{"id":11125,"date":"2026-03-16T02:00:24","date_gmt":"2026-03-15T18:00:24","guid":{"rendered":"https:\/\/toquartz.com\/?p=11125"},"modified":"2026-02-24T17:06:45","modified_gmt":"2026-02-24T09:06:45","slug":"quartz-glass-plate-vs-borosilicate-soda-lime-and-fused-silica-compared","status":"publish","type":"post","link":"https:\/\/toquartz.com\/ko\/quartz-glass-plate-vs-borosilicate-soda-lime-and-fused-silica-compared\/","title":{"rendered":"\uc11d\uc601 \uc720\ub9ac\ud310\uacfc \ubd95\uaddc\uc0b0, \uc18c\ub2e4-\ub77c\uc784 \ubc0f \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ube44\uad50"},"content":{"rendered":"<p>\uad11\ud559 \uae30\ud310\uc744 \uc9c0\uc815\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc790\uc678\uc120 \ud22c\uacfc\uc728\uacfc \uc5f4 \uc548\uc815\uc131\uc744 \ub3d9\uc2dc\uc5d0 \ub9cc\uc871\ud558\ub294 \ub2e8\uc77c \uc18c\uc7ac\uac00 \uc5c6\ub2e4\ub294 \uc9c0\uc18d\uc801\uc778 \ub51c\ub808\ub9c8\uc5d0 \uc9c1\uba74\ud574 \uc788\uc2b5\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc774\ub7ec\ud55c \ubb38\uc81c\ub97c \uc9c1\uc811\uc801\uc73c\ub85c \ud574\uacb0\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc0c1\uc5c5\uc801\uc73c\ub85c \uc774\uc6a9 \uac00\ub2a5\ud55c \ubaa8\ub4e0 \ud3c9\uba74 \uad11\ud559 \uae30\ud310 \uc911\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc2a4\ud399\ud2b8\ub7fc \ud3ed, \uc5f4 \uc21c\ud658\uc5d0\uc11c\uc758 \uce58\uc218 \uc548\uc815\uc131, \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc774 \ud558\ub098\uc758 \uc7ac\ub8cc\uc5d0 \uc218\ub834\ud558\ub294 \ub4dc\ubb38 \uc704\uce58\ub97c \ucc28\uc9c0\ud569\ub2c8\ub2e4. \uc774 \uae30\uc0ac\uc5d0\uc11c\ub294 \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310, \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ud310, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc744 \ub9e4\uac1c\ubcc0\uc218\ubcc4\ub85c \uc5c4\uaca9\ud558\uac8c \ube44\uad50\ud558\uc5ec \ubaa8\ub4e0 \uacb0\ub860\uc744 \uc815\ub7c9\ud654\ub41c \ub370\uc774\ud130\ub85c \uc81c\uc2dc\ud568\uc73c\ub85c\uc368 \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \ud2b9\uc815 \uacf5\uc815 \uc870\uac74\uc5d0 \ub300\ud55c \uc7ac\ub8cc \uc801\ud569\uc131\uc744 \ubaa8\ud638\ud568 \uc5c6\uc774 \uac80\uc99d\ud560 \uc218 \uc788\ub3c4\ub85d \ud569\ub2c8\ub2e4.<\/p>\n<p>\uad11 \ud22c\uacfc\uc728, \uc5f4\ud33d\ucc3d, \ucd5c\ub300 \uc0ac\uc6a9 \uc628\ub3c4, \uad74\uc808\ub960, \ub0b4\ud654\ud559\uc131 \ubc0f \uae30\uacc4\uc801 \ud2b9\uc131\uc744 \ube44\uad50\ud569\ub2c8\ub2e4. \uac01 \uc139\uc158\uc740 \uad6c\uc870\ud654\ub41c \ub370\uc774\ud130 \uc694\uc57d\uc73c\ub85c \ub9c8\ubb34\ub9ac\ub418\uba70, \ub9c8\uc9c0\ub9c9 \uc139\uc158\uc5d0\uc11c\ub294 \uc774\ub7ec\ud55c \ub9e4\uac1c\ubcc0\uc218\ub97c \uac80\uc99d\ub41c \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc801\ud569\uc131 \ud310\ub2e8\uc73c\ub85c \ubcc0\ud658\ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Plate-Technical-Properties-for-High-Temperature-Optics.webp\" alt=\"\uace0\uc628 \uad11\ud559\uc6a9 \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uae30\uc220\uc801 \ud2b9\uc131\" title=\"\uace0\uc628 \uad11\ud559\uc6a9 \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uae30\uc220\uc801 \ud2b9\uc131\" \/><\/p>\n<h2>\uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uc2e4\uc81c \ubaa8\uc2b5<\/h2>\n<p>\uc2e4\ub9ac\uce74 \uae30\ubc18 \uc720\ub9ac\ub97c \ub458\ub7ec\uc2fc \uc6a9\uc5b4\ub294 \uacf5\uae09\uc5c5\uccb4, \ub370\uc774\ud130\uc2dc\ud2b8, \uc2ec\uc9c0\uc5b4 \ud559\uc220 \ubb38\ud5cc\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uc77c\uad00\uc131\uc774 \uc5c6\ub294 \uac83\uc73c\ub85c \uc545\uba85\uc774 \ub192\uae30 \ub54c\ubb38\uc5d0 \ub9e4\uac1c\ubcc0\uc218 \ube44\uad50\uac00 \uacfc\ud559\uc801 \ud0c0\ub2f9\uc131\uc744 \uac00\uc9c0\ub824\uba74 \uba3c\uc800 \uc870\uc0ac \ub300\uc0c1 \ubb3c\uc9c8\uc744 \uc815\ud655\ud558\uac8c \uc815\uc758\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p><a href=\"https:\/\/toquartz.com\/ko\/quartz-plates\/\">\uc11d\uc601 \uc720\ub9ac\ud310<\/a> \ub85c \uc81c\uc791\ub41c \ud3c9\ud3c9\ud55c \uae30\ud310\uc785\ub2c8\ub2e4. <strong>\uc21c\ub3c4\uac00 \uc77c\ubc18\uc801\uc73c\ub85c 99.9% \uc774\uc0c1\uc778 \ube44\uc815\uc9c8 \uc774\uc0b0\ud654 \uaddc\uc18c(SiO\u2082)<\/strong>\ub294 \uc790\uc5f0\uc801\uc73c\ub85c \ubc1c\uc0dd\ud558\ub294 \uacb0\uc815\uc9c8 \uc11d\uc601 \ubaa8\ub798\ub97c 1,700\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \ub179\uc5ec \uc0dd\uc0b0\ub429\ub2c8\ub2e4. \uacb0\uacfc\ubb3c\uc740 \ube44\uacb0\uc815\uc131\uc774\uace0 \uad11\ud559\uc801\uc73c\ub85c \ub4f1\ubc29\uc131\uc774\uba70 \ub2e4\uacb0\uc815 \uc138\ub77c\ubbf9\uc758 \ud2b9\uc9d5\uc778 \uc785\uc790 \uacbd\uacc4\uac00 \uc5c6\uc2b5\ub2c8\ub2e4. \ud45c\uc900 \uc0c1\uc5c5\uc6a9 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 0.5mm\uc5d0\uc11c 25mm\uc758 \ub450\uaed8\uc640 300 \u00d7 300mm \uc774\uc0c1\uc758 \uce21\uba74 \uce58\uc218, \ud30c\uc7a5 \ubd84\uc218(\uad11\ud559 \ub4f1\uae09\uc758 \uacbd\uc6b0 633nm\uc5d0\uc11c \u03bb\/4 ~ \u03bb\/10)\ub85c \ud45c\ud604\ub418\ub294 \ud45c\uba74 \ud3c9\ud0c4\ub3c4 \uc0ac\uc591\uc73c\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc870\ub2ec \ubc0f \uc2e4\ud5d8\uc2e4 \uc2e4\ubb34\uc5d0\uc11c \uc9c0\uc18d\uc801\uc73c\ub85c \ubc1c\uc0dd\ud558\ub294 \ud63c\ub780\uc758 \uc6d0\uc778\uc740 <strong>\uc11d\uc601 \uc720\ub9ac, \uc6a9\uc735 \uc11d\uc601, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubc0f \uc2e4\ub9ac\uce74 \uc720\ub9ac<\/strong>. \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uc6a9\uc735 \uc11d\uc601 \ud310\uc740 \ubaa8\ub450 \ucc9c\uc5f0 \uacb0\uc815\uc9c8 \uc11d\uc601 \uacf5\uae09 \uc6d0\ub8cc\uc5d0\uc11c \ud30c\uc0dd\ub418\ub294 \ubc18\uba74, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc740 \ud654\uc5fc \uac00\uc218\ubd84\ud574 \ub610\ub294 CVD\ub97c \ud1b5\ud574 SiCl\u2084\uc640 \uac19\uc740 \uace0\uc21c\ub3c4 \uc2e4\ub9ac\ucf58 \ud568\uc720 \ud654\ud559 \uc804\uad6c\uccb4\uc5d0\uc11c \ud569\uc131\ub429\ub2c8\ub2e4. \ub450 \ucd5c\uc885 \uc81c\ud488\uc740 \ubaa8\ub450 \ube44\uc815\uc9c8 SiO\u2082\uc774\uc9c0\ub9cc OH \ud568\ub7c9, \uae08\uc18d \ubd88\uc21c\ubb3c \uc218\uc900 \ubc0f \uc2ec\ubd80 \uc790\uc678\uc120 \ud22c\uacfc\uc728\uc774 \uce21\uc815 \uac00\ub2a5\ud558\uac8c \ub2e4\ub974\uba70, \uc774\ub7ec\ud55c \ucc28\uc774\ub294 200nm \ubbf8\ub9cc\uc758 \uad11\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc911\uc694\ud55c \uacb0\uacfc\ub97c \ucd08\ub798\ud569\ub2c8\ub2e4. \uc774 \uae00 \uc804\uccb4\uc5d0 \uac78\uccd0 <strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ud2b9\ud788 \uc790\uc5f0\uc801\uc73c\ub85c \uacf5\uae09\ub418\ub294 \ube44\uc815\uc9c8 SiO\u2082 \uae30\ud310\uc744 \ub9d0\ud569\ub2c8\ub2e4.<\/strong> \ubcc4\ub3c4\uc758 \uc790\uaca9\uc774 \uc5c6\ub294 \ud55c.<\/p>\n<p>\uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ud310\uc740 \uc57d 72% SiO\u2082\uc5d0 Na\u2082O(~14%)\uc640 CaO(~10%)\uac00 \uc0c1\ub2f9\ub7c9 \ucca8\uac00\ub418\uc5b4 \uc5f4 \ubc0f \uad11\ud559 \uac70\ub3d9\uc744 \ud06c\uac8c \ubcc0\ud654\uc2dc\ud0b5\ub2c8\ub2e4. \ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310\uc740 \uc54c\uce7c\ub9ac \ud568\ub7c9\uc758 \ub300\ubd80\ubd84\uc744 B\u2082O\u2083(\uc77c\ubc18\uc801\uc73c\ub85c 12-13%)\ub85c \ub300\uccb4\ud558\uc5ec \uc911\uac04 \uc815\ub3c4\uc758 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc55e\uc11c \uc5b8\uae09\ud55c \ubc14\uc640 \uac19\uc774 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc740 \uc2e4\ub9ac\uce74 \uc2a4\ud399\ud2b8\ub7fc\uc758 \uac00\uc7a5 \ub192\uc740 \uc21c\ub3c4\uc758 \ud569\uc131\ubb3c\uc785\ub2c8\ub2e4. \uc774 \ub124 \uac00\uc9c0 \uc7ac\ub8cc\uac00 \ub2e4\uc74c \uc139\uc158\uc5d0\uc11c \uc0b4\ud3b4\ubcfc \uc804\uccb4 \ube44\uad50 \uc138\ud2b8\ub97c \uad6c\uc131\ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uadf8 \ub77c\uc774\ubc8c\uc744 \uac00\ub85c\uc9c0\ub974\ub294 \uad11 \ud22c\uacfc\uc728<\/h2>\n<p>\uc2a4\ud399\ud2b8\ub7fc \ud22c\uacfc\uc728\uc740 \uad11\ud559 \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \uae30\ud310\uc744 \ud3c9\uac00\ud560 \ub54c \uac00\uc7a5 \uba3c\uc800 \uae30\ub85d\ud558\ub294 \ud30c\ub77c\ubbf8\ud130\uc774\uba70, \uc774 \ub124 \uac00\uc9c0 \uc7ac\ub8cc \uac04\uc758 \ucc28\uc774\ub294 \uc790\uc678\uc120 \uc601\uc5ed\uc5d0\uc11c \uac00\uc7a5 \uadf9\uba85\ud558\uac8c \ub098\ud0c0\ub098\uace0 \uac00\uc7a5 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \ub530\ub77c\uc11c \ub2e4\ub978 \ud30c\ub77c\ubbf8\ud130\ub97c \ud3c9\uac00\ud558\uae30 \uc804\uc5d0 \uc804\uccb4 \uad00\ub828 \uc2a4\ud399\ud2b8\ub7fc\uc5d0 \uac78\uce5c \ud22c\uacfc \uac70\ub3d9\uc744 \uc774\ud574\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601 \uc720\ub9ac\ud310\uc774 \ud0c1\uc6d4\ud55c \uc790\uc678\uc120 \ubc94\uc704 \ud22c\uacfc\uc728<\/h3>\n<p>\uae30\ud310 \uc7ac\ub8cc\uc758 \uc790\uc678\uc120 \ud22c\uacfc \ucc3d\uc740 \uc804\uccb4 \uad11\uc790 \ubc0f \uad11\ud654\ud559 \uc751\uc6a9 \ubd84\uc57c\uc5d0 \ub300\ud55c \uc801\uaca9\uc131\uc744 \uacb0\uc815\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc57d 150nm\uc5d0\uc11c 4,000nm\uae4c\uc9c0 \uc720\uc6a9\ud558\uac8c \ud22c\uacfc\ud569\ub2c8\ub2e4.<\/strong>\ud45c\uba74\uc774 \uad11\ud559 \ub4f1\uae09\uc73c\ub85c \uc5f0\ub9c8\ub41c \uacbd\uc6b0 200nm \uc774\uc0c1\uc758 \ud30c\uc7a5\uc5d0\uc11c \uacbd\ub85c \uae38\uc774 \ubc00\ub9ac\ubbf8\ud130\ub2f9 90%\ub97c \ucd08\uacfc\ud558\ub294 \ud22c\uacfc\uc728\uc744 \ubcf4\uc785\ub2c8\ub2e4. 250nm\uc5d0\uc11c 1mm \ub450\uaed8\uc758 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 93% \uc774\uc0c1\uc758 \ub0b4\ubd80 \ud22c\uacfc\uc728\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \ubc18\uba74 \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 300~320nm \uadfc\ucc98\uc5d0\uc11c \uae09\uaca9\ud55c \uc790\uc678\uc120 \ud761\uc218 \uc5d0\uc9c0\ub97c \ub098\ud0c0\ub0b4\ubbc0\ub85c \uae30\ubcf8\uc801\uc73c\ub85c \uc2ec\uc790\uc678\uc120\uc5d0 \ubd88\ud22c\uba85\ud569\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub294 \ucca0 \ubd88\uc21c\ubb3c\uacfc \uc54c\uce7c\ub9ac \ub124\ud2b8\uc6cc\ud06c \uac1c\uc9c8\uc81c\uc5d0 \uc758\ud55c \uac15\ud55c \uc790\uc678\uc120 \ud761\uc218\ub85c \uc778\ud574 \uc57d 340~360nm\uc5d0\uc11c \ub354 \uc77c\ucc0d \ucc28\ub2e8\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ucc28\ub2e8 \uc704\uce58\ub294 \ubd80\ub4dc\ub7ec\uc6b4 \uadf8\ub77c\ub370\uc774\uc158\uc774 \uc544\ub2c8\ub77c \uc881\uc740 \uc2a4\ud399\ud2b8\ub7fc \uac04\uaca9 \ub0b4\uc5d0\uc11c \ud761\uc218 \uacc4\uc218\uac00 \uba87 \ubc30\ub098 \uc0c1\uc2b9\ud558\ub294 \uc601\uc5ed\uc744 \ub098\ud0c0\ub0b4\ubbc0\ub85c \uc2dc\ub8cc \ub450\uaed8\uc5d0 \uad00\uacc4\uc5c6\uc774 UV \uc758\uc874 \uacf5\uc815\uc5d0 \uae30\ub2a5\uc801\uc73c\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc5c6\ub294 \uc7ac\ub8cc\uac00 \ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\uc5d4\uc9c0\ub2c8\uc5b4\ub97c \uc704\ud55c \uc2e4\uc9c8\uc801\uc778 \uacb0\uacfc<\/strong> 320nm \uc774\ud558\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \ubaa8\ub4e0 \uacf5\uc815 \ub610\ub294 \uae30\uae30(UV-C \uba78\uade0 \ucc54\ubc84, 248nm KrF \ub808\uc774\uc800 \ucc3d, 254nm \uc218\uc740 \ub7a8\ud504 \ubd84\uad11 \uc140 \ub610\ub294 365nm UV \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c)\ub294 \ubd95\uaddc\uc0b0 \ub610\ub294 \uc18c\ub2e4\uc11d\ud68c \uae30\ud310\uacfc \ubb3c\ub9ac\uc801\uc73c\ub85c \ud638\ud658\ub418\uc9c0 \uc54a\ub294\ub2e4\ub294 \uc810\uc740 \ubd84\uba85\ud569\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc774\ub7ec\ud55c \ubaa8\ub4e0 \ud30c\uc7a5\uc5d0\uc11c \uae30\uc220\uc801\uc73c\ub85c \uc2e4\ud589 \uac00\ub2a5\ud55c \uc120\ud0dd\uc785\ub2c8\ub2e4.<\/p>\n<p>\ucd08\uc21c\uc218 \uc804\uad6c\uccb4\uc5d0\uc11c \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29\uc744 \ud1b5\ud574 \ud569\uc131\ub41c \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc740 \uc0ac\uc6a9 \uac00\ub2a5\ud55c \ud22c\uacfc \ucc3d\uc744 \uc9c4\uacf5 \uc790\uc678\uc120\uae4c\uc9c0 \uc57d\uac04 \ub354 \ud655\uc7a5\ud558\uc5ec \ucd5c\uace0\uae09 \ud569\uc131 \ubcc0\ud615\uc758 \uacbd\uc6b0 150nm \uc774\ud558\uc5d0 \ub3c4\ub2ec\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ub300\ubd80\ubd84\uc758 \uc0b0\uc5c5\uc6a9 UV \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \ud3ec\uad04\ud558\ub294 180~400nm \ubc94\uc704\uc758 \uacbd\uc6b0 \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uad11\ud559 \ub4f1\uae09 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc758 \ud22c\uacfc \uace1\uc120\uc740 \uae30\ub2a5\uc801\uc73c\ub85c \ub3d9\ub4f1\ud569\ub2c8\ub2e4.<\/p>\n<h3>\uac00\uc2dc\uad11\uc120 \ubc0f \uadfc\uc801\uc678\uc120 \ud22c\uacfc\uc728 \ube44\uad50<\/h3>\n<p>\uc790\uc678\uc120 \uacbd\uacc4\ub97c \ub118\uc5b4\uac00\uba74 \ub124 \uac00\uc9c0 \uc7ac\ub8cc\uc758 \ud22c\uacfc \uac70\ub3d9\uc740 \ubaa8\ub450 \ud06c\uac8c \uc218\ub834\ud558\uc9c0\ub9cc \uadfc\uc801\uc678\uc120\uae4c\uc9c0 \uc758\ubbf8 \uc788\ub294 \ucc28\uc774\uac00 \uc9c0\uc18d\ub429\ub2c8\ub2e4.