{"id":11112,"date":"2026-03-09T02:00:59","date_gmt":"2026-03-08T18:00:59","guid":{"rendered":"https:\/\/toquartz.com\/?p=11112"},"modified":"2026-02-24T16:08:28","modified_gmt":"2026-02-24T08:08:28","slug":"quartz-glass-crucibles-in-semiconductor-crystal-growth","status":"publish","type":"post","link":"https:\/\/toquartz.com\/ko\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/","title":{"rendered":"\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uac00 CZ \uc2e4\ub9ac\ucf58 \uc0dd\uc0b0 \ud488\uc9c8\uc744 \uacb0\uc815\ud569\ub2c8\ub2e4."},"content":{"rendered":"<p>\ubc18\ub3c4\uccb4 \ud339\uc740 \ub3c4\uac00\ub2c8\ub97c \ud55c \ubc88 \ubf51\uc744 \ub54c\ub9c8\ub2e4 \uad50\uccb4\ud569\ub2c8\ub2e4. \uc870\ub2ec \uc8fc\uae30\uac00 \uc774\ub7ec\ud55c \uc218\uc694\ub97c \ub530\ub77c\uac00\uc9c0 \ubabb\ud558\uba74 \uc0dd\uc0b0\uc774 \uc911\ub2e8\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\ub294 \ucd08\ud06c\ub784\uc2a4\ud0a4 \uc2e4\ub9ac\ucf58 \uc0dd\uc0b0\uc5d0\uc11c \uac00\uc7a5 \ub9ce\uc774 \uc18c\ube44\ub418\ub294 \uad6c\uc870\uc801 \uad6c\uc131 \uc694\uc18c\uc785\ub2c8\ub2e4. \uc774 \ubb38\uc11c\uc5d0\uc11c\ub294 \uc5f4\ud654 \uba54\ucee4\ub2c8\uc998, \uc21c\ub3c4 \uc784\uacc4\uac12, \uce58\uc218 \ud45c\uc900, \ubc30\uce58 \uc77c\uad00\uc131 \uc694\uad6c \uc0ac\ud56d, \uacf5\uae09 \ub9ac\ub4dc \ud0c0\uc784 \ub4f1 \ubc18\ub3c4\uccb4 \uc870\ub2ec \ud300\uc774 \uc790\uc2e0 \uc788\uac8c \uc81c\ud488\uc744 \uc9c0\uc815, \uc18c\uc2f1, \uc7ac\uc8fc\ubb38\ud558\ub294 \ub370 \ud544\uc694\ud55c \ubaa8\ub4e0 \uac83\uc744 \ub2e4\ub8f9\ub2c8\ub2e4.<\/p>\n<p>CZ \ud480\ub9c1 \uacf5\uc815\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uc6a9\uc735\ubb3c\uc744 \ub2f4\ub294 \ub3c4\uac00\ub2c8\ub9cc\ud07c \uae30\uc220\uc801\uc73c\ub85c \uc911\uc694\ud55c \uc18c\ubaa8\ud488\uc740 \uc5c6\uc2b5\ub2c8\ub2e4. \uad6c\ub9e4 \uc8fc\ubb38\uc744 \ud558\uae30 \uc804\uc5d0 \uc774\ub7ec\ud55c \ubd80\ud488\uc758 \uace0\uc7a5 \uc774\uc720, \uc131\ub2a5\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc0ac\uc591, \uc870\ub2ec \ub9c8\ucc30\uc758 \uc6d0\uc778\uc744 \ud30c\uc545\ud558\ub294 \uac83\uc740 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Crucibles-on-Semiconductor-Cleanroom-Workbench.webp\" alt=\"\ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 \uc791\uc5c5\ub300\uc758 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\" title=\"\ubc18\ub3c4\uccb4 \ud074\ub9b0\ub8f8 \uc791\uc5c5\ub300\uc758 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\" \/><\/p>\n<h2>CZ\ub97c \ub2f9\uae38 \ub54c\ub9c8\ub2e4 \uad6c\uc870\uc801\uc73c\ub85c \uc2e4\ud328\ud558\ub294 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8<\/h2>\n<p>\ubaa8\ub4e0 CZ \ud06c\ub9ac\uc2a4\ud0c8 \uc131\uc7a5 \uc8fc\uae30\ub294 \ub3c4\uac00\ub2c8 \ud558\ub098\ub97c \uc644\uc804\ud788 \uc18c\ubaa8\ud558\ubbc0\ub85c \uad50\uccb4 \uc8fc\uae30\ub294 \ubd80\ud488 \ub9c8\ubaa8\ubcf4\ub2e4\ub294 \uc0dd\uc0b0\ub7c9\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubc1b\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uad50\uccb4\uc728 <a href=\"https:\/\/toquartz.com\/ko\/quartz-crucibles\/\">\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8<\/a> \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uacb0\ud568\uc740 \ubd80\uc218\uc801\uc778 \uc190\uc0c1\uc774\ub098 \ucde8\uae09 \uc624\ub958\ub85c \uc778\ud574 \ubc1c\uc0dd\ud558\ub294 \uac83\uc774 \uc544\ub2d9\ub2c8\ub2e4. \uc774\ub294 CZ \uc6a9\uad11\ub85c \ub0b4\ubd80\uc758 \ubb3c\ub9ac\ud654\ud559\uc801 \uc870\uac74, \uc989 \ub4f1\uae09\uc5d0 \uad00\uacc4\uc5c6\uc774 \uc5b4\ub5a4 \uc2e4\ub9ac\uce74 \uc18c\uc7ac\ub3c4 \ubb34\ud55c\uc815 \uacac\ub51c \uc218 \uc5c6\ub294 \uc870\uac74\uc758 \ubcf8\uc9c8\uc801\uc778 \uacb0\uacfc\uc785\ub2c8\ub2e4. \uadfc\ubcf8\uc801\uc778 \uc5f4\ud654 \uacbd\ub85c\ub97c \uc774\ud574\ud558\ub294 \uc870\ub2ec \ud300\uc740 \uc7ac\uace0 \uc8fc\uae30\ub97c \uacc4\ud68d\ud558\uace0 \ud488\uc9c8 \ud3b8\ucc28\ub97c \uc608\uce21\ud558\uba70 \uacf5\uae09\uc5c5\uccb4\uc5d0 \uc0ac\uc591 \uc694\uad6c \uc0ac\ud56d\uc744 \uc815\ub2f9\ud654\ud560 \uc218 \uc788\ub294 \ub354 \ub098\uc740 \uc704\uce58\uc5d0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\ub3c4\uac00\ub2c8 \uc131\ub2a5 \uc800\ud558\uc758 \uc5f4 \uc2a4\ud2b8\ub808\uc2a4 \uba54\ucee4\ub2c8\uc998<\/h3>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ube44\uc815\uc9c8 \uace0\uccb4\ub85c \uc2dc\uc791\ud558\uba70, \uc774\ub7ec\ud55c \ube44\uc815\uc9c8 \uad6c\uc870\uac00 \ubc14\ub85c \uacb0\uc815\uc9c8 \uc11d\uc601\uc5d0 \ube44\ud574 \uc6b0\uc218\ud55c \uc5f4\uc801 \ud2b9\uc131\uc744 \uc81c\uacf5\ud558\ub294 \uc774\uc720\uc785\ub2c8\ub2e4. <strong>\uadf8\ub7ec\ub098 \uc57d 1,050\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc7a5\uc2dc\uac04 \ub178\ucd9c\ub418\uba74 \ud0c8\ub9ac\ud654\uac00 \uc2dc\uc791\ub429\ub2c8\ub2e4.<\/strong> - \ube44\uc815\uc9c8 SiO\u2082 \ub9e4\ud2b8\ub9ad\uc2a4\ub97c \ubd80\ubd84\uc801\uc73c\ub85c \uc7ac\uacb0\uc815\ud654\ud558\uc5ec <a href=\"https:\/\/en.wikipedia.org\/wiki\/Cristobalite\">\ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8<\/a><sup id=\"fnref1:1\"><a href=\"#fn:1\" class=\"footnote-ref\">1<\/a><\/sup>. \uc774 \ub2e8\uacc4 \ubcc0\ud658\uc740 \ub418\ub3cc\ub9b4 \uc218 \uc5c6\uc73c\uba70 \uc810\uc9c4\uc801\uc73c\ub85c \uc774\ub8e8\uc5b4\uc9d1\ub2c8\ub2e4.<\/p>\n<p>\ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\ub294 \ub0c9\uac01 \uc911 \uc57d 200~270\u00b0C\uc5d0\uc11c \uae09\uaca9\ud55c \ubcc0\uc704 \uc0c1 \uc804\uc774\ub97c \uacaa\uc73c\uba70 \ubd80\ud53c\uac00 \uc57d 2.8% \uc815\ub3c4 \uc218\ucd95\ud558\uae30 \ub54c\ubb38\uc5d0 \uae30\uacc4\uc801\uc73c\ub85c \ubb38\uc81c\uac00 \ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc218\ucd95\uc774 \ubd80\ubd84\uc801\uc73c\ub85c \ud0c8\ub9ac\ub41c \ub3c4\uac00\ub2c8 \ubcbd \ub0b4\uc5d0\uc11c \ubc1c\uc0dd\ud558\uba74 \uacb0\uc815\ud654\ub41c \ud45c\uba74\uce35\uacfc \uc544\uc9c1 \ube44\uacb0\uc815\uc9c8\uc778 \ub0b4\ubd80 \uc0ac\uc774\uc758 \ucc28\ub3d9 \uc751\ub825\uc774 \ubbf8\uc138 \uade0\uc5f4\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. <strong>\uc774\ub7ec\ud55c \uade0\uc5f4\uc740 \uac01 \uc5f4 \uc8fc\uae30\uc5d0 \ub530\ub77c \uc548\ucabd\uc73c\ub85c \uc804\ud30c\ub429\ub2c8\ub2e4.<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \ub3c4\uac00\ub2c8\uac00 \uc2e4\ub9ac\ucf58 \uc6a9\uc735\ubb3c\uc758 \uc815\uc218\uc555 \ud558\uc5d0\uc11c \ub354 \uc774\uc0c1 \uad6c\uc870\uc801 \uc77c\uad00\uc131\uc744 \uc720\uc9c0\ud560 \uc218 \uc5c6\uc744 \ub54c\uae4c\uc9c0 \ubcbd\uc758 \ubb34\uacb0\uc131\uc744 \uc810\uc9c4\uc801\uc73c\ub85c \uac10\uc18c\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<p>\uc6a9\uad11\ub85c\uac00 \uc218\uc77c\uac04 \uc5f0\uc18d\uc73c\ub85c \uac00\ub3d9\ub418\ub294 \ub300\ub7c9 \ud339\uc5d0\uc11c\ub294 \ub3c4\uac00\ub2c8\uac00 \uc0ac\uc774\ud074 \uc0ac\uc774\uc5d0 \uc644\uc804\ud788 \ub0c9\uac01\ub418\uc9c0 \uc54a\uae30 \ub54c\ubb38\uc5d0 \ud0c8\uc11d\ud654\uac00 \uac00\uc18d\ud654\ub429\ub2c8\ub2e4. \uacf5\uc815 \uc5d4\uc9c0\ub2c8\uc5b4\uc758 \ud604\uc7a5 \uad00\ucc30\uc5d0 \ub530\ub974\uba74 \ub0b4\ubcbd\uc758 \ud0c8\uc11d\ud654 \uce35\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \uae4a\uc774\uc5d0 \ub3c4\ub2ec\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>0.8~2.5mm<\/strong> \uc6a9\uc735 \uc628\ub3c4 \uade0\uc77c\uc131 \ubc0f \ub3c4\uac00\ub2c8 \ub4f1\uae09\uc5d0 \ub530\ub77c 60\uc2dc\uac04 \uc774\ub0b4\uc5d0 \ud55c \ubc88 \ud480\ub9c1\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\uc2e4\ub9ac\ucf58 \uc6a9\uc735\ubb3c\ub85c\uc758 \uc2e4\ub9ac\uce74 \uc6a9\ud574\uc640 \uadf8 \uacf5\uc815 \uacb0\uacfc<\/h3>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\ucf58\uacfc \ub3c4\uac00\ub2c8 \ub0b4\ubcbd \uc0ac\uc774\uc758 \uc811\ucd09\uba74\uc740 \ud654\ud559\uc801\uc73c\ub85c \ubd88\ud65c\uc131\uc774 \uc544\ub2d9\ub2c8\ub2e4. <strong>SiO\u2082\ub294 \uc2e4\ub9ac\ucf58 \uc6a9\uc735\ubb3c\uc5d0 \uc9c0\uc18d\uc801\uc73c\ub85c \uc6a9\ud574\ub429\ub2c8\ub2e4.<\/strong>\uc6a9\uc735 \uc628\ub3c4, \ub300\ub958 \ud750\ub984 \ud328\ud134 \ubc0f \ub3c4\uac00\ub2c8 \ubcbd\uc758 \ud45c\uba74 \uc0c1\ud0dc\uc5d0 \ub530\ub77c \uc6a9\ud574 \uc18d\ub3c4\uac00 \uacb0\uc815\ub429\ub2c8\ub2e4. \uc774 \ud504\ub85c\uc138\uc2a4\ub294 \ub3c4\uac00\ub2c8 \ud488\uc9c8\uc5d0 \uc9c1\uc811\uc801\uc73c\ub85c \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\ub294 \ub18d\ub3c4\ub85c \uc131\uc7a5\ud558\ub294 \uacb0\uc815\uc5d0 \uc0b0\uc18c\ub97c \ub3c4\uc785\ud569\ub2c8\ub2e4.<\/p>\n<p>CZ \uc2e4\ub9ac\ucf58\uc5d0 \ud1b5\ud569\ub41c \uc0b0\uc18c\ub294 \uac04\uc9c8 \uaca9\uc790 \ubd80\uc704\ub97c \ucc28\uc9c0\ud558\uace0 \uc5f4 \ub3c4\ub108\ub97c \ud615\uc131\ud558\uc5ec \ubcf4\uc815\ud558\uae30 \uc5b4\ub824\uc6b4 \ubc29\uc2dd\uc73c\ub85c \uc800\ud56d\ub960\uc744 \ubcc0\ud654\uc2dc\ud0a4\ub294 \uc804\uae30\uc801 \ud65c\uc131 \uacb0\ud568\uc744 \ud615\uc131\ud569\ub2c8\ub2e4. \ub514\ubc14\uc774\uc2a4 \ub4f1\uae09 \uc6e8\uc774\ud37c\uc758 \uacbd\uc6b0, <strong>\uac04\uc9c8 \uc0b0\uc18c \ub18d\ub3c4\ub294 \uc57d 10~18ppm \ubc94\uc704 \ub0b4\uc5d0\uc11c \uc81c\uc5b4\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/strong> (ASTM F121 \ud45c\uc900). \uacfc\ub3c4\ud55c SiO\u2082 \uc6a9\ud574\uc728\uc744 \uac00\uc9c4 \ub3c4\uac00\ub2c8\ub294 \uc0b0\uc18c \uc218\uc900\uc744 \uc774 \ucc3d\uc744 \ucd08\uacfc\ud558\uc5ec \uc6e8\uc774\ud37c \ub85c\ud2b8\uac00 \ub2e4\uc6b4\uc2a4\ud2b8\ub9bc \ud14c\uc2a4\ud2b8\uc5d0\uc11c \uc804\uae30 \uc0ac\uc591\uc5d0 \uc2e4\ud328\ud558\uac8c \ub9cc\ub4ed\ub2c8\ub2e4. \uadf8 \uacb0\uacfc \uac1c\ubcc4 \uc6e8\uc774\ud37c\uc758 \uc218\uc728 \uc190\uc2e4\ubfd0\ub9cc \uc544\ub2c8\ub77c 40~120\uc2dc\uac04\uc758 \uc6a9\uad11\ub85c \uc2dc\uac04\uc5d0 \ud574\ub2f9\ud558\ub294 \uc804\uccb4 \uacb0\uc815 \uc789\uacf3\uc774 \ubd88\ud569\uaca9\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc0b0\uc18c \uc678\uc5d0\ub3c4 \uc624\uc5fc\ub418\uac70\ub098 \uc21c\ub3c4\uac00 \ub0ae\uc740 \ub3c4\uac00\ub2c8 \ubcbd\uc774 \uc6a9\ud574\ub418\uba74 \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 \uc6a9\uc735\ubb3c\uc5d0 \uc9c1\uc811 \uc720\uc785\ub429\ub2c8\ub2e4. <strong>0.1ppba\uc758 \ubbf8\ub7c9 \uc218\uc900\uc758 \ucca0\ubd84\uae4c\uc9c0<\/strong> \ub294 \ud0dc\uc591\uc804\uc9c0 \ud6a8\uc728\uacfc DRAM \ub9ac\ud504\ub808\uc2dc \uc131\ub2a5\uc5d0 \uc911\uc694\ud55c \ubcc0\uc218\uc778 \uc18c\uc218 \uce90\ub9ac\uc5b4 \uc218\uba85\uc744 \uac10\uc18c\uc2dc\ud0a4\ub294 \ub525 \ub808\ubca8 \ud2b8\ub7a9\uc744 \uc0dd\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\ub2f9\uae40 \uc2dc\uac04\uacfc \ud06c\ub9ac\uc2a4\ud0c8 \uc9c1\uacbd\uc774 \uad50\uccb4 \ube48\ub3c4\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/h3>\n<p>\ub3c4\uac00\ub2c8 \ud06c\uae30\ub294 \ud06c\ub9ac\uc2a4\ud0c8 \uc9c1\uacbd\uc5d0 \ub530\ub77c \uc2a4\ucf00\uc77c\ub9c1\ub418\uba70, \ub450 \uc2a4\ucf00\uc77c \ubaa8\ub450 \ub2f9\uae40 \uc9c0\uc18d \uc2dc\uac04\uc5d0 \ub530\ub77c \uc2a4\ucf00\uc77c\ub9c1\ub429\ub2c8\ub2e4. A <strong>14\uc778\uce58 \ub3c4\uac00\ub2c8<\/strong> \ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ud45c\uc900 \uc870\uac74\uc5d0\uc11c 20~35\uc2dc\uac04 \ub3d9\uc548 \ud55c \ubc88 \ub2f9\uaca8\uc11c 150mm \uc2e4\ub9ac\ucf58 \uc131\uc7a5\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4. A <strong>24\uc778\uce58 \ub3c4\uac00\ub2c8<\/strong> 300mm \uc6e8\uc774\ud37c \uc0dd\uc0b0\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ub3c4\uac00\ub2c8\ub294 60~100\uc2dc\uac04 \ub3d9\uc548 \ud480\uc744 \uacac\ub51c \uc218 \uc788\uc9c0\ub9cc, \ud55c \ubc88 \uc0ac\uc6a9\ud55c \ud6c4\uc5d0\ub294 \ud0c8\ub9ac\ud654 \ubc0f \ubcbd \ub450\uaed8 \uac10\uc18c\ub85c \uc778\ud55c \uad6c\uc870\uc801 \uc5f4\ud654\ub85c \uc7ac\uc0ac\uc6a9\uc774 \ubd88\uac00\ub2a5\ud558\uae30 \ub54c\ubb38\uc5d0 \ud3d0\uae30\ub429\ub2c8\ub2e4.