\uc785 \ubaa8\uc138\uad00\uc740 \ubaa8\ub450 \uace0\uc21c\ub3c4 \ucc9c\uc5f0 \uc11d\uc601(\ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c &lt;25ppm)\uc774 \ubc29\uc5b4 \uac00\ub2a5\ud55c \uc0ac\uc591\uc778 \uc628\ub3c4 \ubc0f \uc21c\ub3c4 \ubc94\uc704 \ub0b4\uc5d0 \uc18d\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc628\ub3c4\uac00 1,050\u00b0C\ub97c \ucd08\uacfc\ud558\uac70\ub098 \uc5f4 \uc21c\ud658 \ube48\ub3c4\uac00 \uc5f0\uac04 \uc57d 100\uc8fc\uae30\ub97c \ucd08\uacfc\ud558\uba74 \ube44\uc6a9 \ub300\ube44 \uc131\ub2a5\uc758 \uacbd\uacc4\uac00 \ubc14\ub01d\ub2c8\ub2e4. <strong>\uc774 \uc784\uacc4\uac12\uc744 \ucd08\uacfc\ud558\uba74 \ucc9c\uc5f0 \uc11d\uc601\uc758 \ud0c8\uc11d\ud654 \ubc0f \ud06c\ub9ac\ud504 \uc18d\ub3c4\uac00 \uac00\uc18d\ud654\ub418\uc5b4 \ucd1d \uc18c\uc720 \ube44\uc6a9 \uc218\uce58\uac00 \ub2e4\uc74c\uacfc \ube44\uc2b7\ud558\uac70\ub098 \ucd08\uacfc\ud569\ub2c8\ub2e4.<\/strong> \uad50\uccb4 \ube48\ub3c4\ub97c \uace0\ub824\ud560 \ub54c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uadf8\uac83\uacfc \ube44\uc2b7\ud569\ub2c8\ub2e4. 1,000\u00b0C\uc5d0\uc11c \uc5f4\ubb34\uac8c \ubd84\uc11d(TGA)\uc744 \uc704\ud574 \ud29c\ube0c \uc6a9\uad11\ub85c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc11d\uc601 \ubaa8\uc138\uad00\uc740 \uc7ac\ub8cc\uc758 \ud55c\uacc4\uac00 \uc798 \ud2b9\uc131\ud654\ub418\uace0 \uc815\uae30\uc801\uc778 \uac80\uc0ac \ubc0f \uc815\uae30 \uad50\uccb4\ub97c \ud1b5\ud574 \uad00\ub9ac\ud560 \uc218 \uc788\ub294 \ub300\ud45c\uc801\uc778 \uc751\uc6a9 \ubd84\uc57c\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>220nm \uc774\ud558\uc758 \uc790\uc678\uc120 \ud22c\uacfc\uac00 \ud544\uc694\ud558\uc9c0 \uc54a\uace0 \uae08\uc18d \ucd09\ub9e4 \ud65c\uc131\uc774 \uc6b0\ub824\ub418\uc9c0 \uc54a\ub294 \uc751\uc6a9 \ubd84\uc57c<\/strong>\ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc740 \uc5ec\uc804\ud788 \uae30\uc220\uc801\uc73c\ub85c \uacbd\uc7c1\ub825\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc218\uc18c \ud654\uc5fc \uc774\uc628\ud654 \uac80\ucd9c\uae30(FID) \ubaa8\uc138\uad00 \uc785\uad6c, 300\u00b0C \uc774\uc0c1\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uac00\uc2a4 \ubd84\uc11d\uae30\uc758 \uc0d8\ud50c \ucee8\ub514\uc154\ub2dd \ub77c\uc778, \uad11\ud559 \ubc29\ucd9c \ubd84\uad11 \ubd84\uc11d \ud1a0\uce58 \ubcf8\uccb4\ub294 \ubaa8\ub450 \uc11d\uc601 \ubaa8\uc138\uad00 \uc131\ub2a5\uc774 \uc785\uc99d\ub418\uace0 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uce21\uc815 \uac00\ub2a5\ud55c \uc6b4\uc601\uc0c1\uc758 \uc774\uc810\uc744 \uc81c\uacf5\ud558\uc9c0 \uc54a\ub294 \uae30\uc874 \uc751\uc6a9 \ubd84\uc57c\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uac00\uc2a4 \ud06c\ub85c\ub9c8\ud1a0\uadf8\ub798\ud53c \uceec\ub7fc\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uc6b0\uc138\uc131<\/h3>\n<p>\uac00\uc2a4 \ud06c\ub85c\ub9c8\ud1a0\uadf8\ub798\ud53c \uceec\ub7fc\uc740 \ub2e8\uc77c \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ucc9c\uc5f0 \uc11d\uc601\uc744 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub85c \uac00\uc7a5 \uc644\ubcbd\ud558\uac8c \ub300\uccb4\ud560 \uc218 \uc788\ub294 \uc81c\ud488\uc785\ub2c8\ub2e4. <strong>1979\ub144 \ub2e8\ub370\ub178\uc640 \uc81c\ub808\ub108\uac00 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uac1c\ubc29\ud615 \uad00\ud615 \uae30\ub465\uc744 \uc2dc\uc5f0\ud55c \uc774\ub798\ub85c<\/strong>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 GC \ubaa8\uc138\uad00 \uceec\ub7fc\uc758 \ubcf4\ud3b8\uc801\uc778 \uae30\uc9c8\ub85c \uc0ac\uc6a9\ub418\uc5b4 \uc654\uc73c\uba70 \uc774\ub7ec\ud55c \uc6b0\uc138\uc758 \uae30\uc220\uc801 \uc774\uc720\ub294 \uc815\ub7c9\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ucc9c\uc5f0 \uc11d\uc601\uc758 \ucca0\uacfc \uc54c\ub8e8\ubbf8\ub284 \ubd88\uc21c\ubb3c\uc740 200\u00b0C \uc774\uc0c1\uc758 \uceec\ub7fc \uc628\ub3c4\uc5d0\uc11c \ub18d\uc57d, \uc2a4\ud14c\ub85c\uc774\ub4dc, \uc5f4\uc5d0 \ubbfc\uac10\ud55c \uc81c\uc57d \ud654\ud569\ubb3c \ub4f1 \ubd88\uc548\uc815\ud55c \ubd84\uc11d \ubb3c\uc9c8\uc758 \uc5f4 \ubd84\ud574\ub97c \ucd09\ub9e4\ud569\ub2c8\ub2e4. <strong>\u00b9\u2074C-\ud45c\uc9c0 \uc720\uae30 \uc5fc\uc18c \uc0b4\ucda9\uc81c\ub97c \uc0ac\uc6a9\ud55c \uc5f0\uad6c\uc5d0\uc11c \ucc9c\uc5f0 \uc11d\uc601 \uce7c\ub7fc\uc5d0\uc11c 45-65%\uc758 \ud68c\uc218\uc728\uc774 \uc785\uc99d\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/strong> \uc640 \ub3d9\uc77c\ud55c \uc628\ub3c4 \ud504\ub85c\uadf8\ub7a8\uc5d0\uc11c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uceec\ub7fc\uc758 92-98%\ub97c \ube44\uad50\ud55c \uacb0\uacfc, \uceec\ub7fc \ub0b4\ubcbd\uc5d0\uc11c\uc758 \uae08\uc18d \ucd09\ub9e4 \ubd84\ud574\uc5d0 \uc804\uc801\uc73c\ub85c \uae30\uc778\ud558\ub294 \uac83\uc73c\ub85c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ud3f4\ub9ac\uc774\ubbf8\ub4dc \ucf54\ud305\ub41c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uceec\ub7fc\uc740 \uc720\uc5f0\uc131 \uce21\uba74\uc5d0\uc11c\ub3c4 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/strong> 30m \u00d7 0.25mm ID GC \uceec\ub7fc\uc740 \uc9c1\uacbd \uc57d 15~20cm\uc758 \ucf54\uc77c\uc5d0 \uac10\uc544\uc57c \ud558\uba70, \ucd5c\uc18c \uad7d\ud798 \ubc18\uacbd\uc740 \uc57d 2cm\uac00 \ud544\uc694\ud558\uba70 \uc774\ub294 \uc587\uc740 \ubcbd(0.15-0.20mm \ubcbd)\uc758 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubc0f \ud3f4\ub9ac\uc774\ubbf8\ub4dc \ucf54\ud305\uc758 \uc870\ud569\uc73c\ub85c\ub9cc \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub3d9\uc77c\ud55c \uae30\ud558\ud559\uc801 \uad6c\uc870\uc758 \ucc9c\uc5f0 \uc11d\uc601 \ud29c\ube0c\ub294 \uad7d\ud798 \ubc18\uacbd 8~10cm \uc774\ud558\uc5d0\uc11c \ud30c\uc190\ub418\uc5b4 \ud45c\uc900 GC \uc624\ube10 \uad6c\uc131\uacfc \ubb3c\ub9ac\uc801\uc73c\ub85c \ud638\ud658\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ud544\uc694\ud55c \ubaa8\uc138\uad00 \uc804\uae30\uc601\ub3d9 \ubc0f \ubbf8\uc138 \uc720\uccb4 \ucc44\ub110<\/h3>\n<p>\ubaa8\uc138\uad00 \uc804\uae30\uc601\ub3d9\uc740 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ubcf4\ub2e4 \ucc9c\uc5f0 \uc11d\uc601\uc744 \uc120\ud0dd\ud55c \uacb0\uacfc\ub97c \ucd1d \uc2dc\uc2a4\ud15c \uc218\uba85\uc774 \uc544\ub2cc \uac1c\ubcc4 \uc2e4\ud5d8 \uc2e4\ud589 \uc218\uc900\uc5d0\uc11c \uce21\uc815\ud560 \uc218 \uc788\ub294 \uc751\uc6a9 \ubd84\uc57c\uc785\ub2c8\ub2e4. <strong>pH 8.5\uc5d0\uc11c \ubca0\uc5b4 \uc6a9\uc735 \uc2e4\ub9ac\uce74 CE \ubaa8\uc138\uad00\uc758 \uc804\uae30 \uc0bc\ud22c\uc555 \ud750\ub984\uc740 \uc57d 2.0-2.5 \u00d7 10-\u2074 cm\u00b2\/(V-s)\uc785\ub2c8\ub2e4.<\/strong>\uc798 \uc870\uc808\ub41c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud29c\ube0c\uc5d0\uc11c \u00b12% \uc774\ub0b4\ub85c \uc7ac\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub3d9\uc77c\ud55c \ud615\uc0c1\uc758 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc5d0\uc11c\ub294 \uad6d\ubd80 \ud45c\uba74 \uc804\uc704\ub97c \uc218\uc815\ud558\ub294 \ud45c\uba74 \uc544\ub798 \uc54c\ub8e8\ubbf8\ub284\uc73c\ub85c \uc778\ud574 EOF \uc7ac\ud604\uc131\uc774 \u00b18-15%\ub85c \uc800\ud558\ub418\uc5b4 \uc815\ub7c9 \ubd84\uc11d\uc744 \uc190\uc0c1\uc2dc\ud0a4\ub294 \uc774\ub3d9 \uc2dc\uac04 \uc7ac\ud604 \ubd88\uac00\ub2a5\uc131\uc73c\ub85c \uc9c1\uc811 \ubcc0\ud658\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\ub2e8\ubc31\uc9c8 \ubd84\uc11d\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5\uc740 \ud2b9\ud788 \uc2ec\uac01\ud569\ub2c8\ub2e4.<\/strong> \ub2e8\ubc31\uc9c8-\ud45c\uba74 \uc0c1\ud638\uc791\uc6a9\uc774 \uc815\uc804\uae30\uc801\uc778 5 \ubbf8\ub9cc\uc758 pH \uac12\uc5d0\uc11c \ucc9c\uc5f0 \uc11d\uc601 \ub0b4\ubcbd\uc758 \ubd88\uaddc\uce59\ud55c \uc2e4\ub77c\ub180 \ubc00\ub3c4\ub294 \ub3d9\uc77c\ud55c \ubc84\ud37c \uc870\uac74\uc5d0\uc11c \uace0\ud488\uc9c8 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 CE \ubaa8\uc138\uad00\uc5d0\uc11c \ub2ec\uc131 \uac00\ub2a5\ud55c 150,000-200,000 N\/m\uc5d0 \ube44\ud574 \uc774\ub860\uc801 \ud50c\ub808\uc774\ud2b8 \uc218 50,000-80,000 N\/m\uc758 \ud53c\ud06c \ud14c\uc77c\ub9c1\uc744 \uc720\ubc1c\ud558\ub294 \ud761\ucc29 \ud328\uce58\ub97c \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud761\ucc29 \ud328\uce58\ub294 \ucee8\ub514\uc154\ub2dd \ud504\ub85c\ud1a0\ucf5c\ub85c \uc548\uc815\uc801\uc73c\ub85c \uc81c\uac70\ud560 \uc218 \uc5c6\ub294 \ubc18\uba74, \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud45c\uba74\uc740 \ud45c\uc900 NaOH \ucee8\ub514\uc154\ub2dd \uc2dc\ud000\uc2a4\uc5d0 \uc608\uce21 \uac00\ub2a5\ud558\uac8c \ubc18\uc751\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc2b5\uc2dd \uc5d0\uce6d\uc744 \uc0ac\uc6a9\ud55c \ubbf8\uc138 \uc720\uccb4 \ucc44\ub110 \uc81c\uc791\uc5d0\ub294 \ucd94\uac00\uc801\uc778 \uc81c\uc57d\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/strong> \ucc9c\uc5f0 \uc11d\uc601\uc758 HF \uc5d0\uce6d\uc740 \uae08\uc18d \ubd88\uc21c\ubb3c \ud074\ub7ec\uc2a4\ud130\uc5d0\uc11c\uc758 \uc6b0\uc120 \uc5d0\uce6d\uc73c\ub85c \uc778\ud574 10-30nm Ra\uc758 \ud45c\uba74 \uac70\uce60\uae30\ub97c \uc0dd\uc131\ud558\ub294 \ubc18\uba74, \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ub3d9\uc77c\ud55c \uc870\uac74\uc5d0\uc11c 1-5nm Ra\ub85c \uc5d0\uce6d\ub429\ub2c8\ub2e4. \ucc44\ub110 \uae4a\uc774\uac00 20~50\u03bcm\uc778 \ubbf8\uc138 \uc720\uccb4 \uc7a5\uce58\uc5d0\uc11c 10~30nm \ubcbd \uac70\uce60\uae30\ub294 \ucc44\ub110 \uae4a\uc774\uc758 0.02~0.15%\ub97c \ub098\ud0c0\ub0b4\uba70, \uc774\ub294 \uc804\uae30 \uc601\ub3d9 \ubd84\ub9ac\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \uc720\uccb4 \uc5ed\ud559\uc801 \ubd84\uc0b0\uc744 \uc77c\uc73c\ud0a4\uace0 \ub514\uc9c0\ud138 \ubbf8\uc138 \uc720\uccb4 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc561\uc801 \ud615\uc131 \uac70\ub3d9\uc758 \ubcc0\ub3d9\uc131\uc744 \uc720\ubc1c\ud558\uae30\uc5d0 \ucda9\ubd84\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uc800\uc628 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \uae30\ubc18\uc73c\ub85c \uad6c\ucd95\ub41c \uad11\uc12c\uc720 \ud504\ub9ac\ud3fc \ubc0f \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c<\/h3>\n<p>\uad11\uc12c\uc720 \uc5c5\uacc4\ub294 \uc8fc\uc694 \uc7ac\ub8cc \ud30c\ub77c\ubbf8\ud130\ub85c OH \ud568\ub7c9 \uc0ac\uc591\uc744 \uac1c\ucc99\ud588\uc73c\uba70, \ud1b5\uc2e0 \uad11\uc12c\uc720\uc5d0 \ub300\ud574 \ud655\ub9bd\ub41c \uc694\uad6c \uc0ac\ud56d\uc740 \ubaa8\uc138\uad00 \ud615\uc2dd\uc758 \uad11\ub3c4\ud30c\uad00, \ub808\uc774\uc800 \uc804\ub2ec \uad11\uc12c\uc720 \ubc0f \uacf5\uc815 \ubd84\uad11\ud559\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uac10\uc9c0 \uc694\uc18c\ub85c \ud655\uc0b0\ub418\uc5c8\uc2b5\ub2c8\ub2e4. <strong>\uad11\uc12c\uc720 \uc804\uc1a1 \uc2a4\ud399\ud2b8\ub7fc\uc5d0\uc11c \"\ubb3c \ud53c\ud06c\"\uc778 1,383nm\uc5d0\uc11c\uc758 OH \uad00\ub828 \ud761\uc218\ub294 ppm OH\ub2f9 \uc57d 35~40dB\/km\uc758 \uac10\uc1e0\ub97c \uc0dd\uc131\ud569\ub2c8\ub2e4.<\/strong> \uac00 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0 \ud568\uc720\ub418\uc5b4 \uc788\uc5b4 1,300~1,600nm \ud1b5\uc2e0 \ucc3d\uc5d0\uc11c \uc804\uc1a1 \uc190\uc2e4\uc744 \uc88c\uc6b0\ud558\ub294 \uc8fc\uc694 \ubcc0\uc218\uac00 OH \ud568\ub7c9\uc785\ub2c8\ub2e4.<\/p>\n<p>150-400ppm\uc758 \uace0\uc815 OH \ud568\ub7c9\uc744 \uac00\uc9c4 \ucc9c\uc5f0 \uc11d\uc601 \uc720\ub9ac\ub294 1,383nm\uc5d0\uc11c \uc57d 5,000-14,000dB\/km\uc758 \uac10\uc1e0\ub97c \uc0dd\uc131\ud558\uba70, \uc774\ub294 \ucd5c\uc2e0 \ub2e8\uc77c \ubaa8\ub4dc \ud1b5\uc2e0 \uad11\ucf00\uc774\ube14\uc758 0.3-0.5dB\/km \uc0ac\uc591\ubcf4\ub2e4 \uba87 \ubc30\ub098 \ub192\uc740 \uc218\uce58\uc785\ub2c8\ub2e4. <strong>1,550nm\uc5d0\uc11c \ub808\uc774\uc800 \uc804\ub2ec \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0, \uc800-OH \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubaa8\uc138\uad00 \uc12c\uc720\ub294 1dB\/m \ubbf8\ub9cc\uc758 \uc804\ud30c \uc190\uc2e4\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/strong>\ucc9c\uc5f0 \uc11d\uc601 \ud29c\ube0c\ub294 \uc774 \ud30c\uc7a5 \ubc94\uc704\uc758 \ub3c4\ud30c\uad00 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc804\ud600 \uc801\ud569\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>ArF \uc5d1\uc2dc\uba38 \ub808\uc774\uc800(193nm) \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \uc0c1\uc5c5\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \uac00\uc7a5 \uc5c4\uaca9\ud55c \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc0ac\uc591\uc744 \uc801\uc6a9\ud569\ub2c8\ub2e4.<\/strong> 193nm \uce68\uc9c0 \ub9ac\uc18c\uadf8\ub798\ud53c\uc6a9 \ud504\ub85c\uc81d\uc158 \uad11\ud559\uc740 0.05ppm \ubbf8\ub9cc\uc758 Fe, 0.01ppm \ubbf8\ub9cc\uc758 Ti, 600~1,000ppm\uc758 OH \ud568\ub7c9(\uc790\uc678\uc120 \uc870\uc0ac \uc2dc \uc555\ucd95 \uc5b5\uc81c)\uacfc 10\u2079 \ud384\uc2a4 \ud50c\ub8e8\uc5b8\uc2a4\ub2f9 0.003cm-\u00b9 \ubbf8\ub9cc\uc758 \uc778\uc99d\ub41c \ubc29\uc0ac\uc120 \uc720\ub3c4 \ud761\uc218(RIA) \uc131\uc7a5\ub960\uc744 \uac00\uc9c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \ud544\uc694\ub85c \ud569\ub2c8\ub2e4. \uc774 \uc0ac\uc591\uc740 \ucc9c\uc5f0 \uc11d\uc601\uc744 \uc644\uc804\ud788 \ubc30\uc81c\ud558\uace0 \ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 \uc870\uac74\uc5d0\uc11c \ud50c\ub77c\uc988\ub9c8 CVD\ub85c \uc0dd\uc0b0\ub418\ub294 \uc18c\uc218\uc758 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub4f1\uae09\uc5d0\ub9cc \uc801\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<h4>\uc560\ud50c\ub9ac\ucf00\uc774\uc158-\uc7ac\ub8cc \uc120\ud0dd \uc694\uc57d<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<th>\ucd94\ucc9c \uc790\ub8cc<\/th>\n<th>\uc911\uc694 \ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\ucc9c\uc5f0 \uc11d\uc601 \uc0dd\uc874 \uac00\ub2a5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>GC \ubaa8\uc138\uad00 \uceec\ub7fc<\/td>\n<td>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74(\uc800-OH)<\/td>\n<td>\uae08\uc18d \ubd88\ud65c\uc131, \uc720\uc5f0\uc131<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>\ubaa8\uc138\uad00 \uc804\uae30 \uc601\ub3d9<\/td>\n<td>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74(\ubca0\uc5b4 \ub610\ub294 \ucf54\ud305)<\/td>\n<td>EOF \uc7ac\ud604\uc131, \uc2e4\ub77c\ub180 \uade0\uc77c\uc131<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>\ubbf8\uc138 \uc720\uccb4 \ucc44\ub110<\/td>\n<td>\ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74<\/td>\n<td>\ub0b4\ubd80 \ubcbd \uac70\uce60\uae30(&lt;5nm Ra)<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>CVD \ud37c\ub2c8\uc2a4 \ud29c\ube0c(&lt;1,050\u00b0C)<\/td>\n<td>\uace0\uc21c\ub3c4 \ucc9c\uc5f0 \uc11d\uc601<\/td>\n<td>\ube44\uc6a9-\uc5f4 \uade0\ud615<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<tr>\n<td>TGA\/\uc5f4 \ubd84\uc11d \ud29c\ube0c<\/td>\n<td>\ucc9c\uc5f0 \uc11d\uc601<\/td>\n<td>\ucd5c\ub300 1,000\u00b0C\uc758 \uc628\ub3c4<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<tr>\n<td>\uadfc\uc801\uc678\uc120 \ub808\uc774\uc800 \uc804\ub2ec<\/td>\n<td>\uc800\uc628 \ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74<\/td>\n<td>OH &lt; 10 ppm<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>ArF \uc5d1\uc2dc\uba38 \uad11\ud559(193nm)<\/td>\n<td>\ucd08\uc21c\uc218 \ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74<\/td>\n<td>Fe &lt; 0.05ppm, RIA \uc778\uc99d<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>\ubd88\uaf43 \uad11\ub3c4 \uce21\uc815 \uc785\uad6c<\/td>\n<td>\ucc9c\uc5f0 \uc11d\uc601<\/td>\n<td>\uc628\ub3c4 \uc800\ud56d<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<tr>\n<td>\ud1b5\uc2e0 \uc12c\uc720<\/td>\n<td>\uc800\uc628 \ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74<\/td>\n<td>OH &lt; 1 ppm<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Precision-quartz-capillary-tube-for-gas-chromatography-instrument-sample-introduction.webp\" alt=\"\uac00\uc2a4 \ud06c\ub85c\ub9c8\ud1a0\uadf8\ub798\ud53c \uae30\uae30 \uc2dc\ub8cc \uc18c\uac1c\uc6a9 \uc815\ubc00 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" title=\"\uac00\uc2a4 \ud06c\ub85c\ub9c8\ud1a0\uadf8\ub798\ud53c \uae30\uae30 \uc2dc\ub8cc \uc18c\uac1c\uc6a9 \uc815\ubc00 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\" \/><\/p>\n<h2>\uc11d\uc601 \ubaa8\uc138\uad00 \uc0ac\uc591\uc758 \ud45c\uc900 \uce58\uc218 \ubc0f \uacf5\ucc28<\/h2>\n<p>\ubaa8\uc138\uad00 \ud29c\ube0c \uc0ac\uc591\uc758 \uce58\uc218 \uc815\ud655\ub3c4\ub294 \uc7ac\ub8cc \uc120\ud0dd \ub2e8\uacc4\uc5d0\uc11c \uc885\uc885 \uacfc\uc18c\ud3c9\uac00\ub418\ub294 \ubc29\uc2dd\uc73c\ub85c \uc2dc\uc2a4\ud15c \uc131\ub2a5\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\uba70, 0.32mm \ud29c\ube0c\uc758 5% OD \ubcc0\ud654\ub294 16\u03bcm\uc758 \uc808\ub300 \ud3b8\ucc28\ub85c \ud574\uc11d\ub418\uc5b4 \uc801\uc808\ud55c \ud398\ub8f0 \ubc00\ubd09\uc744 \ubc29\ud574\ud558\uac70\ub098 \uceec\ub7fc \ud6a8\uc728\uc744 \ubcc0\uacbd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ucc9c\uc5f0 \uc11d\uc601\uacfc \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubaa8\uc138\uad00 \ubaa8\ub450 \uacb9\uce58\ub294 \uce58\uc218 \ubc94\uc704\uc5d0\uc11c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc9c0\ub9cc \uace0\uc815\ubc00 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc911\uc694\ud55c \ubc29\uc2dd\uc73c\ub85c \uc7ac\ub8cc\uc640 \ub4f1\uae09\uc5d0 \ub530\ub77c \ub2ec\uc131 \uac00\ub2a5\ud55c \ud5c8\uc6a9 \uc624\ucc28\uac00 \ub2e4\ub985\ub2c8\ub2e4.<\/p>\n<p>\uc0c1\uc5c5\uc6a9 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc678\uacbd\uc73c\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4. <strong>0.10mm ~ 25mm<\/strong>\ub0b4\uacbd\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc6a9\ub3c4\uc5d0 \ub530\ub77c 10% ~ 80%\uc758 OD \ubc94\uc704\uc785\ub2c8\ub2e4. \uc720\uc5f0\ud55c \ud3f4\ub9ac\uc774\ubbf8\ub4dc \ucf54\ud305 GC\ud615 \ubaa8\uc138\uad00\uc758 \ud45c\uc900 ID\/OD \ube44\uc728\uc740 0.60-0.72(\uc608: 0.25mm ID\/0.36mm OD)\uc774\uba70, \ubd84\uad11\ud559\uc6a9 \uacbd\uc9c8 \uc815\ubc00 \ud29c\ube0c\ub294 0.80-0.92\uc758 \ube44\uc728\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ub3d9\uc2ec\ub3c4 \uacf5\ucc28\ub85c \ud45c\ud604\ub418\ub294 \ubcbd \ub450\uaed8 \uade0\uc77c\uc131\uc740 \ud45c\uc900 \ub4f1\uae09\uc758 \uacbd\uc6b0 \uacf5\uce6d \ubcbd \ub450\uaed8\uc758 \u00b13%, \uc815\ubc00 \ub4f1\uae09\uc758 \uacbd\uc6b0 \u00b11%\uc774\uba70, \ub2e8\uba74 \uc0d8\ud50c\uc5d0\uc11c \ub808\uc774\uc800 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130\ub85c \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud45c\uc900 \uc808\ub2e8 \uae38\uc774\ub294 \u00b10.5mm \uae38\uc774 \uacf5\ucc28\ub85c 50mm\uc5d0\uc11c 1,500mm\uae4c\uc9c0 \ub2e4\uc591\ud558\uba70, \ub9de\ucda4\ud615 \uae38\uc774\ub294 \ucd08\uc74c\ud30c \ub610\ub294 \ub808\uc774\uc800 \uc2a4\ud06c\ub77c\uc774\ube59\uc744 \ud1b5\ud574 \u00b10.1mm\uae4c\uc9c0 \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc720\uc5f0\ud55c \uce90\ud544\ub7ec\ub9ac \ud615\uc2dd\uc5d0 \uc801\uc6a9\ub418\ub294 \ud638\ubc15\uc0c9 \uc678\ubd80 \uc7ac\ud0b7\uc778 \ud3f4\ub9ac\uc774\ubbf8\ub4dc \ucf54\ud305\uc740 \u00b12\u03bcm\uc758 \uacf5\ucc28 \ubc94\uc704\uc5d0\uc11c 12\u03bcm \ubc0f 24\u03bcm\uc758 \uacf5\uce6d \ub450\uaed8\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4. 