<\/p>\n<p>\uac00\uc2dc\uad11\uc120 \uc2a4\ud399\ud2b8\ub7fc(400-700nm)\uc5d0\uc11c, <strong>\ub124 \uac00\uc9c0 \uae30\ud310 \ubaa8\ub450 \ub192\uc740 \ud22c\uacfc\uc728\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/strong>\ud45c\uc900 \ub450\uaed8\uc758 \uacbd\uc6b0 \uc77c\ubc18\uc801\uc73c\ub85c 90%\ub97c \ucd08\uacfc\ud558\ubbc0\ub85c \uc774 \ubc94\uc704\uc758 \uae30\ud310 \uc120\ud0dd\uc740 \uc804\uc1a1 \uad00\uc810\uc5d0\uc11c\ub9cc \ubcf4\uba74 \ub35c \uc911\uc694\ud569\ub2c8\ub2e4. \ub354 \uc911\uc694\ud55c \ucc28\uc774\ub294 \uadfc\uc801\uc678\uc120\uc5d0\uc11c \ub2e4\uc2dc \ub098\ud0c0\ub0a9\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub294 \uc57d 2,000nm \uc774\uc0c1\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \ud761\uc218 \ub300\uc5ed\uc744 \ub098\ud0c0\ub0b4\uae30 \uc2dc\uc791\ud558\uace0, \ub124\ud2b8\uc6cc\ud06c \uac1c\uc9c8\uc81c \uc0b0\ud654\ubb3c\uc758 \uc9c4\ub3d9 \ubc30\uc74c\uc73c\ub85c \uc778\ud574 \ud22c\uacfc\uc728\uc774 50% \uc774\ud558\ub85c 2,500nm\uae4c\uc9c0 \ub5a8\uc5b4\uc9d1\ub2c8\ub2e4. \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \ubd95\uc0b0\uc5fc \ud761\uc218 \ub300\uc5ed\uc774 \uc2e0\ud638\ub97c \ud06c\uac8c \uac10\uc1e0\uc2dc\ud0a4\uae30 \uc804\uc5d0 \uc57d 2,700nm\uae4c\uc9c0 \uc720\uc6a9\ud55c \ud22c\uacfc\uc728\uc744 \uc720\uc9c0\ud558\uc5ec \uc131\ub2a5\uc774 \ub2e4\uc18c \uc6b0\uc218\ud569\ub2c8\ub2e4. \uac70\uc758 \uc21c\uc218\ud55c SiO\u2082 \ub124\ud2b8\uc6cc\ud06c\uac00 \uc788\ub294 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uae30\ubcf8\uc801\uc778 Si-O \uc2a4\ud2b8\ub808\uce6d \ud761\uc218\uac00 4,000nm \uadfc\ucc98\uc5d0\uc11c \uc9c0\ubc30\uc801\uc774\uae30 \uc804\uae4c\uc9c0 \uc57d 3,500nm\uae4c\uc9c0 80% \uc774\uc0c1\uc758 \ud22c\uacfc\uc728\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uad11\ub300\uc5ed \uc2dc\uc2a4\ud15c\uc744 \uc124\uacc4\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4<\/strong>-\ud478\ub9ac\uc5d0 \ubcc0\ud658 \uc801\uc678\uc120 \ubd84\uad11\uae30, \ub2e4\uc911 \ud30c\uc7a5 \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c \ub610\ub294 \uc790\uc678\uc120\ubd80\ud130 \uadfc\uc801\uc678\uc120\uae4c\uc9c0 \uc544\uc6b0\ub974\ub294 \ud0dc\uc591 \uc2dc\ubbac\ub808\uc774\ud130 \uad11\ud559\uc740 \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \ud655\uc7a5\ub41c \uc2a4\ud399\ud2b8\ub7fc \ubc94\uc704\uc5d0\uc11c \uc9c1\uc811 \uc774\uc810\uc744 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub124\ud2b8\uc6cc\ud06c \uac1c\uc9c8\uc81c \uc0b0\ud654\ubb3c\uc774 \uc5c6\uae30 \ub54c\ubb38\uc5d0 \uc720\ub9ac \uc870\uc131\ubb3c\uc5d0\uc11c \uc911\uc801\uc678\uc120 \ud761\uc218\ub97c \ub2f4\ub2f9\ud558\ub294 \uc8fc\uc694 \uba54\ucee4\ub2c8\uc998\uc774 \uc81c\uac70\ub418\uc5b4 \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\uc5d0 \ube44\ud574 \uc720\uc6a9\ud55c \uc2a4\ud399\ud2b8\ub7fc \ucc3d\uc774 1,500nm \uc774\uc0c1 \ud655\uc7a5\ub429\ub2c8\ub2e4.<\/p>\n<h3>\uc804\uc1a1\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \ub3d9\uc9c8\uc131 \ubc0f \ud761\uc218 \ub300\uc5ed<\/h3>\n<p>\uc11d\uc601 \uc720\ub9ac\ud310 \uce74\ud14c\uace0\ub9ac \uc790\uccb4 \ub0b4\uc5d0\uc11c \uc751\uc6a9 \ubd84\uc57c \uc801\ud569\uc131\uc5d0 \ub300\ud55c \uc138\ubd84\ud654\ub294 \ub2e4\uc74c\uacfc \uac19\uc774 \ub354 \uc138\ubd84\ud654\ub429\ub2c8\ub2e4. <strong>\ub192\uc740 OH \ubc0f \ub0ae\uc740 OH \ubcc0\ud615<\/strong>.<\/p>\n<p>\ucc9c\uc5f0 \uc11d\uc601 \uacf5\uae09 \uc6d0\ub8cc\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc218\uc0b0\uae30(OH) \ub18d\ub3c4\uac00 \uc911\ub7c9 \uae30\uc900 150~400ppm\uc778 \uc11d\uc601 \uc720\ub9ac\ud310\uc744 \uc0dd\uc0b0\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c OH \uadf8\ub8f9\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \ud2b9\uc9d5\uc801\uc778 \ud761\uc218 \ubc34\ub4dc\ub97c \ud615\uc131\ud569\ub2c8\ub2e4. <strong>2.72 \u03bcm<\/strong>\uc5d0\uc11c \uc57d 1.38\u03bcm\uc640 0.95\u03bcm\uc5d0\uc11c \ubc30\uc74c \ud761\uc218\uac00 \ub098\ud0c0\ub0a9\ub2c8\ub2e4. \ud2b9\uc815 \ub808\uc774\uc800 \uc808\ub2e8 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ub610\ub294 \ud2b9\uc815 \ubd84\uc790 \ubd84\uad11\ud559 \ub300\uc5ed\uacfc \uac19\uc740 2.5~3.0\u03bcm \uadfc\uc801\uc678\uc120 \ubc94\uc704\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uc2dc\uc2a4\ud15c\uc758 \uacbd\uc6b0 \uc774\ub7ec\ud55c OH \ud761\uc218\ub294 \uc758\ubbf8 \uc788\ub294 \uc804\uc1a1 \ud398\ub110\ud2f0\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 1ppm \ubbf8\ub9cc\uc758 OH \ub18d\ub3c4\ub85c \uc81c\uc870\ud560 \uc218 \uc788\uc73c\ubbc0\ub85c \uc774\ub7ec\ud55c \ud761\uc218 \ud2b9\uc131\uc744 \uadfc\ubcf8\uc801\uc73c\ub85c \uc81c\uac70\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ubc18\ub300\ub85c, <strong>180nm \uc774\ud558\uc758 \ud30c\uc7a5\uc5d0\uc11c \ub354 \ud6a8\uc728\uc801\uc73c\ub85c \ud22c\uacfc\ud558\ub294 \uace0-OH \uc11d\uc601 \uc720\ub9ac\ud310<\/strong> \uc794\ub958 \uae08\uc18d \ubd88\uc21c\ubb3c(\uc2ec\uc790\uc678\uc120\uc5d0 \ud761\uc218\ub418\ub294)\uc774 \uc6a9\uc735 \uc911 OH \ud1b5\ud569 \uacf5\uc815\uc5d0 \uc758\ud574 \ubd80\ubd84\uc801\uc73c\ub85c \uce58\ud658\ub418\uae30 \ub54c\ubb38\uc5d0 \uc800-OH \uc81c\ud488\ubcf4\ub2e4 \uace0-OH \uc81c\ud488\uc774 \ub354 \ud6a8\uacfc\uc801\uc785\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc2ec\uc790\uc678\uc120 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc6a9 \uc11d\uc601 \uc720\ub9ac\ud310\uc744 \uc9c0\uc815\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \ub192\uc740 OH \ub4f1\uae09\uc744 \uc694\uccad\ud574\uc57c \ud558\uba70, 2.5~4.0\u03bcm \uc801\uc678\uc120 \ucc3d\uc744 \ub300\uc0c1\uc73c\ub85c \ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc870\ub2ec \ubb38\uc11c\uc5d0 \ub0ae\uc740 OH \ub610\ub294 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ubcc0\ud615\uc744 \uba85\uc2dc\uc801\uc73c\ub85c \uc9c0\uc815\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h4>\ub124 \uac00\uc9c0 \uae30\ud310 \ubaa8\ub450\uc5d0 \uac78\uce5c \uc804\uc1a1 \uc694\uc57d<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>UV \ucc28\ub2e8(nm)<\/th>\n<th>\uac00\uc2dc\uc801 \uc804\uc1a1(%)<\/th>\n<th>\uadfc\uc801\uc678\uc120 \uc81c\ud55c(\u03bcm)<\/th>\n<th>OH \ud568\ub7c9(ppm)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc11d\uc601 \uc720\ub9ac\ud310<\/td>\n<td>~150<\/td>\n<td>&gt;92<\/td>\n<td>~3.5<\/td>\n<td>150-400<\/td>\n<\/tr>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/td>\n<td>~150<\/td>\n<td>&gt;93<\/td>\n<td>~3.5<\/td>\n<td>&lt;1 (\ud569\uc131)<\/td>\n<\/tr>\n<tr>\n<td>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/td>\n<td>~300<\/td>\n<td>&gt;90<\/td>\n<td>~2.7<\/td>\n<td>N\/A<\/td>\n<\/tr>\n<tr>\n<td>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/td>\n<td>~340<\/td>\n<td>&gt;89<\/td>\n<td>~2.0<\/td>\n<td>N\/A<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\ub124 \uac00\uc9c0 \uae30\ud310 \ubaa8\ub450\uc5d0 \uac78\uce5c \uc5f4\ud33d\ucc3d \uacc4\uc218<\/h2>\n<p>\uc5f4\ud33d\ucc3d\uc740 \uae30\ud310\uc774 \uc628\ub3c4 \ubcc0\ud654\ub97c \uacaa\uc744 \ub54c\ub9c8\ub2e4 \uce58\uc218 \ubb34\uacb0\uc131\uc744 \uc88c\uc6b0\ud558\uba70, \uc774 \ub124 \uac00\uc9c0 \uc7ac\ub8cc \uac04\uc758 \ucc28\uc774\ub294 \uac70\uc758 \ub450 \ubc30\uc5d0 \uc774\ub985\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ucc28\uc774\ub294 \uc5f4\ucda9\uaca9 \uc800\ud56d, \ud558\uc6b0\uc9d5\uc758 \uae30\uacc4\uc801 \uc801\ud569\uc131, \uc815\ubc00 \uc5b4\uc148\ube14\ub9ac\uc758 \uc7a5\uae30\uc801\uc778 \uce58\uc218 \uc548\uc815\uc131\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601 \uc720\ub9ac\ud310, \ubd95\uaddc\uc0b0, \uc18c\ub2e4-\ub77c\uc784 \ubc0f \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0 \ub300\ud55c CTE \ub370\uc774\ud130<\/h3>\n<p>\uc5f4\ud33d\ucc3d\uacc4\uc218(CTE)\ub294 \ube44\uad50 \ub300\uc0c1\uc778 \ub124 \uac00\uc9c0 \uae30\ud310 \uc911 \uac00\uc7a5 \ubcc0\ubcc4\ub825\uc774 \ub192\uc740 \ub2e8\uc77c \uc5f4 \ub9e4\uac1c\ubcc0\uc218\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc57d 0.55 \u00d7 10-\u2076 \/K\uc758 CTE\ub97c \uc804\ub2ec\ud569\ub2c8\ub2e4.<\/strong> 0-300\u00b0C \ubc94\uc704\uc5d0\uc11c \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310(0.55 \u00d7 10-\u2076 \/K)\uacfc \uac70\uc758 \ub3d9\uc77c\ud55c \uac12\uc744 \ub098\ud0c0\ub0b4\uba70, \uc774\ub294 \uacf5\uc720\ub41c SiO\u2082 \ub124\ud2b8\uc6cc\ud06c \uad6c\uc870\ub97c \ubc18\uc601\ud569\ub2c8\ub2e4. \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \ud30c\uc774\ub809\uc2a4 7740 \uad6c\uc131\uc73c\ub85c \ub300\ud45c\ub418\ub294 \ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310\uc740 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc740 CTE\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. <strong>3.3 \u00d7 10-\u2076 \/K<\/strong>-\uc11d\uc601\ubcf4\ub2e4 6\ubc30 \ub354 \ub192\uc2b5\ub2c8\ub2e4. \uc54c\uce7c\ub9ac \uac1c\uc9c8\uc81c \ud568\ub7c9\uc774 \ub192\uc740 \uc18c\ub2e4 \uc11d\ud68c \uc720\ub9ac\ud310\uc740 <strong>8.5-9.0 \u00d7 10-\u2076 \/K<\/strong>\ub294 \uc11d\uc601 \uc720\ub9ac\ud310\uc758 15\ubc30\uac00 \ub118\ub294 CTE\uc785\ub2c8\ub2e4. \uc774\ub294 \ubbf8\uc138\ud55c \ucc28\uc774\uac00 \uc544\ub2c8\ub77c \ub3d9\uc77c\ud55c \uc628\ub3c4 \ud3b8\ucc28\uac00 \uc801\uc6a9\ub420 \ub54c \uadfc\ubcf8\uc801\uc73c\ub85c \ub2e4\ub978 \uc5f4\uc5ed\ud559\uc801 \uac70\ub3d9\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/p>\n<p><strong>CTE\uc758 \uacf5\ud559\uc801 \uc758\ubbf8\ub294 \uc628\ub3c4 \ucc28\uc774\uc5d0 \ub530\ub77c \uc9c1\uc811\uc801\uc73c\ub85c \ud655\uc7a5\ub429\ub2c8\ub2e4.<\/strong> \uac00\ub85c 200mm \ud06c\uae30\uc758 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 200\u00b0C\uc758 \uc628\ub3c4 \uc0c1\uc2b9\uc744 \ubc1b\uc73c\uba74 \uc57d 22\u03bcm \ud33d\ucc3d\ud569\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub85c \ub41c \ub3d9\uc77c\ud55c \ud310\uc740 \ub3d9\uc77c\ud55c \uc870\uac74\uc5d0\uc11c \uc57d 360\u03bcm \ud33d\ucc3d\ud558\uc5ec \uc120\ud615 \ubcc0\uc704\uc5d0\uc11c 16\ubc30\uc758 \ucc28\uc774\ub97c \ubcf4\uc785\ub2c8\ub2e4. \ub2e8\ub2e8\ud55c \uae08\uc18d \ud504\ub808\uc784\uc5d0 \uc7a5\ucc29\ub418\uac70\ub098 \uc11c\ub85c \ub2e4\ub978 \uc7ac\ub8cc\uc5d0 \uc811\ucc29\ub41c \uae30\ud310\uc758 \uacbd\uc6b0, \uc774\ub7ec\ud55c \ucc28\uc774 \ud33d\ucc3d\uc740 \uacc4\uba74 \uc751\ub825\uc744 \ubc1c\uc0dd\uc2dc\ud0a4\uba70 \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\uc758 \uacbd\uc6b0 \uc774\ub7ec\ud55c \uc751\ub825\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc7ac\ub8cc\uc758 \uc751\ub825\uc744 \ucd08\uacfc\ud569\ub2c8\ub2e4. <a href=\"https:\/\/www.sciencedirect.com\/topics\/engineering\/modulus-of-rupture\">\ud30c\uc5f4 \uacc4\uc218<\/a><sup id=\"fnref1:1\"><a href=\"#fn:1\" class=\"footnote-ref\">1<\/a><\/sup>.<\/p>\n<h4>CTE \ubc0f \ud30c\uc0dd \uc5f4 \ud2b9\uc131<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>CTE(\u00d710-\u2076 \/K, 0-300\u00b0C)<\/th>\n<th>\uc5f4 \uc804\ub3c4\uc131(W\/m-K)<\/th>\n<th>\ube44\uc5f4(J\/g-K)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc11d\uc601 \uc720\ub9ac\ud310<\/td>\n<td>0.55<\/td>\n<td>1.38<\/td>\n<td>0.74<\/td>\n<\/tr>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/td>\n<td>0.55<\/td>\n<td>1.38<\/td>\n<td>0.74<\/td>\n<\/tr>\n<tr>\n<td>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/td>\n<td>3.3<\/td>\n<td>1.14<\/td>\n<td>0.83<\/td>\n<\/tr>\n<tr>\n<td>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/td>\n<td>8.5-9.0<\/td>\n<td>1.05<\/td>\n<td>0.84<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uc11d\uc601 \uc720\ub9ac\ud310\uc758 \ub0ae\uc740 CTE\ub85c \uc778\ud55c \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc131<\/h3>\n<p>\uc5f4\ucda9\uaca9 \uc800\ud56d\uc740 \ud30c\uc0dd\ub41c \ud2b9\uc131\uc774\uc9c0\ub9cc \uc7ac\ub8cc\uac00 \uce58\uba85\uc801\uc778 \ud30c\uc190 \uc5c6\uc774 \uae09\uaca9\ud55c \uc628\ub3c4 \ubcc0\ud654\uc5d0\uc11c \uc0b4\uc544\ub0a8\uc744 \uc218 \uc788\ub294\uc9c0\ub97c \uc9c1\uc811\uc801\uc73c\ub85c \uacb0\uc815\ud558\ub294 \ud2b9\uc131\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc5f4\ucda9\uaca9\uc5d0 \ub300\ud55c \uc800\ud56d\uc740 \uc778\uc7a5 \uac15\ub3c4\uc640 CTE, \ud0c4\uc131 \uacc4\uc218, \uc5f4\uc804\ub3c4\uc728\uc758 \uacf1\uc758 \ube44\uc728\uc5d0 \uc758\ud574 \uacb0\uc815\ub418\uba70, \uc774\ub294 \uc5f4\ucda9\uaca9 \uc800\ud56d \ud30c\ub77c\ubbf8\ud130 R\uc5d0 \uc778\ucf54\ub529\ub41c \uad00\uacc4\uc785\ub2c8\ub2e4. <strong>CTE\uac00 \ub9e4\uc6b0 \ub0ae\uc740 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 1,000\u00b0C\ub97c \ucd08\uacfc\ud558\ub294 \uc21c\uac04 \uc628\ub3c4 \ucc28\uc774\ub97c \uacac\ub51c \uc218 \uc788\ub294 \ucda9\ubd84\ud55c R \uac12\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/strong> \ud45c\uc900 \ub450\uaed8 \uc870\uac74\uc5d0\uc11c \ud30c\uc190\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ubb38\uc11c\ud654\ub41c \uc2e4\ud5d8\uc2e4 \ubc0f \uc0b0\uc5c5 \ub370\uc774\ud130\uc5d0 \ub530\ub974\uba74 2mm \ub450\uaed8\uc758 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 1,000\u00b0C\uc5d0\uc11c \uc0c1\uc628\uc758 \ubb3c\ub85c \ubc18\ubcf5 \ub2f4\uae08\uc9c8(\uc57d 80\u00b0C \uc774\uc0c1\uc758 \ucc28\uc555\uc5d0\uc11c \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\uac00 \uae68\uc9c0\uace0 \uc57d 160\u00b0C \uc774\uc0c1\uc758 \ubd95\uaddc\uc0b0 \uc720\ub9ac\uac00 \uae68\uc9c0\ub294 \ud14c\uc2a4\ud2b8)\uc744 \uacac\ub51c \uc218 \uc788\ub294 \uac83\uc73c\ub85c \ud655\uc778\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc774\ub294 \uc774\ub860\uc801\uc778 \uc608\uce21\uc774 \uc544\ub2c8\ub77c \uc7ac\ub8cc \uae30\ub85d\uc774 \uba85\ud655\ud558\uc9c0 \uc54a\uc740 \uace0\uc628 \uc6a9\uad11\ub85c \ubdf0\ud3ec\ud2b8 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc218\uc2ed \ub144\uac04\uc758 \uc6b4\uc601 \uacbd\ud5d8\uc744 \ubc18\uc601\ud55c \uac83\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310\uc740 \uc911\uac04 \uc815\ub3c4\uc758 \uc5f4 \ucda9\uaca9 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc6b0\uc218\ud55c \uc131\ub2a5\uc744 \ubc1c\ud718\ud569\ub2c8\ub2e4.