<\/p>\n<p>\uacb0\uc815 \uc9c1\uacbd\uacfc \ub3c4\uac00\ub2c8 \uc18c\ube44\ub7c9 \uc0ac\uc774\uc758 \uad00\uacc4\ub294 \uc2e4\ub9ac\ucf58 \ud0ac\ub85c\uadf8\ub7a8\ub2f9 \uae30\uc900\uc73c\ub85c \uac70\uc758 \uc120\ud615\uc801\uc774\uc9c0\ub9cc, \ube44\uc6a9 \uacb0\uacfc\ub294 \ube44\uc120\ud615\uc801\uc785\ub2c8\ub2e4. \uc9c1\uacbd\uc774 \ud070 \ub3c4\uac00\ub2c8\ub294 \ub2e8\uc704\ub2f9 \ube44\uc6a9\uc774 \ub354 \ub9ce\uc774 \ub4e4\uace0, \ub3c4\uac00\ub2c8 \ub3c4\uc911\uc5d0 \ub3c4\uac00\ub2c8\uac00 \uace0\uc7a5\ub098\uba74 \uc804\uccb4 \uc789\uacf3\uc774 \uc624\uc5fc\ub418\uac70\ub098 \uc190\uc2e4\ub418\ub294 \uc218\uc728 \uc601\ud5a5\uc740 \uacb0\uc815 \ud06c\uae30\uc5d0 \ub530\ub77c \uae09\uaca9\ud558\uac8c \uc99d\uac00\ud569\ub2c8\ub2e4. <strong>300mm \uc0dd\uc0b0\uc758 \uacbd\uc6b0, \ub3c4\uac00\ub2c8 \uace0\uc7a5\uc73c\ub85c \uc778\ud574 \ud55c \ubc88\uc758 \ud480\ub9c1 \uc2e4\ud328\ub294 \ud504\ub77c\uc784\uae09 \uc2e4\ub9ac\ucf58 \ud3f4\ub9ac\uc2e4\ub9ac\ucf58 80kg\uc744 \ucd08\uacfc\ud558\ub294 \uc7ac\ub8cc \uc190\uc2e4\uc744 \uc758\ubbf8\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong>\uc6a9\uad11\ub85c \uac00\ub3d9 \uc911\ub2e8 \uc2dc\uac04 \uc678\uc5d0\ub3c4.<\/p>\n<p>\ub530\ub77c\uc11c \uc870\ub2ec \uacc4\ud68d\uc5d0\ub294 \ud480 \uc2a4\ucf00\uc904 \ube48\ub3c4\uc640 \ud65c\uc131 \uc6a9\uad11\ub85c \uc804\uccb4\uc758 \uacb0\uc815 \uc9c1\uacbd \ubd84\ud3ec\uc5d0 \ub300\ud55c \uac00\uc2dc\uc131\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc5ec\ub7ec \ub300\uc758 CZ \ud480\ub7ec\ub85c \uc5f0\uc911\ubb34\ud734 24\uc2dc\uac04 \uac00\ub3d9\ub418\ub294 \uc124\ube44\ub294 \ub2e4\uc74c\uc744 \uc18c\ube44\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\uc6d4 50~200\uac1c \ub3c4\uac00\ub2c8<\/strong>\ub294 \uc789\uacf3 \uae38\uc774 \ubaa9\ud45c\uc640 \ub300\uad6c\uacbd \uc0dd\uc0b0 \ube44\uc728\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4.<\/p>\n<h4>\ud06c\ub9ac\uc2a4\ud0c8 \uc9c1\uacbd\uc5d0 \ub530\ub978 \ub3c4\uac00\ub2c8 \uad50\uccb4 \ube48\ub3c4 \uae30\uc900<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ud06c\ub9ac\uc2a4\ud0c8 \uc9c0\ub984(mm)<\/th>\n<th>\uc77c\ubc18\uc801\uc778 \ub3c4\uac00\ub2c8 \ud06c\uae30(\uc778\uce58)<\/th>\n<th>\ub300\ub7b5\uc801\uc778 \ud480 \uae30\uac04(\uc2dc\uac04)<\/th>\n<th>\uc6d4\ubcc4 \uc6a9\uad11\ub85c\ub2f9 \ub3c4\uac00\ub2c8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>150<\/td>\n<td>14<\/td>\n<td>20-35<\/td>\n<td>20-40<\/td>\n<\/tr>\n<tr>\n<td>200<\/td>\n<td>18-20<\/td>\n<td>35-60<\/td>\n<td>12-25<\/td>\n<\/tr>\n<tr>\n<td>300<\/td>\n<td>24-28<\/td>\n<td>60-100<\/td>\n<td>8-18<\/td>\n<\/tr>\n<tr>\n<td>450(\uac1c\ubc1c)<\/td>\n<td>32<\/td>\n<td>90-140<\/td>\n<td>4-10<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \uc21c\ub3c4 \uc784\uacc4\uac12\uc740 CZ \uc2e4\ub9ac\ucf58\uc758 \ud654\ud559\uc801 \ud55c\uacc4\ub97c \uc124\uc815\ud569\ub2c8\ub2e4.<\/h2>\n<p>\uac01 \uc784\uacc4\uac12\uc774 \ubb34\uc5c7\uc744 \ubcf4\ud638\ud558\ub294\uc9c0 \uc774\ud574\ud558\uc9c0 \uc54a\uace0 \uc21c\ub3c4\ub97c \uc9c0\uc815\ud558\uba74 \ubd88\ud544\uc694\ud55c \ube44\uc6a9\uc774 \ubc1c\uc0dd\ud558\uac70\ub098 \ud5c8\uc6a9\ud560 \uc218 \uc5c6\ub294 \uc218\uc728 \ub9ac\uc2a4\ud06c\ub97c \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>CZ \ub3c4\uac00\ub2c8 \uacf5\uae09\ub9dd\uc5d0\uc11c \uc870\ub2ec \uacb0\uc815\uc740 \uc120\ud0dd\ud55c \uc21c\ub3c4 \ub4f1\uae09\ubcf4\ub2e4 \ub354 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce58\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. <strong>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \uc21c\ub3c4\ub294 \uc0dd\uc0b0\ub418\ub294 \uc2e4\ub9ac\ucf58 \uacb0\uc815\uc758 \ud654\ud559\uc801 \ud55c\ub3c4\ub97c \uc815\uc758\ud569\ub2c8\ub2e4.<\/strong> - \uc2e4\ub9ac\uce74\uc5d0 \uc874\uc7ac\ud558\ub294 \uc624\uc5fc \ubb3c\uc9c8\uc740 \uc815\ub3c4\uc5d0 \ub530\ub77c \uc6a9\uc735\ubb3c\ub85c, \uadf8\ub9ac\uace0 \uad81\uadf9\uc801\uc73c\ub85c\ub294 \uc6e8\uc774\ud37c\ub85c \uc774\ub3d9\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc21c\ub3c4 \uc0ac\uc591\uc740 \uc885\uc885 \uacf5\uae09\uc5c5\uccb4\uc5d0\uc11c \ub2e8\uc77c \uc22b\uc790 SiO\u2082 \ubc31\ubd84\uc728\ub85c \uc81c\uc2dc\ub418\uc5b4 \ud2b9\uc815 \ubd88\uc21c\ubb3c \uc694\uc18c\uc758 \ub354 \uc138\ubd84\ud654\ub418\uace0 \uc6b4\uc601\uc0c1 \ub354 \uc911\uc694\ud55c \ubd84\ud574\ub97c \ubaa8\ud638\ud558\uac8c \ub9cc\ub4ed\ub2c8\ub2e4. \uac01 \uc21c\ub3c4 \ub9e4\uac1c\ubcc0\uc218\uac00 \ubb34\uc5c7\uc744 \uc81c\uc5b4\ud558\ub294\uc9c0\uc5d0 \ub300\ud55c \ucca0\uc800\ud55c \uc774\ud574\ub294 \ubc29\uc5b4 \uac00\ub2a5\ud55c \uc870\ub2ec \uc0ac\uc591\uc758 \uae30\ucd08\uc785\ub2c8\ub2e4.<\/p>\n<h3>SiO\u2082 \ud568\ub7c9 \uc784\uacc4\uac12 \ubc0f \uac01 \ub4f1\uae09\uc774 \uacb0\uc815 \ud488\uc9c8\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/h3>\n<p>\ub3c4\uac00\ub2c8\uc758 SiO\u2082 \ud568\ub7c9\uc740 \uac00\uc7a5 \uba3c\uc800 \uadf8\ub9ac\uace0 \uac00\uc7a5 \uc77c\ubc18\uc801\uc73c\ub85c \uc778\uc6a9\ub418\ub294 \uc21c\ub3c4 \uc9c0\ud45c\uc774\uc9c0\ub9cc, \uadf8 \uc720\uc6a9\uc131\uc740 \uc804\uc801\uc73c\ub85c \ub098\uba38\uc9c0 \ubd84\ud68d\uc774 \ubb34\uc5c7\uc73c\ub85c \uad6c\uc131\ub418\uc5b4 \uc788\ub294\uc9c0\uc5d0 \ub2ec\ub824 \uc788\uc2b5\ub2c8\ub2e4. <strong>99.99% SiO\u2082 \ub4f1\uae09\uc758 \ub3c4\uac00\ub2c8\uc5d0\ub294 \ucd5c\ub300 100ppm\uc758 \ube44\uc2e4\ub9ac\uce74 \ubb3c\uc9c8\uc774 \ud3ec\ud568\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4.<\/strong> - \uae08\uc18d \ubd88\uc21c\ubb3c\uc5d0 \ub18d\ucd95\ub41c \uacbd\uc6b0 \ubc18\ub3c4\uccb4 \ub4f1\uae09\uc758 \uacb0\uc815 \uc131\uc7a5\uacfc \uc644\uc804\ud788 \uc591\ub9bd\ud560 \uc218 \uc5c6\ub294 \uc591\uc785\ub2c8\ub2e4. \uc774 \uc218\uce58\ub294 \ubd88\uc21c\ubb3c \ud504\ub85c\ud30c\uc77c\uc5d0 \ub300\ud55c \uc804\uccb4 \uc6d0\uc18c \ubd84\uc11d\uacfc \ud568\uaed8 \uc0ac\uc6a9\ud560 \ub54c\ub9cc \uc758\ubbf8\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc2e4\uc81c\ub85c CZ \ubc18\ub3c4\uccb4 \uc0dd\uc0b0\uc5d0\ub294 \uc138 \uac00\uc9c0 SiO\u2082 \uc21c\ub3c4 \uacc4\uce35\uc774 \uc0c1\uc5c5\uc801\uc73c\ub85c \uad00\ub828\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. <strong>99.99% SiO\u2082\uc758 \ud45c\uc900 \ubc18\ub3c4\uccb4 \ub4f1\uae09<\/strong> \ub294 \uc0b0\uc18c \ub18d\ub3c4 \uc81c\uc5b4\uac00 \ubd80\ucc28\uc801\uc778 \uc911\uc694\ud558\uc9c0 \uc54a\uc740 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uacfc \ud30c\uc77c\ub7ff \uaddc\ubaa8\uc758 \uc791\uc5c5\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4. <strong>99.995% SiO\u2082\uc758 \uace0\uc21c\ub3c4 \ub4f1\uae09<\/strong> \ub294 200mm \uc6e8\uc774\ud37c \ub300\ub7c9 \uc0dd\uc0b0\uc758 \uae30\uc900\uc120\uc744 \ub098\ud0c0\ub0b4\uba70 \ub85c\uc9c1 \ubc0f \uba54\ubaa8\ub9ac \uc18c\uc790 \uc81c\uc870\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4. <strong>99.999% SiO\u2082 \uc774\uc0c1\uc758 \ucd08\uace0\uc21c\ub3c4 \ub4f1\uae09<\/strong>\ud754\ud788 \"5N\" \ub610\ub294 \"6N\" \uc2e4\ub9ac\uce74\ub85c \uc124\uba85\ub418\ub294 \uc774 \uc81c\ud488\uc740 \uc804\uccb4 \uc789\uacf3 \uae38\uc774\uc5d0 \uac78\uccd0 10ppba \ubbf8\ub9cc\uc758 \ucd1d \uae08\uc18d \uc624\uc5fc\uc774 \uc694\uad6c\ub418\ub294 \uace0\uae09 \ub178\ub4dc \uc0dd\uc0b0\uc5d0 \uc9c0\uc815\ub429\ub2c8\ub2e4.<\/p>\n<p>99.99%\uc5d0\uc11c 99.999%\ub85c\uc758 \uc804\ud658\uc740 \ud06c\ub9ac\uc2a4\ud0c8 \ud488\uc9c8\uc774 \uc120\ud615\uc801\uc73c\ub85c \ud5a5\uc0c1\ub418\uc5c8\uc74c\uc744 \uc758\ubbf8\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. <strong>\ub514\ubc14\uc774\uc2a4 \uc218\uc900\uc5d0\uc11c \uad00\uacc4\ub294 \uae30\ud558\uae09\uc218\uc801\uc785\ub2c8\ub2e4.<\/strong> \uc8fc\uc694 \uc804\uae30\uc801 \ud30c\ub77c\ubbf8\ud130\uc778 \uc18c\uc218 \uce90\ub9ac\uc5b4 \uc218\uba85\uc740 \uae08\uc18d \uc624\uc5fc \ub18d\ub3c4\uc5d0 \ub530\ub77c \ub300\uc218\uc801\uc73c\ub85c \uc800\ud558\ub418\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \ub4f1\uae09\uc744 \uc120\ud0dd\ud558\ub294 \uc870\ub2ec \ud300\uc740 \ubc29\uc5b4 \uac00\ub2a5\ud55c \ube44\uad50\ub97c \uc704\ud574 \uacf5\uae09\uc5c5\uccb4\uc5d0 \ub3c4\uac00\ub2c8 SiO\u2082 \ube44\uc728\ubfd0\ub9cc \uc544\ub2c8\ub77c \uc6e8\uc774\ud37c \uc218\uc900\uc758 \uc0b0\uc18c \uade0\uc77c\uc131 \ub370\uc774\ud130\ub97c \uc694\uccad\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h4>SiO\u2082 \uc21c\ub3c4 \ub4f1\uae09 \ubc0f \ubc18\ub3c4\uccb4 \uc751\uc6a9 \ubd84\uc57c \uc801\ud569\uc131<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc21c\ub3c4 \ub4f1\uae09<\/th>\n<th>SiO\u2082 \ud568\ub7c9<\/th>\n<th>\ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c(\ucd5c\ub300)<\/th>\n<th>\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ud45c\uc900<\/td>\n<td>99.99%<\/td>\n<td>\u2264 50ppm<\/td>\n<td>R&amp;D, \uc911\uc694\ud558\uc9c0 \uc54a\uc740 CZ \ud480<\/td>\n<\/tr>\n<tr>\n<td>\uace0\uc21c\ub3c4<\/td>\n<td>99.995%<\/td>\n<td>\u2264 10ppm<\/td>\n<td>200mm \ub300\ub7c9 \uc0dd\uc0b0<\/td>\n<\/tr>\n<tr>\n<td>\ucd08\uace0\uc21c\ub3c4<\/td>\n<td>99.999%<\/td>\n<td>\u2264 1ppm<\/td>\n<td>300mm \uace0\uae09 \ub178\ub4dc<\/td>\n<\/tr>\n<tr>\n<td>\uc804\uc790 \ub4f1\uae09<\/td>\n<td>&gt; 99.9995%<\/td>\n<td>&lt; 0.1ppm<\/td>\n<td>EUV \uc2dc\ub300\uc758 \ub85c\uc9c1, \ucd5c\ucca8\ub2e8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Semiconductor-Grade-Quartz-Glass-Crucibles.webp\" alt=\"\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\" title=\"\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\" \/><\/p>\n<h3>\ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\uc11c \ud0c0\ud611\ud560 \uc218 \uc5c6\ub294 \uae08\uc18d \uc624\uc5fc \ubb3c\uc9c8\uc758 \ud55c\uacc4<\/h3>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub3c4\uac00\ub2c8\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c\uc740 \ubc18\ub3c4\uccb4 \ucda9\uaca9 \uacbd\ub85c\uc5d0 \ub530\ub77c \ub450 \uac00\uc9c0 \ubc94\uc8fc\ub85c \ub098\ub269\ub2c8\ub2e4: <strong>\ube60\ub978 \ub514\ud4e8\uc800<\/strong> \uc6a9\uc735 \uc628\ub3c4\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uaca9\uc790\ub97c \ube60\ub974\uac8c \uad00\ud1b5\ud558\ub294 \ubb3c\uc9c8\uacfc <strong>\uc2ac\ub85c\uc6b0 \ub514\ud4e8\uc800<\/strong> \uacb0\uc815 \uaf2c\ub9ac \uadfc\ucc98\uc758 \uace0\uccb4-\uc561\uccb4 \uacc4\uba74\uc5d0 \uc9d1\uc911\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \ub450 \ubc94\uc8fc \ubaa8\ub450 \uc190\uc0c1\uc744 \uc785\ud788\uc9c0\ub9cc \uc11c\ub85c \ub2e4\ub978 \uba54\ucee4\ub2c8\uc998\uacfc \ub2e4\ub978 \uacb0\uc815 \uc704\uce58\uc5d0\uc11c \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/p>\n<p>\ucca0(Fe), \uad6c\ub9ac(Cu), \ub2c8\ucf08(Ni)\uc740 \uac00\uc7a5 \uc804\uae30\uc801\uc73c\ub85c \ud65c\uc131\ub3c4\uac00 \ub192\uc740 \uace0\uc18d \ub514\ud4e8\uc800\uc785\ub2c8\ub2e4. <strong>0.01ppba \uc774\uc0c1\uc758 \ub18d\ub3c4\uc758 \ucca0\ubd84<\/strong> \uc2e4\ub9ac\ucf58 \uacb0\uc815\uc5d0\uc11c \ubd95\uc18c\uac00 \ub3c4\ud551\ub41c p\ud615 \ubb3c\uc9c8\uc5d0\uc11c FeB \uc30d\uc744 \uc0dd\uc131\ud558\uc5ec \uc18c\uc218 \uce90\ub9ac\uc5b4 \uc218\uba85\uc744 \ud06c\uac8c \uc904\uc785\ub2c8\ub2e4. \uace0\uc21c\ub3c4 \ub3c4\uac00\ub2c8\uc758 \uc870\ub2ec \uc0ac\uc591\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 Fe \ud568\ub7c9\uc744 \uc694\uad6c\ud574\uc57c \ud569\ub2c8\ub2e4. <strong>\uc2e4\ub9ac\uce74 \uc6d0\ub8cc \uc911\ub7c9 \uae30\uc900 20ppb<\/strong>\ud45c\uc900 CZ \ubd84\ub9ac \uc870\uac74\uc5d0\uc11c \uacb0\uacfc \uacb0\uc815\uc758 \uc57d 