12\u03bcm \ucf54\ud305\uc740 GC \uceec\ub7fc \ubc0f CE \uce90\ud544\ub7ec\ub9ac\uc758 \ud45c\uc900\uc774\uba70, 24\u03bcm \ucf54\ud305\uc740 \ud604\uc7a5\uc5d0 \ubc30\uce58\ub41c \uad11\uc12c\uc720 \ubc0f \uacf5\uc815 \ubd84\uc11d\uae30 \uc0d8\ud50c \ub77c\uc778\uc5d0 \ucd94\uac00\uc801\uc778 \uae30\uacc4\uc801 \ubcf4\ud638 \uae30\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ub450 \ucf54\ud305 \ub450\uaed8 \ubaa8\ub450 360\u00b0C \uc5f0\uc18d \uc628\ub3c4 \ubc0f 400\u00b0C \ub2e8\uae30 \ud3b8\ucc28\uc5d0 \ub300\ud55c \ub4f1\uae09\uc744 \ubc1b\uc558\uc2b5\ub2c8\ub2e4. SEMI \ud45c\uc900 M1\uc740 \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \uc11d\uc601 \ubaa8\uc138\uad00 \uce58\uc218 \ud5c8\uc6a9 \uc624\ucc28\ub97c \uc9c0\uc815\ud569\ub2c8\ub2e4: 5mm OD \ubbf8\ub9cc\uc758 \ud29c\ube0c\uc5d0 \ub300\ud55c OD \uacf5\ucc28 \u00b10.05mm, \ubcbd \ub450\uaed8 \uade0\uc77c\uc131 \u00b15%, \uacf5\uce6d OD\uc758 0.5% \ubbf8\ub9cc\uc758 \ud0c0\uc6d0\ud615(\uc8fc\uc5b4\uc9c4 \ub2e8\uba74\uc5d0\uc11c \ucd5c\ub300\uc5d0\uc11c \ucd5c\uc18c OD\ub97c \ube80 \uac12) - \uc778\uc99d\ub41c \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uacf5\uae09\uc5c5\uccb4\uc758 \uace0\uc21c\ub3c4 \ucc9c\uc5f0 \uc11d\uc601\uc73c\ub85c \ub2ec\uc131\ud560 \uc218 \uc788\uc9c0\ub9cc \ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74\ub294 \uc0dd\uc0b0 \ub85c\ud2b8 \uc804\uccb4\uc5d0\uc11c \uc77c\uad00\uc131\uc774 \ub192\uc740 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294 \uc694\uac74\uc785\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcc4 \uc11d\uc601 \ubaa8\uc138\uad00 \uc0ac\uc591 \uc120\ud0dd \ud504\ub808\uc784\uc6cc\ud06c<\/h2>\n<p>\uc774\uc804\uc758 \ubaa8\ub4e0 \uc131\ub2a5 \ub370\uc774\ud130\ub294 \uc774 \ub9c8\uc9c0\ub9c9 \uc139\uc158\uc5d0\uc11c \uad6c\uc870\ud654\ub41c \uc758\uc0ac \uacb0\uc815 \ud504\ub808\uc784\uc6cc\ud06c\ub85c \ud1b5\ud569\ub418\uc5b4 \uc7ac\ub8cc \ud2b9\uc131 \ucc28\uc774\ub97c \ubaa8\ud638\ud568 \uc5c6\uc774 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcc4 \uc120\ud0dd \uae30\uc900\uc73c\ub85c \ubcc0\ud658\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc544\ub798 \ud504\ub808\uc784\uc6cc\ud06c\ub294 \uc791\ub3d9 \uc628\ub3c4, \ud544\uc694\ud55c UV \ud22c\uacfc \ud30c\uc7a5, \ubd84\uc11d\ubb3c \ub610\ub294 \uacf5\uc815\uc758 \uae08\uc18d \uac10\ub3c4, \ud45c\uba74 \ud654\ud559 \uc694\uac74, \uae30\uacc4\uc801 \ud615\uc2dd \ub4f1 \uc7ac\ub8cc \uc120\ud0dd \uacb0\uacfc\ub97c \uac00\uc7a5 \uc790\uc8fc \uacb0\uc815\ud558\ub294 5\uac00\uc9c0 \uae30\uc220 \ud30c\ub77c\ubbf8\ud130\ub97c \uc911\uc2ec\uc73c\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4. \uac01 \ub9e4\uac1c\ubcc0\uc218\ub294 \uc2e4\ud589 \uac00\ub2a5\ud55c \uc7ac\ub8cc \uc0ac\uc591\uc744 \uc810\uc9c4\uc801\uc73c\ub85c \uc881\ud600\uc8fc\ub294 \uc774\uc9c4 \ub610\ub294 \uc784\uacc4\uac12 \uacb0\uc815\uc5d0 \ub9e4\ud551\ub429\ub2c8\ub2e4.<\/p>\n<h3>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0 \ub300\ud574 \uc11d\uc601 \ubaa8\uc138\uad00\uc744 \ubc30\uce58\ud558\ub294 \ud30c\ub77c\ubbf8\ud130 \ub9e4\ud2b8\ub9ad\uc2a4<\/h3>\n<h4>\uc18c\uc7ac \uc131\ub2a5 \ube44\uad50 \ub9e4\ud2b8\ub9ad\uc2a4<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc131\ub2a5 \ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00<\/th>\n<th>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74(\uace0-OH)<\/th>\n<th>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74(\uc800-OH)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c(ppm)<\/td>\n<td>50-200<\/td>\n<td>&lt; 0.5<\/td>\n<td>&lt; 0.5<\/td>\n<\/tr>\n<tr>\n<td>UV \ucc28\ub2e8 \ud30c\uc7a5(nm)<\/td>\n<td>~170-180<\/td>\n<td>~155<\/td>\n<td>~155<\/td>\n<\/tr>\n<tr>\n<td>200nm(1mm) \uae30\uc900 \uc790\uc678\uc120 \ud22c\uacfc\uc728<\/td>\n<td>40-60%<\/td>\n<td>&gt; 90%<\/td>\n<td>&gt; 90%<\/td>\n<\/tr>\n<tr>\n<td>2.73\u03bcm\uc5d0\uc11c IR \uc804\uc1a1<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<td>\ubd88\ub7c9(\ub192\uc740 OH \ud761\uc218)<\/td>\n<td>\uc6b0\uc218<\/td>\n<\/tr>\n<tr>\n<td>\uc5f0\ud654\uc810(\u00b0C)<\/td>\n<td>~1,665<\/td>\n<td>~1,683<\/td>\n<td>~1,683<\/td>\n<\/tr>\n<tr>\n<td>\ucd5c\ub300 \uc5f0\uc18d \uc0ac\uc6a9 \uc628\ub3c4(\u00b0C)<\/td>\n<td>1,050-1,100<\/td>\n<td>1,100-1,150<\/td>\n<td>1,100-1,150<\/td>\n<\/tr>\n<tr>\n<td>CTE(\u00d7 10-\u2076\/\u00b0C)<\/td>\n<td>0.54-0.58<\/td>\n<td>0.52-0.55<\/td>\n<td>0.52-0.55<\/td>\n<\/tr>\n<tr>\n<td>\ub370\ube44\ud2b8\ub9ac\ud53c\ucf00\uc774\uc158 \uc2dc\uc791(\u00b0C)<\/td>\n<td>1,050-1,100<\/td>\n<td>1,200-1,250<\/td>\n<td>1,200-1,250<\/td>\n<\/tr>\n<tr>\n<td>\ub0b4\ubcbd Ra(nm)<\/td>\n<td>5-15<\/td>\n<td>1-5<\/td>\n<td>1-5<\/td>\n<\/tr>\n<tr>\n<td>\ud45c\uba74 \uc2e4\ub77c\ub180 \ubc00\ub3c4(Si-OH\/nm\u00b2)<\/td>\n<td>3.5-4.2<\/td>\n<td>4.6-5.0<\/td>\n<td>4.6-5.0<\/td>\n<\/tr>\n<tr>\n<td>CE(RSD)\uc758 EOF \uc7ac\ud604\uc131<\/td>\n<td>\u00b18-15%<\/td>\n<td>\u00b12%<\/td>\n<td>\u00b12%<\/td>\n<\/tr>\n<tr>\n<td>193nm\uc5d0\uc11c\uc758 \ubc29\uc0ac\uc120 \uacbd\ub3c4<\/td>\n<td>Poor<\/td>\n<td>\uc591\ud638(RIA \uc778\uc99d \uc0ac\uc6a9)<\/td>\n<td>\uc591\ud638(RIA \uc778\uc99d \uc0ac\uc6a9)<\/td>\n<\/tr>\n<tr>\n<td>\uc0c1\ub300 \uc7ac\ub8cc\ube44 \uc9c0\uc218<\/td>\n<td>1.0\u00d7<\/td>\n<td>2.5-4.0\u00d7<\/td>\n<td>3.0-5.5\u00d7<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\ubaa8\uc138\uad00 \uc18c\uc7ac\ub97c \uacb0\uc815\ud558\uae30 \uc804 \uc911\uc694\ud55c \uc0ac\uc591 \uc9c8\ubb38<\/h3>\n<p>\ubaa8\uc138\uad00 \uc0ac\uc591\uc744 \ud655\uc815\ud558\uae30 \uc804\uc5d0 5\uac00\uc9c0 \uae30\uc220\uc801 \uc9c8\ubb38\uc744 \ud1b5\ud574 \ucc9c\uc5f0 \uc11d\uc601 \ub610\ub294 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uc801\ud569\ud55c \uc7ac\ub8cc\uc778\uc9c0, \uacbd\uc6b0\uc5d0 \ub530\ub77c \ud544\uc694\ud55c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ub4f1\uae09\uc774 \ubb34\uc5c7\uc778\uc9c0 \uacb0\uc815\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\ucd5c\ub300 \uc791\ub3d9 \uc628\ub3c4\ub294 \uc5bc\ub9c8\uc778\uac00\uc694, \uadf8\ub9ac\uace0 \uc5f4 \uc21c\ud658\uc740 \uc5bc\ub9c8\ub098 \uc790\uc8fc \ubc1c\uc0dd\ud558\ub098\uc694?<\/strong> \uc5f0\uac04 \uc5f4 \uc8fc\uae30\uac00 50\ud68c \ubbf8\ub9cc\uc778 950\u00b0C \uc774\ud558\uc758 \uc5f0\uc18d \uc0ac\uc6a9\uc5d0\ub294 \uace0\uc21c\ub3c4 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uac00 \uc5f4\uc801\uc73c\ub85c \uc801\ud569\ud569\ub2c8\ub2e4. 1,050\u00b0C \uc774\uc0c1 \ub610\ub294 \uc5f0\uac04 100\ud68c \uc774\uc0c1\uc758 \uc0ac\uc774\ud074\uc5d0\uc11c\ub294 \uc870\uae30 \ud0c8\uc11d\ud654 \ubc0f \ud06c\ub9ac\ud504\ub97c \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \uc0ac\uc6a9\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 220nm \ubbf8\ub9cc\uc758 UV \ud22c\uacfc\uac00 \ud544\uc694\ud569\ub2c8\uae4c?<\/strong> \ub300\ub2f5\uc774 '\uc608'\uc778 \uacbd\uc6b0 - 200nm\uc5d0\uc11c UV \uac10\uc9c0, \uc2ec\ubd80 \uc790\uc678\uc120 \ubd84\uad11\ubc95 \ub610\ub294 193nm \ub808\uc774\uc800 \uad11\ud559\uc744 \uc0ac\uc6a9\ud558\ub294 CE\uc5d0\uc11c\uc640 \uac19\uc774 - \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ud544\uc218\uc785\ub2c8\ub2e4. \uc774 \ubc94\uc704\uc758 \ucc9c\uc5f0 \uc11d\uc601 \ud22c\uacfc\uc728\uc740 \ubd88\ucda9\ubd84\ud558\uace0 \uc0dd\uc0b0 \ub85c\ud2b8 \uac04\uc5d0 \uc77c\uad00\uc131\uc774 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ubd84\uc11d\ubb3c \ub610\ub294 \uacf5\uc815 \uac00\uc2a4\uac00 ppb \uc218\uc900\uc758 \ubbf8\ub7c9 \uae08\uc18d \uc624\uc5fc\uc5d0 \ubbfc\uac10\ud569\ub2c8\uae4c?<\/strong> \uc720\uae30 \uc5fc\uc18c\uacc4 \uc0b4\ucda9\uc81c, \ud638\ub974\ubaac \ubc0f \uc5f4\uc5d0 \ubd88\uc548\uc815\ud55c \uc81c\uc57d \ud654\ud569\ubb3c\uc740 200\u00b0C \uc774\uc0c1\uc758 \ucc9c\uc5f0 \uc11d\uc601 \ud45c\uba74\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud558\uac8c \ubd84\ud574\ub429\ub2c8\ub2e4. GC, CE, \uace0\uc628 \ucd09\ub9e4 \uc5f0\uad6c \ub4f1 \uae08\uc18d \ubd88\ud65c\uc131 \ud45c\uba74\uc774 \ud544\uc694\ud55c \ubaa8\ub4e0 \uc751\uc6a9 \ubd84\uc57c\uc5d0\ub294 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 2~4\u03bcm\uc758 \uadfc\uc801\uc678\uc120 \ub610\ub294 \uc911\uc801\uc678\uc120 \uc804\uc1a1\uc774 \ud544\uc694\ud569\ub2c8\uae4c?<\/strong> \uadf8\ub807\ub2e4\uba74 \uc800 OH \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74(&lt;10ppm OH)\ub9cc\uc774 \uc720\uc77c\ud558\uac8c \uc2e4\ud589 \uac00\ub2a5\ud55c \uc7ac\ub8cc\uc785\ub2c8\ub2e4. \uc774 \uc2a4\ud399\ud2b8\ub7fc \ucc3d\uc5d0\uc11c\ub294 \ucc9c\uc5f0 \uc11d\uc601\uc774\ub098 \uace0-OH \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ud5c8\uc6a9\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ud45c\uba74 \ud654\ud559\uc801 \uade0\uc77c\uc131\uc774 EOF \uc7ac\ud604\uc131, \ub2e8\ubc31\uc9c8 \ud68c\uc218 \ub610\ub294 \ubbf8\uc138 \uc720\uccb4 \ucc44\ub110 \uc5d0\uce6d\uc5d0 \uc911\uc694\ud569\ub2c8\uae4c?