<\/strong>\ubd84\uc820 \ubc84\ub108 \uac00\uc5f4\uc5d0 \ub178\ucd9c\ub418\ub294 \uc2e4\ud5d8\uc2e4 \uc720\ub9ac \uc81c\ud488\uc5d0\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc120\ud0dd\ub418\uc9c0\ub9cc \uc0b0\uc5c5 \uacf5\uc815 \ucc3d, \ud50c\ub77c\uc988\ub9c8 \uc6d0\uc790\ub85c \ub610\ub294 \uae09\uc18d \uc5f4 \uc5b4\ub2d0\ub9c1 \ucc54\ubc84\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uc628\ub3c4 \ucc28\uc774\ubcf4\ub2e4 \ud6e8\uc52c \ub0ae\uc740 \uc628\ub3c4\uc5d0\uc11c \ud30c\uc190 \uc784\uacc4\uac12\uc5d0 \ub3c4\ub2ec\ud569\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ud310\uc740 \uc800\ub834\ud55c \ube44\uc6a9\uacfc \uad11\ubc94\uc704\ud55c \uac00\uc6a9\uc131\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0 \uace0\uc758\uc801\uc774\uac70\ub098 \uc6b0\ubc1c\uc801\uc778 \uc5f4 \ucda9\uaca9\uc774 \uc218\ubc18\ub418\ub294 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c\ub294 \uc808\ub300\uc801\uc73c\ub85c \ubc30\uc81c\ub418\uba70, \ub192\uc740 CTE\ub294 \uc11d\uc601 \uc720\ub9ac\ud310\uc774 \uc77c\uc0c1\uc801\uc73c\ub85c \ucc98\ub9ac\ud558\ub294 \uc870\uac74\uc5d0\uc11c \ud30c\uc190\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<p>\ud504\ub85c\uc138\uc2a4 \uc5d4\uc9c0\ub2c8\uc5b4\uc5d0\uac8c \uc8fc\ub294 \uc758\ubbf8\ub294 \uac04\ub2e8\ud569\ub2c8\ub2e4: <strong>\ube60\ub978 \uac00\uc5f4 \ub610\ub294 \ub0c9\uac01 \uc0ac\uc774\ud074(\uc6a9\uad11\ub85c \uc2dc\uc791 \ubc0f \uc885\ub8cc, \ub808\uc774\uc800 \ud384\uc2a4 \ub178\ucd9c \ub610\ub294 \uc9c1\uc811\uc801\uc778 \ud654\uc5fc \ucda9\ub3cc)\uc5d0 \ub178\ucd9c\ub418\ub294 \ubaa8\ub4e0 \ubdf0\ud3ec\ud2b8, \ucc3d \ub610\ub294 \uae30\ud310\uc5d0\ub294 \ucd5c\uc18c \uc0ac\uc591 \uc7ac\ub8cc\ub85c \uc11d\uc601 \uc720\ub9ac\ud310\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/strong> \ubb34\uac8c \ub610\ub294 \ube44\uc6a9 \uc81c\uc57d\uc73c\ub85c \uc778\ud574 \uc54c\ub824\uc9c4 \uc704\ud5d8\uc744 \uac10\uc218\ud558\uace0 \uace0\uc758\uc801\uc73c\ub85c \uc131\ub2a5\uc744 \uc800\ud558\uc2dc\ud0ac \uc218\ubc16\uc5d0 \uc5c6\ub294 \uacbd\uc6b0\uac00 \uc544\ub2c8\ub77c\uba74 \ub9d0\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uc815\ubc00 \uad11\ud559 \uc5b4\uc148\ube14\ub9ac\uc758 \uce58\uc218 \uc548\uc815\uc131<\/h3>\n<p>\uc815\ubc00 \uad11\ud559 \uae30\uae30\uc5d0\uc11c \uc5f4 \ubcc0\ud654\uc5d0 \ub530\ub978 \uce58\uc218 \uc548\uc815\uc131\uc740 \uc548\uc804 \ubb38\uc81c\uac00 \uc544\ub2c8\ub77c \uce21\uc815 \uc815\ud655\ub3c4\uc640 \uc2dc\uc2a4\ud15c \ubc18\ubcf5\uc131\uc744 \uc9c1\uc811\uc801\uc73c\ub85c \uacb0\uc815\ud558\ub294 \uc131\ub2a5 \ub9e4\uac1c\ubcc0\uc218\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\uc18c\ub2e4 \uc11d\ud68c \uc720\ub9ac\ub85c \uc81c\uc791\ub41c \uac04\uc12d\uacc4 \ud3c9\ud310<\/strong> \ud65c\uc131 \uc5f4 \uc81c\uc5b4\uac00 \uc5c6\ub294 \uc2e4\ud5d8\uc2e4 \ud658\uacbd\uc5d0\uc11c \ud754\ud788 \ubc1c\uc0dd\ud558\ub294 10\u00b0C\uc758 \uc8fc\ubcc0 \uc628\ub3c4 \ubcc0\ub3d9\uc744 \uacbd\ud5d8\ud558\uba74 \ud310 \ub108\ube44 \ubc00\ub9ac\ubbf8\ud130\ub2f9 \uc57d 85-90nm\uc758 \uc120\ud615 \uce58\uc218 \ubcc0\ud654\ub97c \uacaa\uac8c \ub429\ub2c8\ub2e4. \uc9c1\uacbd 100mm \uae30\uc900 \ud3c9\ud310\uc758 \uacbd\uc6b0, \uc774\ub294 633nm\uc5d0\uc11c \uba87 \ud30c\uc7a5 \uc815\ub3c4\uc758 \ud45c\uba74 \ud615\uc0c1 \uc624\ucc28\ub97c \uc758\ubbf8\ud558\uba70, \uc815\ubc00 \ud30c\uba74 \uae30\uc900 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc0ac\uc6a9\ud560 \uc218 \uc5c6\uac8c \ub429\ub2c8\ub2e4. \ub3d9\uc77c\ud55c \uce58\uc218\uc758 \uc11d\uc601 \uc720\ub9ac\ud310\uc5d0 \ub3d9\uc77c\ud55c \uc628\ub3c4 \ud3b8\ucc28\ub97c \uc801\uc6a9\ud558\uba74 \ubc00\ub9ac\ubbf8\ud130\ub2f9 \uc57d 5.5nm\uc758 \uce58\uc218 \ubcc0\ud654\uac00 \ubc1c\uc0dd\ud558\uba70, \uc774\ub294 15\ubc30 \uc774\uc0c1 \uc791\uc740 \uc218\uce58\uc785\ub2c8\ub2e4. \ud30c\uba74 \uc624\ucc28 \uc608\uc0b0\uc774 \ub098\ub178\ubbf8\ud130 \ub2e8\uc704\ub85c \ud560\ub2f9\ub418\ub294 \uc2dc\uc2a4\ud15c\uc5d0\uc11c\ub294 \uc774 \ucc28\uc774\uac00 \uacb0\uc815\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc740 CTE\uc5d0\uc11c \ud6a8\uacfc\uc801\uc73c\ub85c \uad6c\ubd84\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/strong>\ub458 \ub2e4 \uc815\ubc00 \uad11\ud559 \ub9c8\uc6b4\ud2b8\uc5d0 \uae30\uc220\uc801\uc73c\ub85c \uc801\ud569\ud558\ub2e4\ub294 \uc758\ubbf8\uc785\ub2c8\ub2e4. \uce58\uc218 \uc548\uc815\uc131\uc774 \uc911\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc774\ub4e4 \uc911 \ud558\ub098\ub97c \uc120\ud0dd\ud558\uba74 \ub0b4\ubd80 \uade0\uc9c8\uc131, \uc751\ub825 \ubcf5\uad74\uc808 \ubc0f \ud45c\uba74 \ud488\uc9c8\uacfc \uac19\uc740 \ub2e4\ub978 \ub9e4\uac1c \ubcc0\uc218\ub85c \uc804\ud658\ub418\uba70, \uc774\ub294 \ub2e4\uc74c \uc139\uc158\uc5d0\uc11c \uc124\uba85\ud569\ub2c8\ub2e4. \ub300\ubd80\ubd84\uc758 \uc815\ubc00 \uad11\ud559 \uc5b4\uc148\ube14\ub9ac \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ubd95\uaddc\uc0b0 \ub610\ub294 \uc18c\ub2e4\uc11d\ud68c \uae30\ud310\uc73c\ub85c\ub294 \uc811\uadfc\ud560 \uc218 \uc5c6\ub294 \uce58\uc218 \uc548\uc815\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<h4>\u0394T = 50\u00b0C\uc5d0\uc11c \ud3ed 100mm\ub2f9 \uce58\uc218 \ubcc0\ud654<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>\uc120\ud615 \uce58\uc218 \ubcc0\ud654(\u03bcm)<\/th>\n<th>\uc815\ubc00 \uad11\ud559\uc5d0 \ub300\ud55c \uc801\ud569\uc131<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc11d\uc601 \uc720\ub9ac\ud310<\/td>\n<td>2.75<\/td>\n<td>\ub192\uc74c<\/td>\n<\/tr>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/td>\n<td>2.75<\/td>\n<td>\ub192\uc74c<\/td>\n<\/tr>\n<tr>\n<td>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/td>\n<td>16.5<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<\/tr>\n<tr>\n<td>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/td>\n<td>42.5-45.0<\/td>\n<td>\ub0ae\uc74c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/transparent-quartz-glass-plate-near-open-industrial-high-temperature-furnace-door.webp\" alt=\"\uac1c\ubc29\ud615 \uc0b0\uc5c5\uc6a9 \uace0\uc628 \uc6a9\uad11\ub85c \ub3c4\uc5b4 \uadfc\ucc98\uc758 \ud22c\uba85 \uc11d\uc601 \uc720\ub9ac\ud310\" title=\"\uac1c\ubc29\ud615 \uc0b0\uc5c5\uc6a9 \uace0\uc628 \uc6a9\uad11\ub85c \ub3c4\uc5b4 \uadfc\ucc98\uc758 \ud22c\uba85 \uc11d\uc601 \uc720\ub9ac\ud310\" \/><\/p>\n<h2>\uae4c\ub2e4\ub85c\uc6b4 \ud658\uacbd\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \ucd5c\ub300 \uc0ac\uc6a9 \uc628\ub3c4<\/h2>\n<p>\uc628\ub3c4 \uc131\ub2a5\uc740 \uc7ac\ub8cc\uc758 \ubc30\uce58 \ubc94\uc704\uc758 \uc808\ub300\uc801\uc778 \uacbd\uacc4\ub97c \uc815\uc758\ud558\uba70, \uc774 \ub9e4\uac1c\ubcc0\uc218\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \ub450 \uac00\uc9c0 \uc77c\ubc18\uc801\uc778 \uacbd\uc7c1 \uc81c\ud488\uc778 \ubd95\uaddc\uc0b0\uacfc \uc18c\ub2e4\uc11d\ud68c \uc0ac\uc774\uc758 \uaca9\ucc28\ub294 \ub9e4\uc6b0 \ucee4\uc11c \uc5f4 \uc751\uc6a9 \ubd84\uc57c\uc758 \uc11c\ub85c \ub2e4\ub978 \uc7ac\ub8cc \ubc94\uc8fc\uc5d0 \ud6a8\uacfc\uc801\uc73c\ub85c \ubc30\uce58\ub429\ub2c8\ub2e4.<\/p>\n<h3>\uac01 \uba38\ud2f0\ub9ac\uc5bc\uc758 \uc5f0\uc18d \uc0ac\uc6a9 \ubc0f \uc5f0\ud654\uc810 \ub370\uc774\ud130<\/h3>\n<p>\uc720\ub9ac \uae30\ud310\uc758 \uc5f4 \uc131\ub2a5\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uacfc \uac19\uc740 \uc138 \uac00\uc9c0 \uae30\uc900 \uc628\ub3c4\ub85c \ud2b9\uc9d5\uc9c0\uc5b4\uc9d1\ub2c8\ub2e4. <strong>\uc2a4\ud2b8\ub808\uc778 \ud3ec\uc778\ud2b8<\/strong> (\uc2a4\ud2b8\ub808\uc2a4 \uc774\uc644\uc774 \ubb34\uc2dc\ud560 \uc218 \uc788\ub294 \uc218\uc900), \uadf8 \uc774\ud558\uc5d0\uc11c\ub294 <strong>\uc5b4\ub2d0\ub9c1 \ud3ec\uc778\ud2b8<\/strong> (\ub0b4\ubd80 \uc2a4\ud2b8\ub808\uc2a4\uac00 \uba87 \ubd84 \uc548\uc5d0 \uc774\uc644\ub418\ub294 \uc2dc\uc810), \uadf8\ub9ac\uace0 <strong>\uc5f0\ud654\uc810<\/strong> (\uc7ac\ub8cc\uac00 \uc790\uccb4 \ubb34\uac8c\uc5d0 \uc758\ud574 \ubcc0\ud615\ub418\uae30 \uc2dc\uc791\ud558\ub294 \uc2dc\uc810).<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc57d 1,665\u00b0C\uc758 \uc5f0\ud654\uc810\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/strong>1,140\u00b0C\uc5d0 \uac00\uae4c\uc6b4 \uc5b4\ub2d0\ub9c1 \ud3ec\uc778\ud2b8\uc640 1,070\u00b0C\uc5d0 \uac00\uae4c\uc6b4 \uc2a4\ud2b8\ub808\uc778 \ud3ec\uc778\ud2b8\uac00 \uc788\uc2b5\ub2c8\ub2e4. \uc5f0\uc18d \uc11c\ube44\uc2a4\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc77c\uc0c1\uc801\uc73c\ub85c \ub2e4\uc74c\uacfc \uac19\uc740 \uc628\ub3c4\uc5d0\uc11c \uc791\ub3d9\ud569\ub2c8\ub2e4. <strong>1,050-1,100 \u00b0C<\/strong> \uce21\uc815 \uac00\ub2a5\ud55c \ubcc0\ud615 \uc5c6\uc774 \uae30\uacc4\uc801 \ubd80\ud558\uac00 \ucd5c\uc18c\ud654\ub418\ub294 \uacbd\uc6b0. \uc774 \uae30\ub2a5\uc740 \uace0\uc21c\ub3c4 SiO\u2082 \ub124\ud2b8\uc6cc\ud06c\uc5d0\uc11c \uc9c1\uc811 \ud30c\uc0dd\ub429\ub2c8\ub2e4. Na\u2082O \ub610\ub294 CaO\uc640 \uac19\uc740 \uc800\uc735\uc810 \ub124\ud2b8\uc6cc\ud06c \uac1c\uc9c8\uc81c\uac00 \uc5c6\uc73c\uba74 \uc720\ub9ac \uc810\ub3c4\ub294 \ub300\ubd80\ubd84\uc758 \uc0b0\uc5c5 \uacf5\uc815\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uc628\ub3c4\ub97c \ud6e8\uc52c \ucd08\uacfc\ud558\ub294 \uc628\ub3c4\uae4c\uc9c0 \ucc9c\ubb38\ud559\uc801\uc73c\ub85c \ub192\uc740 \uc0c1\ud0dc\ub97c \uc720\uc9c0\ud569\ub2c8\ub2e4. \ubd95\uaddc\uc0b0 \uc720\ub9ac\uc758 \uc5f0\ud654\uc810\uc740 820\u00b0C\uc5d0 \uac00\uae5d\uace0 \uc2e4\uc81c \uc5f0\uc18d \uc11c\ube44\uc2a4 \ud55c\uacc4\ub294 \uc57d 1,000\u00b0C\uc785\ub2c8\ub2e4. <strong>450-500 \u00b0C<\/strong>\ub294 \uc11d\uc601 \uc720\ub9ac\ud310\uc774 \uacac\ub51c \uc218 \uc788\ub294 \uc628\ub3c4\uc5d0\uc11c \uc810\uc131 \ubcc0\ud615\uc774 \ub098\ud0c0\ub098\uae30 \uc2dc\uc791\ud569\ub2c8\ub2e4. \uc18c\ub2e4 \uc11d\ud68c \uc720\ub9ac\ub294 \uc5f0\ud654\uc810\uc774 \uc57d 730\u00b0C\uc774\uace0 \uc5f0\uc18d \uc0ac\uc6a9 \ud55c\ub3c4\uac00 \uc57d <strong>250-300 \u00b0C<\/strong>\ub294 \ubaa8\ub4e0 \uace0\uc628 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ud658\uacbd\uc5d0\uc11c \uc5f4\uc801\uc73c\ub85c \uc81c\uc678\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8\ub294 \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uac70\uc758 \ub3d9\uc77c\ud55c \uc5f4 \uae30\uc900 \uc628\ub3c4(\uc5f0\ud654\uc810 ~1,665\u00b0C)\ub97c \uac00\uc9c0\uace0 \uc788\uc5b4 \ub450 \uc7ac\ub8cc\uac00 \ub3d9\uc77c\ud55c SiO\u2082 \ub124\ud2b8\uc6cc\ud06c \uae30\uc6d0\uc744 \uacf5\uc720\ud558\uba70 \uace0\uc628 \uc131\ub2a5\uc774 \ubcf8\uc9c8\uc801\uc73c\ub85c \ub3d9\ub4f1\ud558\ub2e4\ub294 \uac83\uc744 \ud655\uc778\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n<h4>\ub124 \uac00\uc9c0 \uae30\ud310 \ubaa8\ub450\uc5d0 \ub300\ud55c \uc5f4 \uae30\uc900 \uc628\ub3c4<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>\uc2a4\ud2b8\ub808\uc778 \ud3ec\uc778\ud2b8(\u00b0C)<\/th>\n<th>\uc5b4\ub2d0\ub9c1 \ud3ec\uc778\ud2b8(\u00b0C)<\/th>\n<th>\uc5f0\ud654\uc810(\u00b0C)<\/th>\n<th>\ucd5c\ub300 \uc5f0\uc18d \uc11c\ube44\uc2a4(\u00b0C)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc11d\uc601 \uc720\ub9ac\ud310<\/td>\n<td>~1,070<\/td>\n<td>~1,140<\/td>\n<td>~1,665<\/td>\n<td>~1,050<\/td>\n<\/tr>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/td>\n<td>~1,075<\/td>\n<td>~1,140<\/td>\n<td>~1,665<\/td>\n<td>~1,050<\/td>\n<\/tr>\n<tr>\n<td>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/td>\n<td>~515<\/td>\n<td>~565<\/td>\n<td>~820<\/td>\n<td>~450<\/td>\n<\/tr>\n<tr>\n<td>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/td>\n<td>~470<\/td>\n<td>~514<\/td>\n<td>~730<\/td>\n<td>~250<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uace0\uc628 \uacf5\uc815 \ucc3d\ubb38\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uc131\ub2a5<\/h3>\n<p>\ucd94\uc0c1\uc801\uc778 \uc628\ub3c4 \uc81c\ud55c\uc740 \uae30\ud310 \uc120\ud0dd\uc774 \uc911\uc694\ud55c \uc0b0\uc5c5 \ubc0f \uacfc\ud559 \uacf5\uc815\uc758 \uc2e4\uc81c \uc5f4 \ud504\ub85c\ud30c\uc77c\uacfc \ub9e4\ud551\ud560 \ub54c\ub9cc \uc758\ubbf8\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ubc18\ub3c4\uccb4 \ud655\uc0b0\ub85c<\/strong> \ub3c4\ud380\ud2b8 \ub4dc\ub77c\uc774\ube0c\uc778 \ubc0f \uc0b0\ud654 \uacf5\uc815\uc744 \uc704\ud574 900~1,100\u00b0C\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uc6a9\uad11\ub85c\uc5d0\ub294 \uc218 \uc2dc\uac04 \ub3d9\uc548 \uc9c0\uc18d\ub418\ub294 \uacf5\uc815 \uc8fc\uae30 \ub3d9\uc548 \uce58\uc218 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\ub294 \ubdf0\ud3ec\ud2b8 \ubc0f \ud29c\ube0c \uc7ac\ub8cc\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc6a9\uad11\ub85c\uc5d0 \uad00\ucc30 \ucc3d\uc73c\ub85c \uc124\uce58\ub41c \uc11d\uc601 \uc720\ub9ac\ud310 \uae30\ud310\uc740 \ud30c\uc190\uc774\ub098 \uad11\ud559 \uc131\ub2a5 \uc800\ud558 \uc5c6\uc774 \uc218\ucc9c \ubc88\uc758 \uc5f4 \uc0ac\uc774\ud074\uc744 \ucd95\uc801\ud558\uba70 40\ub144 \uc774\uc0c1 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ubd84\uc57c\uc5d0\uc11c \uc313\uc544\uc628 \uc11c\ube44\uc2a4 \uae30\ub85d\uc744 \ubcf4\uc720\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ucd08\uae30 \uacf5\uc815 \uac1c\ubc1c \ub2e8\uacc4\uc5d0\uc11c \ub3d9\uc77c\ud55c \uc704\uce58\uc5d0 \uc124\uce58\ub41c \ubd95\uaddc\uc0b0 \ubdf0\ud3ec\ud2b8\ub294 500\u00b0C\uc5d0\uc11c \uc218\uc2ed \uc2dc\uac04 \ub0b4\uc5d0 \uc810\uc131 \ucc98\uc9d0\uc774 \ubc1c\uc0dd\ud558\uc5ec \uacf5\uc815 \ucc54\ubc84\ub97c \uc624\uc5fc\uc2dc\ud0a4\uace0 \uc608\uae30\uce58 \uc54a\uc740 \uc720\uc9c0\ubcf4\uc218 \uc911\ub2e8 \uc2dc\uac04\uc744 \ud544\uc694\ub85c \ud558\ub294 \uace0\uc7a5 \ubaa8\ub4dc\uac00 \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4. <strong>\uc2e4\ud328\ub294 \ubbf8\ubbf8\ud55c \uac83\uc774 \uc544\ub2c8\ub77c \uc808\ub300\uc801\uc778 \uac83\uc785\ub2c8\ub2e4.