2ppba\uc5d0 \ud574\ub2f9\ud569\ub2c8\ub2e4. \ub098\ud2b8\ub968(Na)\uacfc \uce7c\ub968(K)\uc740 \uc2e4\ub9ac\ucf58\uc5d0\uc11c \uc804\uae30\uc801 \ud65c\uc131\uc774 \ub0ae\uc9c0\ub9cc \uace0\uc628\uc5d0\uc11c SiO\u2082 \ub124\ud2b8\uc6cc\ud06c \uad6c\uc870\ub97c \uacf5\uaca9\ud558\uc5ec \ud0c8\uc11d\ud654\ub97c \uac00\uc18d\ud654\ud558\uace0 \uc6a9\ud574 \uc18d\ub3c4\ub97c \uc99d\uac00\uc2dc\ud0a4\ubbc0\ub85c \uc21c\ub3c4\uc640 \uad6c\uc870\uc801 \uc774\uc720 \ubaa8\ub450\uc5d0\uc11c \uc774\ub4e4\uc758 \uc81c\uc5b4\uac00 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p>\uce7c\uc298(Ca)\uacfc \uc54c\ub8e8\ubbf8\ub284(Al)\uc740 \ucc9c\uc5f0 \uc11d\uc601 \uae30\ubc18 \ub3c4\uac00\ub2c8\uc5d0\uc11c \uac00\uc7a5 \uc5b5\uc81c\ud558\uae30 \uc5b4\ub824\uc6b4 \ubd88\uc21c\ubb3c\uc778\ub370, \uadf8 \uc774\uc720\ub294 \ub458 \ub2e4 \ub2e8\uc21c\ud788 \ud45c\uba74 \uc624\uc5fc \ubb3c\uc9c8\uc774 \uc544\ub2c8\ub77c \uc11d\uc601 \uacb0\uc815 \uaca9\uc790\uc5d0\uc11c \uad6c\uc870\uc801 \uce58\ud658\uc73c\ub85c \uc874\uc7ac\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. <strong>Al \ud568\ub7c9\uc774 2ppm \ubbf8\ub9cc\uc778 \ucc9c\uc5f0 \uc11d\uc601 \uacf5\uae09\uc6d0<\/strong> \ub294 \uace0\ud488\uc9c8 \uc6d0\ub8cc\ub85c \uac04\uc8fc\ub418\uc9c0\ub9cc, \ucc9c\uc5f0 \uc6d0\ub8cc\uc758 \ubc30\uce58 \uac04 \uc77c\uad00\uc131\uc740 \ubcf8\uc9c8\uc801\uc73c\ub85c \uc9c0\uc9c8\ud559\uc801 \ubcc0\ub3d9\uc131\uc5d0 \uc758\ud574 \uc81c\ud55c\ub429\ub2c8\ub2e4. \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uacfc \uac19\uc774 \ud6e8\uc52c \ub354 \ub0ae\uace0 \uc77c\uad00\ub41c Al \ubc0f Ca \uc218\uc900\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. <strong>\ucd1d 0.1ppm<\/strong>\ub97c \ud568\uc720\ud558\uace0 \uc788\uc5b4 \ucd08\uace0\uc21c\ub3c4 \ub3c4\uac00\ub2c8 \uc0dd\uc0b0\uc5d0 \uc120\ud638\ub418\ub294 \uacf5\uae09 \uc6d0\ub8cc\uc785\ub2c8\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub3c4\uac00\ub2c8\uc758 \uae08\uc18d \ubd88\uc21c\ubb3c \ud55c\uacc4<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc694\uc18c<\/th>\n<th>\ucd5c\ub300 \ub18d\ub3c4(ppb wt)<\/th>\n<th>\uc2e4\ub9ac\ucf58 \ud06c\ub9ac\uc2a4\ud0c8\uc5d0 \ubbf8\uce58\ub294 \uc8fc\uc694 \uc601\ud5a5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ucca0(Fe)<\/td>\n<td>\u2264 20<\/td>\n<td>\uc18c\uc218 \uc0ac\uc5c5\uc790 \uc218\uba85 \ub2e8\ucd95<\/td>\n<\/tr>\n<tr>\n<td>\uad6c\ub9ac(Cu)<\/td>\n<td>\u2264 5<\/td>\n<td>\ub525 \ub808\ubca8 \ud2b8\ub7a9, \ub204\uc124 \uc804\ub958<\/td>\n<\/tr>\n<tr>\n<td>\ub2c8\ucf08(Ni)<\/td>\n<td>\u2264 5<\/td>\n<td>\uace0\uac08 \uc9c0\uc5ed\uc758 \uc7ac\uacb0\ud569 \uc13c\ud130<\/td>\n<\/tr>\n<tr>\n<td>\ub098\ud2b8\ub968(Na)<\/td>\n<td>\u2264 30<\/td>\n<td>\ud0c8\uc0b0\ud654 \uac00\uc18d\ud654, \uc0b0\ud654\ubb3c \uc2e0\ub8b0\uc131<\/td>\n<\/tr>\n<tr>\n<td>\uce7c\ub968(K)<\/td>\n<td>\u2264 20<\/td>\n<td>SiO\u2082 \ub124\ud2b8\uc6cc\ud06c \uc131\ub2a5 \uc800\ud558<\/td>\n<\/tr>\n<tr>\n<td>\uc54c\ub8e8\ubbf8\ub284(Al)<\/td>\n<td>\u2264 100<\/td>\n<td>n\ud615 \uc2e4\ub9ac\ucf58\uc758 \uce90\ub9ac\uc5b4 \ubcf4\uc815<\/td>\n<\/tr>\n<tr>\n<td>\uce7c\uc298(Ca)<\/td>\n<td>\u2264 50<\/td>\n<td>2\ucc28 \uad6c\uc870\uc801 \ud6a8\uacfc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uc218\uc0b0\uae30 \ud568\ub7c9\uacfc \uace0\uc628 \uad6c\uc870 \ubb34\uacb0\uc131\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/h3>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uc218\uc0b0\uae30(OH) \ud568\ub7c9\uc740 \ub3c4\uac00\ub2c8 \uc870\ub2ec\uc5d0\uc11c \uac00\uc7a5 \uc798 \uc774\ud574\ub418\uc9c0 \uc54a\ub294 \uc21c\ub3c4 \ud30c\ub77c\ubbf8\ud130 \uc911 \ud558\ub098\uc774\uc9c0\ub9cc, CZ \uc791\ub3d9 \uc628\ub3c4\uc5d0\uc11c \uad6c\uc870\uc801 \uc131\ub2a5\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. <strong>OH \uadf8\ub8f9\uc740 \uc0ac\uba74\uccb4 \uc5f0\uc18d\uc131\uc744 \ubc29\ud574\ud558\uc5ec Si-O-Si \ub124\ud2b8\uc6cc\ud06c\ub97c \uc57d\ud654\uc2dc\ud0b5\ub2c8\ub2e4.<\/strong>\ub97c \uc99d\uac00\uc2dc\ucf1c \uace0\uc628\uc5d0\uc11c \uc720\ub9ac\uc758 \uc720\ud6a8 \uc810\ub3c4\ub97c \ub0ae\ucda5\ub2c8\ub2e4. OH \ud568\ub7c9\uc774 \ub192\uc740 \ub3c4\uac00\ub2c8\ub294 OH \ud568\ub7c9\uc774 \ub0ae\uc740 \ub3c4\uac00\ub2c8\ubcf4\ub2e4 \ub0ae\uc740 \uc628\ub3c4\uc5d0\uc11c \uc5f0\ud654\ub418\uc5b4 \uc2e4\ub9ac\ucf58 \uc6a9\uc735 \uc804\ud558\uc758 \uae30\uacc4\uc801 \ubd80\ud558 \ud558\uc5d0\uc11c \ubcbd \ubcc0\ud615 \uac70\ub3d9\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p>\ud654\uc5fc \uc735\ud569\uc73c\ub85c \uc0dd\uc131\ub418\ub294 \ucc9c\uc5f0 \uc735\ud569 \uc2e4\ub9ac\uce74\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4. <strong>150~400ppm OH<\/strong> \uc81c\uc870\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc218\uc18c\uac00 \ud48d\ubd80\ud55c \ud654\uc5fc \ud658\uacbd\uc758 \uacb0\uacfc\uc785\ub2c8\ub2e4. \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \ub610\ub294 \uc878-\uac94 \uacbd\ub85c\ub85c \uc0dd\uc0b0\ub41c \ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ub2e4\uc74c\uacfc \uac19\uc774 \uad11\ubc94\uc704\ud55c OH \ubc94\uc704\uc5d0\uc11c \uc124\uacc4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>1ppm<\/strong> (\uc720\ud615 2 \ud569\uc131, \uc9c4\uacf5 \uc735\ud569)\uc5d0\uc11c \uc704\uae4c\uc9c0 <strong>1,000ppm<\/strong> (\uc720\ud615 3 \ud569\uc131, \ud654\uc5fc \uac00\uc218\ubd84\ud574). CZ \ubc18\ub3c4\uccb4 \ub3c4\uac00\ub2c8\uc758 \uacbd\uc6b0, \uc120\ud638\ub418\ub294 OH \ubc94\uc704\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>30ppm \ubbf8\ub9cc<\/strong>\uc804\uae30 \uc544\ud06c\ub85c\uc5d0\uc11c \uac00\uacf5\ub41c \uace0\uc21c\ub3c4 \ucc9c\uc5f0 \uc11d\uc601(\ud0c0\uc785 1) \ub610\ub294 \ud0c0\uc785 2 \ud569\uc131 \uc18c\uc7ac\ub97c \ud1b5\ud574 \uad6c\ud604\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc774 \uc784\uacc4\uac12\uc744 \ucd08\uacfc\ud560 \uacbd\uc6b0\uc758 \uc2e4\uc9c8\uc801\uc778 \uacb0\uacfc\ub294 \uc7a5\uc2dc\uac04 \ud480\ub9c1\ud560 \ub54c \ubd84\uba85\ud574\uc9d1\ub2c8\ub2e4. <strong>100ppm \uc774\uc0c1\uc758 OH \ub18d\ub3c4\uc5d0\uc11c<\/strong>\ub3c4\uac00\ub2c8 \ubcbd\uc740 \uc77c\ubc18\uc801\uc778 \uc2e4\ub9ac\ucf58 \uc6a9\uc735 \uc628\ub3c4\uc778 1,500\u00b0C\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \uc810\uc131 \ud06c\ub9ac\ud504\uac00 \ub098\ud0c0\ub098\uae30 \uc2dc\uc791\ud558\uc5ec \ub3c4\uac00\ub2c8 \ud615\uc0c1\uc774 \uc810\uc9c4\uc801\uc73c\ub85c \ubcc0\ud615\ub418\uae30 \uc2dc\uc791\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubcc0\ud615\uc740 \uc6a9\uc735\ubb3c\uc758 \uc5f4 \ub300\uce6d\uc744 \ubcc0\uacbd\ud558\uc5ec \ub300\ub958 \ud328\ud134\uc744 \ubc29\ud574\ud558\uace0 \uc131\uc7a5\ud558\ub294 \uacb0\uc815\uc5d0 \ubc29\uc0ac\ud615 \uc0b0\uc18c \ubd88\uade0\uc77c\uc131\uc744 \uc720\ubc1c\ud569\ub2c8\ub2e4. \ubc29\uc0ac\ud615 \uc0b0\uc18c \ubd88\uade0\uc77c\uc131\uc740 \uc6e8\uc774\ud37c \ub808\ubca8 \ub370\uc774\ud130\ub9cc\uc73c\ub85c\ub294 \uc9c4\ub2e8\ud558\uae30 \uac00\uc7a5 \uc5b4\ub824\uc6b4 CZ \uacf5\uc815 \uacb0\ud568 \uc911 \ud558\ub098\uc774\uba70, \uadf8 \uadfc\ubcf8 \uc6d0\uc778\uc740 \ud480\ub9c1 \uc911 \ub3c4\uac00\ub2c8 \ud615\uc0c1 \ud3b8\ucc28\ub85c \uac70\uc2ac\ub7ec \uc62c\ub77c\uac00\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4.<\/p>\n<h4>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc720\ud615 \ubc0f CZ \uc801\ud569\uc131\uc5d0 \ub530\ub978 OH \ud568\ub7c9 \ubc94\uc704<\/h4>\n<table>\n<thead>\n<tr>\n<th>\uc735\ud569 \uc2e4\ub9ac\uce74 \uc720\ud615<\/th>\n<th>OH \ud568\ub7c9(ppm)<\/th>\n<th>\uc81c\uc870 \uacbd\ub85c<\/th>\n<th>CZ \ubc18\ub3c4\uccb4 \uc801\ud569\uc131<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc720\ud615 1(\ub0b4\ucd94\ub7f4)<\/td>\n<td>150-400<\/td>\n<td>\uc804\uae30 \uc544\ud06c \uc735\ud569, \ucc9c\uc5f0 \uc11d\uc601<\/td>\n<td>\uc81c\ud55c\uc801 - \uc911\uc694\ud558\uc9c0 \uc54a\uc740 \uc6a9\ub3c4\ub85c\ub9cc \uc0ac\uc6a9<\/td>\n<\/tr>\n<tr>\n<td>\uc720\ud615 2(\ud569\uc131)<\/td>\n<td>&lt; 5<\/td>\n<td>\uc9c4\uacf5\/\ubd88\ud65c\uc131 \ubd84\uc704\uae30 CVD<\/td>\n<td>\uace0\uae09 \ub178\ub4dc\uc5d0 \uc120\ud638<\/td>\n<\/tr>\n<tr>\n<td>\uc720\ud615 3(\ud569\uc131)<\/td>\n<td>800-1,200<\/td>\n<td>\ud654\uc5fc \uac00\uc218\ubd84\ud574<\/td>\n<td>\ubc18\ub3c4\uccb4 CZ\uc5d0\ub294 \uc801\ud569\ud558\uc9c0 \uc54a\uc74c<\/td>\n<\/tr>\n<tr>\n<td>\uc720\ud615 4(\ud569\uc131)<\/td>\n<td>0.1-30<\/td>\n<td>\ud50c\ub77c\uc988\ub9c8 \uc735\ud569, \uc815\uc81c\ub41c \ucc9c\uc5f0<\/td>\n<td>\ud45c\uc900 200mm \ud5c8\uc6a9<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\ub3c4\uac00\ub2c8 \uc9c0\uc624\uba54\ud2b8\ub9ac \ubc0f \ud45c\uba74 \uc870\uac74\uc774 \uc6a9\uc735 \uade0\uc77c\uc131\uc5d0 \uc9c1\uc811 \ud53c\ub4dc\ub429\ub2c8\ub2e4.<\/h2>\n<p>\ub3c4\uac00\ub2c8\uc758 \uce58\uc218 \ubd80\uc801\ud569\uc740 \uc0c1\ud488 \uc785\uace0 \uc2dc \uac10\uc9c0\ub418\ub294 \uac83\uc774 \uc544\ub2c8\ub77c \ub354 \uc774\uc0c1 \uc218\uc815\uc774 \ubd88\uac00\ub2a5\ud55c \ud480\ub9c1 \uc911\uac04\uc5d0 \uac10\uc9c0\ub429\ub2c8\ub2e4.<\/p>\n<p>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \ud615\uc0c1\uc740 \ub2e8\uc21c\ud55c \ud328\ud0a4\uc9d5 \ud30c\ub77c\ubbf8\ud130\uac00 \uc544\ub2c8\ub77c \uacf5\uc815 \ubcc0\uc218\uc785\ub2c8\ub2e4. <strong>\ubcbd \ub450\uaed8 \uade0\uc77c\uc131, \uc9c1\uacbd \uacf5\ucc28 \ubc0f \ub0b4\ubd80 \ud45c\uba74 \uc0c1\ud0dc\ub294 \uac01\uac01 \uc6a9\uc735 \ud750\ub984 \ub300\uce6d\uc131, \uc5f4 \uad6c\ubc30 \ubd84\ud3ec, \uadf8\ub9ac\uace0 <a href=\"https:\/\/en.wikipedia.org\/wiki\/Nucleation\">\ud575 \ud615\uc131<\/a><sup id=\"fnref1:2\"><a href=\"#fn:2\" class=\"footnote-ref\">2<\/a><\/sup> \uc131\uc7a5\ud558\ub294 \uacb0\uc815\uc758 \ub3d9\uc791\uc744 \ud655\uc778\ud569\ub2c8\ub2e4.<\/strong> \uce58\uc218 \ub9e4\uac1c\ubcc0\uc218\ub97c \ud654\ud559\uc5d0 \ube44\ud574 \ubd80\ucc28\uc801\uc778 \uac83\uc73c\ub85c \ucde8\uae09\ud558\ub294 \uc870\ub2ec \uc0ac\uc591\uc740 \uacf5\uc815 \ubcc0\ub3d9\uc131\uc758 \uc911\uc694\ud55c \uc6d0\uc778\uc744 \uccb4\uacc4\uc801\uc73c\ub85c \uacfc\uc18c\ud3c9\uac00\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>14\uc778\uce58\uc5d0\uc11c 32\uc778\uce58\uae4c\uc9c0 SEMI M1 \ub3c4\uac00\ub2c8 \ud06c\uae30 \uc9c0\uc815<\/h3>\n<p>SEMI M1 \ud45c\uc900\uc740 \uc2e4\ub9ac\ucf58 \uc0dd\uc0b0\uc5d0 \uc0ac\uc6a9\ub418\ub294 CZ \ub3c4\uac00\ub2c8\uc5d0 \ub300\ud55c \uae30\ubcf8 \uce58\uc218 \ucc38\uc870 \ud504\ub808\uc784\uc6cc\ud06c\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4. \ub3c4\uac00\ub2c8 \ud06c\uae30\ub294 \ub2e4\uc74c\uacfc \uac19\uc774 \uc9c0\uc815\ub429\ub2c8\ub2e4. <strong>\ub9bc\uc758 \uc678\uacbd(\uc778\uce58)<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \ubcf8\uccb4 \ub192\uc774, \ubcbd \ub450\uaed8 \ubc0f \uae30\ubcf8 \ubc18\uacbd\uc5d0 \ub300\ud55c \ud574\ub2f9 \uc0ac\uc591\uc744 \uc9c0\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc9c0\uc815\uc740 \uc815\ud655\ud55c \uac12\uc758 \ub2e8\uc77c \uc9d1\ud569\uc744 \uc124\uba85\ud558\ub294 \uac83\uc774 \uc544\ub2c8\ub77c \ub2e4\uc74c\uc744 \uc815\uc758\ud569\ub2c8\ub2e4. <strong>\uc801\ud569 \ub3c4\uac00\ub2c8\uac00 \ub5a8\uc5b4\uc838\uc57c \ud558\ub294 \ud5c8\uc6a9 \uc624\ucc28 \ubc94\uc704<\/strong> - \uadf8\ub9ac\uace0 \uc774\ub7ec\ud55c \ubc34\ub4dc\uc758 \ud3ed\uc740 \ud504\ub85c\uc138\uc2a4 \uc77c\uad00\uc131\uc5d0 \uc911\uc694\ud55c \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p>300mm \uc2e4\ub9ac\ucf58 \uc0dd\uc0b0\uc758 \uacbd\uc6b0, \uc8fc\uc694 \ub3c4\uac00\ub2c8 \ud06c\uae30\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>24\uc778\uce58(\uc678\uacbd 610mm)<\/strong>\uc758 \ubab8 \ub192\uc774\uac00 \uc57d <strong>430-450 