<\/strong> \ub7f0\ud22c\ub7f0 \uc7ac\ud604\uc131 \uc694\uac74\uc774 \u00b13% \ubbf8\ub9cc\uc778 \uacbd\uc6b0, \uc778\uc99d\ub41c \uc2e4\ub77c\ub180 \ubc00\ub3c4\ub97c \uac00\uc9c4 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub9cc\uc774 \ud544\uc694\ud55c \ud45c\uba74 \uc77c\uad00\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ucc9c\uc5f0 \uc11d\uc601\uc740 \ub2e8\ubc31\uc9c8, \ud575\uc0b0 \ub610\ub294 \uc774\uc131\uc9c8\uccb4\uc758 CE \ubd84\ub9ac\ub97c \uc704\ud55c \ub300\uccb4\ud488\uc73c\ub85c \ud5c8\uc6a9\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uacb0\ub860<\/h2>\n<p>\ucc9c\uc5f0 \uc11d\uc601\uacfc \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ubaa8\ub450 \ube44\uc815\uc9c8 SiO\u2082 \uc18c\uc7ac\uc774\uc9c0\ub9cc \uc131\ub2a5 \ubc94\uc704\uac00 \ubd80\ubd84\uc801\uc73c\ub85c\ub9cc \uacb9\uce69\ub2c8\ub2e4. \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\ub294 \uae08\uc18d \uac10\ub3c4 \ubc0f UV \ud22c\uba85\ub3c4\uac00 \uc911\uc694\ud558\uc9c0 \uc54a\uc740 1,050\u00b0C \uc774\ud558\uc758 \uace0\uc628 \uc0b0\uc5c5\uc6a9 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ube44\uc6a9 \ud6a8\uc728\uc801\uc778 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 220nm \ubbf8\ub9cc\uc758 UV \ud22c\uacfc\uc728, \uc5f0\uc18d \ubd84\uc11d \uc7ac\ud604\uc131, \uae08\uc18d \ubd88\ud65c\uc131 \ud45c\uba74 \ub610\ub294 2~4\u03bcm \uc0ac\uc774\uc758 \uc801\uc678\uc120 \ud22c\uacfc\uc728\uc774 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc694\uac74\uc73c\ub85c \uc815\uc758\ub418\ub294 \ubaa8\ub4e0 \uacf3\uc5d0\uc11c \ud544\uc218\uc785\ub2c8\ub2e4. \uc120\ud0dd \uacb0\uc815\uc740 \uc628\ub3c4 \uc0c1\ud55c, UV \ucc28\ub2e8, \uae08\uc18d \uac10\ub3c4, OH \uc758\uc874\uc801 \uc801\uc678\uc120 \ud22c\uacfc, \ud45c\uba74 \uc2e4\ub77c\ub180 \uade0\uc77c\uc131 \ub4f1 5\uac00\uc9c0 \uc815\ub7c9\ud654 \uac00\ub2a5\ud55c \uae30\uc900\uc73c\ub85c \ucd95\uc18c\ub429\ub2c8\ub2e4. \uac01 \uae30\uc900\uc740 \uc774 \ubb38\uc11c\uc5d0 \uc81c\uc2dc\ub41c \uc138 \uac00\uc9c0 \uc7ac\ub8cc \ub4f1\uae09(\ucc9c\uc5f0 \uc11d\uc601, \uace0-OH \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub610\ub294 \uc800-OH \uc6a9\uc735 \uc2e4\ub9ac\uce74) \uc911 \ud558\ub098\uc5d0 \uba85\ud655\ud558\uac8c \ub9e4\ud551\ub429\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n<p><strong>\uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubaa8\uc138\uad00 \ud29c\ube0c\uc640 \ub3d9\uc77c\ud55c\uac00\uc694?<\/strong><br \/>\n\ub458 \ub2e4 \ube44\uc815\uc9c8 SiO\u2082 \uc720\ub9ac\uc774\uc9c0\ub9cc \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc740 \ucc44\uad74\ub41c \uacb0\uc815\uc9c8 \uc11d\uc601\uc5d0\uc11c \ucd94\ucd9c\ub418\uba70 50~200ppm\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c\uc744 \ud3ec\ud568\ud558\uace0 \uc788\ub294 \ubc18\uba74, \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 0.5ppm \ubbf8\ub9cc\uc778 \uace0\uc21c\ub3c4 SiCl\u2084\uc5d0\uc11c \ud654\ud559\uc801\uc73c\ub85c \ud569\uc131\ub429\ub2c8\ub2e4. \uc21c\ub3c4 \ucc28\uc774\ub85c \uc778\ud574 \uc790\uc678\uc120 \ud22c\uacfc\uc728, \uc5f4 \ud0c8\uc11d\ud654 \uc800\ud56d\uc131, \ud45c\uba74 \ud654\ud559\uc131\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \ucc28\uc774\uac00 \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \ubaa8\uc138\uad00 \ud29c\ube0c\uc758 \ucd5c\ub300 \uc628\ub3c4\ub294 \uc5bc\ub9c8\uc778\uac00\uc694?<\/strong><br \/>\n\uc0c1\uc5c5\uc6a9 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc740 \uc57d 1,665\u00b0C\uc758 \uc5f0\ud654\uc810\uc744 \uac00\uc9c4 \uc0b0\ud654 \ub300\uae30\uc5d0\uc11c 1,050~1,100\u00b0C\uc5d0\uc11c \uc9c0\uc18d\uc801\uc73c\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc8fc\uae30\uc801\uc778 \uc5f4 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c 1,050\u00b0C \uc774\uc0c1\uc5d0\uc11c\ub294 \ud0c8\uc11d\ud654\uac00 \uc2dc\uc791\ub418\ub294 \uac83\uc774 \uc2e4\uc9c8\uc801\uc778 \ubb38\uc81c\uac00 \ub429\ub2c8\ub2e4. \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc548\uc804\ud55c \uc791\ub3d9 \uc0c1\ud55c\uc744 \uc57d 1,100~1,150\u00b0C\ub85c \ud655\uc7a5\ud558\uc5ec \ud0c8\uc11d\ud654 \uc704\ud5d8\uc744 \ud604\uc800\ud788 \ub0ae\ucda5\ub2c8\ub2e4.<\/p>\n<p><strong>GC \uceec\ub7fc\uc5d0 \uc11d\uc601 \ub300\uc2e0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \uc0ac\uc6a9\ud558\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><br \/>\n\uac00\uc2a4 \ud06c\ub85c\ub9c8\ud1a0\uadf8\ub798\ud53c \uceec\ub7fc\uc740 200\u00b0C \uc774\uc0c1\uc758 \ubd88\uc548\uc815\ud55c \ubd84\uc11d\ubb3c\uc9c8\uc758 \ucd09\ub9e4 \ubd84\ud574\ub97c \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uae08\uc18d \ubd88\ud65c\uc131 \ub0b4\ubd80 \ud45c\uba74\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 0.5ppm \ubbf8\ub9cc\uc778 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc774\ub7ec\ud55c \ubd88\ud65c\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. 