<\/strong><\/p>\n<p>\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29 \ubc0f \uc804\uc790\ube54 \uc99d\ubc1c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uace0\uc628 \uc9c4\uacf5 \ucc54\ubc84\ub294 \uae30\ud310 \uc628\ub3c4\uac00 600~800\u00b0C\uc5d0 \uc774\ub974\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc73c\uba70, \ubcf5\uc0ac\uc5f4 \ubd80\ud558\ub85c \uc778\ud574 \uc678\ubd80 \ud504\ub808\uc784\uc758 \uc218\ub0c9\uc2dd \ub0c9\uac01\uc73c\ub85c\ub3c4 \ubdf0\ud3ec\ud2b8 \uc628\ub3c4\uac00 400~600\u00b0C\uae4c\uc9c0 \uc0c1\uc2b9\ud569\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc774\ub7ec\ud55c \uc870\uac74\uc5d0\uc11c\ub3c4 \uad11\ud559\uc801 \uc120\uba85\ub3c4\uc640 \uae30\uacc4\uc801 \ubb34\uacb0\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. \ub610\ud55c \ud654\uc5fc \uc628\ub3c4\uac00 1,400\u00b0C\ub97c \ucd08\uacfc\ud558\ub294 \uc720\ub9ac \uc6a9\ud574\ub85c, \uc2dc\uba58\ud2b8 \uac00\ub9c8, \uc11d\uc720\ud654\ud559 \uac1c\uc9c8\uae30 \ub4f1\uc5d0 \uc124\uce58\ub418\ub294 \uc0b0\uc5c5\uc6a9 \uc5f0\uc18c \uad00\ucc30\ucc3d\uc740 \uc774\ub7ec\ud55c \ubcf5\uc0ac\uc5f4 \ud658\uacbd\uc5d0 \uc9c1\uc811 \ub178\ucd9c\ub418\uc5b4\ub3c4 \uacac\ub51c \uc218 \uc788\ub294 \ub300\uccb4 \ud3c9\uba74 \uc720\ub9ac \uae30\ud310\uc774 \uc5c6\uae30 \ub54c\ubb38\uc5d0 \uad00\ucc30 \ud3ec\ud2b8 \uc7ac\ub8cc\ub85c \uc11d\uc601 \uc720\ub9ac\ud310\ub9cc\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n<h4>\uc801\uc6a9 \uc628\ub3c4 \uc694\uad6c \uc0ac\ud56d\uacfc \uc7ac\ub8cc \uc131\ub2a5 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<th>\uacf5\uc815 \uc628\ub3c4(\u00b0C)<\/th>\n<th>\ud544\uc218 \ubdf0\ud3ec\ud2b8 \uc628\ub3c4 \ud5c8\uc6a9 \uc624\ucc28(\u00b0C)<\/th>\n<th>\uc11d\uc601 \uc720\ub9ac\ud310 \uc801\ud569<\/th>\n<th>\ubd95\uaddc\uc0b0\uc5fc \uc801\ud569<\/th>\n<th>\uc18c\ub2e4-\ub77c\uc784 \uc801\ud569<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ubc18\ub3c4\uccb4 \ud655\uc0b0\ub85c<\/td>\n<td>900-1,100<\/td>\n<td>\u2265800<\/td>\n<td>\uc608<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>RTP \ucc54\ubc84 \ucc3d<\/td>\n<td>800-1,200<\/td>\n<td>\u2265700<\/td>\n<td>\uc608<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>\uc0b0\uc5c5 \uc5f0\uc18c \ubdf0\ud3ec\ud2b8<\/td>\n<td>1,200-1,600<\/td>\n<td>\u2265600<\/td>\n<td>\uc608<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>\uc9c4\uacf5 PVD \ucc54\ubc84<\/td>\n<td>300-600<\/td>\n<td>\u2265400<\/td>\n<td>\uc608<\/td>\n<td>\ud55c\uacc4<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>UV \ub7a8\ud504 \ud558\uc6b0\uc9d5<\/td>\n<td>200-400<\/td>\n<td>\u2265300<\/td>\n<td>\uc608<\/td>\n<td>\uc608<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uad74\uc808\ub960 \ubc0f \ubd84\uc0b0 \ud2b9\uc131<\/h2>\n<p>\uad11\ud559 \uc124\uacc4\ub294 \uad74\uc808\ub960\uc744 \uae30\ubc18\uc73c\ub85c \ud558\uba70, \uad74\uc808\ub960 \uac12\uc758 \uc791\uc740 \ucc28\uc774\ub098 \ud30c\uc7a5\ubcc4 \ubd84\uc0b0\ub3c4 \uace0\uc815\ubc00 \uc2dc\uc2a4\ud15c\uc5d0\uc11c\ub294 \uc0c1\ub2f9\ud55c \uc218\ucc28\ub85c \ub204\uc801\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub124 \uac00\uc9c0 \uae30\ud310 \ubaa8\ub450\uc5d0\uc11c \uc774\ub7ec\ud55c \uac12\uc744 \ub9e4\ud551\ud558\uba74 \uad11\ud559 \uc124\uacc4 \ud658\uacbd\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc774 \uc5b4\ub514\uc5d0 \uc704\uce58\ud558\ub294\uc9c0 \uc54c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\ub124 \uac00\uc9c0 \uc7ac\ub8cc \ubaa8\ub450\uc5d0 \ub300\ud55c \ud30c\uc7a5\ubcc4 \uad74\uc808\ub960 \uac12<\/h3>\n<p>\uad74\uc808\ub960 \uac12\uc740 \ud30c\uc7a5\uc5d0 \ub530\ub77c \ub2e4\ub974\ubbc0\ub85c \uc758\ubbf8 \uc788\ub294 \ube44\uad50\ub97c \uc704\ud574\uc11c\ub294 \ud45c\uc900\ud654\ub41c \uae30\uc900 \ud30c\uc7a5\uc5d0\uc11c\uc758 \ub370\uc774\ud130\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 589nm\uc5d0\uc11c \uc57d 1.4584\uc758 \uad74\uc808\ub960\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/strong> (\ub098\ud2b8\ub968 D \ub77c\uc778), 632.8nm\uc5d0\uc11c 1.4570(HeNe \ub808\uc774\uc800), 1,064nm\uc5d0\uc11c 1.4496(Nd:YAG \uae30\ubcf8)\uc744 \uae30\ub85d\ud588\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uac12\uc740 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310(589nm\uc5d0\uc11c 1.4584)\uacfc \uac70\uc758 \ub3d9\uc77c\ud558\uc5ec \uad6c\uc870\uc801 \ub3d9\ub4f1\uc131\uc774 \ud655\uc778\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac\ud310\uc740 \uc57d 1.4584\uc758 \ub192\uc740 \uc9c0\uc218\ub97c \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. <strong>589nm\uc5d0\uc11c 1.472<\/strong>\uc640 \uc18c\ub2e4 \uc11d\ud68c \uc720\ub9ac\ud310\uc758 \ubc94\uc704\ub294 <strong>589nm\uc5d0\uc11c 1.512 ~ 1.520<\/strong> \uc815\ud655\ud55c \uad6c\uc131\uc5d0 \ub530\ub77c \ub2e4\ub985\ub2c8\ub2e4. \uc0c9\ubd84\uc0b0\uc758 \ucc99\ub3c4\uc778 \uc544\ubca0 \uc218(\uac12\uc774 \ud074\uc218\ub85d \ubd84\uc0b0\ub3c4\uac00 \ub0ae\uc74c\uc744 \uc758\ubbf8)\ub294 \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uacbd\uc6b0 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>67.8<\/strong>\uc5d0 \ube44\ud574 \ubd95\uaddc\uc0b0\uc740 ~64, \uc18c\ub2e4 \uc11d\ud68c\ub294 ~58-64\uc785\ub2c8\ub2e4. \uc544\ubca0 \uc218\uce58\uac00 \ub192\uc744\uc218\ub85d \uc11d\uc601 \uc720\ub9ac\ud310\uc774 \ub354 \uc801\uc740 <a href=\"https:\/\/en.wikipedia.org\/wiki\/Chromatic_aberration\">\uc0c9\uc218\ucc28<\/a><sup id=\"fnref1:2\"><a href=\"#fn:2\" class=\"footnote-ref\">2<\/a><\/sup> \uacbd\uc7c1 \uc720\ub9ac \uc720\ud615\ubcf4\ub2e4 \ub2e8\uc704 \uad11\ucd9c\ub825\ub2f9 \uad11\ucd9c\ub825\uc774 \ub192\uc544 \uad11\ub300\uc5ed \uc774\ubbf8\uc9d5 \uc2dc\uc2a4\ud15c\uacfc \ub2e4\uc911 \ud30c\uc7a5 \ub808\uc774\uc800 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc720\ub9ac\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc0c9\uc218\ucc28\ub97c \ucd5c\uc18c\ud654\ud558\ub294 \uc2dc\uc2a4\ud15c\uc744 \uc124\uacc4\ud558\ub294 \uad11\ud559 \uc5d4\uc9c0\ub2c8\uc5b4\uc6a9<\/strong>\ub0ae\uc740 \uad74\uc808\ub960\uacfc \ub192\uc740 \uc544\ubca0 \uc218\uc758 \uc870\ud569\uc73c\ub85c \uc778\ud574 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uae30\ud310\uc5d0 \uc794\ub958\ud558\ub294 \uc6e8\uc9c0\uac00 \uc18c\ub2e4\uc11d\ud68c \ub610\ub294 \ubd95\uaddc\uc0b0 \uc720\ub9ac\uc758 \ub3d9\ub4f1\ud55c \uc6e8\uc9c0\ubcf4\ub2e4 \uc0c9 \ubcc0\uc704\uac00 \uc791\uae30 \ub54c\ubb38\uc5d0 \uc120\ud638\ub418\ub294 \ud3c9\uba74 \ud3c9\ud589 \ucc3d \uc7ac\ub8cc\uac00 \ub429\ub2c8\ub2e4.<\/p>\n<h4>\uad74\uc808\ub960 \ubc0f \ubd84\uc0b0 \ub370\uc774\ud130<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>n @ 589nm<\/th>\n<th>n @ 632.8nm<\/th>\n<th>n @ 1,064nm<\/th>\n<th>\uc544\ubca0\uc218(Vd)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc11d\uc601 \uc720\ub9ac\ud310<\/td>\n<td>1.4584<\/td>\n<td>1.4570<\/td>\n<td>1.4496<\/td>\n<td>~67.8<\/td>\n<\/tr>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/td>\n<td>1.4584<\/td>\n<td>1.4570<\/td>\n<td>1.4496<\/td>\n<td>~67.8<\/td>\n<\/tr>\n<tr>\n<td>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/td>\n<td>1.472<\/td>\n<td>1.470<\/td>\n<td>1.462<\/td>\n<td>~64.2<\/td>\n<\/tr>\n<tr>\n<td>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/td>\n<td>1.512-1.520<\/td>\n<td>1.510-1.518<\/td>\n<td>1.500-1.508<\/td>\n<td>~58-64<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uc11d\uc601 \uc720\ub9ac\ud310\uacfc \ube44\uc815\uc9c8 \uae30\ud310\uc758 \ubcf5\uad74\uc808\ub960 \ube44\uad50<\/h3>\n<p>\ubcf5\uad74\uc808\uc740 \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \uc2e4\ub9ac\uce74 \uae30\ubc18 \uae30\ud310\uc744 \uc9c0\uc815\ud560 \ub54c \uac00\uc7a5 \uc790\uc8fc \uc624\ud574\ud558\ub294 \uad11\ud559\uc801 \ud2b9\uc131 \uc911 \ud558\ub098\uc774\uba70, \ud63c\ub3d9\uc758 \uc6d0\uc778\uc740 \uccb4\uacc4\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ube44\uc815\uc9c8\uc774\ubbc0\ub85c \uad11\ud559\uc801\uc73c\ub85c \ub4f1\ubc29\uc131\uc785\ub2c8\ub2e4.<\/strong>-\ub0b4\uc7ac\uc801 \ubcf5\uad74\uc808\uc774 \uc5c6\uc2b5\ub2c8\ub2e4. \uc774\ub294 589nm\uc5d0\uc11c \ubcf5\uad74\uc808\ub960\uc774 \uc57d 0.009\uc778 \ub2e8\ucd95 \uacb0\uc815\uc73c\ub85c \uc6e8\uc774\ube0c \ud50c\ub808\uc774\ud2b8 \ubc0f \ud3b8\uad11 \uad11\ud559\uc5d0 \uc758\ub3c4\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \uacb0\uc815\uc9c8 \ucffc\uce20(\u03b1-\ucffc\uce20)\uc640 \uadfc\ubcf8\uc801\uc73c\ub85c \uad6c\ubcc4\ub418\ub294 \ud2b9\uc9d5\uc785\ub2c8\ub2e4. \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \uc2e4\uc218\ub85c \ud3b8\uad11\uc5d0 \ubbfc\uac10\ud55c \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310 \ub300\uc2e0 \uacb0\uc815\uc9c8 \uc11d\uc601\uc744 \uc9c0\uc815\ud558\uba74 \uc758\ub3c4\ud558\uc9c0 \uc54a\uc740 \uacf3\uc5d0 \ubcf5\uad74\uc808 \uc694\uc18c\uac00 \ub3c4\uc785\ub418\uc5b4 \ud0c0\uc6d0\uacc4, \ud3b8\uad11\uacc4 \ubc0f \uc77c\uad00\uc131 \ubbfc\uac10 \uac04\uc12d\uacc4\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \uacb0\uacfc\ub97c \ucd08\ub798\ud558\ub294 \ub300\uccb4 \uc624\ub958\ub97c \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\ub450 \ubb3c\uc9c8\uc740 \uc774\ub984\uc740 \uacf5\uc720\ud558\uc9c0\ub9cc \uacb0\uc815 \uad6c\uc870\ub294 \ub2e4\ub974\uba70 \uc11c\ub85c \ubc14\uafd4 \uc0ac\uc6a9\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/strong><\/p>\n<p>\uc81c\uc870 \uc911 \uc5f4 \uad6c\ubc30 \ub610\ub294 \uc0ac\uc6a9 \uc911 \uae30\uacc4\uc801 \ud074\ub7a8\ud551\uc5d0 \uc758\ud574 \uc720\ubc1c\ub418\ub294 \uc794\ub958 \uc751\ub825 \ubcf5\uad74\uc808\uc740 \ub124 \uac00\uc9c0 \ube44\uc815\uc9c8 \uae30\ud310 \ubaa8\ub450\uc5d0\uc11c \ub2e4\uc591\ud55c \uc815\ub3c4\ub85c \uc874\uc7ac\ud569\ub2c8\ub2e4. \uad11\ud559 \ub4f1\uae09\uc73c\ub85c \uc81c\uc870\ub41c \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uacfc \uac19\uc740 \uc751\ub825 \ubcf5\uad74\uc808\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. <strong>5nm\/cm<\/strong> \uc758 \uad11 \uacbd\ub85c\ub97c \uc81c\uacf5\ud558\uba70, \uc774\ub294 \ud3b8\uad11\uc5d0 \ubbfc\uac10\ud55c \ub300\ubd80\ubd84\uc758 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud5c8\uc6a9\ub418\ub294 \uc218\uc900\uc785\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8\ub294 \ucd5c\uace0\uae09 \ud569\uc131 \ub4f1\uae09\uc5d0\uc11c \ube44\uc2b7\ud558\uac70\ub098 \uc57d\uac04 \ub0ae\uc740 \uac12\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4. CTE \uac12\uc774 \ub192\uc740 \ubd95\uaddc\uc0b0 \ubc0f \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ud310\uc740 \uc5b4\ub2d0\ub9c1 \uc911\uc5d0 \ub354 \ud070 \ub0b4\ubd80 \uc751\ub825 \uad6c\ubc30\ub97c \ucd95\uc801\ud558\uba70 \uc751\ub825 \ubcf5\uad74\uc808 \uac12\uc740 \ub2e4\uc74c\uacfc \uac19\uc774 \ub3c4\ub2ec\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>10-20nm\/cm<\/strong> \ud45c\uc900 \ud50c\ub85c\ud2b8 \uc720\ub9ac \uc0dd\uc0b0\uc5d0\uc11c \uc815\ubc00 \ud3b8\uad11\uacc4\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \ud3b8\uad11 \uc0c1\ud0dc \uc624\ucc28\ub97c \uc720\ubc1c\ud558\ub294 \uc218\uc900\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\uc77c\ub9bd\uc18c\ubbf8\ud130, \ubbac\ub7ec \ub9e4\ud2b8\ub9ad\uc2a4 \ud3b8\uad11\uacc4 \ub610\ub294 \uc751\ub825 \uad74\uc808\uc5d0 \ubbfc\uac10\ud55c \ub808\uc774\uc800 \uce90\ube44\ud2f0\uc758 \uae30\ud310\uc744 \uc9c0\uc815\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\uc6a9<\/strong>\ubb38\uc11c\ud654\ub41c \ubcf5\uad74\uc808 \uc778\uc99d\uc744 \ubc1b\uc740 \uc11d\uc601 \uc720\ub9ac\ud310 \ub610\ub294 \uad11\ud559 \ub4f1\uae09 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc774 \uc801\uc808\ud55c \uc7ac\ub8cc \ub4f1\uae09\uc774\uba70, \ud45c\uc900 \ubd95\uaddc\uc0b0 \ubc0f \uc18c\ub2e4\uc11d\ud68c \ud310\uc740 \uadf8\ub807\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<h4>\ubcf5\uad74\uc808 \ubc0f \ub4f1\ubc29\uc131 \uc694\uc57d<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>\ub0b4\uc7ac\uc801 \ubcf5\uad74\uc808<\/th>\n<th>\uc794\ub958 \uc2a4\ud2b8\ub808\uc2a4 \ubcf5\uad74\uc808(nm\/cm)<\/th>\n<th>\ud3b8\uad11 \uce21\uc815\uc5d0 \uc801\ud569<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc11d\uc601 \uc720\ub9ac\ud310(\ube44\uc815\uc9c8)<\/td>\n<td>\uc5c6\uc74c<\/td>\n<td>&lt;5(\uad11\ud559 \ub4f1\uae09)<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/td>\n<td>\uc5c6\uc74c<\/td>\n<td>&lt;2(\ud504\ub9ac\ubbf8\uc5c4 \ub4f1\uae09)<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<tr>\n<td>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/td>\n<td>\uc5c6\uc74c<\/td>\n<td>10-15<\/td>\n<td>\uc81c\ud55c\uc801<\/td>\n<\/tr>\n<tr>\n<td>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/td>\n<td>\uc5c6\uc74c<\/td>\n<td>15-20<\/td>\n<td>\uc544\ub2c8\uc694<\/td>\n<\/tr>\n<tr>\n<td>\uacb0\uc815\uc9c8 \uc11d\uc601<\/td>\n<td>0.009<\/td>\n<td>-<\/td>\n<td>\uc758\ub3c4\ub41c \uc694\uc18c\ub85c\ub9cc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/quartz-glass-plate-specimens-resting-flat-on-cleanroom-laboratory-workbench.webp\" alt=\"\ud074\ub9b0\ub8f8 \uc2e4\ud5d8\uc2e4 \uc791\uc5c5\ub300\uc5d0 \ud3c9\ud3c9\ud558\uac8c \ub193\uc778 \uc11d\uc601 \uc720\ub9ac\ud310 \uc2dc\ud3b8\" title=\"\ud074\ub9b0\ub8f8 \uc2e4\ud5d8\uc2e4 \uc791\uc5c5\ub300\uc5d0 \ud3c9\ud3c9\ud558\uac8c \ub193\uc778 \uc11d\uc601 \uc720\ub9ac\ud310 \uc2dc\ud3b8\" \/><\/p>\n<h2>\uc11d\uc601 \uc720\ub9ac\ud310\uc758 \ub0b4\ud654\ud559\uc131 \ubc0f \ud45c\uba74 \uc548\uc815\uc131<\/h2>\n<p>\ud654\ud559\uc801 \ub178\ucd9c\uc740 \ubc18\ub3c4\uccb4 \uc2b5\uc2dd \ucc98\ub9ac, \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 \ubc0f \uae30\ud310\uc774 \uc77c\uc0c1\uc801\uc73c\ub85c \uac15\ud55c \uc2dc\uc57d\uacfc \uc811\ucd09\ud558\ub294 \ubd84\uc11d \ud654\ud559 \ud658\uacbd\uc5d0\uc11c \uacb0\uc815\uc801\uc778 \uc120\ud0dd \uae30\uc900\uc774 \ub429\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud654\ud559 \uacf5\uc815 \uc11c\ube44\uc2a4\ub97c \uc704\ud574 \uae30\ud310\uc744 \uc2b9\uc778\ubc1b\uae30 \uc804\uc5d0 \uc0b0, \uc5fc\uae30 \ubc0f \uc6a9\ub9e4 \ub178\ucd9c \ubc94\uc8fc\uc5d0 \ub300\ud55c \ub0b4\uc131\uc744 \ud3c9\uac00\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<h3>\uae30\ud310 \uc720\ud615\ubcc4 \ub0b4\uc0b0\uc131 \ubc0f \ub0b4\uc54c\uce7c\ub9ac\uc131 \ube44\uad50<\/h3>\n<p>\uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uace0\uc21c\ub3c4 SiO\u2082 \ub124\ud2b8\uc6cc\ud06c\ub294 \ud45c\uc900 \uacf5\uc815 \uc870\uac74\uc5d0\uc11c \ub300\ubd80\ubd84\uc758 \ubb34\uae30\uc0b0\uc5d0 \ub300\ud55c \uac15\ub825\ud55c \ub0b4\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\uc5fc\uc0b0(HCl):<\/strong> \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ucd5c\ub300 37%\uc758 \ub18d\ub3c4\uc640 \ucd5c\ub300 100\u00b0C\uc758 \uc628\ub3c4\uc5d0\uc11c \uc5fc\uc0b0(HCl)\uc5d0\uc11c \ubbf8\ubbf8\ud55c \uc6a9\ud574\uc728\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uce21\uc815\ub41c \ubb34\uac8c \uac10\uc18c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>\ud558\ub8e8 0.01 mg\/cm\u00b2<\/strong> \uc774\ub7ec\ud55c \uc870\uac74\uc5d0\uc11c. \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \uc54c\uce7c\ub9ac \ud568\ub7c9\uc774 \uc0c1\ub300\uc801\uc73c\ub85c \ub0ae\uae30 \ub54c\ubb38\uc5d0 \ube44\uc2b7\ud55c \uc131\ub2a5\uc744 \ubc1c\ud718\ud569\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub294 Na\u2082O \ud568\ub7c9\uc774 \ub192\uae30 \ub54c\ubb38\uc5d0 \ub098\ud2b8\ub968 \uc774\uc628\uc758 \uce21\uc815 \uac00\ub2a5\ud55c \uce68\ucd9c\uacfc \ub124\ud2b8\uc6cc\ud06c \uc6a9\ud574\uac00 \ub2e4\uc74c\uacfc \uac19\uc740 \ube44\uc728\ub85c \ub098\ud0c0\ub0a9\ub2c8\ub2e4. <strong>\ud558\ub8e8 0.5mg\/cm\u00b2<\/strong> \ub97c \ub18d\ucd95\ud558\uc5ec \ud45c\uba74\uc774 \ud750\ub824\uc9d1\ub2c8\ub2e4. \ud45c\uc900 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uae30\ud310 \uc218\uba85 \ub2f9 \uc218\ubc31 \ubc88 \ubc18\ubcf5\ub418\ub294 RCA-1(NH\u2084OH\/H\u2082O\u2082\/H\u2082O) \ubc0f RCA-2(HCl\/H\u2082O\u2082\/H\u2082O) \ubc18\ub3c4\uccb4 \uc138\ucc99 \uc2dc\ud000\uc2a4\uc5d0\uc11c\ub3c4 \uad11\ud559 \ub610\ub294 \uce58\uc218 \uc800\ud558\ub97c \uac10\uc9c0\ud560 \uc218 \uc5c6\ub294 \uc0c1\ud0dc\ub85c \uacac\ub51c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ubd88\ud654\uc218\uc18c\uc0b0(HF):<\/strong> \ub124 \uac00\uc9c0 \uc2e4\ub9ac\uce74 \uae30\ubc18 \uae30\ud310\uc740 \ubaa8\ub450 \ubd88\uc18c \uc774\uc628(F-)\uc774 Si-O \uacb0\ud569\uc744 \uc9c1\uc811 \ub04a\uc5b4 SiO\u2082\ub97c \ud718\ubc1c\uc131 SiF\u2084 \ubc0f \uc6a9\ud574\uc131 H\u2082SiF\u2086\ub85c \uc804\ud658\ud558\uae30 \ub54c\ubb38\uc5d0 HF\uc758 \uacf5\uaca9\uc744 \ubc1b\uc2b5\ub2c8\ub2e4. <strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 HF\uc5d0 \ub300\ud55c \ub0b4\ud654\ud559\uc131\uc774 \uc5c6\uc2b5\ub2c8\ub2e4.