mm<\/strong> \uc758 \uacf5\uce6d \ubcbd \ub450\uaed8\uc640 <strong>10-14 mm<\/strong> \ub97c \uae30\uc900\uc73c\ub85c \ud569\ub2c8\ub2e4. \uc774 \ud06c\uae30 \ub4f1\uae09\uc758 SEMI M1\uc5d0 \ub530\ub978 \ubcbd \ub450\uaed8 \ud5c8\uc6a9 \uc624\ucc28\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>\u00b11.0mm<\/strong>\ud558\uc9c0\ub9cc \uc120\ub3c4\uc801\uc778 \ubc18\ub3c4\uccb4 \ud339\uc740 \uc885\uc885 \ub2e4\uc74c\uacfc \uac19\uc740 \ub354 \uc5c4\uaca9\ud55c \ub0b4\ubd80 \uc0ac\uc591\uc744 \uc801\uc6a9\ud569\ub2c8\ub2e4. <strong>\u00b10.5mm<\/strong> \ub97c \uc0ac\uc6a9\ud558\uc5ec \uacb0\ud568\uc774 \uc801\uc740 \uacb0\uc815 \uc131\uc7a5\uc5d0 \ud544\uc694\ud55c \uc5f4 \ub300\uce6d\uc744 \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubca0\uc774\uc2a4 \ubc18\uacbd\uc740 \uacb0\uc815 \uaf2c\ub9ac\uc5d0\uc11c \ud070 \uc131\uc7a5 \uacf5\uadf9(D-\uacb0\ud568)\uc774 \ud615\uc131\ub418\ub294 \uac83\uacfc \uad00\ub828\ub41c \uc601\uc5ed\uc778 \ubca0\uc774\uc2a4 \uadfc\ucc98\uc758 \uc6a9\uc735 \ud750\ub984 \uc7ac\uc21c\ud658 \ud328\ud134\uc744 \uc9c0\ubc30\ud558\uae30 \ub54c\ubb38\uc5d0 \uae30\ud558\ud559\uc801\uc73c\ub85c \uc911\uc694\ud55c \uce58\uc218\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>450mm \uc2e4\ub9ac\ucf58 \uac1c\ubc1c\uc6a9 \ub3c4\uac00\ub2c8<\/strong> (32\uc778\uce58 \uc9c0\uc815)\ub294 \uc544\uc9c1 \uc644\uc804\ud788 \uc870\ud654\ub41c SEMI M1 \uac1c\uc815\uc774 \uc801\uc6a9\ub418\uc9c0 \uc54a\uc73c\uba70 \uc7a5\ube44 \uc81c\uc870\uc5c5\uccb4\uc640 \ub3c4\uac00\ub2c8 \uacf5\uae09\uc5c5\uccb4 \uac04\uc758 \uc591\uc790 \uac04 \uc0ac\uc591\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c 450mm \ub3c4\uac00\ub2c8\uc758 \uc870\ub2ec\uc740 \uc804\uc801\uc73c\ub85c \uacf5\uae09\uc5c5\uccb4\uc640\uc758 \uc9c1\uc811\uc801\uc778 \uae30\uc220 \ub300\ud654\uc5d0 \uc758\uc874\ud574\uc57c \ud558\uba70, \uc774\ub294 \ub9ac\ub4dc \ud0c0\uc784 \uacc4\ud68d\uc5d0 \uace0\ub824\ud574\uc57c \ud558\ub294 \uc694\uad6c \uc0ac\ud56d\uc785\ub2c8\ub2e4.<\/p>\n<h4>SEMI M1 \ub3c4\uac00\ub2c8 \uce58\uc218 \uae30\uc900<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ub3c4\uac00\ub2c8 \uc9c0\uc815(\uc778\uce58)<\/th>\n<th>\uc678\uacbd(mm)<\/th>\n<th>\ubcf8\uccb4 \ub192\uc774(mm)<\/th>\n<th>\uacf5\uce6d \ubcbd \ub450\uaed8(mm)<\/th>\n<th>\ud45c\uc900 \uc9c1\uacbd \uacf5\ucc28(mm)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>14<\/td>\n<td>356<\/td>\n<td>250-280<\/td>\n<td>7-9<\/td>\n<td>\u00b10.8<\/td>\n<\/tr>\n<tr>\n<td>18<\/td>\n<td>457<\/td>\n<td>320-350<\/td>\n<td>8-11<\/td>\n<td>\u00b10.8<\/td>\n<\/tr>\n<tr>\n<td>20<\/td>\n<td>508<\/td>\n<td>360-390<\/td>\n<td>9-12<\/td>\n<td>\u00b11.0<\/td>\n<\/tr>\n<tr>\n<td>24<\/td>\n<td>610<\/td>\n<td>430-450<\/td>\n<td>10-14<\/td>\n<td>\u00b11.0<\/td>\n<\/tr>\n<tr>\n<td>28<\/td>\n<td>711<\/td>\n<td>500-530<\/td>\n<td>12-16<\/td>\n<td>\u00b11.2<\/td>\n<\/tr>\n<tr>\n<td>32<\/td>\n<td>813<\/td>\n<td>560-600<\/td>\n<td>14-18<\/td>\n<td>\uc591\ubc29\ud5a5 \uc0ac\uc591<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\ub2e4\uc591\ud55c CZ \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \ub0b4\ubd80 \ud45c\uba74 \ud14d\uc2a4\ucc98 \uc694\uad6c \uc0ac\ud56d<\/h3>\n<p>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \ub0b4\ubd80 \ud45c\uba74 \uc0c1\ud0dc\ub294 \uc6a9\uc735 \ubcbd \uacc4\uba74\uc5d0\uc11c\uc758 \ud575 \ud615\uc131 \ubc0f \uc6a9\ud574 \uac70\ub3d9\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. <strong>\ub9e4\ub044\ub7fd\uace0 \uad11\ud0dd\uc774 \ub098\ub294 \ub0b4\ubd80 \ud45c\uba74<\/strong> - \uc544\ub798\uc758 \ud45c\uba74 \uac70\uce60\uae30 Ra\uac00 \ud2b9\uc9d5\uc785\ub2c8\ub2e4. <strong>0.4 \u03bcm<\/strong> - \ub294 \uc6b0\uc120 \uc6a9\ud574 \ubd80\uc704\ub97c \ucd5c\uc18c\ud654\ud558\uace0 \ubcf4\ub2e4 \ud654\ud559\uc801\uc73c\ub85c \uade0\uc77c\ud55c \uc6a9\uc735 \uc811\ucd09 \uc601\uc5ed\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc774\ub294 \uc0b0\uc18c \uade0\uc77c\uc131\uc774 \uc911\uc694\ud55c \ucca8\ub2e8 \ub178\ub4dc \ubc18\ub3c4\uccb4 \ub3c4\uac00\ub2c8\uc758 \ud45c\uc900 \uc0ac\uc591\uc785\ub2c8\ub2e4.<\/p>\n<p>\uac70\uce60\uac70\ub098 \uac00\ubccd\uac8c \uc5d0\uce6d\ub41c \ub0b4\ubd80 \ud45c\uba74, Ra \ubc94\uc704\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>1.5 ~ 4.0\u03bcm<\/strong>\ub294 \uc18c\uc790 \uacf5\uc815 \uc911 \uc0b0\ud654\ubb3c \uce68\uc804 \uc81c\uc5b4\ub97c \uc704\ud574 \ucd5c\uc18c \uc0b0\uc18c \ub18d\ub3c4\uac00 \ud544\uc694\ud55c \ud2b9\uc815 DRAM \uacf5\uc815 \ud750\ub984\uacfc \uac19\uc774 \uc0b0\uc18c \ubc29\ucd9c \uc81c\uc5b4\uac00 \ud544\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc9c0\uc815\ub418\uae30\ub3c4 \ud569\ub2c8\ub2e4. \ud14d\uc2a4\ucc98 \ub0b4\ubcbd\uc758 \ud45c\uba74\uc801\uc774 \uc99d\uac00\ud558\uba74 \ucd08\uae30 \ub2e8\uacc4 SiO\u2082 \uc6a9\ud574\uac00 \uac00\uc18d\ud654\ub418\uc5b4 \ucd08\uae30 \uac00\uc5f4 \ub2e8\uacc4\uc5d0\uc11c \uc6a9\uc735\ubb3c\uc5d0 \uc0b0\uc18c\ub97c \ud6a8\uacfc\uc801\uc73c\ub85c \uc0ac\uc804 \ub85c\ub4dc\ud558\uace0 \uc77c\ubc18\uc801\uc73c\ub85c \ud480 \uac1c\uc2dc \uc2dc \ubc1c\uc0dd\ud558\ub294 \uc0b0\uc18c \uacfc\ub3c4 \ud604\uc0c1\uc744 \uc555\ucd95\ud569\ub2c8\ub2e4. <strong>\uc774 \ud45c\uba74 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc811\uadfc \ubc29\uc2dd\uc5d0\ub294 \ud14d\uc2a4\ucc98\uc758 \uacf5\uac04 \uade0\uc77c\uc131\uacfc Ra \uac12\uc758 \uc815\ubc00\ud55c \uc0ac\uc591\uc774 \ubaa8\ub450 \ud544\uc694\ud569\ub2c8\ub2e4.<\/strong>\ud45c\uc900 \uce74\ud0c8\ub85c\uadf8 \ubaa9\ub85d\uc5d0\ub294 \uac70\uc758 \uc790\uc138\ud788 \uc124\uba85\ub418\uc5b4 \uc788\uc9c0 \uc54a\uc73c\uba70 \uc77c\ubc18\uc801\uc73c\ub85c \uacf5\uae09\uc5c5\uccb4\uc640 \uc9c1\uc811 \uae30\uc220 \ud611\uc0c1\uc774 \ud544\uc694\ud55c \ub9e4\uac1c\ubcc0\uc218\uc785\ub2c8\ub2e4.<\/p>\n<p>\ubc14\ub968 \ub3c4\ud551 \ub610\ub294 \uc9c8\ud654\ubd95\uc18c \ucf54\ud305 \ub0b4\ubd80 \ud45c\uba74\uc740 \ud45c\uc900 \uc2e4\ub9ac\uce74 \uc6a9\ud574\uc728\ub85c\ub294 \ub300\uad6c\uacbd \ud480\uc5d0\uc11c \ud5c8\uc6a9\ud560 \uc218 \uc5c6\uc744 \uc815\ub3c4\ub85c \ub192\uc740 \uc0b0\uc18c\ub97c \uc0dd\uc131\ud558\ub294 \ud2b9\uc218 \uc6a9\ub3c4\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc138 \ubc88\uc9f8 \ubc94\uc8fc\uc5d0 \uc18d\ud569\ub2c8\ub2e4. <strong>BN \ucf54\ud305 \ub3c4\uac00\ub2c8\ub294 \uc720\ud6a8 \uc0b0\uc18c \uc804\ub2ec\ub7c9\uc744 15~40%\uae4c\uc9c0 \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong> \ucf54\ud305\ub418\uc9c0 \uc54a\uc740 \ub3d9\uae09 \uc81c\ud488\uc5d0 \ube44\ud574 \uc0c1\ub2f9\ud55c \ucd94\uac00 \ube44\uc6a9\uc774 \ubc1c\uc0dd\ud558\uace0 \uc0ac\uc6a9 \uc911\uc778 \ud2b9\uc815 \uc6a9\uad11\ub85c \ubd84\uc704\uae30 \ubc0f \ud480 \ud504\ub85c\ud1a0\ucf5c\uacfc\uc758 \ud638\ud658\uc131 \uac80\uc99d\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h4>\ub0b4\ubd80 \ud45c\uba74 \uc0c1\ud0dc \uc635\uc158 \ubc0f CZ \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ub9e4\uce6d<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ud45c\uba74 \uc0c1\ud0dc<\/th>\n<th>Ra \ubc94\uc704(\u03bcm)<\/th>\n<th>\uc0b0\uc18c \uc804\ub2ec \uc18d\ub3c4<\/th>\n<th>\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uad11\ud0dd(\ud45c\uc900)<\/td>\n<td>&lt; 0.4<\/td>\n<td>\ubcf4\ud1b5, \uade0\uc77c<\/td>\n<td>300mm \ub85c\uc9c1, \uba54\ubaa8\ub9ac<\/td>\n<\/tr>\n<tr>\n<td>\uac00\ubccd\uac8c \uc5d0\uce6d<\/td>\n<td>1.5-2.5<\/td>\n<td>\uc0c1\uc2b9, \uc81c\uc5b4<\/td>\n<td>DRAM \uc0b0\uc18c \uc0ac\uc804 \ub85c\ub529<\/td>\n<\/tr>\n<tr>\n<td>\ubb34\uac70\uc6b4 \ud14d\uc2a4\ucc98<\/td>\n<td>3.0-4.0<\/td>\n<td>\ub192\uc740 \ucd08\uae30 \ub2e8\uacc4 \ud53c\ud06c<\/td>\n<td>\ud2b9\uc218 CZ, \ud14c\uc2a4\ud2b8 \uc6e8\uc774\ud37c<\/td>\n<\/tr>\n<tr>\n<td>BN \ucf54\ud305<\/td>\n<td>\ud574\ub2f9 \uc5c6\uc74c(\ucf54\ud305)<\/td>\n<td>15-40% \uac10\uc18c<\/td>\n<td>\uc800\uc0b0\uc18c 300mm \ud480<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Crucibles-Beside-CZ-Crystal-Growth-Furnace.webp\" alt=\"CZ \uacb0\uc815 \uc131\uc7a5\ub85c \uc606 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\" title=\"CZ \uacb0\uc815 \uc131\uc7a5\ub85c \uc606 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\" \/><\/p>\n<h2>\uc6d0\uc790\uc7ac \uc6d0\uc0b0\uc9c0\ub85c \ud5c8\uc6a9 \uac00\ub2a5\ud55c \ub3c4\uac00\ub2c8\uc640 \uc0dd\uc0b0\uc5d0 \ud544\uc218\uc801\uc778 \ub3c4\uac00\ub2c8 \uad6c\ubd84<\/h2>\n<p>\ud569\uc131 \uc2e4\ub9ac\uce74\uc640 \ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc0ac\uc774\uc758 \uc120\ud0dd\uc740 \uc21c\ub3c4\ubfd0\ub9cc \uc544\ub2c8\ub77c \ubaa8\ub4e0 \uc870\ub2ec \uc8fc\uae30\uc5d0 \ub0b4\uc7ac\ub41c \uc9c0\uc9c8\ud559\uc801 \uc77c\uad00\uc131 \uc704\ud5d8\uc5d0\ub3c4 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p>\uc8fc\ub85c \ube0c\ub77c\uc9c8, \ub9c8\ub2e4\uac00\uc2a4\uce74\ub974, \ubbf8\uad6d\uc758 \uace0\uc21c\ub3c4 \ub9e4\uc7a5\uc9c0\uc5d0\uc11c \uacf5\uae09\ub418\ub294 \ucc9c\uc5f0 \uc11d\uc601 \uae30\ubc18 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc218\uc2ed \ub144 \ub3d9\uc548 CZ \ub3c4\uac00\ub2c8 \uc0dd\uc0b0\uc758 \uc8fc\uc694 \uc6d0\ub8cc\ub85c \uc0ac\uc6a9\ub418\uc5b4 \uc654\uc2b5\ub2c8\ub2e4. \ud569\uc131 \uacbd\ub85c\uc5d0 \ube44\ud574 \ube44\uc6a9 \uba74\uc5d0\uc11c \uc0c1\ub2f9\ud55c \uc774\uc810\uc774 \uc788\uc73c\uba70, \ub2e4\uc74c\uacfc \uac19\uc740 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. <strong>150mm \ubc0f 200mm \uc0dd\uc0b0\uc5d0 \uc0ac\uc6a9\ub418\ub294 14\uc778\uce58 \ubc0f 18\uc778\uce58 \ub3c4\uac00\ub2c8<\/strong>\ud504\ub9ac\ubbf8\uc5c4 \ucc9c\uc5f0 \uc11d\uc601\uc5d0\uc11c \uc5bb\uc744 \uc218 \uc788\ub294 \uc21c\ub3c4\ub294 \ub300\ubd80\ubd84\uc758 \ub514\ubc14\uc774\uc2a4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ucda9\ubd84\ud569\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \ucc9c\uc5f0 \uc11d\uc601\uc740 \ub0b4\uc7ac\uc801\uc778 \uc9c0\uc9c8\ud559\uc801 \ubcc0\ub3d9\uc131 \uc704\ud5d8\uc744 \ub0b4\ud3ec\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4: <strong>\ubbf8\ub7c9 \uc6d0\uc18c \ub18d\ub3c4(\ud2b9\ud788 Al, Ti, Li)\ub294 \ucc44\uad74 \ubc30\uce58\ub9c8\ub2e4 \ubcc0\ub3d9\ud569\ub2c8\ub2e4.<\/strong>\uc774\ub7ec\ud55c \ubcc0\ub3d9\uc740 \ubd84\uc11d \uc778\uc99d\uc11c \ub370\uc774\ud130\ub9cc\uc73c\ub85c\ub294 \uc608\uce21\ud558\uae30 \uc5b4\ub824\uc6b4 \ub3c4\uac00\ub2c8 \uc131\ub2a5\uc758 \uac10\uc9c0 \uac00\ub2a5\ud55c \ubcc0\ud654\ub85c \uc774\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\ud569\uc131 \uc735\ud569 \uc2e4\ub9ac\uce74<\/strong> \ub294 SiCl\u2084 \ub610\ub294 TEOS\uc640 \uac19\uc740 \uace0\uc21c\ub3c4 \uc2e4\ub9ac\ucf58 \uc804\uad6c\uccb4\uc758 \uc5f4\ubd84\ud574 \ub610\ub294 \uc0b0\ud654\uc5d0 \uc758\ud574 \uc0dd\uc131\ub418\uba70, \ub2e4\uc74c\uacfc \uac19\uc740 \ucd9c\ubc1c \ubb3c\uc9c8\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. <strong>\ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \uc218\uc900\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 0.1ppm \ubbf8\ub9cc\uc785\ub2c8\ub2e4.