50~200ppm\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 \uc788\ub294 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00\uc740 \ud2b9\ud788 \uc0b4\ucda9\uc81c, \ud638\ub974\ubaac \ubc0f \uc5f4\uc5d0 \ubbfc\uac10\ud55c \uc81c\uc57d \ud654\ud569\ubb3c\uc758 \uacbd\uc6b0 \uce21\uc815 \uac00\ub2a5\ud55c \ubd84\uc11d\ubb3c \ubd84\ud574\ub97c \uc720\ubc1c\ud558\uc5ec \ud68c\uc218\uc728\uc774 45-65%\ub85c \uac10\uc18c\ud558\ub294 \ubc18\uba74 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 92-98%\ub85c \uc99d\uac00\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubaa8\uc138\uad00\uc5d0\uc11c\uc758 OH \ud568\ub7c9\uc740 \ubb34\uc5c7\uc744 \uc758\ubbf8\ud558\ub098\uc694?<\/strong><br \/>\nOH \ud568\ub7c9\uc740 \ud569\uc131 \uacfc\uc815\uc5d0\uc11c \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc720\ub9ac \ub124\ud2b8\uc6cc\ud06c\uc5d0 \ud1b5\ud569\ub41c \uc218\uc0b0\uae30(Si-OH)\uc758 \ub18d\ub3c4\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \ub192\uc740 OH \ub4f1\uae09(&gt;800ppm)\uc740 \uc790\uc678\uc120\uc740 \uc798 \ud22c\uacfc\ud558\uc9c0\ub9cc 2.73\u03bcm\uc758 \uc801\uc678\uc120\uc740 \uac15\ud558\uac8c \ud761\uc218\ud569\ub2c8\ub2e4. \uc800 OH \ub4f1\uae09(&lt;10ppm)\uc740 2~4\u03bcm \uc801\uc678\uc120 \uc601\uc5ed\uc5d0\uc11c \ud22c\uba85\ud558\uba70 \uadfc\uc801\uc678\uc120 \ub808\uc774\uc800 \uc804\ub2ec \ubc0f \ud1b5\uc2e0 \uad11\uc12c\uc720 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud544\uc694\ud569\ub2c8\ub2e4. \ucc9c\uc5f0 \uc11d\uc601\uc740 150-400ppm\uc758 OH\ub97c \ud568\uc720\ud558\uace0 \uc788\uc5b4 \uc790\uc678\uc120 \ub610\ub294 \uc801\uc678\uc120 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ucd5c\uc801\ud654\ub418\uc9c0 \uc54a\uc740 \uc911\uac04 \ubc94\uc704\uc785\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p>\ucc38\uc870:<\/p>\n<div class=\"footnotes\">\n<hr \/>\n<ol>\n<li id=\"fn:1\">\n<p>\uc774 \ud56d\ubaa9\uc5d0\uc11c\ub294 \ucc9c\uc5f0 \uc11d\uc601 \ubc0f \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc7ac\ub8cc \ubaa8\ub450\uc5d0\uc11c \uae08\uc18d \ubd88\uc21c\ubb3c \ub18d\ub3c4\ub97c ppm \uc774\ud558 \uc218\uc900\uc73c\ub85c \uc815\ub7c9\ud654\ud558\ub294 \ub370 \uc0ac\uc6a9\ub418\ub294 \ubd84\uc11d \uae30\uc220\uc778 \uc720\ub3c4 \uacb0\ud569 \ud50c\ub77c\uc988\ub9c8 \uc9c8\ub7c9 \ubd84\uc11d\ubc95\uc5d0 \ub300\ud574 \uc124\uba85\ud569\ub2c8\ub2e4.<a href=\"#fnref1:1\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:2\">\n<p>\uc774 \ub808\ud37c\ub7f0\uc2a4\uc5d0\uc11c\ub294 \uc5c4\uaca9\ud55c \uad11\ud559 \uc7ac\ub8cc \uc694\uad6c \uc0ac\ud56d(0.05ppm \ubbf8\ub9cc\uc758 Fe, \uc778\uc99d\ub41c RIA \uc131\uc7a5\ub960)\uc73c\ub85c \uc778\ud574 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uc774\ub7ec\ud55c \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc720\uc77c\ud558\uac8c \uc801\uaca9 \ubaa8\uc138\uad00 \uc7ac\ub8cc\uac00 \ub418\ub294 ArF(193nm) \ubc0f F\u2082(157nm) \uc5d1\uc2dc\uba38 \ub808\uc774\uc800 \uc18c\uc2a4\uc758 \uc791\ub3d9 \uc6d0\ub9ac\uc5d0 \ub300\ud574 \uc124\uba85\ud569\ub2c8\ub2e4.<a href=\"#fnref1:2\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:3\">\n<p>\uc774 \ud56d\ubaa9\uc5d0\uc11c\ub294 CE \ubc84\ud37c \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc0b0\ud654 \uc2dc\uc57d\uc774 \ucca0 \ud568\uc720 \ucc9c\uc5f0 \uc11d\uc601 \ubaa8\uc138\uad00 \ubcbd\uc5d0 \uc811\ucd09\ud560 \ub54c \uad00\ucc30\ub418\ub294 \ubd84\uc11d\ubb3c \ubd84\ud574 \uba54\ucee4\ub2c8\uc998\uc758 \uc9c1\uc811\uc801\uc778 \uae30\ubc18\uc774 \ub418\ub294 \uacfc\uc0b0\ud654\uc218\uc18c\uc5d0\uc11c \ucca0 \ucd09\ub9e4\uc5d0 \uc758\ud55c \ud558\uc774\ub4dc\ub85d\uc2e4 \ub77c\ub514\uce7c \uc0dd\uc131\uc5d0 \ub300\ud574 \uc124\uba85\ud569\ub2c8\ub2e4.<a href=\"#fnref1:3\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<\/ol>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\ub300\ubd80\ubd84\uc758 \uc2e4\ud5d8\uc2e4\uacfc \uc870\ub2ec \ud300\uc740 \uc774 \ub450 \uac00\uc9c0 \uc7ac\ub8cc\ub97c \uc11c\ub85c \uad50\ud658 \uac00\ub2a5\ud55c \uac83\uc73c\ub85c \ucde8\uae09\ud558\ub294\ub370, \uc774\ub7ec\ud55c \uac00\uc815\uc740 \ubd84\uc11d \uc624\ub958, \uc870\uae30 \ud29c\ube0c [...]\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4.<\/p>","protected":false},"author":2,"featured_media":11146,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[10],"tags":[72],"class_list":["post-11144","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blogs","tag-quartz-glass-tube"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v25.4 (Yoast SEO v27.4) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>Fused Silica vs Quartz Capillary Tube: Purity, Optics and Heat | TOQUARTZ\u00ae<\/title>\n<meta name=\"description\" content=\"Not all SiO\u2082 tubes perform alike. 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