<\/strong>\ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8, \uc18c\ub2e4 \uc11d\ud68c \ub610\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8\ub3c4 \ub9c8\ucc2c\uac00\uc9c0\uc785\ub2c8\ub2e4. 25\u00b0C\uc5d0\uc11c 5% HF\uc758 \uc11d\uc601 \uc6a9\ud574\uc728\uc740 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>0.5-1.0 \u03bcm\/min<\/strong> \ud45c\uba74\ub2f9. \uc774\ub294 \uc11d\uc601\ub9cc\uc758 \uc57d\uc810\uc774 \uc544\ub2c8\ub77c \ubaa8\ub4e0 SiO\u2082 \uae30\ubc18 \uc18c\uc7ac\uc758 \ubcf4\ud3b8\uc801\uc778 \ud2b9\uc131\uc785\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ub0b4\uc54c\uce7c\ub9ac\uc131:<\/strong> \uac15\uc54c\uce7c\ub9ac\uc131 \uc6a9\uc561(pH &gt; 12\uc758 NaOH, KOH)\uc740 Si-O \uacb0\ud569\uc758 \ud558\uc774\ub4dc \ub85d\uc2e4 \ub9e4\uac1c \uac00\uc218\ubd84\ud574\uc5d0 \uc758\ud574 SiO\u2082 \ub124\ud2b8\uc6cc\ud06c\ub97c \uacf5\uaca9\ud569\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc740 60\u00b0C \uc774\uc0c1\uc758 \ub18d\ucd95\ub41c NaOH \uc6a9\uc561\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud558\uac8c \uc6a9\ud574\ub429\ub2c8\ub2e4. SiO\u2082 \ud568\ub7c9\uc774 \ub0ae\uace0 \ubd95\uc0b0\uc5fc \ub124\ud2b8\uc6cc\ud06c\uac00 \uc788\ub294 \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \uc2e4\uc81c\ub85c \ub2e4\uc74c\uacfc \uac19\uc740 \ud2b9\uc131\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. <em>lower<\/em> \uac15\uc5fc\uae30\uc131 \ud658\uacbd\uc5d0\uc11c \uc11d\uc601\ubcf4\ub2e4 \uc54c\uce7c\ub9ac \uc800\ud56d\uc131\uc774 \ub354 \ub192\uc2b5\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub294 \uc5ed\uc124\uc801\uc73c\ub85c \ud45c\uba74 \uce68\ucd9c\uc774 \uc2e4\ub9ac\uce74\uac00 \ud48d\ubd80\ud55c \ubcf4\ud638\uce35\uc744 \ube60\ub974\uac8c \uc0dd\uc131\ud558\uae30 \ub54c\ubb38\uc5d0 \uc54c\uce7c\ub9ac \uc800\ud56d\uc131\uc774 \uc911\uac04 \uc815\ub3c4\uc785\ub2c8\ub2e4. \uace0\uc628\uc5d0\uc11c pH 13 \uc774\uc0c1\uc758 \uc54c\uce7c\ub9ac\uc5d0 \uc9c0\uc18d\uc801\uc73c\ub85c \ub178\ucd9c\ub418\ub294 \uacbd\uc6b0, \ub124 \uac00\uc9c0 \uae30\uc9c8 \uc720\ud615 \uc911 \uc5b4\ub290 \uac83\ub3c4 \ucd94\uac00\uc801\uc778 \ubcf4\ud638 \uc870\uce58 \uc5c6\uc774 \ud654\ud559\uc801\uc73c\ub85c \ubd88\ud65c\uc131\uc774\ub77c\uace0 \ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uc790\uc678\uc120 \ud22c\uacfc \ubc0f \ub0b4\uc5f4 \uae30\ub2a5\uacfc \ud568\uaed8 \uac15\ub825\ud55c \ub0b4\uc54c\uce7c\ub9ac\uc131\uc774 \ud544\uc218\uc778 \uacbd\uc6b0 \uc720\uc6a9\ud558\uac8c \uc804\ud658\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4, <strong>\uc801\uc808\ud55c \ucf54\ud305 \uc804\ub7b5\uacfc \uacb0\ud569\ub41c \uc11d\uc601 \uc720\ub9ac\ud310<\/strong> \ub294 \ud3c9\uba74 \uad11\ud559 \uae30\ud310 \uc911 \uac00\uc7a5 \uac00\uae4c\uc6b4 \uc194\ub8e8\uc158\uc73c\ub85c \ub0a8\uc544 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<h4>\ub0b4\ud654\ud559\uc131 \ub4f1\uae09 \uc694\uc57d<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc7ac\ub8cc<\/th>\n<th>HCl\/H\u2082SO\u2084\/HNO\u2083\uc5d0 \ub300\ud55c \ub0b4\uc131<\/th>\n<th>HF\uc5d0 \ub300\ud55c \ub0b4\uc131<\/th>\n<th>NaOH\uc5d0 \ub300\ud55c \ub0b4\uc131(\ub3d9\uc2dc)<\/th>\n<th>\ubc18\ub3c4\uccb4 \uacf5\uc815 \ud638\ud658\uc131<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc11d\uc601 \uc720\ub9ac\ud310<\/td>\n<td>\uc6b0\uc218<\/td>\n<td>\ubd88\ub7c9(\ubc94\uc6a9)<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<td>\ub192\uc74c<\/td>\n<\/tr>\n<tr>\n<td>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/td>\n<td>\uc6b0\uc218<\/td>\n<td>\ubd88\ub7c9(\ubc94\uc6a9)<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<td>\ub192\uc74c<\/td>\n<\/tr>\n<tr>\n<td>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/td>\n<td>Good<\/td>\n<td>\ubd88\ub7c9(\ubc94\uc6a9)<\/td>\n<td>\ub0ae\uc74c<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<\/tr>\n<tr>\n<td>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/td>\n<td>Poor<\/td>\n<td>\ubd88\ub7c9(\ubc94\uc6a9)<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<td>\ub0ae\uc74c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uad00\ub828\ub41c \ud45c\uba74 \uc624\uc5fc \ubc0f \uc138\ucc99 \ud504\ub85c\ud1a0\ucf5c<\/h3>\n<p>\uc11d\uc601 \uc720\ub9ac\ud310\uc758 \ud45c\uba74 \uccad\uacb0\uc740 \uc21c\uc218\ud558\uac8c \uad6c\uc870\uc801 \uc694\uc18c\ub85c\ub9cc \uc0ac\uc6a9\ub418\ub294 \uae30\ud310\uc5d0\ub294 \uc801\uc6a9\ub418\uc9c0 \uc54a\ub294 \uad11\ud559\uc801 \uacb0\uacfc\ub97c \uac00\uc838\uc635\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310 \ud45c\uba74\uc758 \uc720\uae30\ubb3c \uc624\uc5fc<\/strong>-\ud0c4\ud654\uc218\uc18c \ud544\ub984, \uc9c0\ubb38 \uc794\uc5ec\ubb3c, \ud761\ucc29\ub41c \ud38c\ud504 \uc624\uc77c \ub4f1\uc740 \uc624\uc5fc \ub450\uaed8 \ub098\ub178\ubbf8\ud130\ub2f9 \uce21\uc815\ub41c \ud22c\uacfc\uc728\uc744 \uba87 \ud37c\uc13c\ud2b8 \uac10\uc18c\uc2dc\ud0a4\uae30\uc5d0 \ucda9\ubd84\ud55c \uc18c\uba78 \uacc4\uc218\ub85c 200-300nm \ubc94\uc704\uc758 UV \ubcf5\uc0ac\ub97c \ud761\uc218\ud569\ub2c8\ub2e4. UV \ubd84\uad11 \uc140 \ub610\ub294 \ub808\uc774\uc800 \uc708\ub3c4\uc6b0 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc774\ub294 \uce21\uc815 \uc624\ub958 \ub610\ub294 \ube54 \uac10\uc1e0\ub85c \uc9c1\uc811\uc801\uc73c\ub85c \ud574\uc11d\ub429\ub2c8\ub2e4. \ucde8\uae09 \ub610\ub294 \uc81c\ub300\ub85c \uc81c\uc5b4\ub418\uc9c0 \uc54a\uc740 \uc138\ucc99 \ud654\ud559 \ubb3c\uc9c8\ub85c \uc778\ud574 \uc720\uc785\ub41c \uae08\uc18d \uc624\uc5fc(Fe, Cu, Na)\uc740 \uace0\uc628\uc5d0\uc11c \uc11d\uc601\uc758 \ud45c\uba74 \uadfc\ucc98 \uc601\uc5ed\uc73c\ub85c \ud655\uc0b0\ub418\uc5b4 \uad11\ub300\uc5ed \ubc29\uc0ac\uc120\uc744 \ud761\uc218\ud558\uace0 \uc5f4\ucc98\ub9ac \ud6c4 \ud45c\uba74 \uc138\ucc99\uc73c\ub85c \uc81c\uac70\ud560 \uc218 \uc5c6\ub294 \uc0c9 \uc911\uc2ec\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ud53c\ub77c\ub0d0 \uc138\ucc99(H\u2082SO\u2084:H\u2082O\u2082, 120\u00b0C\uc5d0\uc11c 3:1)\uacfc \uace0\uc720\ud558\uac8c \ud638\ud658\ub429\ub2c8\ub2e4.<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc5b4\ub41c \ub178\ucd9c \uc2dc\uac04 \ub3d9\uc548 \uce21\uc815 \uac00\ub2a5\ud55c \uc18d\ub3c4\ub85c SiO\u2082 \ud45c\uba74\uc744 \uacf5\uaca9\ud558\uc9c0 \uc54a\uace0 \uc720\uae30 \uc624\uc5fc\uc744 \uc0b0\ud654 \ubc0f \uc81c\uac70\ud569\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc81c\uc870\uc758 \ud45c\uc900\uc778 RCA \ud074\ub9ac\ub2dd \uc2dc\ud000\uc2a4\ub3c4 \uc720\uc0ac\ud558\uac8c \ud638\ud658\ub429\ub2c8\ub2e4. \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \ud53c\ub77c\ub0d0 \uc138\ucc99\uc5d0\ub3c4 \uacac\ub51c \uc218 \uc788\uc9c0\ub9cc \ubc18\ubcf5 \ucc98\ub9ac \ud6c4 \uce21\uc815 \uac00\ub2a5\ud55c \ubd95\uc18c \uce68\ucd9c\uc774 \ubc1c\uc0dd\ud558\uc5ec \ud45c\uba74 \uadfc\ucc98 \uc870\uc131\uc774 \uc810\ucc28\uc801\uc73c\ub85c \ubcc0\ud569\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub294 \uac15\ud55c \uc0b0\ud654\uc81c\uc640 \uc5f4\uc758 \uc870\ud569\uc774 \uc54c\uce7c\ub9ac \uce68\ucd9c\uacfc \ud45c\uba74 \uac70\uce60\uae30\ub97c \uac00\uc18d\ud654\ud558\uae30 \ub54c\ubb38\uc5d0 \uace0\uc628\uc5d0\uc11c \ud53c\ub77c\ub0d0 \ud654\ud559 \ubb3c\uc9c8\uacfc \ud638\ud658\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc138\ucc99\ub41c \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \ud45c\uba74 \uc218\uc0b0\uae30 \ubc00\ub3c4(\uc77c\ubc18\uc801\uc73c\ub85c nm\u00b2\ub2f9 \uc2e4\ub77c\ub180(Si-OH) \uadf8\ub8f9\uc73c\ub85c \ud45c\uc2dc)\ub294 \uce5c\uc218\uc131 \ud2b9\uc131\uacfc \uc720\uae30 \uc2e4\ub780 \uacb0\ud569\uc81c\uc5d0 \ub300\ud55c \uacb0\ud569 \uce5c\ud654\ub825\uc744 \uacb0\uc815\ud569\ub2c8\ub2e4. \uac13 \ud53c\ub77c\ub0d0 \uc138\ucc99\ud55c \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc740 \uc2e4\ub77c\ub180 \ubc00\ub3c4\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. <strong>4-5 OH \uadf8\ub8f9\/nm\u00b2<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \ubc14\uc774\uc624\uc13c\uc11c \ud45c\uba74, PDMS \ubbf8\uc138\uc720\uccb4 \uacb0\ud569 \ubc0f \uc790\uc678\uc120 \uacbd\ud654\ud615 \uc811\ucc29\uc81c \uc778\ud130\ud398\uc774\uc2a4\uc5d0 \ud6a8\uacfc\uc801\uc778 \uae30\ub2a5\ud654\ub97c \uad6c\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud45c\uba74 \ud654\ud559\uc801 \ub2e4\uc591\uc131\uc740 \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\uc5d0\uc11c\ub294 \ub3d9\ub4f1\ud558\uc9c0 \uc54a\uc73c\uba70 \ubd95\uaddc\uc0b0\uc5fc\uc5d0\uc11c\ub294 \ubd80\ubd84\uc801\uc73c\ub85c\ub9cc \ub3d9\ub4f1\ud569\ub2c8\ub2e4.<\/p>\n<h4>\uccad\uc18c \ud504\ub85c\ud1a0\ucf5c \ud638\ud658\uc131<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uccad\uc18c \ubc29\ubc95<\/th>\n<th>\uc11d\uc601 \uc720\ub9ac\ud310<\/th>\n<th>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/th>\n<th>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/th>\n<th>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ud53c\ub77c\ub0d0(H\u2082SO\u2084\/H\u2082O\u2082)<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658 \uac00\ub2a5(\uc81c\ud55c\ub41c \uc8fc\uae30)<\/td>\n<td>\ub192\uc740 T\uc5d0\uc11c \ud638\ud658\ub418\uc9c0 \uc54a\uc74c<\/td>\n<\/tr>\n<tr>\n<td>RCA-1(NH\u2084OH\/H\u2082O\u2082)<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud55c\uacc4<\/td>\n<\/tr>\n<tr>\n<td>RCA-2(HCl\/H\u2082O\u2082)<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\ub418\uc9c0 \uc54a\uc74c<\/td>\n<\/tr>\n<tr>\n<td>HF \uc5d0\uce6d<\/td>\n<td>\ud45c\uba74 \uc5d0\uce6d<\/td>\n<td>\ud45c\uba74 \uc5d0\uce6d<\/td>\n<td>\ud45c\uba74 \uc5d0\uce6d<\/td>\n<td>\ud45c\uba74 \uc5d0\uce6d<\/td>\n<\/tr>\n<tr>\n<td>UV-\uc624\uc874<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<td>\ud638\ud658\uc131<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Plate-Outperforms-Borosilicate-in-UV-Applications.webp\" alt=\"\uc11d\uc601 \uc720\ub9ac\ud310, UV \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ubd95\uaddc\uc0b0\uc5fc\ubcf4\ub2e4 \ub6f0\uc5b4\ub09c \uc131\ub2a5 \ubc1c\ud718\" title=\"\uc11d\uc601 \uc720\ub9ac\ud310, UV \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ubd95\uaddc\uc0b0\uc5fc\ubcf4\ub2e4 \ub6f0\uc5b4\ub09c \uc131\ub2a5 \ubc1c\ud718\" \/><\/p>\n<h2>\uc11d\uc601 \uc720\ub9ac\ud310\uc744 \uad6c\ubcc4\ud558\ub294 \uae30\uacc4\uc801 \ud2b9\uc131<\/h2>\n<p>\uae30\uacc4\uc801 \ud30c\ub77c\ubbf8\ud130\ub294 \uac00\uacf5 \uacf5\ucc28, \uc2e4\uc7a5 \uc124\uacc4, \ub0b4\ub9c8\ubaa8\uc131 \ub4f1 \uae30\ud310\uc774 \uc81c\uc791 \ub610\ub294 \uc870\ub9bd\uc5d0 \ub4e4\uc5b4\uac00\uae30 \uc804\uc5d0 \uc815\ub7c9\ud654\ud574\uc57c \ud558\ub294 \uc11c\ube44\uc2a4 \uc18d\uc131\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\uacbd\ub3c4:<\/strong> \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ub300\ub7b5 <strong>1,050-1,100 HV<\/strong> \ube44\ucee4\uc2a4 \ucc99\ub3c4\uc5d0\uc11c\ub294 \ubaa8\uc2a4 \uacbd\ub3c4 7\uc5d0 \ud574\ub2f9\ud569\ub2c8\ub2e4. \uc774\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \uac00\uc7a5 \ub2e8\ub2e8\ud55c \uc0b0\ud654\ubb3c \uc720\ub9ac \uc911 \ud558\ub098\uc785\ub2c8\ub2e4. \uc774\uc5d0 \ube44\ud574 \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \uc57d 750-850 HV(Mohs ~6), \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub294 530-600 HV \ubc94\uc704(Mohs ~5.5)\uc5d0 \uc18d\ud569\ub2c8\ub2e4. <strong>\uacbd\ub3c4\uac00 \ub192\uc744\uc218\ub85d \ub9c8\ubaa8\uc131 \uc811\ucd09 \uc2dc \uae01\ud798\uc5d0 \ub300\ud55c \ub0b4\uc131\uc774 \ub192\uc544\uc9d1\ub2c8\ub2e4.<\/strong>\ub294 \uae30\ud310\uc744 \ubc18\ubcf5\uc801\uc73c\ub85c \ub2e4\ub8e8\uac70\ub098 \uc811\ucd09 \ubc29\uc2dd\uc73c\ub85c \uc138\ucc99\ud558\ub294 \ud658\uacbd\uc5d0\uc11c \uc2e4\uc9c8\uc801\uc778 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8\ub294 \uc57d 1,050~1,100 HV\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uc77c\uce58\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uace8\uc808 \uc778\uc131:<\/strong> \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uacbd\ub3c4\uc758 \uc7a5\uc810\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0, \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc740 \ud30c\uad34 \uc778\uc131(K_IC)\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. <strong>0.70-0.75 MPa-m\u00bd<\/strong>\ubd95\uaddc\uc0b0 \uc720\ub9ac(~0.80~0.90 MPa-m\u00bd)\ubcf4\ub2e4 \uc57d\uac04 \ub0ae\uace0 \ub300\ubd80\ubd84\uc758 \uacb0\uc815\uc9c8 \uc138\ub77c\ubbf9\ubcf4\ub2e4 \ud6e8\uc52c \ub0ae\uc2b5\ub2c8\ub2e4. \uc774\ub807\uac8c \ub0ae\uc740 \ud30c\ub2e8 \uc778\uc131\uc740 \uac00\uc7a5\uc790\ub9ac \uce69, \ud45c\uba74 \uc2a4\ud06c\ub798\uce58, \uc810 \uc811\ucd09 \ud558\uc911\uc774 \ubaa8\ub450 \uc778\uc7a5 \uc751\ub825 \ud558\uc5d0\uc11c \uce58\uba85\uc801\uc73c\ub85c \uc804\ud30c\ub420 \uc218 \uc788\ub294 \uade0\uc5f4 \uc2dc\uc791 \ubd80\uc704\uc784\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. <strong>\uae08\uc18d \ud504\ub808\uc784\uc5d0 \uc11d\uc601 \uc720\ub9ac\ud310\uc744 \uc7a5\ucc29\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uae08\uc18d\uacfc \uc720\ub9ac\uc758 \uc9c1\uc811\uc801\uc778 \uc811\ucd09\uc744 \ud53c\ud574\uc57c \ud569\ub2c8\ub2e4.<\/strong>\ub300\uc2e0 \uaddc\uc815\uc744 \uc900\uc218\ud558\ub294 \ud0c4\uc131 \uac1c\uc2a4\ud0b7 \ub610\ub294 PTFE \uc2a4\ud398\uc774\uc11c\ub97c \uc0ac\uc6a9\ud558\uc5ec \ud074\ub7a8\ud551 \ud798\uc744 \ubd84\uc0b0\ud558\uace0 \uac00\uc7a5\uc790\ub9ac\uc5d0 \uc751\ub825\uc774 \uc9d1\uc911\ub418\ub294 \uac83\uc744 \ubc29\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ud0c4\uc131 \uacc4\uc218 \ubc0f \ubc00\ub3c4:<\/strong> \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc740 \uc601 \uacc4\uc218\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. <strong>72 GPa<\/strong> \uc758 \ubc00\ub3c4\uc640 <strong>2.20g\/cm\u00b3<\/strong>. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub294 \ubc00\ub3c4\uac00 \uc57d 2.50g\/cm\u00b3\ub85c \uc57d 70-74 GPa\uc5d0 \uac00\uae4c\uc6b4 \ubc18\uba74, \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \uc57d 2.23g\/cm\u00b3 \ubc0f 63-66 GPa\ub85c \ub5a8\uc5b4\uc9d1\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \ubc00\ub3c4\uac00 \ub0ae\uae30 \ub54c\ubb38\uc5d0 \ubb34\uac8c\uc5d0 \ubbfc\uac10\ud55c \uad11\ud559 \ub9c8\uc6b4\ud2b8 \ubc0f \ud56d\uacf5\uc6b0\uc8fc \uad00\ub828 \uacc4\uce21\uae30 \ub4f1 \ub300\ub7c9 \uc608\uc0b0\uc774 \uc81c\ud55c\uc801\uc778 \ubd84\uc57c\uc5d0 \uc720\ub9ac\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<p>\ub192\uc740 \uacbd\ub3c4\uc640 \ub0ae\uc740 \ud30c\ub2e8 \uc778\uc131\uc758 \uc870\ud569\uc73c\ub85c \uc778\ud574 \uc11d\uc601 \uc720\ub9ac\ud310 \uae30\ud310\uc740 \uad11\ud559 \ud50c\ub7ab \ubc0f \uc815\ubc00 \uac70\uc6b8\uc5d0 \uc801\uc6a9\ub418\ub294 \uac83\uacfc \ub3d9\uc77c\ud55c \uad00\ub9ac \ud504\ub85c\ud1a0\ucf5c(\uc804\uc6a9 \ubcf4\uad00 \uc124\ube44, \uac00\uc7a5\uc790\ub9ac \ubcf4\ud638 \ud3ec\uc7a5, \uc6b4\uc1a1 \uc911 \uae30\ud310 \uac04 \uc9c1\uc811 \uc811\ucd09 \uae08\uc9c0)\uc744 \uc0ac\uc6a9\ud558\uc5ec \ucde8\uae09\ud574\uc57c \ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uae30\uacc4\uc801 \uc131\ub2a5 \ud2b9\uc131\uc740 \ub2e4\uc74c\uacfc \uac19\uc774 \uac00\uc7a5 \uc798 \uc124\uba85\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\ubd84\uc0b0 \ud558\uc911\uacfc \ub9c8\ubaa8\uc131 \uc811\ucd09\uc5d0\ub294 \ub0b4\uad6c\uc131\uc774 \ub6f0\uc5b4\ub098\uc9c0\ub9cc \uc9d1\uc911 \ud558\uc911\uc774\ub098 \ucda9\uaca9 \ud558\uc911\uc5d0\ub294 \ubd80\uc11c\uc9c0\uae30 \uc27d\uc2b5\ub2c8\ub2e4.<\/strong>\ubaa8\ub4e0 \ub9c8\uc6b4\ud305 \ubc0f \ucde8\uae09 \uc808\ucc28 \uc0ac\uc591\uc744 \uc54c\ub824\uc57c \ud558\ub294 \ud2b9\uc131\ud654\uc785\ub2c8\ub2e4.<\/p>\n<h4>\uae30\uacc4\uc801 \ud2b9\uc131 \uc694\uc57d<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc18d\uc131<\/th>\n<th>\uc11d\uc601 \uc720\ub9ac\ud310<\/th>\n<th>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/th>\n<th>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/th>\n<th>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ube44\ucee4\uc2a4 \uacbd\ub3c4(HV)<\/td>\n<td>1,050-1,100<\/td>\n<td>1,050-1,100<\/td>\n<td>750-850<\/td>\n<td>530-600<\/td>\n<\/tr>\n<tr>\n<td>\ubaa8\uc2a4 \uacbd\ub3c4<\/td>\n<td>7<\/td>\n<td>7<\/td>\n<td>~6<\/td>\n<td>~5.5<\/td>\n<\/tr>\n<tr>\n<td>\ud30c\ub2e8 \uc778\uc131 K_IC(MPa-m\u00bd)<\/td>\n<td>0.70-0.75<\/td>\n<td>0.70-0.75<\/td>\n<td>0.80-0.90<\/td>\n<td>0.75-0.82<\/td>\n<\/tr>\n<tr>\n<td>\uc601\ud0c4\uc131\uacc4\uc218(GPa)<\/td>\n<td>72<\/td>\n<td>73<\/td>\n<td>63-66<\/td>\n<td>70-74<\/td>\n<\/tr>\n<tr>\n<td>\ubc00\ub3c4(g\/cm\u00b3)<\/td>\n<td>2.20<\/td>\n<td>2.20<\/td>\n<td>2.23<\/td>\n<td>2.50<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\uc11d\uc601 \uc720\ub9ac\ud310\uc5d0 \uc801\ud569\ud55c \uc77c\ubc18\uc801\uc778 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc751\uc6a9 \ubd84\uc57c<\/h2>\n<p>\uc644\uc804\ud55c \ud30c\ub77c\ubbf8\ud130 \ud504\ub85c\ud544\uc744 \uc124\uc815\ud55c \ub2e4\uc74c \ub2e8\uacc4\ub294 \uae30\ud310 \uc120\ud0dd\uc774 \uacf5\uc815 \ubb34\uacb0\uc131, \uae30\uae30 \uc815\ud655\ub3c4 \ub610\ub294 \uc2dc\uc2a4\ud15c \uc218\uba85\uc5d0 \uce21\uc815 \uac00\ub2a5\ud55c \uacb0\uacfc\ub97c \uac00\uc838\uc624\ub294 \uc2e4\uc81c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ud658\uacbd\uc5d0 \ud574\ub2f9 \ud30c\ub77c\ubbf8\ud130\ub97c \ub9e4\ud551\ud558\ub294 \uac83\uc785\ub2c8\ub2e4. \uc544\ub798\uc758 \uac01 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \uc11d\uc601 \uc720\ub9ac\ud310\uc774 \uae30\uc220\uc801\uc73c\ub85c \uc62c\ubc14\ub978 \uc7ac\ub8cc \uc120\ud0dd\uc774 \ub420 \uc218 \uc788\ub294 \ud2b9\uc815 \uc18d\uc131 \uc138\ud2b8\uc640 \ube44\uad50\ud558\uc5ec \uac80\ud1a0\ub429\ub2c8\ub2e4.<\/p>\n<h3>\uc11d\uc601 \uc720\ub9ac\ud310\uc5d0 \uc758\uc874\ud558\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815<\/h3>\n<p>\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc740 \ud3c9\ud3c9\ud55c \uad11\ud559 \uae30\ud310\uc5d0 \ub300\ud574 \uae30\uc220\uc801\uc73c\ub85c \uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ud658\uacbd\uc73c\ub85c \uc5f4, \uad11\ud559 \ubc0f \ud654\ud559\uc801 \uc131\ub2a5 \uce21\uba74\uc5d0\uc11c \ub3d9\uc2dc\uc5d0 \uc694\uad6c \uc0ac\ud56d\uc774 \ubd80\uacfc\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\ub3c4\ud380\ud2b8 \ud655\uc0b0\ub85c<\/strong> 900~1,100\u00b0C\uc5d0\uc11c \uc791\ub3d9\ud558\ub824\uba74 \ub3c4\ud380\ud2b8 \uac00\uc2a4(\ud3ec\uc2a4\ud540, \ub514\ubcf4\ub780, \uc544\ub974\uc2e0)\uc640 \uc0b0\ud654 \uc8fc\ubcc0 \ud658\uacbd(O\u2082, H\u2082O \uc99d\uae30)\uc5d0 \ud654\ud559\uc801\uc73c\ub85c \ubd88\ud65c\uc131 \uc0c1\ud0dc\ub97c \uc720\uc9c0\ud558\uba74\uc11c \uc218\ucc9c \ubc88\uc758 \uc5f4 \uc8fc\uae30 \ub3d9\uc548 \uce58\uc218 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\ub294 \uae30\ud310 \uc7ac\ub8cc\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uc11d\uc601 \ud29c\ube0c \uc81c\ud488\uc740 \uc774 \uc138 \uac00\uc9c0 \uc694\uac74\uc744 \ub3d9\uc2dc\uc5d0 \ucda9\uc871\ud558\uba70, \ub2e4\ub978 \ud3c9\ud310 \uc720\ub9ac \uae30\ud310\uc740 \uc774\ub97c \ucda9\uc871\ud558\uc9c0 \ubabb\ud569\ub2c8\ub2e4. \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 500\u00b0C \uc774\uc0c1\uc5d0\uc11c \uc810\uc131\uc73c\ub85c \ubcc0\ud615\ub418\uc5b4 \uc6a9\uad11\ub85c \ub300\uae30\ub85c \ubd95\uc18c\ub97c \ubc29\ucd9c\ud558\uba70, \uc774\ub294 \ub3c4\ud380\ud2b8 \uc81c\uc5b4 \uacf5\uc815\uc5d0\uc11c \ud5c8\uc6a9\ud560 \uc218 \uc5c6\ub294 \uc624\uc5fc\uc6d0\uc744 \uad6c\uc131\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>UV \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c<\/strong> \uc218\uc740 \uc544\ud06c \ub7a8\ud504(365nm i-line, 248nm KrF)\ub97c \uc0ac\uc6a9\ud558\ub824\uba74 \uc791\ub3d9 \ud30c\uc7a5\uc5d0\uc11c 85% \uc774\uc0c1\uc758 \ud22c\uacfc\uc728, \ub0ae\uc740 \ud615\uad11 \ubc30\uacbd, \uc5f0\uc18d UV \uc870\uc0ac \uc2dc \uc5f4 \uc548\uc815\uc131\uc744 \uac16\ucd98 \uc870\uba85 \uacbd\ub85c \ucc3d\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc774 \uc138 \uac00\uc9c0\ub97c \ubaa8\ub450 \ucda9\uc871\ud569\ub2c8\ub2e4. 248nm\uc5d0\uc11c UV \ud22c\uacfc\uc728\uc774 \ub450\uaed8 3mm\ub2f9 88%\ub97c \ucd08\uacfc\ud558\uace0, UV \uc5ec\uae30 \uc2dc \ud615\uad11 \ubc29\ucd9c\uc774 \ubd95\uaddc\uc0b0 \uc720\ub9ac(\ubbf8\ub7c9\uc758 \ucca0 \ubc0f \uc138\ub968 \ubd88\uc21c\ubb3c\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c UV \uc5ec\uae30 \ubc29\ucd9c\uc744 \ubcf4\uc774\ub294)\uc5d0 \ube44\ud574 \ubb34\uc2dc\ud560 \uc218 \uc788\uc73c\uba70, \ub0ae\uc740 CTE\ub294 \uc7a5\uc2dc\uac04 \ub178\ucd9c \uc2e4\ud589 \uc911 \uc708\ub3c4\uc6b0 \uc694\uc18c\uc758 \uc5f4 \ud33d\ucc3d\uc73c\ub85c \uc778\ud55c \ucd08\uc810 \uc774\ub3d9\uc744 \ubc29\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uae09\uc18d \uc5f4\ucc98\ub9ac(RTP) \ucc54\ubc84<\/strong> \ub294 \ucd08\ub2f9 50-300\u00b0C\uc758 \uc628\ub3c4 \uc0c1\uc2b9 \uc18d\ub3c4\ub85c \uae30\ud310\uc5d0 \ub178\ucd9c\ub418\uc5b4 \uc218\ucd08 \ub0b4\uc5d0 1,000-1,200\u00b0C\uc758 \ucd5c\uace0 \uc628\ub3c4\uc5d0 \ub3c4\ub2ec\ud569\ub2c8\ub2e4. 0.55 \u00d7 10-\u2076 \/K\uc758 \ucd08\uc800 CTE\uc5d0\uc11c \ube44\ub86f\ub41c \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc131\uc740 \uc774 \uc18c\uc7ac \ud074\ub798\uc2a4\uac00 \uae30\uc220\uc801\uc73c\ub85c \uacbd\uc7c1\ub825 \uc788\ub294 \ub300\uc548 \uc5c6\uc774 30\ub144 \uc774\uc0c1 \ubc18\ub3c4\uccb4 \ub300\ub7c9 \uc81c\uc870\uc758 \ud45c\uc900 RTP \ubdf0\ud3ec\ud2b8 \ubc0f \uc11c\uc149\ud130 \uc9c0\uc9c0 \uc7ac\ub8cc\ub85c \uc0ac\uc6a9\ub418\uc5b4 \uc628 \uc720\uc77c\ud55c \uc774\uc720\uc785\ub2c8\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc694\uad6c \uc0ac\ud56d\uacfc \uc11d\uc601 \uc720\ub9ac\ud310 \uc131\ub2a5 \ube44\uad50<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ud504\ub85c\uc138\uc2a4<\/th>\n<th>\uc8fc\uc694 \uc694\uad6c \uc0ac\ud56d<\/th>\n<th>\uc11d\uc601 \uc720\ub9ac\ud310 \ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\uc131\ub2a5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ud655\uc0b0\ub85c<\/td>\n<td>T &gt; 900\u00b0C, \ud654\ud559\uc801 \ubd88\ud65c\uc131<\/td>\n<td>\uc11c\ube44\uc2a4 T ~1,050\u00b0C, \ub192\uc740 \ub0b4\uc0b0\uc131<\/td>\n<td>\uc790\uaca9\uc744 \uac16\ucd98<\/td>\n<\/tr>\n<tr>\n<td>UV \ub9ac\uc18c\uadf8\ub798\ud53c \ucc3d<\/td>\n<td>&gt;85% T @ 248-365nm<\/td>\n<td>&gt;88% T @ 248nm<\/td>\n<td>\uc790\uaca9\uc744 \uac16\ucd98<\/td>\n<\/tr>\n<tr>\n<td>RTP \ucc54\ubc84 \ubdf0\ud3ec\ud2b8<\/td>\n<td>\u0394T &gt; 500 \u00b0C\/s \ub0b4\ucda9\uaca9\uc131<\/td>\n<td>\u0394T &gt; 1,000\u00b0C \ub2f4\uae08\uc9c8\uc5d0\ub3c4 \uacac\ub524<\/td>\n<td>\uc790\uaca9\uc744 \uac16\ucd98<\/td>\n<\/tr>\n<tr>\n<td>\uc2b5\uc2dd \ubca4\uce58 \uacf5\uc815 \uce90\ub9ac\uc5b4<\/td>\n<td>HCl\/H\u2082SO\u2084 \uc800\ud56d<\/td>\n<td>\ubbf8\ub124\ub784 \uc0b0\uc5d0 \ubbf8\ubbf8\ud55c \uc6a9\ud574\uc131<\/td>\n<td>\uc790\uaca9\uc744 \uac16\ucd98<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uc11d\uc601 \uc720\ub9ac\ud310\uc744 \uc0ac\uc6a9\ud55c \ub808\uc774\uc800 \ubc0f \ubd84\uad11 \uc2dc\uc2a4\ud15c<\/h3>\n<p>\uad11\ud559 \ubc0f \ubd84\uad11 \uae30\uae30 \uc124\uacc4\uc790\ub294 \uad11\ud559 \uc218\ucc28\ub97c \ucd5c\uc18c\ud654\ud558\uace0 \ub808\uc774\uc800\ub85c \uc778\ud55c \uc5f4 \ubd80\ud558\ub97c \uacac\ub514\uba70 \uae30\uc0dd \ud761\uc218 \uc5c6\uc774 \ubaa9\ud45c \ud30c\uc7a5\uc744 \ud22c\uacfc\ud558\ub294 \uae30\ud310\uc744 \ud544\uc694\ub85c \ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc2ec\ubd80 \uc790\uc678\uc120 \uc5d1\uc2dc\uba38 \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c<\/strong> 193nm(ArF) \ubc0f 248nm(KrF)\uc5d0\uc11c \uc791\ub3d9\ud558\ub824\uba74 \uc791\ub3d9 \ud30c\uc7a5\uc5d0\uc11c 80% \uc774\uc0c1\uc758 \ud22c\uacfc\uc728, UV\uc5d0 \uc758\ud55c \uc0c9 \uc911\uc2ec \ud615\uc131(\uc194\ub77c\ub77c\uc774\uc81c\uc774\uc158)\uc5d0 \ub300\ud55c \ub0b4\uc131, \ubc18\ubcf5 \ud384\uc2a4 \uac00\uc5f4 \uc2dc \uc5f4 \uc548\uc815\uc131\uc744 \uac16\ucd98 \ucc3d \uc18c\uc7ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. <strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ubcf4\ub2e4 \ud6e8\uc52c \uc800\ub834\ud55c \uc7ac\ub8cc \ube44\uc6a9\uc73c\ub85c \uc774\ub7ec\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4.<\/strong>\ub294 \ucc98\ub9ac\ub7c9 \uc694\uac74\uc774 180nm \uc774\ud558\uc758 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ucd94\uac00\uc801\uc778 \ud22c\uba85\uc131\uc744 \uc694\uad6c\ud558\uc9c0 \uc54a\ub294 \uc5f0\uad6c\uc6a9 \uc5d1\uc2dc\uba38 \ub808\uc774\uc800 \uc778\ud074\ub85c\uc800, \uc790\uc678\uc120 \ub178\ucd9c \ucc54\ubc84 \ubc0f \uad11\ud654\ud559 \ubc18\uc751\uae30\uc5d0\uc11c \uc8fc\uc694 \ucc3d \uc18c\uc7ac\ub85c \uc0ac\uc6a9\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \ubc0f \ubd95\uaddc\uc0b0 \uc720\ub9ac \uae30\ud310\uc740 \uc774\ub7ec\ud55c \ud30c\uc7a5\uc5d0\uc11c \uad11\ud559\uc801\uc73c\ub85c \uc2e4\ud589 \uac00\ub2a5\ud558\uc9c0 \uc54a\uc73c\uba70 \uc774 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uacf5\uac04\uc5d0\uc11c \uc544\ubb34\ub7f0 \uc5ed\ud560\uc744 \ud558\uc9c0 \ubabb\ud569\ub2c8\ub2e4.<\/p>\n<p><strong><a href=\"https:\/\/en.wikipedia.org\/wiki\/Raman_spectroscopy\">\ub77c\ub9cc \ubd84\uad11\ud559<\/a><sup id=\"fnref1:3\"><a href=\"#fn:3\" class=\"footnote-ref\">3<\/a><\/sup> \uc138\ud3ec \ubc0f \ud615\uad11 \ud050\ubcb3<\/strong> \ubc30\uacbd \ubc1c\uad11\uc5d0 \ub300\ud55c \uc5c4\uaca9\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ubd80\uacfc\ud569\ub2c8\ub2e4. \uae30\ud310\uc5d0\uc11c \uc0dd\uc131\ub41c \ubaa8\ub4e0 \ud615\uad11 \uc2e0\ud638\uac00 \ubd84\uc11d\ubb3c \uc2a4\ud399\ud2b8\ub7fc\uacfc \uacb9\uccd0\uc11c \ub178\uc774\uc988 \ud50c\ub85c\uc5b4\uac00 \ub192\uc544\uc9c0\uace0 \uac10\ub3c4\uac00 \uac10\uc18c\ud569\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uac00\uc7a5 \uc77c\ubc18\uc801\uc778 \uc138 \uac00\uc9c0 \ub77c\ub9cc \uc5ec\uae30 \ub77c\uc778\uc778 532nm, 633nm \ubc0f 785nm \ub808\uc774\uc800 \uc5ec\uae30 \uc544\ub798\uc5d0\uc11c \uace0\uc720\ud55c \ub77c\ub9cc \uc0b0\ub780\uacfc \ubb34\uc2dc\ud560 \uc218 \uc788\ub294 \uad11\ub300\uc5ed \ud615\uad11\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \uc800\ub18d\ub3c4 \ubd84\uc11d\ubb3c \uce21\uc815\uc5d0\uc11c \uc2e0\ud638 \ub300 \uc7a1\uc74c\ube44\ub97c 2~5\ubc30\uae4c\uc9c0 \uc800\ud558\uc2dc\ud0a4\ub294 532nm \uc5ec\uae30 \uc544\ub798\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \ud615\uad11 \ubc30\uacbd\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ub294 \ub192\uc740 \ud615\uad11 \ubc30\uacbd\uacfc \uc790\uc678\uc120 \ucc28\ub2e8\uc73c\ub85c \uc778\ud574 \ubd84\uad11 \uc140 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uae30\ubcf8\uc801\uc73c\ub85c \uc81c\uc678\ub429\ub2c8\ub2e4. \ub77c\ub9cc \uc140\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc744 \ubd95\uaddc\uc0b0\uc5fc\uc73c\ub85c \ub300\uccb4\ud558\uba74 \ubc30\uacbd \ud615\uad11 \uac1c\uc218\uac00 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc774 \uac10\uc18c\ud558\ub294 \uac83\uc73c\ub85c \ubb38\uc11c\ud654\ub418\uc5c8\uc2b5\ub2c8\ub2e4. <strong>60-70%<\/strong> \uc9c1\uc811 \ube44\uad50 \uce21\uc815\uc5d0\uc11c \uc9c1\uc811\uc801\uc778 \ubd84\uc11d \uacb0\uacfc\ub97c \ud1b5\ud574 \uc815\ub7c9\uc801 \uc131\ub2a5 \uc6b0\uc704\ub97c \ud655\ubcf4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><strong>\ud0dc\uc591\uad11 \uc2dc\ubbac\ub808\uc774\ud130 \ubc0f \uc790\uc678\uc120 \uc870\ub3c4 \ubcf4\uc815 \ud45c\uc900<\/strong> \uc7a5\uc2dc\uac04 \uc790\uc678\uc120\uc5d0 \ub178\ucd9c\ub418\uc5b4\ub3c4 \ud754\ub4e4\ub9ac\uc9c0 \uc54a\ub294 \uc548\uc815\uc801\uc774\uace0 \ubcf4\uc815\ub41c \ud22c\uacfc\uc728\uc744 \uac16\ucd98 \ud3c9\ud3c9\ud55c \uad11\ud559 \ucc3d\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \ub2e8\ud30c\uc7a5 \uc870\uc0ac\uac00 \uc9c0\uc18d\ub420 \ub54c \uc790\uc678\uc120\uc744 \ud761\uc218\ud558\ub294 \uc0c9 \uc911\uc2ec\uc774 \ud615\uc131\ub418\ub294 \ud604\uc0c1\uc778 \uc194\ub77c\ub77c\uc774\uc81c\uc774\uc158\uc740 \ubaa8\ub4e0 \uc720\ub9ac \uc720\ud615\uc5d0 \uac01\uae30 \ub2e4\ub978 \uc815\ub3c4\ub85c \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310, \ud2b9\ud788 \uc800 OH \ubcc0\ud615\uc740 \ub3d9\ub4f1\ud55c 254nm UV \uc120\ub7c9\uc5d0\uc11c \ubd95\uaddc\uc0b0 \uc720\ub9ac\ubcf4\ub2e4 \ud6e8\uc52c \ub0ae\uc740 \ud0dc\uc591\ud654\uc728\uc744 \ub098\ud0c0\ub0b4\uba70, \ud22c\uacfc\uc728 \ubcc0\ud654\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>10\u2078 J\/m\u00b2\ub2f9 0.5%<\/strong> \ubb38\uc11c\ud654\ub41c \ub178\ud654 \uc5f0\uad6c\uc5d0\uc11c \uc790\uc678\uc120 \ud50c\ub8e8\uc5b8\uc2a4\uc758 \ube44\uc728\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/p>\n<h4>\ubd84\uad11 \ubc0f \ub808\uc774\uc800 \uc2dc\uc2a4\ud15c \uc801\ud569\uc131<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc2dc\uc2a4\ud15c<\/th>\n<th>\uc791\ub3d9 \ud30c\uc7a5(nm)<\/th>\n<th>\uc11d\uc601 \uc720\ub9ac\ud310 T(%)<\/th>\n<th>\ubd95\uaddc\uc0b0 T(%)<\/th>\n<th>\uc18c\ub2e4-\ub77c\uc784 T(%)<\/th>\n<th>\ucffc\uce20 \uc801\ud569<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ArF \uc5d1\uc2dc\uba38 \ub808\uc774\uc800<\/td>\n<td>193<\/td>\n<td>~75-80<\/td>\n<td>&lt;1<\/td>\n<td>&lt;1<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<tr>\n<td>KrF \uc5d1\uc2dc\uba38 \ub808\uc774\uc800<\/td>\n<td>248<\/td>\n<td>~88<\/td>\n<td>&lt;5<\/td>\n<td>&lt;1<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<tr>\n<td>\uba38\ud050\ub9ac \uc544\uc774\ub77c\uc778<\/td>\n<td>365<\/td>\n<td>&gt;92<\/td>\n<td>~70<\/td>\n<td>&lt;30<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<tr>\n<td>\ub77c\ub9cc(532nm)<\/td>\n<td>532<\/td>\n<td>&gt;93<\/td>\n<td>&gt;90<\/td>\n<td>&gt;89<\/td>\n<td>\uc608(\ub0ae\uc740 \ud615\uad11)<\/td>\n<\/tr>\n<tr>\n<td>Nd:YAG<\/td>\n<td>1,064<\/td>\n<td>&gt;93<\/td>\n<td>&gt;92<\/td>\n<td>&gt;90<\/td>\n<td>\uc608<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uace0\uc628 \uc0b0\uc5c5\uc6a9 \ubdf0\ud3ec\ud2b8 \ubc0f \ud504\ub85c\uc138\uc2a4 \ucc3d<\/h3>\n<p>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ubc18\ub3c4\uccb4 \ubd84\uc57c \uc678\uc5d0\ub3c4 \uace0\uc628, \ubd80\uc2dd\uc131 \ub300\uae30, \uc218\ucc9c \uc2dc\uac04 \ub2e8\uc704\ub85c \uce21\uc815\ub418\ub294 \uc5f0\uc18d \uc791\ub3d9 \uc8fc\uae30\ub97c \ud2b9\uc9d5\uc73c\ub85c \ud558\ub294 \uad11\ubc94\uc704\ud55c \uc0b0\uc5c5 \uacf5\uc815\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p><strong>\uc720\ub9ac \uc6a9\ud574 \ubc0f \ud50c\ub85c\ud2b8 \uc720\ub9ac \uc6a9\uad11\ub85c<\/strong> \uc6a9\uc735 \uc628\ub3c4 1,400~1,600\u00b0C\uc640 \ubcf5\uc0ac\uc5f4 \ubd80\ud558\uac00 \uadf9\uc2ec\ud55c \uc5f0\uc18c \uacf5\uac04\uc5d0\uc11c \uc791\ub3d9\ud569\ub2c8\ub2e4. \ud654\uc5fc \ubaa8\ub2c8\ud130\ub9c1, \uc628\ub3c4 \uace0\uc628 \uce21\uc815, \uc721\uc548 \uacf5\uc815 \uac80\uc0ac\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc6a9\uad11\ub85c \ud06c\ub77c\uc6b4 \ub610\ub294 \uce21\ubcbd\uc5d0 \uc124\uce58\ub41c \uad00\ucc30\uc6a9 \ubdf0\ud3ec\ud2b8\ub294 \uacf5\uc815 \uba74\uc758 \ud45c\uba74 \uc628\ub3c4\uac00 500~900\u00b0C\ub85c \uc9c0\uc18d\ub418\ub294 \uac83\uc744 \uacbd\ud5d8\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc124\ube44\uc758 \uc11d\uc601 \uc720\ub9ac\ud310 \ubdf0\ud3ec\ud2b8\uc758 \ubb38\uc11c\ud654\ub41c \uc11c\ube44\uc2a4 \uc218\uba85\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>12-24\uac1c\uc6d4<\/strong> \ub97c \ucd08\uacfc\ud558\uba74 \ud45c\uba74 \ud0c8\uc11d\ud654(\ube44\uc815\uc9c8 SiO\u2082 \ud45c\uba74\uce35\uc758 \uacb0\uc815\ud654)\ub85c \uc778\ud574 \uad50\uccb4\uac00 \ud544\uc694\ud55c \ubc18\uba74, \ud3c9\ud3c9\ud55c \uc720\ub9ac \uae30\ud310\uc740 \ub3d9\ub4f1\ud55c \uc5f4 \ub178\ucd9c \uc870\uac74\uc5d0\uc11c \uba87 \uc2dc\uac04 \uc774\uc0c1 \uacac\ub51c \uc218 \uc788\ub294 \ub300\uccb4 \uae30\ud310\uc774 \uc5c6\uc2b5\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c \uc5f0\ud654\uc810\uc774 \uc544\ub2cc \ud0c8\uc11d\ud654 \ud55c\uacc4\uac00 \uc9c0\uc18d\uc801\uc778 \uace0\uc628 \ubdf0\ud3ec\ud2b8 \uc11c\ube44\uc2a4\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uad50\uccb4 \uc8fc\uae30\ub97c \uacb0\uc815\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc720\ud654\ud559 \uac1c\uc9c8\uae30 \ubc0f \ubd84\ud574\ub85c \ubdf0\ud3ec\ud2b8<\/strong> \ub294 \uace0\uc628(\ud53c\ubd80 \uc628\ub3c4 600~900\u00b0C)\uacfc H\u2082, CH\u2084, CO\uac00 \ud3ec\ud568\ub41c \ud658\uc6d0 \uac00\uc2a4 \ud658\uacbd\uc774\ub77c\ub294 \ubcf5\ud569\uc801\uc778 \uacfc\uc81c\ub97c \uc81c\uc2dc\ud569\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uace0\uc628 \ud658\uc6d0 \uc870\uac74\uc5d0\uc11c \ubd95\uc18c \ud718\ubc1c\uc774 \ubc1c\uc0dd\ud558\ub294 \ubd95\uaddc\uc0b0 \uc720\ub9ac\uc640 \ub2ec\ub9ac \uc0ac\uc6a9 \uc628\ub3c4 \ud55c\uacc4\uae4c\uc9c0 \ud658\uc6d0 \ubd84\uc704\uae30\uc5d0\uc11c \ud654\ud559\uc801\uc73c\ub85c \uc548\uc815\uc801\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud658\uacbd\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \ubdf0\ud3ec\ud2b8\uc758 \ud3c9\uade0 \uad50\uccb4 \uc8fc\uae30\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>18\uac1c\uc6d4<\/strong> \uc5f0\uc18d \uc791\ub3d9 \uc2dc \uc720\uc9c0\ubcf4\uc218 \ube48\ub3c4 - \uc911\uc694\ud55c \uc124\ube44\uc5d0 \ub300\ud574 \ud5a5\uc0c1\ub41c \ud0c8\uc11d\ud654 \uc800\ud56d\uc131\uc744 \uac16\ucd98 \uace0\uc21c\ub3c4 \uc11d\uc601 \ub4f1\uae09\uc744 \uc120\ud0dd\ud558\ub294 \uacbd\uc81c\uc801 \uae30\uc900\uc744 \uc815\uc758\ud558\ub294 \uc720\uc9c0\ubcf4\uc218 \ube48\ub3c4\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\ud50c\ub77c\uc988\ub9c8 \ucc98\ub9ac \ucc54\ubc84<\/strong> \ubc18\uc751\uc131 \uc774\uc628 \uc5d0\uce6d(RIE) \ubc0f \uc720\ub3c4 \uacb0\ud569 \ud50c\ub77c\uc988\ub9c8(ICP) \uc99d\ucc29\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ubdf0\ud3ec\ud2b8 \uc7ac\ub8cc\ub294 \ub192\uc740 \uae30\ud310 \uc628\ub3c4\uc5d0\uc11c \ubd88\uc18c \ud568\uc720 \ud50c\ub77c\uc988\ub9c8 \uc885(CF\u2084, SF\u2086)\uc5d0 \ub178\ucd9c\ub429\ub2c8\ub2e4. \uc774 \ucc54\ubc84\uc758 \uc11d\uc601 \uc720\ub9ac\ud310 \ubdf0\ud3ec\ud2b8\ub294 \ubd88\uc18c \ub77c\ub514\uce7c \uacf5\uaca9\uc73c\ub85c \uc778\ud574 \ub290\ub9ac\uc9c0\ub9cc \uce21\uc815 \uac00\ub2a5\ud55c \ud45c\uba74 \uce68\uc2dd\uc744 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc740 \uc18d\ub3c4\ub85c \uacbd\ud5d8\ud569\ub2c8\ub2e4. <strong>0.1-0.3 \u03bcm\/\uc2dc\uac04<\/strong> \uc774\ub7ec\ud55c \uc5d0\ub108\uc9c0 \ubc00\ub3c4\uc5d0\uc11c \ubd88\uc18c \ud50c\ub77c\uc988\ub9c8 \uce68\uc2dd\uc5d0 \uc601\ud5a5\uc744 \ubc1b\uc9c0 \uc54a\ub294 \uc0c1\uc5c5\uc801\uc73c\ub85c \uc2e4\uc6a9\uc801\uc778 \ud3c9\uba74 \uad11\ud559 \uc7ac\ub8cc\ub294 \uc5c6\uae30 \ub54c\ubb38\uc5d0 \uc81c\uac70\ud558\uae30\ubcf4\ub2e4\ub294 \uc815\uae30\uc801\uc778 \uad50\uccb4\ub97c \ud1b5\ud574 \uad00\ub9ac\ub418\ub294 \uc18c\ubaa8\ud488\uc73c\ub85c \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h4>\uace0\uc628 \uc0b0\uc5c5\uc6a9 \ubdf0\ud3ec\ud2b8 \uc131\ub2a5<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<th>\ud504\ub85c\uc138\uc2a4 \uce21 \uc628\ub3c4(\u00b0C)<\/th>\n<th>\ubd84\uc704\uae30<\/th>\n<th>\uc11d\uc601 \uc720\ub9ac\ud310 \uc11c\ube44\uc2a4 \uc218\uba85<\/th>\n<th>\ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc11c\ube44\uc2a4 \uc218\uba85<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc720\ub9ac \uc6a9\ud574\ub85c \ubdf0\ud3ec\ud2b8<\/td>\n<td>500-900<\/td>\n<td>\uc0b0\ud654<\/td>\n<td>12-24\uac1c\uc6d4<\/td>\n<td>\uc2dc\uac04<\/td>\n<\/tr>\n<tr>\n<td>\uc11d\uc720\ud654\ud559 \uac1c\uc9c8\uae30 \ubdf0\ud3ec\ud2b8<\/td>\n<td>600-900<\/td>\n<td>\uac10\uc18c<\/td>\n<td>~18\uac1c\uc6d4<\/td>\n<td>\ud574\ub2f9 \uc5c6\uc74c<\/td>\n<\/tr>\n<tr>\n<td>\ud50c\ub77c\uc988\ub9c8 RIE \ucc54\ubc84<\/td>\n<td>200-400<\/td>\n<td>\ubd88\uc18c \ud50c\ub77c\uc988\ub9c8<\/td>\n<td>\uc608\uc57d\ub41c \uad50\uccb4<\/td>\n<td>\ud574\ub2f9 \uc5c6\uc74c<\/td>\n<\/tr>\n<tr>\n<td>\uc0b0\uc5c5\uc6a9 \uc5f0\uc18c \ubaa8\ub2c8\ud130<\/td>\n<td>400-700<\/td>\n<td>\uc0b0\ud654\/\uace0\uc628 \uac00\uc2a4<\/td>\n<td>6-18\uac1c\uc6d4<\/td>\n<td>\uc8fc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/quartz-glass-plate-placed-on-black-anodized-optical-table-with-laser-equipment.webp\" alt=\"\ub808\uc774\uc800 \uc7a5\ube44\ub85c \uac80\uc740\uc0c9 \uc591\uadf9\uc0b0\ud654 \ucc98\ub9ac\ub41c \uad11\ud559 \ud14c\uc774\ube14 \uc704\uc5d0 \uc11d\uc601 \uc720\ub9ac\ud310 \ubc30\uce58\" title=\"\ub808\uc774\uc800 \uc7a5\ube44\ub85c \uac80\uc740\uc0c9 \uc591\uadf9\uc0b0\ud654 \ucc98\ub9ac\ub41c \uad11\ud559 \ud14c\uc774\ube14 \uc704\uc5d0 \uc11d\uc601 \uc720\ub9ac\ud310 \ubc30\uce58\" \/><\/p>\n<h2>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ud45c\uc900 \uc11d\uc601 \uc720\ub9ac\ud310\ubcf4\ub2e4 \ubb34\uac70\uc6b4 \uacbd\uc6b0<\/h2>\n<p>\uc774 \ubb38\uc11c\uc5d0\uc11c \uc0b4\ud3b4\ubcf8 \uc804\uccb4 \ud30c\ub77c\ubbf8\ud130 \ubc94\uc704\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc740 \ub300\ubd80\ubd84\uc758 \uc0b0\uc5c5 \ubc0f \uc2e4\ud5d8\uc2e4 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ub3d9\ub4f1\ud55c \uc131\ub2a5\uc744 \ubc1c\ud718\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8\uac00 \ud45c\uc900 \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \ube44\uad50\ud560 \uc218 \uc5c6\ub294 \uc131\ub2a5\uc744 \uc81c\uacf5\ud558\ub294 \ub124 \uac00\uc9c0 \ud2b9\uc815 \uc870\uac74\uc774 \uc874\uc7ac\ud558\uba70, \uc774\ub7ec\ud55c \ud658\uacbd\uc5d0\uc11c \uc791\uc5c5\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uadf8 \ucc28\uc774\uc810\uc744 \uc815\ud655\ud558\uac8c \uc774\ud574\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>180nm \ubbf8\ub9cc\uc758 \ub525 UV \uc804\uc1a1:<\/strong> \ud654\uc5fc \uac00\uc218\ubd84\ud574\ub85c \uc0dd\uc0b0\ub41c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc9c4\uacf5 \uc790\uc678\uc120(VUV) \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c 150nm \uc774\ud558\uc758 \uc9e7\uc740 \ud30c\uc7a5\uc5d0\uc11c\ub3c4 \uc720\uc6a9\ud55c \ud22c\uacfc\uc728\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4. \ucc9c\uc5f0 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc720\uc0ac\ud55c SiO\u2082 \uad6c\uc131\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0 150-180nm \ubc94\uc704\uc758 \ud761\uc218 \uc13c\ud130\ub97c \uc0dd\uc131\ud558\ub294 \ucc9c\uc5f0 \uacf5\uae09 \uc6d0\ub8cc\uc758 \ubbf8\ub7c9 \uae08\uc18d \ubd88\uc21c\ubb3c\uacfc \uad6c\uc870\uc801 \ubd88\uade0\uc77c\uc131\uc744 \ud3ec\ud568\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. 193nm\uc5d0\uc11c ArF \ub808\uc774\uc800 \ub9ac\uc18c\uadf8\ub798\ud53c\uc758 \uacbd\uc6b0 \uc11d\uc601 \uc720\ub9ac\ud310\uc774 \uc801\ud569\ud569\ub2c8\ub2e4. 157nm\uc758 VUV \ubd84\uad11\ubc95 \ub610\ub294 F\u2082 \ub808\uc774\uc800 \uc751\uc6a9 \ubd84\uc57c\uc758 \uacbd\uc6b0 \ucd5c\uace0\uae09 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub9cc \uad11\ud559\uc801\uc73c\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>OH \ud568\ub7c9 \uc815\ubc00\ub3c4 1ppm \ubbf8\ub9cc:<\/strong> 2.5~3.5\u03bcm \ucc3d\uc5d0\uc11c \uadfc\uc801\uc678\uc120 \ud22c\uacfc\uac00 \ud544\uc694\ud558\uace0 2.72\u03bcm\uc5d0\uc11c OH \uad00\ub828 \ud761\uc218\uac00 \ucd5c\uc18c\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc0dd\uc0b0\uc744 \ud1b5\ud574\uc11c\ub9cc \ub2ec\uc131 \uac00\ub2a5\ud55c 1ppm \ubbf8\ub9cc\uc758 OH \ub18d\ub3c4\ub97c \uc694\uad6c\ud569\ub2c8\ub2e4. \ud45c\uc900 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ub4f1\uae09\uc5d0 \uad00\uacc4\uc5c6\uc774 150-400ppm\uc758 OH\ub97c \uc804\ub2ec\ud558\ubbc0\ub85c \uc774 \ud2b9\uc815 \uc2a4\ud399\ud2b8\ub7fc \uc694\uad6c \uc0ac\ud56d\uc5d0 \uc801\ud569\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ud30c\uba74\uc5d0 \ubbfc\uac10\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \ub0b4\ubd80 \uade0\uc9c8\uc131:<\/strong> 633nm\uc5d0\uc11c \u03bb\/20 \uc774\ud558\uc758 \uc815\ubc00\ub3c4\ub85c \uc791\ub3d9\ud558\ub294 \uac04\uc12d\uacc4 \uae30\uc900 \ud50c\ub7ab, \ub808\uc774\uc800 \uacf5\uc9c4\uae30 \uc5d0\ud0c8\ub860 \ubc0f \ud30c\uba74 \uc13c\uc11c\ub294 \uad74\uc808\ub960 \ubcc0\ud654\uac00 \uacbd\ub85c \uc13c\ud2f0\ubbf8\ud130\ub2f9 \uc57d 1 \u00d7 10-\u2076 \uc774\ud558\uc778 \uc7ac\ub8cc\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. CVD\ub85c \uc0dd\uc0b0\ub41c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \ubc94\uc704\uc5d0\uc11c \uad74\uc808\ub960 \uade0\uc77c\uc131\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4. <strong>0.5-1 \u00d7 10-\u2076\/cm<\/strong>\uc778 \ubc18\uba74, \ucc9c\uc5f0 \uc6d0\ub8cc\uc5d0\uc11c \ub179\uc778 \ud45c\uc900 \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uacfc \uac19\uc740 \uc9c0\uc218 \ubcc0\ud654\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. <strong>2-5 \u00d7 10-\u2076\/cm<\/strong> \uacf5\uae09 \uc6d0\ub8cc \uc870\uc131 \uad6c\ubc30\ub85c \uc778\ud574 \uc815\ubc00 \ud30c\uba74 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \uc62c\ubc14\ub978 \uc0ac\uc591\uc785\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ud45c\uc900 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub300\ud55c \ud310\ub2e8:<\/strong> \uc791\ub3d9 \ud30c\uc7a5\uc774 200nm\uc5d0\uc11c 2,500nm \uc0ac\uc774\uc778 \uacbd\uc6b0 \uacf5\uc815 \uc628\ub3c4\ub294 1,000\u00b0C \uc774\ud558\ub85c \uc720\uc9c0\ub418\uba70 \ud30c\uba74 \uc815\ubc00\ub3c4 \uc694\uad6c \uc0ac\ud56d\uc740 \u03bb\/4-\u03bb\/10 \uc218\uc900\uc785\ub2c8\ub2e4, <strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc5d0 \ub3d9\ub4f1\ud55c \uae30\ub2a5\uc801 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/strong> \uce58\uc218 \ubc0f \ud45c\uba74 \ub9c8\uac10 \uc0ac\uc591\uc5d0 \ub530\ub77c \uc77c\uad00\ub418\uac8c 30~60% \ub0ae\uc740 \ube44\uc6a9\uc73c\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4. \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc11d\uc601 \uc720\ub9ac\ud310\uc774 \uacf5\uc815 \uc694\uac74\uc744 \uc644\uc804\ud788 \ucda9\uc871\ud558\ub294 \uacbd\uc6b0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \uc790\ub3d9\uc73c\ub85c \uc9c0\uc815\ud574\uc11c\ub294 \uc548 \ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\uc2e4\uc81c \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \uc7ac\ub8cc \uc120\ud0dd \uae30\uc900<\/h2>\n<p>\ubaa8\ub4e0 \ud30c\ub77c\ubbf8\ud130\ub97c \ube44\uad50\ud558\uba74 \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \ubaa8\ud638\ud558\uac70\ub098 \uacfc\ub3c4\ud55c \uc0ac\uc591 \uc5c6\uc774 \uae30\ud310 \ud658\uacbd \ub0b4\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uc744 \uc62c\ubc14\ub974\uac8c \ubc30\uce58\ud560 \uc218 \uc788\ub294 \uc77c\uad00\ub41c \uc7ac\ub8cc \uc120\ud0dd \ud504\ub808\uc784\uc6cc\ud06c\uac00 \ub098\ud0c0\ub0a9\ub2c8\ub2e4.