<\/strong>. \uc774 \uc218\uc900\uc758 \uc21c\ub3c4\ub294 \ucc9c\uc5f0 \uc11d\uc601\uc758 \uc5b4\ub5a4 \uc815\uc81c \uacfc\uc815\uc73c\ub85c\ub3c4 \ub2ec\uc131\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. For <strong>300mm \ubc0f \uace0\uae09 \ub178\ub4dc \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong>\ud2b9\ud788 \uc6a9\uc735 \uc811\ucd09 \uc2dc\uac04\uc774 \uac00\uc7a5 \uae34 \ub3c4\uac00\ub2c8\uc758 \uc678\ubcbd\uacfc \ubc14\ub2e5 \uc601\uc5ed\uc5d0\uc11c \ud569\uc131 \uc18c\uc7ac\uac00 \uc0ac\uc2e4\uc0c1 \ud45c\uc900\uc774 \ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c 24\uc778\uce58 \ud06c\uae30\uc758 \uacbd\uc6b0 \ucc9c\uc5f0 \uc18c\uc7ac \ub3c4\uac00\ub2c8\uc5d0 \ube44\ud574 \ud569\uc131 \uc18c\uc7ac \ub3c4\uac00\ub2c8\uc758 \uac00\uaca9 \ud504\ub9ac\ubbf8\uc5c4\uc740 \uc0c1\ub2f9\ud558\uba70 \ub2e4\ub144\uac04\uc758 \uc870\ub2ec \uc608\uc0b0 \ucc45\uc815 \uc2dc \uc774\ub97c \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\ud558\uc774\ube0c\ub9ac\ub4dc \uac74\uc124 \ub3c4\uac00\ub2c8<\/strong>\ud569\uc131 \ub0b4\ubd80 \ub808\uc774\uc5b4\uc640 \ucc9c\uc5f0 \uc11d\uc601 \uc678\ubd80 \ub808\uc774\uc5b4\ub97c \uacb0\ud569\ud558\ub294 \uac83\uc740 \uc21c\ub3c4 \uc694\uad6c \uc0ac\ud56d\uacfc \ube44\uc6a9\uc758 \uade0\ud615\uc744 \ub9de\ucd94\ub294 \uac00\uc7a5 \uc77c\ubc18\uc801\uc778 \uc0c1\uc6a9 \uc194\ub8e8\uc158\uc785\ub2c8\ub2e4. \ub0b4\ubd80 \ub808\uc774\uc5b4 - \uc77c\ubc18\uc801\uc73c\ub85c <strong>2~5mm \ub450\uaed8<\/strong> - \ub294 \uc2e4\ub9ac\ucf58 \uc6a9\uc735\ubb3c\uacfc \uc811\ucd09\ud558\ub294 \ud654\ud559\uc801 \ud65c\uc131 \uc601\uc5ed\uc73c\ub85c \ud569\uc131 \uc2e4\ub9ac\uce74\ub85c \uc81c\uc791\ub429\ub2c8\ub2e4. \uae30\uacc4\uc801 \uc9c0\uc9c0\uc640 \uc5f4 \uc9c8\ub7c9\uc744 \uc81c\uacf5\ud558\ub294 \uc678\ubd80 \uad6c\uc870 \uce35\uc740 \uac00\uacf5\ub41c \ucc9c\uc5f0 \uc11d\uc601\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774 \uad6c\uc870\ub294 \uc7ac\ub8cc\ube44\ub97c \ud06c\uac8c \uc904\uc774\uba74\uc11c \uc644\uc804 \ud569\uc131 \ub3c4\uac00\ub2c8\uc758 \ubd88\uc21c\ubb3c \uc81c\uc5b4\ub97c \ub2ec\uc131\ud558\uba70, \ub2e4\uc74c\uacfc \uac19\uc740 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. <strong>\uba54\uc778\uc2a4\ud2b8\ub9bc 300mm CZ \uc0dd\uc0b0\uc744 \uc704\ud55c \ub300\ubd80\ubd84\uc758 \ub3c4\uac00\ub2c8\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uad6c\uc131\uc785\ub2c8\ub2e4.<\/strong>.<\/p>\n<\/li>\n<li>\n<p><strong>\uc870\ub2ec \uc0ac\uc591\uc758 \uc758\ubbf8:<\/strong> \uacac\uc801\uc744 \uc694\uccad\ud560 \ub54c\ub294 \uacac\uc801\uc11c\uc5d0 \ucc9c\uc5f0, \ud558\uc774\ube0c\ub9ac\ub4dc, \uc804\ud569\uc131 \uad6c\uc870\uc758 \uad6c\ubd84\uc744 \uba85\uc2dc\uc801\uc73c\ub85c \uba85\uc2dc\ud574\uc57c \ud569\ub2c8\ub2e4. \uacf5\uae09\uc5c5\uccb4\ub294 \uc790\uc7ac \ub808\uc774\uc5b4\ub9c1\uc744 \uacf5\uac1c\ud558\uc9c0 \uc54a\uace0 \uac00\uc7a5 \ube44\uc6a9 \uacbd\uc7c1\ub825\uc774 \ub192\uc740 \uad6c\uc131\uc744 \uae30\ubcf8\uc73c\ub85c \ud560 \uc218 \uc788\uc73c\ubbc0\ub85c \ud45c\uc900 \ubb38\uc11c \ud328\ud0a4\uc9c0\uc758 \uc77c\ubd80\ub85c \ub2e8\uba74 \uc790\uc7ac \uc120\uc5b8\uc744 \uc694\uccad\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc774 \ub2e8\uc77c \uba85\ud655\ud654 \ud3ec\uc778\ud2b8\ub294 \ub3c4\uac00\ub2c8 \uc870\ub2ec\uc5d0\uc11c \uac00\uc7a5 \ud754\ud55c \uc0ac\uc591 \ubaa8\ud638\uc131\uc758 \uc6d0\uc778 \uc911 \ud558\ub098\ub97c \uc81c\uac70\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \ubc30\uce58 \ubcc0\ud654\ub85c \uacbd\uace0 \uc5c6\uc774 CZ \uacf5\uc815 \uae30\uac04\uc744 \ubcc0\uacbd\ud558\ub294 \ubc29\ubc95<\/h2>\n<p>\ub3c4\uac00\ub2c8\uac00 \uac1c\ubcc4 \uac80\uc0ac\ub97c \ud1b5\uacfc\ud588\uc9c0\ub9cc OH \ud568\ub7c9\uc774\ub098 \ubcbd \ub450\uaed8\uac00 \uc774\uc804 \ubc30\uce58\uc5d0\uc11c \ubc97\uc5b4\ub098\ub294 \uacbd\uc6b0 \ud488\uc9c8 \uacbd\ubcf4\uac00 \ud2b8\ub9ac\uac70\ub418\uc9c0 \uc54a\uace0 \uacf5\uc815 \ucc3d\uc774 \ubcc0\uacbd\ub429\ub2c8\ub2e4.<\/p>\n<p>\ubc30\uce58 \uac04 \uc77c\uad00\uc131\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8 \uc870\ub2ec\uc5d0 \uc788\uc5b4 \uac00\uc7a5 \uc0ac\uc591\uc774 \ubbf8\ub2ec\ub418\ub294 \ucc28\uc6d0\uc785\ub2c8\ub2e4. \ub3c5\ub9bd\uc801\uc73c\ub85c \uce58\uc218 \ubc0f \uc21c\ub3c4 \uc0ac\uc591\uc744 \uc644\ubcbd\ud558\uac8c \uc900\uc218\ud558\ub294 \uac1c\ubcc4 \ub3c4\uac00\ub2c8\ub3c4 \uc8fc\ubb38\ub9c8\ub2e4 \ud574\ub2f9 \ud30c\ub77c\ubbf8\ud130\uc758 \ud1b5\uacc4\uc801 \ubd84\ud3ec\uac00 \ubc14\ub00c\uba74 \uc218\uc728\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \ubcc0\ub3d9\uc131\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\ub3c4\uac00\ub2c8 \uac04 \ubcc0\ub3d9\uc131\uc5d0 \ub300\ud55c CZ \uc0b0\uc18c \uc81c\uc5b4\uc758 \ubbfc\uac10\ub3c4\ub294 \ubcbd \ub450\uaed8 \ub610\ub294 \uc6a9\ud574\uc728\uc758 \ud558\uc704 \uc0ac\uc591 \ubcc0\ud654\ub85c\ub3c4 \uc6e8\uc774\ud37c \uc0b0\uc18c \ud0c0\uac9f\uc774 1~3ppma\uae4c\uc9c0 \uc774\ub3d9\ud560 \uc218 \uc788\uc74c\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4.<\/strong> - \ucd09\ubc15\ud55c \uacf5\uc815 \uae30\uac04\uc5d0 \ud569\uaca9 \ud14c\uc2a4\ud2b8\uc5d0 \uc2e4\ud328\ud558\ub294 \ub3c4\uac00\ub2c8 \uc5c6\uc774 \uc6e8\uc774\ud37c \ub85c\ud2b8\ub97c \uc0ac\uc591\uc5d0\uc11c \ubd88\ud569\uaca9\uc73c\ub85c \ubc00\uc5b4\ubd99\uc77c \uc218 \uc788\ub294 \ub378\ud0c0\uc785\ub2c8\ub2e4.<\/p>\n<h3>\ubc18\ub3c4\uccb4 \ub3c4\uac00\ub2c8\uc5d0 \ub300\ud55c \ubd84\uc11d \uc99d\uba85\uc11c\uc758 \ub0b4\uc6a9<\/h3>\n<p>\ubd84\uc11d \uc99d\uba85\uc11c(COA)\ub294 \uc785\uace0\ub41c \ub3c4\uac00\ub2c8 \ub85c\ud2b8\uac00 \ud569\uc758\ub41c \uc0ac\uc591\uc744 \ucda9\uc871\ud558\ub294\uc9c0 \ud655\uc778\ud558\uae30 \uc704\ud55c \uae30\ubcf8 \ubb38\uc11c\ud654 \ub3c4\uad6c\uc774\uba70, \uadf8 \ud3ec\uad04\uc131\uc5d0 \ub530\ub77c \uc785\uace0 \uac80\uc0ac\uac00 \uc9c4\uc815\ud55c \ud488\uc9c8 \uac8c\uc774\ud2b8\uc778\uc9c0 \uc544\ub2c8\uba74 \ud615\uc2dd\uc801\uc778 \uac83\uc778\uc9c0 \uacb0\uc815\ub429\ub2c8\ub2e4. <strong>\ubc18\ub3c4\uccb4 \ub4f1\uae09 \ub3c4\uac00\ub2c8\uc5d0 \ub300\ud55c \ucd5c\uc18c\ud55c\uc758 \uc801\uc808\ud55c COA\uc5d0\ub294 \uc6d0\uc18c \uc21c\ub3c4 \ub370\uc774\ud130, \uce58\uc218 \uce21\uc815 \ubc0f \uad11\ud559 \ud488\uc9c8 \ubd84\ub958\uac00 \ud3ec\ud568\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/strong> - \ubb38\uc11c\uac00 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uc218\uc2e0 \uac80\uc0ac \uacb0\uc815\uc744 \ub4b7\ubc1b\uce68\ud558\ub824\uba74 \uc138 \uac00\uc9c0 \ubc94\uc8fc\uac00 \ubaa8\ub450 \uc874\uc7ac\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p>\uc21c\ub3c4 \uce21\uba74\uc5d0\uc11c COA\ub294 \uc9c0\uc815\ub41c \ubd84\uc11d \ubc29\ubc95(\uc77c\ubc18\uc801\uc73c\ub85c 10ppb \ubbf8\ub9cc \uae08\uc18d\uc758 \uacbd\uc6b0 ICP-MS)\uc744 \uc0ac\uc6a9\ud558\uc5ec \ucd5c\uc18c Fe, Cu, Ni, Na, K, Al, Ca \ubc0f Ti\uc758 \uac1c\ubcc4 \ub18d\ub3c4\ub97c \uc911\ub7c9 ppb\ub85c \ud45c\uc2dc\ud558\uc5ec \ud569\uc0b0\ud55c \ucd1d\uacc4\uac00 \uc544\ub2cc \uac1c\ubcc4 \ub18d\ub3c4\ub97c \ubcf4\uace0\ud574\uc57c \ud569\ub2c8\ub2e4(\uc77c\ubc18\uc801\uc73c\ub85c 10ppb \ubbf8\ub9cc \uae08\uc18d\uc758 \uacbd\uc6b0 ICP-MS). <strong>\uc6d0\uc18c \uc218\uc900 \ubd84\uc11d \uc5c6\uc774 SiO\u2082 \ud568\ub7c9\uc744 \ub2e8\uc77c \ubc31\ubd84\uc728\ub85c \ubcf4\uace0\ud558\ub294 \uac83\uc740 \ubc18\ub3c4\uccb4 \uc870\ub2ec\uc5d0 \ucda9\ubd84\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/strong> \ub85c\ud2b8 \uc218\ub77d \uc804\uc5d0 \ubcf4\uc644 \ub370\uc774\ud130\ub97c \uc694\uccad\ud558\ub294 \uba54\uc2dc\uc9c0\ub97c \ud45c\uc2dc\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p>\uce58\uc218 \uce21\uba74\uc5d0\uc11c COA\uc5d0\ub294 \ub2e8\uc77c \uc2dc\ub8cc\uc758 \uac12\uc774 \uc544\ub2c8\ub77c \ub85c\ud2b8\uc758 \ud1b5\uacc4\uc801\uc73c\ub85c \ub300\ud45c\uc801\uc778 \uc0d8\ud50c\uc5d0\uc11c \uce21\uc815\ud55c \uc678\uacbd, \ubab8\uccb4 \ub192\uc774, \ubcbd \ub450\uaed8\uc758 \ud3c9\uade0 \ubc0f \ud45c\uc900\ud3b8\ucc28 \uac12\uc774 \ud3ec\ud568\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4. \ub3c4\uac00\ub2c8 50\uac1c\ub97c \ucd08\uacfc\ud558\ub294 \uc8fc\ubb38\uc758 \uacbd\uc6b0, <strong>\uc804\uccb4 \uce21\uc815 \ubcf4\uace0\uac00 \ud3ec\ud568\ub41c \ucd5c\uc18c 10%\uc758 \uc0d8\ud50c\ub9c1 \uacc4\ud68d<\/strong> \ub294 \uc8fc\uc694 \ud339 \uacf5\uae09\ub9dd\uc758 \ud45c\uc900 \uad00\ud589\uc785\ub2c8\ub2e4.<\/p>\n<h4>\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc11d\uc601 \ub3c4\uac00\ub2c8 \uc870\ub2ec\uc744 \uc704\ud55c \ucd5c\uc18c COA \ud30c\ub77c\ubbf8\ud130<\/h4>\n<table>\n<thead>\n<tr>\n<th>COA \uce74\ud14c\uace0\ub9ac<\/th>\n<th>\ud544\uc218 \ub9e4\uac1c \ubcc0\uc218<\/th>\n<th>\ucd5c\uc18c \ubcf4\uace0 \ud615\uc2dd<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\ud654\ud559\uc801 \uc21c\ub3c4<\/td>\n<td>Fe, Cu, Ni, Na, K, Al, Ca, Ti(\uac1c\ubcc4)<\/td>\n<td>ppb \uc911\ub7c9, ICP-MS \ubc29\ubc95 \ud45c\uae30<\/td>\n<\/tr>\n<tr>\n<td>SiO\u2082 \ud568\ub7c9<\/td>\n<td>\ucd1d SiO\u2082 \ube44\uc728<\/td>\n<td>\uc18c\uc218\uc810 \uc774\ud558 4\uc790\ub9ac \uc774\uc0c1 %<\/td>\n<\/tr>\n<tr>\n<td>OH \ucf58\ud150\uce20<\/td>\n<td>\uc218\uc0b0\uae30 \ub18d\ub3c4<\/td>\n<td>ppm, IR \ubd84\uad11\ubc95<\/td>\n<\/tr>\n<tr>\n<td>\ucc28\uc6d0<\/td>\n<td>OD, \ub192\uc774, \ubcbd \ub450\uaed8(\ud3c9\uade0 \u00b1 SD)<\/td>\n<td>mm, \uc0d8\ud50c \ud06c\uae30 \uba85\uc2dc<\/td>\n<\/tr>\n<tr>\n<td>\uad11\ud559 \ud488\uc9c8<\/td>\n<td>\ubc84\ube14 \ub4f1\uae09, \uc778\ud074\ub8e8\uc804 \ubd84\ub958<\/td>\n<td>ISO 10110 \ub610\ub294 SEMI \ub0b4\ubd80 \uae30\uc900<\/td>\n<\/tr>\n<tr>\n<td>\uad6c\uc870\uc801<\/td>\n<td>\uc2a4\ud2b8\ub808\uc2a4 \ubcf5\uad74\uc808 \uc218\uc900<\/td>\n<td>nm\/cm, \ud3b8\uad11\ubc95<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\ubc84\ube14 \ub4f1\uae09 \ubd84\ub958 \ubc0f \ud5c8\uc6a9\ub418\ub294 \ud3ec\ud568 \ud55c\ub3c4<\/h3>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uae30\ud3ec\uc640 \uace0\uccb4 \ub0b4\ud3ec\ubb3c\uc740 \ub3c4\uac00\ub2c8 \ubcbd\uc758 \uc5f4 \uade0\uc9c8\uc131\uc744 \uac10\uc18c\uc2dc\ucf1c \uad6d\ubd80\uc801\uc778 \ud56b\uc2a4\ud31f\uc744 \uc0dd\uc131\ud558\uc5ec \ud0c8\uc11d\ud654\ub97c \uac00\uc18d\ud654\ud558\uace0 \uc6a9\uc735\ubb3c\uc5d0 \ube44\ub300\uce6d\uc801\uc778 \uc5f4 \uad6c\ubc30\ub97c \ub3c4\uc785\ud569\ub2c8\ub2e4. <strong>ISO 10110 \ud30c\ud2b8 4\ub294 \ub2e8\uc704 \ubd80\ud53c\ub2f9 \uc218\uc640 \ucd5c\ub300 \uac1c\ubcc4 \uc9c1\uacbd\uc5d0 \ub530\ub77c \uae30\ud3ec\ub97c \ubd84\ub958\ud569\ub2c8\ub2e4.<\/strong>0(\ucd5c\uace0 \ud488\uc9c8, \ubcf8\uc9c8\uc801\uc73c\ub85c \uae30\ud3ec\uac00 \uc5c6\uc74c)\uc5d0\uc11c 3(\ube44\uad11\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud5c8\uc6a9\ub418\ub294 \uac00\uc2dc\uc801 \uae30\ud3ec \ubc00\ub3c4)\uae4c\uc9c0\uc758 \ub4f1\uae09\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 CZ \ub3c4\uac00\ub2c8\uc6a9, <strong>0\ub4f1\uae09 \ub610\ub294 1\ub4f1\uae09 \ubd84\ub958\uac00 \ud45c\uc900\uc785\ub2c8\ub2e4.<\/strong>\uac1c\ubcc4 \uae30\ud3ec \uc9c1\uacbd\uc740 \ub2e4\uc74c\uacfc \uac19\uc774 \uc81c\ud55c\ub429\ub2c8\ub2e4. <strong>0.1 mm<\/strong> \uc640 \uc544\ub798\uc758 \ucd1d \ub2e8\uba74\uc801\uc744 \ud569\uc0b0\ud569\ub2c8\ub2e4. <strong>100cm\u00b3\ub2f9 0.1mm\u00b2<\/strong> \uc758 \uc790\ub8cc\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc77c\ubc18\uc801\uc73c\ub85c \ubc18\uc751\ud558\uc9c0 \uc54a\uc740 \uc11d\uc601 \uc785\uc790, \uc6a9\uad11\ub85c \ub0b4\ud654 \uc624\uc5fc\uc758 \uc9c0\ub974\ucf54\ub2c8\uc544, \uac00\uacf5 \uc7a5\ube44\uc758 \uae08\uc18d \uc785\uc790 \ub4f1 \uace0\uccb4 \uac1c\uc7ac\ubb3c\uc740 \uae30\ud3ec\uc640 \ubcc4\ub3c4\ub85c \ubd84\ub958\ub418\uba70 \ud654\ud559\uc801\uc73c\ub85c \ud65c\uc131\uc774\uace0 \uad6c\uc870\uc801\uc73c\ub85c \ud30c\uad34\uc801\uc774\uae30 \ub54c\ubb38\uc5d0 \ub354 \uc5c4\uaca9\ud55c \ud5c8\uc6a9 \uae30\uc900\uc744 \ub530\ub985\ub2c8\ub2e4. <strong>\ub3c4\uac00\ub2c8 \ubcbd\uc758 \ub0b4\ubd80 3mm\uc5d0\uc11c 50\u03bcm\ubcf4\ub2e4 \ud070 \ub2e8\uc77c \uace0\uccb4 \ub0b4\ud3ec\ubb3c<\/strong> \uc774 \ud06c\uae30\uc758 \uac1c\uc7ac\ubb3c\uc740 \ud480\ub9c1 \uc911\uc5d0 \uc6b0\uc120\uc801\uc73c\ub85c \uc6a9\ud574\ub418\uc5b4 \uacb0\uc815 \uc131\uc7a5 \uc8fc\uae30\uc758 \uc608\uce21\ud560 \uc218 \uc5c6\ub294 \uc9c0\uc810\uc5d0\uc11c \uc6a9\uc735\ubb3c\uc5d0 \uc9d1\uc911\ub41c \uc624\uc5fc \ubb3c\uc9c8 \ud384\uc2a4\ub97c \ubc29\ucd9c\ud558\ubbc0\ub85c \uc8fc\uc694 \ubc18\ub3c4\uccb4 \ud339 \uc0ac\uc591\uc5d0\uc11c \ub85c\ud2b8 \uac70\ubd80\uc5d0 \ub300\ud55c \ucda9\ubd84\ud55c \uadfc\uac70\uac00 \ub429\ub2c8\ub2e4.<\/p>\n<p>\uc870\ub2ec \ud300\uc758 \uc2e4\uc9c8\uc801\uc778 \uacfc\uc81c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uacf5\uae09\uc5c5\uccb4\uac00 \uc790\uccb4 \uac80\uc0ac \ud504\ub85c\ud1a0\ucf5c\uc5d0 \ub530\ub77c \ud339\uc758 \ub0b4\ubd80 \ud45c\uc900\uacfc \uc77c\uce58\ud558\uc9c0 \uc54a\uc744 \uc218 \uc788\ub294 \uc7a5\ube44\uc640 \uc0d8\ud50c\ub9c1 \uc18d\ub3c4\ub97c \uc0ac\uc6a9\ud558\uc5ec \ubc84\ube14 \ubc0f \ud3ec\ud568 \ub370\uc774\ud130\ub97c \uc218\uc9d1\ud55c\ub2e4\ub294 \uc810\uc785\ub2c8\ub2e4. <strong>\uacf5\uae09\uc5c5\uccb4\uc5d0 \ubc30\uc728 \uc218\uc900, \uc870\uba85 \uc720\ud615, \uac80\uc0ac\ud55c \uc0d8\ud50c \ube44\uc728 \ub4f1 \uac80\uc0ac \ubc29\ubc95\ub860\uc744 \uacf5\uac1c\ud558\ub3c4\ub85d \uc694\uccad\ud558\uba74 \ubcf4\uace0\ub41c \ub4f1\uae09\uc774 \uc5ec\ub7ec \uc7a0\uc7ac\uc801 \uacf5\uae09\uc5c5\uccb4\uc5d0\uc11c \ube44\uad50 \uac00\ub2a5\ud55c\uc9c0 \ud3c9\uac00\ud560 \uc218 \uc788\ub294 \uadfc\uac70\uac00 \ub429\ub2c8\ub2e4.<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \ubaa8\ub4e0 \"1\ub4f1\uae09\" \uc120\uc5b8\uc744 \ub3d9\ub4f1\ud558\uac8c \ucde8\uae09\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<h4>CZ \ub3c4\uac00\ub2c8 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c ISO 10110 \uae30\ud3ec \ub4f1\uae09 \uae30\uc900<\/h4>\n<table>\n<thead>\n<tr>\n<th>ISO 10110 \ub4f1\uae09<\/th>\n<th>\ucd5c\ub300 \uae30\ud3ec \uc9c1\uacbd(mm)<\/th>\n<th>100cm\u00b3(mm\u00b2) \ub2f9 \ucd5c\ub300 \uc9d1\uacc4 \uba74\uc801<\/th>\n<th>\ubc18\ub3c4\uccb4 CZ \uc801\ud569\uc131<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>0\ub4f1\uae09<\/td>\n<td>&lt; 0.016<\/td>\n<td>&lt; 0.029<\/td>\n<td>\uace0\uae09 \ub178\ub4dc, 300mm EUV \uc778\uc811<\/td>\n<\/tr>\n<tr>\n<td>1\ub4f1\uae09<\/td>\n<td>&lt; 0.1<\/td>\n<td>&lt; 0.1<\/td>\n<td>\ud45c\uc900 300mm, 200mm \uc0dd\uc0b0<\/td>\n<\/tr>\n<tr>\n<td>2\ub4f1\uae09<\/td>\n<td>&lt; 0.25<\/td>\n<td>&lt; 0.5<\/td>\n<td>\uc911\uc694\ud558\uc9c0 \uc54a\uc740 \ud30c\uc77c\ub7ff \uaddc\ubaa8<\/td>\n<\/tr>\n<tr>\n<td>3\ud559\ub144<\/td>\n<td>&lt; 0.5<\/td>\n<td>&lt; 2.0<\/td>\n<td>\ubc18\ub3c4\uccb4 CZ\uc5d0\ub294 \uc801\ud569\ud558\uc9c0 \uc54a\uc74c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Semiconductor-Quartz-Glass-Crucibles-in-Warehouse-Storage-Packaging.webp\" alt=\"\ucc3d\uace0 \ubcf4\uad00 \ud3ec\uc7a5\uc758 \ubc18\ub3c4\uccb4 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\" title=\"\ucc3d\uace0 \ubcf4\uad00 \ud3ec\uc7a5\uc758 \ubc18\ub3c4\uccb4 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\" \/><\/p>\n<h2>\ud4e8\uc988\ub4dc \uc2e4\ub9ac\uce74 \uc5f4 \ud2b9\uc131\uc774 \ub2e4\ub978 \ub3c4\uac00\ub2c8\uac00 \ubd88\uac00\ub2a5\ud55c \uacf3\uc5d0\uc11c CZ \ub3c4\uac00\ub2c8\uac00 \uc791\ub3d9\ud558\ub294 \uc774\uc720\ub97c \uc124\uba85\ud569\ub2c8\ub2e4.<\/h2>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uc5f4\uc801 \ud2b9\uc131\uc740 \ubd80\uc218\uc801\uc778 \uac83\uc774 \uc544\ub2c8\ub77c \uc2e4\ub9ac\ucf58\uacfc\uc758 \ud654\ud559\uc801 \ubc18\uc751\uc131\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0 \uc774 \uc18c\uc7ac\uac00 CZ \ub3c4\uac00\ub2c8 \uc751\uc6a9 \ubd84\uc57c\ub97c \uc9c0\ubc30\ud558\ub294 \uc774\uc720\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc5f4\ud33d\ucc3d \uacc4\uc218(CTE)\uac00 \ub9e4\uc6b0 \ub0ae\uc2b5\ub2c8\ub2e4. <strong>0.55 \u00d7 10-\u2076\/\u00b0C<\/strong> 0~1,000\u00b0C \ubc94\uc704\uc5d0\uc11c \uc791\ub3d9\ud569\ub2c8\ub2e4. \uc774 \uc218\uce58\ub294 \uc54c\ub8e8\ubbf8\ub098\ubcf4\ub2e4 \uc57d 10\ubc30, \ud45c\uc900 \ubd95\uaddc\uc0b0 \uc720\ub9ac\ubcf4\ub2e4 20\ubc30 \uc774\uc0c1 \ub0ae\uc740 \uc218\uce58\uc785\ub2c8\ub2e4. \uadf8 \uacb0\uacfc \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub3c4\uac00\ub2c8\ub97c \uc2e4\uc628\uc5d0\uc11c 1,500\u00b0C\uae4c\uc9c0 \uac00\uc5f4\ud588\ub2e4\uac00 \ub2e4\uc2dc \uc2e4\uc628\uc73c\ub85c \ub0c9\uac01\ud560 \ub54c \ub3d9\uc77c\ud55c \uc870\uac74\uc5d0\uc11c \ub354 \ub192\uc740 \ub4f1\uae09\uc758 \ub0b4\ud654 \uc7ac\ub8cc\ub97c \uade0\uc5f4\uc2dc\ud0ac \uc218 \uc788\ub294 \uc5f4 \uc751\ub825 \uad6c\ubc30\ub97c \ubc1c\uc0dd\uc2dc\ud0a4\uc9c0 \uc54a\uace0\ub3c4 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub3c4\uac00\ub2c8\ub97c \uac00\uc5f4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\uc5f0\ud654\uc810 \ubc0f \uc791\ub3d9 \uc628\ub3c4:<\/strong> \uace0\uc21c\ub3c4 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uc5f0\ud654\uc810\uc740 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>1,665\u00b0C<\/strong>\uadf8\ub9ac\uace0 \uc2e4\uc81c \uc791\ub3d9 \uc628\ub3c4 \ud55c\uacc4(\uc810\uc131 \ubcc0\ud615 \uc5c6\uc774 \uc9c0\uc18d\uc801\uc778 \uae30\uacc4\uc801 \ubd80\ud558\ub97c \uc9c0\ud0f1\ud560 \uc218 \uc788\ub294 \uc628\ub3c4)\ub294 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>1,100\u00b0C<\/strong> \ub300\uae30\uc555 \ud558\uc5d0\uc11c. CZ \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc2e4\ub9ac\ucf58\uc740 \ub300\ub7b5 \ub2e4\uc74c\uacfc \uac19\uc740 \uc628\ub3c4\uc5d0\uc11c \ub179\uc2b5\ub2c8\ub2e4. <strong>1,415~1,500\u00b0C<\/strong> \ub294 \uc774 \uc791\uc5c5 \ud55c\uacc4\ub97c \ud6e8\uc52c \ucd08\uacfc\ud558\uae30 \ub54c\ubb38\uc5d0 CZ \ub3c4\uac00\ub2c8\ub294 \ud56d\uc0c1 \ud751\uc5f0 \uac10\uc751\uae30\ub85c \uc678\ubd80\uc5d0\uc11c \uc9c0\uc9c0\ub429\ub2c8\ub2e4. <strong>\uc11c\uc149\ud130\ub294 \uae30\uacc4\uc801 \ubd80\ud558\ub97c \uc804\ub2ec\ud558\uace0, \uc11d\uc601 \ub3c4\uac00\ub2c8\ub294 \ud654\ud559\uc801 \uaca9\ub9ac \uae30\ub2a5\uc744 \uc218\ud589\ud569\ub2c8\ub2e4.<\/strong> \uc774\ub7ec\ud55c \uae30\uacc4\uc801 \ubc0f \ud654\ud559\uc801 \uc5ed\ud560 \ubd84\ub2f4\uc740 \ub3c4\uac00\ub2c8 \ubcc0\ud615\uc774 \uc8fc\ub85c \uad6c\uc870 \uc124\uacc4 \ubb38\uc81c\uac00 \uc544\ub2cc \uc7ac\ub8cc \uc21c\ub3c4 \ubc0f OH \ud568\ub7c9 \ubb38\uc81c\uc778 \uc774\uc720\ub97c \uc774\ud574\ud558\ub294 \ub370 \uae30\ubcf8\uc774 \ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc5f4\ucda9\uaca9 \ub9e4\uac1c\ubcc0\uc218 \ubc0f \uade0\uc5f4\uc5d0 \ub300\ud55c \ub0b4\uc131:<\/strong> \uc7ac\ub8cc\uc758 \uc5f4\ucda9\uaca9 \uc800\ud56d\uc740 R = \u03c3f \u00d7 \u03bb \/ (E \u00d7 \u03b1 \u00d7 \u03ba)\ub85c \ud45c\ud604\ub418\uba70, \uc5ec\uae30\uc11c \u03c3f\ub294 \ud30c\ub2e8 \uac15\ub3c4, \u03bb\ub294 \uc5f4\uc804\ub3c4\uc728, E\ub294 \ud0c4\uc131 \uacc4\uc218, \u03b1\ub294 CTE, \u03ba\ub294 \uc5f4\ud655\uc0b0\ub3c4\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \uacbd\uc6b0, \ub192\uc740 \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc758 \uc8fc\uc694 \uc6d0\uc778\uc740 \ub6f0\uc5b4\ub09c \ud30c\ub2e8 \uac15\ub3c4\uac00 \uc544\ub2c8\ub77c \ub9e4\uc6b0 \ub0ae\uc740 CTE\uc785\ub2c8\ub2e4. <strong>50 MPa<\/strong> \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub97c \uc5b4\ub2d0\ub9c1\ud569\ub2c8\ub2e4. <strong>\uc989, \ud45c\uba74 \uacb0\ud568, \uae30\uacc4 \uac00\uacf5\uc73c\ub85c \uc778\ud55c \ubbf8\uc138 \uade0\uc5f4 \ub610\ub294 \ubd80\uc801\uc808\ud55c \ucde8\uae09\uc73c\ub85c \uc778\ud55c \uc2a4\ud06c\ub798\uce58\uac00 \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131\uc744 \ud06c\uac8c \ub5a8\uc5b4\ub728\ub9bd\ub2c8\ub2e4.<\/strong> CTE \ud56d\uc744 \uac1c\uc120\ud558\uc9c0 \uc54a\uace0 \uc720\ud6a8 \ud30c\ub2e8 \uac15\ub3c4 \ud56d\uc744 \uac10\uc18c\uc2dc\ucf30\uc2b5\ub2c8\ub2e4. \uc785\uace0 \uac80\uc0ac \ud504\ub85c\ud1a0\ucf5c\uc5d0\ub294 \ud45c\uba74 \uacb0\ud568 \ud3c9\uac00, \ud2b9\ud788 \uc6a9\uad11\ub85c \ud558\uc911 \uc911\uc5d0 \uac00\uc7a5 \uac00\ud30c\ub978 \uc5f4 \uad6c\ubc30\ub97c \uacbd\ud5d8\ud558\ub294 \ub9bc \uadfc\ucc98\uc758 \uc678\ubd80 \ud45c\uba74\uc5d0 \ub300\ud55c \ud45c\uba74 \uacb0\ud568 \ud3c9\uac00\uac00 \ud3ec\ud568\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc5b4\ub2d0\ub9c1 \uc0c1\ud0dc \ubc0f \uc794\ub958 \uc751\ub825:<\/strong> \ubaa8\ub4e0 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc131\ubd84\uc740 \uc81c\uc870 \uacf5\uc815\uc5d0\uc11c \uc5b4\ub290 \uc815\ub3c4\uc758 \uc794\ub958 \uc751\ub825\uc744 \uc9c0\ub2c8\uace0 \uc788\uc73c\uba70, \uadf8 \ud06c\uae30\ub294 \ub0c9\uac01 \uc18d\ub3c4\uc640 \uc131\ud615 \ubc29\ubc95\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. <strong>\ub3c4\uac00\ub2c8\uc758 \uc794\ub958 \uc751\ub825\uc740 \uc751\ub825 \ubcf5\uad74\uc808 \uce21\uc815\uc73c\ub85c \uc815\ub7c9\ud654\ub429\ub2c8\ub2e4.<\/strong>\uad11 \uacbd\ub85c \ucc28\uc774\uc758 nm\/cm\ub85c \ud45c\uc2dc\ub429\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \ub4f1\uae09 \ub3c4\uac00\ub2c8\uc758 \uacbd\uc6b0 \uc77c\ubc18\uc801\uc73c\ub85c \ud5c8\uc6a9\ub418\ub294 \ud55c\uacc4\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4. <strong>10nm\/cm<\/strong>\uc911\uac04 \ubab8\uccb4 \uc601\uc5ed\uc5d0\uc11c \uce21\uc815\ud55c \uac12\uc785\ub2c8\ub2e4. \uc794\ub958 \uc751\ub825\uc774 \ub192\uc740 \ub3c4\uac00\ub2c8\ub294 \uc5f4 \ub7a8\ud504 \uc911\uc5d0 \uc2e4\ub9ac\ucf58 \uc6a9\uc735 \uc624\uc5fc\uacfc \uc6a9\uad11\ub85c \uad74\uc808\uc744 \ucd08\ub798\ud558\ub294 \uace0\uc7a5 \ubaa8\ub4dc\uc778 \uce58\uba85\uc801\uc778 \ud30c\uc190\uc774 \ubc1c\uc0dd\ud558\uae30 \uc26c\uc6b0\uba70, \uc774\ub85c \uc778\ud574 \uba70\uce60 \ub2e8\uc704\ub85c \uce21\uc815\ub418\ub294 \uc608\uae30\uce58 \uc54a\uc740 \uac00\ub3d9 \uc911\ub2e8 \uc2dc\uac04\uc774 \ucd94\uac00\ub429\ub2c8\ub2e4. \uc870\ub2ec \ubb38\uc11c\uc5d0 \uc5b4\ub2d0\ub9c1 \uc0c1\ud0dc\uc640 \ubcf5\uad74\uc808 \ud55c\uacc4\ub97c \uc9c0\uc815\ud558\uba74 \ubcf5\uc7a1\uc131\uc740 \ucd5c\uc18c\ud654\ud558\uba74\uc11c \uc6a9\uad11\ub85c \uc0ac\uace0 \uc704\ud5d8\uc758 \uc0c1\ub2f9 \ubd80\ubd84\uc744 \uc81c\uac70\ud560 \uc218 \uc788\ub2e4\ub294 \uc810\uc5d0\uc11c \uc790\uc5f0\uc2a4\ub7ec\uc6b4 \uc804\ud658\uc774 \uc774\ub8e8\uc5b4\uc9d1\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8 \ub9ac\ub4dc \ud0c0\uc784\uc73c\ub85c \uc778\ud55c \uacf5\uae09 \uacc4\ud68d\uc758 \uc0dd\uc0b0 \ud488\uc9c8 \ubcc0\uc218<\/h2>\n<p>\ub9ac\ub4dc \ud0c0\uc784\uc5d0 \ub300\ud55c \uac00\uc2dc\uc131 \uc5c6\uc774 \ub0b4\ub9b0 \uc870\ub2ec \uacb0\uc815\uc740 \uc5b4\ub460 \uc18d\uc5d0\uc11c \ub0b4\ub9b0 \uc0dd\uc0b0 \uc77c\uc815 \uacb0\uc815\uc785\ub2c8\ub2e4.