<\/p>\n<p>\uc120\ud0dd \ub85c\uc9c1\uc740 \uc138 \uac00\uc9c0 \uae30\ubcf8 \ucd95 \uae30\uc900\uc744 \ub530\ub985\ub2c8\ub2e4: <strong>\uc791\ub3d9 \ud30c\uc7a5, \ucd5c\ub300 \uc0ac\uc6a9 \uc628\ub3c4 \ubc0f \ud654\ud559\uc801 \ud658\uacbd.<\/strong> 320nm \uc774\ud558\uc758 \uc790\uc678\uc120 \ud22c\uacfc\uac00 \ud544\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0, \uc11d\uc601 \uc720\ub9ac\ud310 \ub610\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74-\uc18c\ub2e4 \uc11d\ud68c\uc640 \ubd95\uaddc\uc0b0\uc5fc\uc740 \uc790\uc678\uc120 \ud761\uc218 \uac00\uc7a5\uc790\ub9ac\ub85c \uc778\ud574 \uc989\uc2dc \uc2e4\uaca9 \ucc98\ub9ac\ub429\ub2c8\ub2e4. \uc0ac\uc6a9 \uc628\ub3c4\uac00 450\u00b0C\ub97c \ucd08\uacfc\ud558\uba74 \ubd95\uaddc\uc0b0\uc5fc\uc774 \uc81c\uac70\ub418\uace0, 300\u00b0C\ub97c \ucd08\uacfc\ud558\uba74 \uc18c\ub2e4\uc11d\ud68c\uac00 \uc81c\uac70\ub429\ub2c8\ub2e4. \ud654\ud559\uc801 \ud658\uacbd\uc5d0\uc11c HF\uac00 \uc5c6\ub294 \ubb34\uae30\uc0b0\uc5d0 \ub300\ud55c \ub0b4\uc131\uc774 \uc694\uad6c\ub418\ub294 \uacbd\uc6b0 \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ubaa8\ub450 \uc801\ud569\ud558\uba70 \uc18c\ub2e4\uc11d\ud68c\ub294 \uc81c\uc678\ub429\ub2c8\ub2e4. \uacb0\uacfc\uc801\uc73c\ub85c \uc790\uc678\uc120 \ud22c\uacfc\uc640 \uace0\uc628, \uc790\uc678\uc120 \ud22c\uacfc\uc640 \ub0b4\ud654\ud559\uc131 \ub610\ub294 \uace0\uc628\uacfc \ub0b4\ud654\ud559\uc131 \uc911 \ub450 \uac00\uc9c0 \uc774\uc0c1\uc758 \uc870\uac74\uc744 \ub3d9\uc2dc\uc5d0 \ucda9\uc871\ud574\uc57c \ud558\ub294 \ubaa8\ub4e0 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \uc11d\uc601 \uc720\ub9ac\ud310(\ub610\ub294 \uc6a9\uc735 \uc2e4\ub9ac\uce74)\uc774 \uc720\uc77c\ud558\uac8c \uc801\ud569\ud55c \uc7ac\ub8cc \ub4f1\uae09\uc73c\ub85c \uc778\uc815\ubc1b\uac8c \ub429\ub2c8\ub2e4.<\/p>\n<p>\uc774\ub807\uac8c \uc881\ud600\uc9c4 \uc601\uc5ed \ub0b4\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310 \uc0ac\uc774\uc758 \uc120\ud0dd\uc740 180nm \uc774\ud558\uc758 \uae4a\uc740 \uc790\uc678\uc120\uc774 \ud544\uc694\ud55c\uc9c0(\uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc120\ud0dd), 2.72\u03bcm\uc5d0\uc11c OH \ud761\uc218\uac00 \uc6b0\ub824\ub418\ub294\uc9c0(\ub0ae\uc740 OH \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc120\ud0dd), 1 \u00d7 10-\u2076\/cm \uc774\ud558\uc758 \uc778\ub371\uc2a4 \uade0\uc9c8\uc131\uc774 \uc694\uad6c\ub418\ub294\uc9c0(\uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc120\ud0dd) \ub4f1\uc758 2\ucc28 \uae30\uc900\uc5d0 \uc758\ud574 \uacb0\uc815\ub429\ub2c8\ub2e4. \ub300\ubd80\ubd84\uc758 \ubc18\ub3c4\uccb4, \ub808\uc774\uc800, \ubd84\uad11\ud559 \ubc0f \uc0b0\uc5c5\uc6a9 \ubdf0\ud3ec\ud2b8 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \ud2b9\uc9d5\uc9d3\ub294 \uc774\ub7ec\ud55c \ud2b9\uc815 \uc694\uad6c \uc0ac\ud56d\uc774 \uc5c6\ub294 \uacbd\uc6b0, \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uae30\uc220\uc801\uc73c\ub85c \ucda9\ubd84\ud558\uace0 \uacbd\uc81c\uc801\uc73c\ub85c \ud569\ub9ac\uc801\uc778 \uae30\ud310 \uc120\ud0dd\uc785\ub2c8\ub2e4.<\/strong><\/p>\n<h4>\ud1b5\ud569 \uc790\ub8cc \uc120\ud0dd<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc120\ud0dd \uae30\uc900<\/th>\n<th>\uc11d\uc601 \uc720\ub9ac\ud310<\/th>\n<th>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud50c\ub808\uc774\ud2b8<\/th>\n<th>\ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310<\/th>\n<th>\uc18c\ub2e4-\ub77c\uc784 \uc720\ub9ac\ud310<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc790\uc678\uc120 \ud22c\uacfc(200~320nm)<\/td>\n<td>\u2713<\/td>\n<td>\u2713<\/td>\n<td>\u2717<\/td>\n<td>\u2717<\/td>\n<\/tr>\n<tr>\n<td>\uc790\uc678\uc120 \ud22c\uacfc\uc728(&lt;180nm)<\/td>\n<td>\uc81c\ud55c\uc801<\/td>\n<td>\u2713<\/td>\n<td>\u2717<\/td>\n<td>\u2717<\/td>\n<\/tr>\n<tr>\n<td>\uc11c\ube44\uc2a4 \uc628\ub3c4 &gt; 500\u00b0C<\/td>\n<td>\u2713<\/td>\n<td>\u2713<\/td>\n<td>\u2717<\/td>\n<td>\u2717<\/td>\n<\/tr>\n<tr>\n<td>\uc11c\ube44\uc2a4 \uc628\ub3c4 1,000\u00b0C \uc774\uc0c1<\/td>\n<td>\u2713<\/td>\n<td>\u2713<\/td>\n<td>\u2717<\/td>\n<td>\u2717<\/td>\n<\/tr>\n<tr>\n<td>\uc5f4 \ucda9\uaca9 \uc800\ud56d<\/td>\n<td>\uc6b0\uc218<\/td>\n<td>\uc6b0\uc218<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<td>Poor<\/td>\n<\/tr>\n<tr>\n<td>\ubbf8\ub124\ub784 \uc0b0 \ub0b4\uc131<\/td>\n<td>\uc6b0\uc218<\/td>\n<td>\uc6b0\uc218<\/td>\n<td>Good<\/td>\n<td>Poor<\/td>\n<\/tr>\n<tr>\n<td>\uc778\ub371\uc2a4 \uade0\uc9c8\uc131 &lt;1\u00d710-\u2076\/cm<\/td>\n<td>\uc81c\ud55c\uc801<\/td>\n<td>\u2713<\/td>\n<td>\u2717<\/td>\n<td>\u2717<\/td>\n<\/tr>\n<tr>\n<td>OH \uc81c\uc5b4 &lt;1ppm<\/td>\n<td>\u2717<\/td>\n<td>\u2713 (\ud569\uc131)<\/td>\n<td>\u2717<\/td>\n<td>\u2717<\/td>\n<\/tr>\n<tr>\n<td>\uacbd\ub3c4(\ub0b4\ub9c8\ubaa8\uc131)<\/td>\n<td>\ub192\uc74c<\/td>\n<td>\ub192\uc74c<\/td>\n<td>\ubcf4\ud1b5<\/td>\n<td>\ub0ae\uc74c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\uacb0\ub860<\/h2>\n<p>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ud569\uc131 \uc804\uad6c\uccb4\ub098 \ud2b9\uc218 \ucc98\ub9ac \uc5c6\uc774\ub3c4 UV \ud22c\uba85\uc131, \ucd08\uc800 CTE, \ub192\uc740 \uc0ac\uc6a9 \uc628\ub3c4, \ud654\ud559\uc801 \ubd88\ud65c\uc131 \ubc0f \uae30\uacc4\uc801 \uacbd\ub3c4\uac00 \ub2e8\uc77c \uc7ac\ub8cc\uc5d0 \uc218\ub834\ub418\uae30 \ub54c\ubb38\uc5d0 \ud3c9\uba74 \uad11\ud559 \uae30\ud310 \uc911\uc5d0\uc11c \ub3c5\ubcf4\uc801\uc778 \uc704\uce58\ub97c \ucc28\uc9c0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ubd95\uaddc\uc0b0 \uc720\ub9ac\ud310\uacfc \uc18c\ub2e4\uc11d\ud68c \uc720\ub9ac\ud310\uc758 \uc131\ub2a5 \ucc28\uc774\ub294 \uc870\uc0ac\ub41c \ubaa8\ub4e0 \uc911\uc694 \ub9e4\uac1c\ubcc0\uc218\uc5d0\uc11c \ub69c\ub837\ud558\uac8c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uacfc \ube44\uad50\ud588\uc744 \ub54c, \ub300\ubd80\ubd84\uc758 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc131\ub2a5\uc740 \uae30\ub2a5\uc801\uc73c\ub85c \ub3d9\ub4f1\ud558\uba70, \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 180nm \ubbf8\ub9cc\uc758 \uae4a\uc740 \uc790\uc678\uc120 \ud22c\uacfc, 1ppm \ubbf8\ub9cc\uc758 OH \ud568\ub7c9 \ub610\ub294 \uac04\uc12d\uacc4 \ub4f1\uae09 \uc9c0\uc218 \uade0\uc77c\uc131\uc774 \uba85\uc2dc\uc801\uc73c\ub85c \uc694\uad6c\ub418\ub294 \uacbd\uc6b0\uc5d0\ub9cc \uc120\ud0dd\uc774 \ubcf4\uc7a5\ub429\ub2c8\ub2e4. UV \ud3ec\ud1a0\ub2c9\uc2a4, \uace0\uc628 \uacf5\uc815 \ud658\uacbd, \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub610\ub294 \ud654\ud559 \uacf5\uc815 \uad00\ucc30\uc5d0\uc11c \uae30\ud310 \uc801\ud569\uc131\uc744 \uac80\uc99d\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\uc758 \uacbd\uc6b0, \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc218\uc2ed \ub144\uac04 \uc0b0\uc5c5 \ud604\uc7a5\uc5d0\uc11c \uce21\uc815\ub41c \uae30\uc220 \uae30\ub85d\uc744 \ud1b5\ud574 \uc774\ub7ec\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uad11\ud559 \ubc0f \uc5f4 \uc694\uad6c \uc0ac\ud56d\uc744 \ubaa8\ub450 \ucda9\uc871\ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74\ud310\uc758 \ucc28\uc774\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><\/p>\n<p>\ub450 \uc7ac\ub8cc \ubaa8\ub450 \uac70\uc758 \ub3d9\uc77c\ud55c \uad74\uc808\ub960(589nm\uc5d0\uc11c ~1.4584), CTE(~0.55 \u00d7 10-\u2076 \/K), \uc0ac\uc6a9 \uc628\ub3c4(~1,050\u00b0C \uc5f0\uc18d)\ub97c \uac00\uc9c4 \ube44\uc815\uc9c8 SiO\u2082\uc785\ub2c8\ub2e4. \uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ucc9c\uc5f0 \uacb0\uc815\uc9c8 \uc11d\uc601 \ubaa8\ub798\uc5d0\uc11c \uc0dd\uc0b0\ub418\ub294 \ubc18\uba74, \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ud310\uc740 SiCl\u2084\uc640 \uac19\uc740 \ud654\ud559\uc801 \uc804\uad6c\uccb4\uc5d0\uc11c \ud569\uc131\ub41c\ub2e4\ub294 \uc810\uc5d0\uc11c \ucc28\uc774\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uae08\uc18d \ubd88\uc21c\ubb3c \uc218\uc900\uc774 \ub0ae\uace0, OH \ud568\ub7c9\uc744 1ppm \uc774\ud558\ub85c \uc81c\uc5b4\ud560 \uc218 \uc788\uc73c\uba70, 180nm \uc774\ud558\uc758 \uc6b0\uc218\ud55c \ub525 UV \ud22c\uacfc\uc728 \ub4f1 \uae4c\ub2e4\ub85c\uc6b4 \ud2b9\uc815 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c\ub9cc \uc911\uc694\ud55c \ud2b9\uc131\uc744 \uad6c\ud604\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc744 \ud654\uc5fc\uc5d0 \uc9c1\uc811 \uc811\ucd09\ud558\ub294 \uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\ub098\uc694?<\/strong><\/p>\n<p>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 1,000\u00b0C\uac00 \ub118\ub294 \uc21c\uac04 \uc628\ub3c4 \ucc28\uc774\ub97c \ud30c\uc190 \uc5c6\uc774 \uacac\ub51c \uc218 \uc788\uc5b4 \ud654\uc5fc \uad00\ucc30 \ucc3d\uc774\ub098 \ubcf5\uc0ac\uc5f4\uc5d0 \uc9c1\uc811 \ub178\ucd9c\ub418\ub294 \uc6a9\ub3c4\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4. \uc57d 1,665\u00b0C\uc758 \uc5f0\ud654\uc810\uc740 \ubaa8\ub4e0 \ud45c\uc900 \uc0b0\uc5c5 \uc5f0\uc18c \ud658\uacbd\uc5d0\uc11c \uad6c\uc870\uc801 \ubb34\uacb0\uc131\uc744 \uc720\uc9c0\ud55c\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. \uc57d 1,050\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc9c0\uc18d\uc801\uc778 \ud0c8\uc11d\ud654(\ud45c\uba74 \uacb0\uc815\ud654)\ub294 \uc2e4\uc81c \uc0ac\uc6a9 \uc218\uba85 \ud55c\uacc4\ub97c \uc815\uc758\ud558\uba70, \uc77c\ubc18\uc801\uc73c\ub85c \uace0\uc628 \ubdf0\ud3ec\ud2b8 \uc5f0\uc18d \uc0ac\uc6a9 \uc2dc 12~24\uac1c\uc6d4\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \uc790\uc678\uc120\uc744 \ud22c\uacfc\ud558\ub294 \ubc18\uba74 \ubd95\uaddc\uc0b0 \uc720\ub9ac\ub294 \ud22c\uacfc\ud558\uc9c0 \uc54a\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><\/p>\n<p>\ubd95\uaddc\uc0b0 \uc720\ub9ac\uc758 \uc790\uc678\uc120 \ud761\uc218\ub294 \ubd95\uc0b0\uc5fc \ub124\ud2b8\uc6cc\ud06c \uac1c\uc9c8\uc81c(B\u2082O\u2083)\uc640 250~320nm \ubc94\uc704\uc758 \uc804\uc790 \ud761\uc218 \ub300\uc5ed\uc744 \uc0dd\uc131\ud558\ub294 \ubbf8\ub7c9 \uc804\uc774 \uae08\uc18d \ubd88\uc21c\ubb3c\uc5d0\uc11c \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \u226599.9% SiO\u2082\ub85c \uad6c\uc131\ub41c \uc11d\uc601 \uc720\ub9ac\ud310\uc5d0\ub294 \uc774\ub7ec\ud55c \ub124\ud2b8\uc6cc\ud06c \uc218\uc815\uc790\uac00 \uc5c6\uc73c\uba70 \uc804\uc790 \ud761\uc218 \uc5d0\uc9c0\uac00 150nm \uc774\ud558\ub85c \ub5a8\uc5b4\uc838 UV-C, UV-B \ubc0f UV-A \ubc94\uc704\ub97c \ud6e8\uc52c \ubc97\uc5b4\ub0a9\ub2c8\ub2e4. \uadf8 \uacb0\uacfc \uc11d\uc601 \uc720\ub9ac\ud310\uc740 248nm\uc5d0\uc11c 88% \uc774\uc0c1\uc758 \uc785\uc0ac \ubc29\uc0ac\uc120\uc744 \ud22c\uacfc\ud558\ub294 \ubc18\uba74, \ubd95\uaddc\uc0b0\uc740 5% \ubbf8\ub9cc\uc744 \ud22c\uacfc\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ubaa8\ub4e0 \uc0b0\uc5d0 \ub0b4\ud654\ud559\uc131\uc774 \uc788\ub098\uc694?<\/strong><\/p>\n<p>\uc11d\uc601 \uc720\ub9ac\ud310\uc740 \ud45c\uc900 \uacf5\uc815 \ub18d\ub3c4\uc5d0\uc11c \uc77c\ubc18\uc801\uc73c\ub85c \ud558\ub8e8 0.01 mg\/cm\u00b2 \ubbf8\ub9cc\uc758 \uc6a9\ud574\uc728\uc744 \ubcf4\uc774\ub294 HCl, H\u2082SO\u2084 \ubc0f HNO\u2083\ub97c \ud3ec\ud568\ud55c \ubb34\uae30\uc0b0\uc5d0 \ub300\ud55c \ub0b4\uc131\uc774 \ub9e4\uc6b0 \ub192\uc2b5\ub2c8\ub2e4. Si-O \uacb0\ud569\uc744 \ub04a\uc5b4 \ubaa8\ub4e0 SiO\u2082 \uae30\ubc18 \ubb3c\uc9c8\uc744 \uacf5\uaca9\ud558\ub294 \ubd88\uc0b0(HF)\uc5d0\ub294 \ub0b4\uc131\uc774 \uc5c6\uc2b5\ub2c8\ub2e4. \uace0\uc628\uc758 \ub18d\ucd95 \uc54c\uce7c\ub9ac \uc6a9\uc561(NaOH, KOH)\ub3c4 \uce21\uc815 \uac00\ub2a5\ud55c \uc6a9\ud574\ub97c \uc77c\uc73c\ud0b5\ub2c8\ub2e4. HF \ub610\ub294 \uac15\ud55c \uc54c\uce7c\ub9ac\uc5d0 \ub178\ucd9c\ub418\ub294 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uc11d\uc601\uc744 \ud3ec\ud568\ud55c \ud45c\uc900 \ud3c9\uba74 \uc720\ub9ac \uae30\ud310\uc740 \ubcf4\ud638 \ucf54\ud305\uc774\ub098 \ub300\uccb4 \uc18c\uc7ac \uc120\ud0dd \uc5c6\uc774\ub294 \ub0b4\uc131\uc744 \uc81c\uacf5\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p>\ucc38\uc870:<\/p>\n<div class=\"footnotes\">\n<hr \/>\n<ol>\n<li id=\"fn:1\">\n<p>\ud30c\uc5f4 \uacc4\uc218\ub294 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \uc7ac\ub8cc\uac00 \ud30c\ub2e8 \uc804\uc5d0 \uacac\ub51c \uc218 \uc788\ub294 \ucd5c\ub300 \uad7d\ud798 \uc751\ub825\uc744 \uc815\uc758\ud558\uc5ec \uc720\ub9ac \uae30\ud310\uc758 \ucc28\ub3d9 \uc5f4\ud33d\ucc3d\uc774 \uce58\uba85\uc801\uc778 \ud30c\uc190\uc744 \uc77c\uc73c\ud0a4\ub294 \uc751\ub825 \uc784\uacc4\uac12\uc744 \uc124\uc815\ud569\ub2c8\ub2e4.<a href=\"#fnref1:1\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:2\">\n<p>\uc0c9\uc218\ucc28\ub294 \uad11\ud559 \uc7ac\ub8cc\uc758 \uad74\uc808\ub960\uc758 \ud30c\uc7a5 \uc758\uc874\uc131\uc5d0\uc11c \ube44\ub86f\ub418\uba70, \uc11d\uc601 \uc720\ub9ac\ud310\uacfc \uac19\uc774 \uc544\ubca0\uc218\uac00 \ub192\uc740 \uae30\ud310\uc740 \uad11\ub300\uc5ed \uad11\ud559 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ube44\ub840\uc801\uc73c\ub85c \ub354 \uc791\uc740 \uc0c9 \ubcc0\uc704\ub97c \uc720\ubc1c\ud569\ub2c8\ub2e4.<a href=\"#fnref1:2\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:3\">\n<p>\ub77c\ub9cc \ubd84\uad11\ubc95\uc740 \ube44\ud0c4\uc131 \uad11 \uc0b0\ub780\uc5d0 \uc758\uc874\ud558\uc5ec \ubd84\uc790 \uc9c4\ub3d9 \uc2e0\ud638\ub97c \uc2dd\ubcc4\ud558\uba70, \ub808\uc774\uc800 \uc5ec\uae30 \uc2dc \uc11d\uc601 \uc720\ub9ac\ud310\uc758 \ud615\uad11 \ubc30\uacbd\uc774 \ubbf8\ubbf8\ud558\uc5ec \ub77c\ub9cc \uc140 \uc708\ub3c4\uc6b0 \ubc0f \uc0d8\ud50c \uce90\ub9ac\uc5b4\uc5d0 \uc120\ud638\ub418\ub294 \uae30\ud310 \uc7ac\ub8cc\uc785\ub2c8\ub2e4.<a href=\"#fnref1:3\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<\/ol>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\uad11\ud559 \uae30\ud310\uc744 \uc9c0\uc815\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc9c0\uc18d\uc801\uc778 \ub51c\ub808\ub9c8\uc5d0 \uc9c1\uba74\ud574 \uc788\uc2b5\ub2c8\ub2e4. \uc790\uc678\uc120 \ud22c\uacfc\uc728\uacfc \uc5f4 \uc548\uc815\uc131\uc744 \ubaa8\ub450 \ub9cc\uc871\ud558\ub294 \ub2e8\uc77c \uc18c\uc7ac\ub294 \uc5c6\ub294 \uac83 \uac19\uc2b5\ub2c8\ub2e4 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