<\/p>\n<p>\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \uacf5\uae09\ub9dd\uc740 \uc9c0\ub9ac\uc801\uc73c\ub85c \uc9d1\uc911\ub418\uc5b4 \uc788\uace0 \uae30\uc220\uc801\uc73c\ub85c \uc804\ubb38\ud654\ub418\uc5b4 \uc788\uc73c\uba70, \uc8fc\uc694 \uc81c\uc870 \uc5ed\ub7c9\uc740 \uc77c\ubcf8, \ub3c5\uc77c, \uc911\uad6d\uc5d0 \uc704\uce58\ud574 \uc788\uc2b5\ub2c8\ub2e4. <strong>\uc774\ub7ec\ud55c \uac01 \uc0dd\uc0b0 \uc9c0\uc5ed\uc740 \uc21c\ub3c4 \ub4f1\uae09, \ud06c\uae30 \ub4f1\uae09 \ubc0f \uc778\uc99d \uae30\ub2a5\uc5d0 \ub530\ub77c \uc11c\ub85c \ub2e4\ub978 \uc2dc\uc7a5 \ubd80\ubb38\uc5d0 \uc11c\ube44\uc2a4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/strong>\uadf8\ub9ac\uace0 \uac01 \uc9c0\uc5ed\uc5d0\uc11c \uc18c\uc2f1\ud560 \ub54c \ub9ac\ub4dc \ud0c0\uc784\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5\uc740 \uc0c1\ub2f9\ud788 \ub2e4\ub985\ub2c8\ub2e4. \ub300\ub7c9\uc758 CZ \uc124\ube44\ub97c \uad00\ub9ac\ud558\ub294 \uc870\ub2ec \ud300\uc758 \uacbd\uc6b0 \ub3c4\uac00\ub2c8 \uacf5\uae09\ub9dd\uc758 \uad6c\uc870\uc801 \ud2b9\uc131\uc744 \uc774\ud574\ud558\ub294 \uac83\uc774 \uc81c\ud488\uc758 \uae30\uc220 \uc0ac\uc591\uc744 \uc774\ud574\ud558\ub294 \uac83\ub9cc\ud07c\uc774\ub098 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h3>\ub3c4\uac00\ub2c8 \ud06c\uae30 \ubc0f \uc8fc\ubb38\ub7c9\ubcc4 \ud45c\uc900 \uc0dd\uc0b0 \ub9ac\ub4dc \ud0c0\uc784<\/h3>\n<p>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \ub9ac\ub4dc \ud0c0\uc784\uc740 \uc138 \uac00\uc9c0 \ubcc0\uc218\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4: <strong>\uc0ac\uc774\uc988 \ub4f1\uae09, \uc8fc\ubb38\ub7c9 \ubc0f \uc8fc\ubb38\ud55c \uc0ac\uc591\uc774 \uacf5\uae09\uc5c5\uccb4\uc758 \ud45c\uc900 \uc0dd\uc0b0 \ud504\ub85c\uadf8\ub7a8\uc5d0 \ud3ec\ud568\ub418\ub294\uc9c0 \uc5ec\ubd80<\/strong>. \ud45c\uc900 \uce74\ud0c8\ub85c\uadf8 \ud06c\uae30(\uc77c\ubc18\uc801\uc73c\ub85c 14, 18, 20, 24\uc778\uce58)\ub294 \uae30\uc874 \uae08\ud615 \ubc0f \ud234\ub9c1 \uc138\ud2b8\uc5d0 \ub9de\uac8c \uc0dd\uc0b0\ud560 \uc218 \uc788\uc73c\ubbc0\ub85c \uc124\uc815 \uc2dc\uac04\uc774 \ub2e8\ucd95\ub418\uace0 \uc8fc\ubb38 \ud655\uc778 \ud6c4 \uba70\uce60 \ub0b4\uc5d0 \uc0dd\uc0b0\uc744 \uc2dc\uc791\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ube44\ud45c\uc900 \ub610\ub294 \uace0\uac1d\ubcc4 \ud06c\uae30\ub294 \uae08\ud615 \uc81c\uc791 \ub610\ub294 \uc218\uc815\uc774 \ud544\uc694\ud558\ubbc0\ub85c \ub2e4\uc74c\uacfc \uac19\uc740 \ucd94\uac00 \ube44\uc6a9\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. <strong>4~12\uc8fc<\/strong> \ub97c \uc0dd\uc0b0\ub7c9\uc744 \uc2dc\uc791\ud558\uae30\uae4c\uc9c0\uc758 \ucd1d \ub9ac\ub4dc \ud0c0\uc784\uc5d0 \ucd94\uac00\ud569\ub2c8\ub2e4.<\/p>\n<p>\ud45c\uc900 \uc0ac\uc774\uc988\uc758 \uacbd\uc6b0, <strong>10~50\uac1c\uc758 \ub3c4\uac00\ub2c8 \uc18c\ub7c9 \uc8fc\ubb38<\/strong> \uc77c\ubc18\uc801\uc73c\ub85c \uc0dd\uc0b0 \ub9ac\ub4dc \ud0c0\uc784\uc740 <strong>3~6\uc8fc<\/strong> \uc8fc\ubb38 \ud655\uc778\ubd80\ud130 \ubc30\uc1a1\uae4c\uc9c0(\uc6b4\uc1a1 \uc81c\uc678) \uc18c\uc694\ub429\ub2c8\ub2e4. \uc911\uac04 \uaddc\ubaa8\uc758 \uc8fc\ubb38 <strong>\ub3c4\uac00\ub2c8 50~200\uac1c<\/strong> \ub85c \ud655\uc7a5\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>6~10\uc8fc<\/strong> \uc6a9\uad11\ub85c \uc77c\uc815\uacfc \ud488\uc9c8 \uac80\uc0ac \uc6a9\ub7c9\uc774 \uc81c\uc57d\uc774 \ub418\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. <strong>200\uac1c\ub97c \ucd08\uacfc\ud558\ub294 \ub300\ub7c9 \uc8fc\ubb38<\/strong> \uc0dd\uc0b0 \uc77c\uc815\uc758 \uacbd\uc81c\uc131\uc5d0\uc11c \uc774\uc810\uc744 \uc5bb\uc744 \uc218 \uc788\uc9c0\ub9cc \uc5ed\uc124\uc801\uc73c\ub85c \ub9ac\ub4dc \ud0c0\uc784\uc774 \uae38\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>8~14\uc8fc<\/strong> - \uc804\uc6a9 \uc6a9\uad11\ub85c \uc2dc\uac04\uc774\ub098 \uace0\uc21c\ub3c4 \ud569\uc131 \uc2e4\ub9ac\uce74 \uacf5\uae09 \uc6d0\ub8cc\uc758 \uc6b0\uc120 \ud560\ub2f9 \ub4f1\uc774 \ud544\uc694\ud55c \uacbd\uc6b0, \uc804 \uc138\uacc4\uc801\uc73c\ub85c \uacf5\uae09 \ub2a5\ub825\uc774 \uc81c\ud55c\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc774\ub3d9 \uc2dc\uac04\uc740 \uc885\uc885 \uacfc\uc18c\ud3c9\uac00\ub418\ub294 \ub610 \ub2e4\ub978 \ubcc0\uc218\ub97c \ucd94\uac00\ud569\ub2c8\ub2e4. <strong>\ub3c4\uac00\ub2c8\ub294 \uae68\uc9c0\uae30 \uc26c\uc6b4 \ub300\ud615 \ud654\ubb3c \ud488\ubaa9\uc785\ub2c8\ub2e4.<\/strong> \ub9de\ucda4\ud615 \uc0c1\uc790\uac00 \ud544\uc694\ud558\uba70 \ube44\uc6a9\uc0c1\uc758 \uc774\uc720\ub85c \uc77c\ubc18\uc801\uc73c\ub85c \ud574\uc0c1 \uc6b4\uc1a1\uc73c\ub85c \ubc30\uc1a1\ub429\ub2c8\ub2e4. \ub3d9\uc544\uc2dc\uc544\uc5d0\uc11c \ubd81\ubbf8 \ub610\ub294 \uc720\ub7fd\uc73c\ub85c\uc758 \ud574\uc0c1 \uc6b4\uc1a1\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \ucd94\uac00 \ube44\uc6a9\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. <strong>4~6\uc8fc<\/strong> \uacf5\uae09\uc5c5\uccb4\uac00 \uc81c\uc2dc\ud55c \ub9ac\ub4dc \ud0c0\uc784\uc5d0 \ub9de\ucdb0 \ubc30\uc1a1\ub429\ub2c8\ub2e4. \ud56d\uacf5 \uc6b4\uc1a1\ub3c4 \uac00\ub2a5\ud558\uc9c0\ub9cc \ub300\ud615 \ub3c4\uac00\ub2c8\uc758 \uacbd\uc6b0 \uce58\uc218 \uc911\ub7c9\uc5d0 \ub530\ub978 \uc694\uae08\uc774 \ubd80\uacfc\ub418\ubbc0\ub85c \uc77c\ubc18\uc801\uc73c\ub85c \uae34\uae09\ud558\uac8c \ubd80\uc871\ud55c \ubb3c\ub7c9\uc744 \ubcf4\ucda9\ud558\uae30 \uc704\ud574 \uc608\uc57d\ud569\ub2c8\ub2e4.<\/p>\n<h4>\ub3c4\uac00\ub2c8 \ud06c\uae30 \ubc0f \uc8fc\ubb38\ub7c9\ubcc4 \ub9ac\ub4dc \ud0c0\uc784 \uae30\uc900<\/h4>\n<table>\n<thead>\n<tr>\n<th>\ub3c4\uac00\ub2c8 \ud06c\uae30(\uc778\uce58)<\/th>\n<th>\uc8fc\ubb38\ub7c9(\ub2e8\uc704)<\/th>\n<th>\uc81c\uc791 \ub9ac\ub4dc \ud0c0\uc784(\uc8fc)<\/th>\n<th>\ubbf8\uad6d\/\uc720\ub7fd\ud589 \ud574\uc0c1 \uc6b4\uc1a1(\uc8fc)<\/th>\n<th>\ucd1d \uc870\ub2ec \ub9ac\ub4dc \ud0c0\uc784(\uc8fc)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>14-18<\/td>\n<td>10-50<\/td>\n<td>3-5<\/td>\n<td>4-5<\/td>\n<td>7-10<\/td>\n<\/tr>\n<tr>\n<td>14-18<\/td>\n<td>50-200<\/td>\n<td>5-8<\/td>\n<td>4-5<\/td>\n<td>9-13<\/td>\n<\/tr>\n<tr>\n<td>20-24<\/td>\n<td>10-50<\/td>\n<td>4-6<\/td>\n<td>4-6<\/td>\n<td>8-12<\/td>\n<\/tr>\n<tr>\n<td>20-24<\/td>\n<td>50-200<\/td>\n<td>6-10<\/td>\n<td>4-6<\/td>\n<td>10-16<\/td>\n<\/tr>\n<tr>\n<td>24-28<\/td>\n<td>&lt; 50<\/td>\n<td>6-10<\/td>\n<td>5-6<\/td>\n<td>11-16<\/td>\n<\/tr>\n<tr>\n<td>32(\uc0ac\uc6a9\uc790 \uc9c0\uc815)<\/td>\n<td>\ubaa8\ub4e0<\/td>\n<td>14-20+<\/td>\n<td>5-6<\/td>\n<td>19-26+<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\ub9de\ucda4\ud615 \uce58\uc218\uac00 \uacf5\uae09\uc5c5\uccb4\uc640 \uc9c1\uc811 \uc18c\ud1b5\ud574\uc57c \ud558\ub294 \uc774\uc720<\/h3>\n<p>\ud45c\uc900 \uce74\ud0c8\ub85c\uadf8 \ub3c4\uac00\ub2c8\ub294 \ub300\ubd80\ubd84\uc758 CZ \uc0dd\uc0b0 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uc9c0\ub9cc, \ub354 \ud070 \uacb0\uc815 \uc9c1\uacbd, \ub354 \uae34 \ud480 \ud0c0\uc784 \ubc0f \ub354 \uc5c4\uaca9\ud55c \uacf5\uc815 \ucc3d\uc5d0 \ub300\ud55c \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \uc9c0\uc18d\uc801\uc778 \ucd94\uc9c4\uc73c\ub85c \uc778\ud574 \ub2e4\uc74c\uacfc \uac19\uc740 \uc218\uc694\uac00 \uc9c0\uc18d\uc801\uc73c\ub85c \ubc1c\uc0dd\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. <strong>\ube44\ud45c\uc900 \uce58\uc218, \ubcc0\ud615\ub41c \ud45c\uba74 \ucc98\ub9ac \ubc0f \ud558\uc774\ube0c\ub9ac\ub4dc \uc7ac\ub8cc \uad6c\uc870<\/strong> \uce74\ud0c8\ub85c\uadf8 \uc120\ud0dd\ub9cc\uc73c\ub85c\ub294 \uc9c0\uc815\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc694\uad6c \uc0ac\ud56d\uc740 \ud45c\uc900 RFQ \uc591\uc2dd\uc73c\ub85c\ub294 \ud574\uacb0\ud560 \uc218 \uc5c6\uc73c\uba70, \uad6c\ub9e4\uc790\uc758 \ud504\ub85c\uc138\uc2a4 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ud300\uacfc \uacf5\uae09\uc5c5\uccb4\uc758 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ubd80\uc11c \uac04\uc758 \uc9c1\uc811\uc801\uc778 \uae30\uc220 \ucee4\ubba4\ub2c8\ucf00\uc774\uc158\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc0ac\uc6a9\uc790 \uc9c0\uc815 \ucc28\uc6d0 \uc694\uccad\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc138 \uac00\uc9c0 \ud504\ub85c\uc138\uc2a4 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc2dc\ub098\ub9ac\uc624\uc5d0\uc11c \ube44\ub86f\ub429\ub2c8\ub2e4: <strong>\uc218\uc815\ub41c \uae30\ubcf8 \ubc18\uacbd \uc0ac\uc591<\/strong> \ub97c \uc0ac\uc6a9\ud558\uc5ec \ud14c\uc77c \uc601\uc5ed\uc758 \uc6a9\uc735 \ud750\ub984 \uc7ac\uc21c\ud658\uc744 \ubcc0\uacbd\ud569\ub2c8\ub2e4, <strong>\ud558\uccb4\uc758 \ubcbd \ub450\uaed8 \uc99d\uac00<\/strong> \ub97c \uc0ac\uc6a9\ud558\uc5ec \uace0\uc0b0\uc18c \ud0c0\uac9f \ud480\uc5d0\uc11c \uac00\uc18d\ud654\ub418\ub294 \uc6a9\ud574\ub97c \ubcf4\uc0c1\ud569\ub2c8\ub2e4. <strong>\ube44\ud45c\uc900 \ub192\uc774 \ub300 \uc9c1\uacbd \ube44\uc728<\/strong> \uc5c5\uadf8\ub808\uc774\ub4dc\ub41c CZ \uc7a5\ube44\uc758 \uc218\uc815\ub41c \uc6a9\uad11\ub85c \ucc54\ubc84 \ud615\uc0c1\uc5d0 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uac01 \uc218\uc815 \uc0ac\ud56d\uc740 \uacf5\uae09\uc5c5\uccb4\uac00 \ud234\ub9c1 \ud638\ud658\uc131, \uc9c0\uc815\ub41c \ubd80\ud53c\uc5d0 \ub300\ud55c \uc6d0\uc790\uc7ac \uac00\uc6a9\uc131, \ube44\ud45c\uc900 \ud3fc \ud329\ud130\uc5d0\uc11c \uc694\uccad\ub41c \ud45c\uba74 \ub9c8\uac10\uc744 \ub2ec\uc131\ud560 \uc218 \uc788\ub294 \uac00\ub2a5\uc131\uc744 \ud3c9\uac00\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\uc911\uc694\ud55c \uc870\ub2ec\uc758 \uc758\ubbf8\ub294 \ub9de\ucda4\ud615 \ub3c4\uac00\ub2c8 \uac1c\ubc1c\uc744 \uc704\ud574\uc11c\ub294 \ub300\ub7c9 \uacf5\uae09\uc744 \uc2dc\uc791\ud558\uae30 \uc804\uc5d0 \uc0d8\ud50c\ub9c1 \ub2e8\uacc4\uac00 \ud544\uc694\ud558\ub2e4\ub294 \uac83\uc785\ub2c8\ub2e4.<\/strong> \ud45c\uc900 \ud504\ub85c\uc138\uc2a4\uc5d0\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uacf5\uae09\uc5c5\uccb4\uac00 \uc18c\ub7c9\uc758 \uc778\uc99d \ubc30\uce58\ub97c \uc0dd\uc0b0\ud558\ub294 \uac83\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. <strong>5~20\uac1c \ub2e8\uc704<\/strong> - \uc0ac\uc6a9\uc790 \uc9c0\uc815 \uc0ac\uc591\uacfc \ube44\uad50\ud55c \ub2e4\uc74c, \uc0c1\uc5c5\uc801 \uacf5\uae09 \uacc4\uc57d\uc774 \ud655\uc815\ub418\uae30 \uc804\uc5d0 \uad6c\ub9e4\uc790\uc758 \uc6a9\uad11\ub85c\uc5d0\uc11c \ud14c\uc2a4\ud2b8\ub97c \uac70\uce69\ub2c8\ub2e4. \uc774 \uac80\uc99d \ub2e8\uacc4\uc5d0\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uc774 \ucd94\uac00\ub429\ub2c8\ub2e4. <strong>8~16\uc8fc<\/strong> \ub97c \uccab \ubc88\uc9f8 \uc0c1\uc6a9 \ubc30\uc1a1\uc758 \uc720\ud6a8 \ub9ac\ub4dc \ud0c0\uc784\uc73c\ub85c \uc124\uc815\ud569\ub2c8\ub2e4. <strong>\ubaa9\ud45c \uc0dd\uc0b0 \uc99d\uac00\uc77c\ub85c\ubd80\ud130 6\uac1c\uc6d4 \uc774\ub0b4\uc5d0 \ub9de\ucda4\ud615 \uce58\uc218 \ub17c\uc758\ub97c \uc2dc\uc791\ud558\ub294 \uc870\ub2ec \ud300\uc740 \uc885\uc885 \uacf5\uae09 \uacf5\ubc31\uc5d0 \uc9c1\uba74\ud569\ub2c8\ub2e4.<\/strong> \ud504\ub85c\uc138\uc2a4 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\uc774 \uc0ac\uc591 \ud0c0\ud611\uc744 \uc218\uc6a9\ud558\ub3c4\ub85d \uac15\uc694\ud558\ub294 \ud328\ud134\uc73c\ub85c, \uc774\ub294 \uacf5\uae09\uc5c5\uccb4\uc758 \ucd08\uae30 \ucc38\uc5ec\ub97c \ud1b5\ud574 \uc608\ubc29\ud560 \uc218 \uc788\ub294 \ubb38\uc81c\uc785\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p><img decoding=\"async\" src=\"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Crucibles-Specifications-for-CZ-Silicon-Wafer-Fabs.webp\" alt=\"CZ \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ud339\uc6a9 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8 \uc0ac\uc591\" title=\"CZ \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ud339\uc6a9 \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8 \uc0ac\uc591\" \/><\/p>\n<h2>\ud480\ub9c1 \uc2dc\uc791 \uc804 \ub3c4\uac00\ub2c8 \uc131\ub2a5 \uc800\ud558\ub97c \ucd08\ub798\ud558\ub294 \uc0ac\uc804 \ud37c\ub2c8\uc2a4 \ucc98\ub9ac \uc624\ub958<\/h2>\n<p>\uc0ac\uc591\uc5d0 \ub9de\uac8c \ub3c4\ucc29\ud55c \ub3c4\uac00\ub2c8\uac00 \uc6a9\uad11\ub85c\uc5d0 \ub3c4\ucc29\ud558\uae30\ub3c4 \uc804\uc5d0 \ubd80\uc801\ud569 \ud310\uc815\uc744 \ubc1b\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \ub3c4\uac00\ub2c8\ub294 \uc8fc\ubcc0 \ubcf4\uad00 \uc870\uac74\uc5d0\uc11c \ud654\ud559\uc801\uc73c\ub85c \uc548\uc815\uc801\uc774\uc9c0\ub9cc \uae30\uacc4\uc801 \ucde8\uc57d\uc131(\ud2b9\ud788 \ud14c\ub450\ub9ac\uc640 \ubca0\uc774\uc2a4 \ubc18\uacbd)\uc73c\ub85c \uc778\ud574 \ub2e4\uc74c\uacfc \uac19\uc740 \ubb38\uc81c\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\ubd80\uc801\uc808\ud55c \ucde8\uae09\uc740 \ucc3d\uace0 \ub0b4 \ub3c4\uac00\ub2c8 \ubd88\ud569\uaca9\uc758 \uc8fc\uc694 \uc6d0\uc778\uc785\ub2c8\ub2e4.<\/strong> \ub300\ub7c9 \ubc18\ub3c4\uccb4 \uc870\ub2ec \ud658\uacbd\uc5d0\uc11c. \uba85\ud655\ud55c \ubcf4\uad00 \ubc0f \uc0ac\uc804 \uc0ac\uc6a9 \ud504\ub85c\ud1a0\ucf5c\uc744 \uc218\ub9bd\ud558\ub294 \uac83\uc740 \ud488\uc9c8 \uad00\ub9ac\ub9cc\ud07c\uc774\ub098 \ube44\uc6a9 \uad00\ub9ac \ub300\ucc45\uc774\uae30\ub3c4 \ud569\ub2c8\ub2e4.<\/p>\n<ul>\n<li>\n<p><strong>\uc2a4\ud1a0\ub9ac\uc9c0 \ud658\uacbd \uc694\uad6c \uc0ac\ud56d:<\/strong> \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\ub294 \uc0c1\ub300 \uc2b5\ub3c4 \uc774\ud558\uc758 \uae68\ub057\ud558\uace0 \uac74\uc870\ud55c \ud658\uacbd\uc5d0 \ubcf4\uad00\ud574\uc57c \ud569\ub2c8\ub2e4. <strong>60%<\/strong> \uc0ac\uc774\uc758 \uc628\ub3c4\ub97c \uc720\uc9c0\ud569\ub2c8\ub2e4. <strong>15\u00b0C \ubc0f 35\u00b0C<\/strong>. \uc2b5\ub3c4\uac00 \ub192\uc73c\uba74 \ud45c\uba74\uc758 \uc218\uc0b0\uae30 \ud761\uc218\uac00 \uac00\uc18d\ud654\ub429\ub2c8\ub2e4. <a href=\"https:\/\/www.sciencedirect.com\/topics\/engineering\/hydroxylated-surface\">\ud45c\uba74 \uc218\uc0b0\ud654<\/a><sup id=\"fnref1:3\"><a href=\"#fn:3\" class=\"footnote-ref\">3<\/a><\/sup> - \ub294 \ub3c4\uac00\ub2c8 \ud14c\ub450\ub9ac\uc758 \uc5f4 \uc548\uc815\uc131\uc744 \uad6d\ubd80\uc801\uc73c\ub85c \uc800\ud558\uc2dc\ud0b5\ub2c8\ub2e4. <strong>\uc2b5\ub3c4\uac00 \ub192\uc740 \ud658\uacbd\uc5d0\uc11c \ubc00\ubd09\ub418\uc9c0 \uc54a\uc740 \ud3ec\uc7a5 \uc0c1\ud0dc\ub85c 90\uc77c \uc774\uc0c1 \ubcf4\uad00\ub41c \ub3c4\uac00\ub2c8<\/strong> \ub294 \uac10\uc1e0\ub41c \ucd1d \ubc18\uc0ac\uc728 FTIR \ubd84\uad11\ubc95\uc73c\ub85c \uac10\uc9c0\ud560 \uc218 \uc788\ub294 \ub9bc \uc601\uc5ed\uc758 \uc0c1\uc704 100\u03bcm\uc5d0\uc11c \uce21\uc815 \uac00\ub2a5\ud55c \ud45c\uba74 OH \ub18d\ucd95\uc744 \ubcf4\uc774\ub294 \uac83\uc73c\ub85c \ubb38\uc11c\ud654\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ubc8c\ud06c OH \ud568\ub7c9\uc740 \ubcc0\ud558\uc9c0 \uc54a\uc9c0\ub9cc, \ud45c\uba74 \ub18d\ucd95\uc740 \uc6a9\uc735\uc120 \uc811\ucd09 \uc601\uc5ed\uc5d0\uc11c \ud480 \ucd08\uae30\uc5d0 \uac00\uc18d\ud654\ub41c \ud0c8\uc11d\ud654\uc5d0 \uae30\uc5ec\ud569\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc2dc\uc124 \ub0b4 \ucde8\uae09 \ubc0f \uc6b4\uc1a1:<\/strong> \ub3c4\uac00\ub2c8\ub294 \uae68\ub057\ud55c \uc7a5\uac11 \uc5c6\uc774 \ucde8\uae09\ud574\uc11c\ub294 \uc548 \ub429\ub2c8\ub2e4. \ub9e8\uc190\uc758 \ud53c\ubd80 \uc624\uc77c\uacfc \ubbf8\ub9bd\uc790 \uc804\ub2ec\uc740 \uc720\uae30 \ubc0f \uae08\uc18d \uc794\ub958\ubb3c\uc744 \ub0a8\uae30\uace0 \uc6a9\uad11\ub85c \ub7a8\ud504 \uc911\uc5d0 \uc5f0\uc18c \ubc0f \ud718\ubc1c\ub418\uc5b4 \ucd08\uae30 \ud480\ub9c1 \ub2e8\uacc4\uc5d0\uc11c \uc6a9\uc735\ubb3c\uc5d0 \ubbf8\uc138\ud558\uc9c0\ub9cc \uce21\uc815 \uac00\ub2a5\ud55c \uae08\uc18d \uc624\uc5fc\uc744 \uc77c\uc73c\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. <strong>\uac01 \ub3c4\uac00\ub2c8\ub294 \uc6d0\ub798\uc758 \uc131\ud615 \ud3ec\uc7a5\uc5d0 \uac1c\ubcc4\uc801\uc73c\ub85c \uc6b4\uc1a1\ud574\uc57c \ud569\ub2c8\ub2e4.<\/strong>\uc778\uc811\ud55c \ub3c4\uac00\ub2c8\uc758 \ub9bc\uc774 \uc811\ucd09\ud558\uba74 \uc5f4 \ud558\uc911 \uc911 \uac00\uc7a5 \ub192\uc740 \uc751\ub825 \uc601\uc5ed\uc778 \ub9bc \uac00\uc7a5\uc790\ub9ac\uc5d0 \ubbf8\uc138 \uade0\uc5f4 \uc2dc\uc791 \ubd80\uc704\uac00 \ubc1c\uc0dd\ud558\ubbc0\ub85c \ub9bc\uacfc \ub9bc\uc744 \uc313\uac70\ub098 \uc911\ucca9\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. 24\uc778\uce58 \uc774\uc0c1\uc758 \ub300\ud615 \ub3c4\uac00\ub2c8\uc758 \uacbd\uc6b0 \ubc14\ub2e5\uacfc \uc911\uac04 \ubcf8\uccb4\uc5d0 \uc9c0\uc815\ub41c \uc9c0\uc9c0 \uc9c0\uc810\uc774 \uc788\ub294 2\uc778\uc6a9 \ub9ac\ud504\ud2b8\uac00 \ud45c\uc900 \ud504\ub85c\ud1a0\ucf5c\uc774\uba70, \ud55c \uc0ac\ub78c\uc774 \ub300\ud615 \ub3c4\uac00\ub2c8\ub97c \ucde8\uae09\ud558\uba74 \ube44\ub300\uce6d \uc751\ub825 \ud558\uc911\uc73c\ub85c \uc778\ud574 \ubcf4\uc774\uc9c0 \uc54a\ub294 \ud45c\uba74 \uc544\ub798 \uade0\uc5f4\uc774 \uc2dc\uc791\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<\/li>\n<li>\n<p><strong>\uc0ac\uc6a9 \uc804 \uc810\uac80 \ubc0f \uccad\uc18c:<\/strong> \uc801\uc7ac\ud558\uae30 \uc804\uc5d0 \uac01 \ub3c4\uac00\ub2c8\ub294 \ube44\uc2a4\ub4ec\ud55c \uc870\uba85 \uc544\ub798\uc5d0\uc11c \ud45c\uba74 \uae01\ud798, \ud14c\ub450\ub9ac \uce69, \ub208\uc5d0 \ubcf4\uc774\ub294 \uc774\ubb3c\uc9c8\uc774 \uc788\ub294\uc9c0 \uc721\uc548 \uac80\uc0ac\ub97c \ubc1b\uc544\uc57c \ud569\ub2c8\ub2e4. <strong>1mm\ubcf4\ub2e4 \uae4a\uac70\ub098 5mm\ubcf4\ub2e4 \uae34 \ubaa8\ub4e0 \ub9bc \uce69<\/strong> \uce69 \uc5d0\uc9c0 \uc751\ub825 \ub18d\ub3c4\uac00 \uc6a9\uad11\ub85c \ub7a8\ud504 \uc911\uc5d0 \uc804\uccb4 \ub458\ub808 \uade0\uc5f4\ub85c \uc804\ud30c\ub418\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc73c\ubbc0\ub85c \ubd88\ud569\uaca9 \uc0ac\uc720\uac00 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubcf4\uad00 \uc911 \ud45c\uba74 \uc624\uc5fc\uc774 \uc758\uc2ec\ub418\ub294 \uacbd\uc6b0 \uace0\uc21c\ub3c4 \ud0c8\uc774\uc628\uc218 \ud5f9\uad7c\uacfc \ud074\ub9b0\ub8f8 \ub4f1\uae09\uc758 \uc9c8\uc18c \ube14\ub85c\uc6b0 \ub4dc\ub77c\uc774\ub97c \uc0ac\uc6a9\ud558\ub294 \uc138\ucc99 \ud504\ub85c\ud1a0\ucf5c\uc774 \ud45c\uc900\uc774\uba70, \ud45c\uc900 \uc624\uc5fc \uc218\uc900\uc5d0\uc11c\ub294 HF\ub97c \uc0ac\uc6a9\ud55c \uc2b5\uc2dd \ud654\ud559 \uc138\ucc99\uc774 \uac70\uc758 \ud544\uc694\ud558\uc9c0 \uc54a\uc73c\uba70 \ubcc4\ub3c4\uc758 \ud504\ub85c\ud1a0\ucf5c\uc5d0 \ub530\ub77c \uad00\ub9ac\ud574\uc57c \ud558\ub294 \ucde8\uae09 \uc548\uc804 \uc694\uac74\uc774 \ub3c4\uc785\ub429\ub2c8\ub2e4. \uc870\ub2ec \uad00\ud589\uc73c\ub85c \uc790\uc5f0\uc2a4\ub7fd\uac8c \uc804\ud658: \uac1c\ubcc4 \ubcf4\ud638 \ud3ec\uc7a5 \uc5c6\uc774 \ub3c4\ucc29\ud558\uac70\ub098 \uc6b4\uc1a1 \uc911 \ud14c\ub450\ub9ac\uc640 \ud14c\ub450\ub9ac\uac00 \uc811\ucd09\ud55c \ud754\uc801\uc774 \uc788\ub294 \ub3c4\uac00\ub2c8\ub294 \uc218\ub839 \uae30\ub85d\uc5d0 \uc989\uc2dc \ud45c\uc2dc\ud558\uace0 \uacf5\uae09\uc5c5\uccb4\uc5d0 \uc54c\ub824\uc57c \ud569\ub2c8\ub2e4. \ud3ec\uc7a5 \ud488\uc9c8\uc740 \uacf5\uae09\uc5c5\uccb4\uc758 \uad11\ubc94\uc704\ud55c \ud488\uc9c8 \uad00\ub9ac \uc5ed\ub7c9\uc744 \uc608\uce21\ud558\ub294 \uc9c0\ud45c\uac00 \ub429\ub2c8\ub2e4.<\/p>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\uacb0\ub860<\/h2>\n<p>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\ub294 \uc6d0\ub8cc \uc2e4\ub9ac\uce74\uc640 \ub514\ubc14\uc774\uc2a4 \ub4f1\uae09 \uc2e4\ub9ac\ucf58 \uc0ac\uc774\uc758 \ud654\ud559\uc801 \ubc0f \uce58\uc218\uc801 \uc778\ud130\ud398\uc774\uc2a4\uc785\ub2c8\ub2e4. \uc21c\ub3c4 \ub4f1\uae09, OH \ud568\ub7c9, \uce58\uc218 \ud5c8\uc6a9 \uc624\ucc28, \ubc30\uce58 \uc77c\uad00\uc131, \ud45c\uba74 \uc0c1\ud0dc \ub4f1 \uc774 \ubb38\uc11c\uc5d0\uc11c \uc124\uba85\ud558\ub294 \ubaa8\ub4e0 \uc0ac\uc591 \ud30c\ub77c\ubbf8\ud130\ub294 CZ \uacb0\uc815 \uc131\uc7a5\uc758 \ubbfc\uac10\ub3c4\uac00 \uc791\uc740 \uc7ac\ub8cc \ubcc0\ud654\ub97c \uce21\uc815 \uac00\ub2a5\ud55c \uc218\uc728 \uacb0\uacfc\ub85c \uc99d\ud3ed\uc2dc\ud0a4\uae30 \ub54c\ubb38\uc5d0 \uc874\uc7ac\ud569\ub2c8\ub2e4. \ubd88\uc644\uc804\ud55c \uae30\uc220 \uc815\ubcf4\ub85c \uc870\ub2ec \uacb0\uc815\uc744 \ub0b4\ub9ac\uba74 \uc6a9\uad11\ub85c \uc2dc\uac04, \uc2e4\ub9ac\ucf58 \uacf5\uae09 \uc6d0\ub8cc, \uc0dd\uc0b0 \uc77c\uc815\uc774 \uc774\ubbf8 \ud655\uc815\ub41c \ud6c4\uc5d0\uc57c \uacf5\uc815 \ub9ac\uc2a4\ud06c\uac00 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \uc644\uc804\ud55c \uc0ac\uc591 \uba85\ud655\uc131, \uc801\uc808\ud55c \ub9ac\ub4dc \ud0c0\uc784, \ubb38\uc11c\ud654\ub41c \ubc30\uce58 \ucd94\uc801\uc131\uc744 \uac16\ucd98 \uc18c\uc2f1\uc740 \uc870\ub2ec \ubaa8\ubc94 \uc0ac\ub840\uac00 \uc544\ub2c8\ub77c \uc0dd\uc0b0 \uc5f0\uc18d\uc131\uc744 \uc704\ud55c \ud544\uc218 \uc694\uac74\uc785\ub2c8\ub2e4.<\/p>\n<hr \/>\n<h2>\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n<p><strong>300mm \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \uc0dd\uc0b0\uc5d0 \ud544\uc694\ud55c \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \uc21c\ub3c4 \ub4f1\uae09\uc740 \ubb34\uc5c7\uc785\ub2c8\uae4c?<\/strong><\/p>\n<p>\uc8fc\ub958 300mm CZ \uc2e4\ub9ac\ucf58 \uc0dd\uc0b0\uc758 \uacbd\uc6b0, \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c\uc774 10ppm \ubbf8\ub9cc\uc778 99.995%(\uace0\uc21c\ub3c4 \ub4f1\uae09)\uc758 \ucd5c\uc18c SiO\u2082 \ud568\ub7c9\uc774 \ud45c\uc900\uc785\ub2c8\ub2e4. \uace0\uae09 \ub178\ub4dc \uc560\ud50c\ub9ac\ucf00\uc774\uc158, \ud2b9\ud788 10nm \uc774\ud558\uc758 \uacf5\uc815 \ub178\ub4dc\uc5d0\uc11c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 99.999% \uc774\uc0c1\uc758 \ucd08\uace0\uc21c\ub3c4 \ub4f1\uae09\uc744 \uc9c0\uc815\ud558\uba70, Fe, Cu, Ni\uc758 \uac1c\ubcc4 \uc6d0\uc18c \uc81c\ud55c\uc740 \ud55c \uc790\ub9bf\uc218 ppb \ubc94\uc704\ub85c \uc81c\ud55c\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>CZ \uc6a9\uad11\ub85c\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\ub294 \uc5bc\ub9c8\ub098 \uc790\uc8fc \uad50\uccb4\ud574\uc57c \ud558\ub098\uc694?<\/strong><\/p>\n<p>\uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\ub294 \ud45c\uc900 CZ \uc0dd\uc0b0\uc5d0\uc11c \ud06c\ub9ac\uc2a4\ud0c8\uc744 \ud55c \ubc88 \ubf51\uc744 \ub54c\ub9c8\ub2e4 \uad50\uccb4\ud569\ub2c8\ub2e4. \uc774 \ub3c4\uac00\ub2c8\ub294 \uc77c\ud68c\uc6a9 \uc18c\ubaa8\ud488\uc785\ub2c8\ub2e4. \ud480\ub9c1 \uc2dc\uac04\uc774 60~100\uc2dc\uac04\uc778 300mm \uc0dd\uc0b0\uc744 \uc2e4\ud589\ud558\ub294 \uc6a9\uad11\ub85c\uc758 \uacbd\uc6b0, \uc774\ub294 \uc5f0\uc18d \uac00\ub3d9 \uc2dc \uc6a9\uad11\ub85c\ub2f9 \uc6d4 8~18\ud68c\uc758 \ub3c4\uac00\ub2c8 \uad50\uccb4\uac00 \ud544\uc694\ud558\ub2e4\ub294 \uc758\ubbf8\uc785\ub2c8\ub2e4.<\/p>\n<p><strong>CZ \ub3c4\uac00\ub2c8\uc5d0\uc11c \ud569\uc131 \uc2e4\ub9ac\uce74\uc640 \ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uc758 \ucc28\uc774\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><\/p>\n<p>\ud569\uc131 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 \ub610\ub294 \ud50c\ub77c\uc988\ub9c8 \uc735\ud569\uc744 \ud1b5\ud574 \ucd08\uace0\uc21c\ub3c4 \uc2e4\ub9ac\ucf58 \uc804\uad6c\uccb4\uc5d0\uc11c \uc81c\uc870\ub418\uba70, \ucd1d \uae08\uc18d \ubd88\uc21c\ubb3c \ud568\ub7c9\uc774 0.1ppm \ubbf8\ub9cc\uc785\ub2c8\ub2e4. \ucc9c\uc5f0 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uace0\uc21c\ub3c4 \ucc44\uad74 \uc11d\uc601\uc744 \ub179\uc5ec \uc0dd\uc0b0\ub418\uba70 \uc54c\ub8e8\ubbf8\ub284\uacfc \ud2f0\ud0c0\ub284\uc744 \ube44\ub86f\ud55c \ubbf8\ub7c9 \uc6d0\uc18c \ud568\ub7c9\uc774 \ub192\uac70\ub098 \uc77c\uc815\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ub300\ubd80\ubd84\uc758 300mm \uc0dd\uc0b0\uc6a9 \uc0c1\uc5c5\uc6a9 \ub3c4\uac00\ub2c8\ub294 \ud569\uc131 \ub0b4\uce35\uacfc \ucc9c\uc5f0 \uc11d\uc601 \uc678\uce35\uc774 \uc788\ub294 \ud558\uc774\ube0c\ub9ac\ub4dc \uad6c\uc870\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n<p><strong>\ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc11d\uc601 \ub3c4\uac00\ub2c8\ub97c \uc870\ub2ec\ud560 \ub54c \uc5b4\ub5a4 \uc11c\ub958\ub97c \uc694\uccad\ud574\uc57c \ud558\ub098\uc694?<\/strong><\/p>\n<p>\uc804\uccb4 \uc870\ub2ec \ubb38\uc11c \ud328\ud0a4\uc9c0\uc5d0\ub294 \uac1c\ubcc4 \uc6d0\uc18c \uc21c\ub3c4(ICP-MS), OH \ud568\ub7c9(IR \ubd84\uad11\ubc95), \ud1b5\uacc4\uc801 \uc0d8\ud50c\ub9c1 \ub370\uc774\ud130\ub97c \uc0ac\uc6a9\ud55c \uce58\uc218 \uce21\uc815, ISO 10110\uc5d0 \ub530\ub978 \uae30\ud3ec \ubc0f \ud3ec\ud568 \ub4f1\uae09 \ubd84\ub958, \uc751\ub825 \ubcf5\uad74\uc808 \uac12\uc744 \ud3ec\ud568\ud558\ub294 \ubd84\uc11d \uc99d\uba85\uc11c\uac00 \ud3ec\ud568\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4. \ub9de\ucda4\ud615 \ub610\ub294 \ube44\ud45c\uc900 \uce58\uc218\uc758 \uacbd\uc6b0, \ub300\ub7c9 \uacf5\uae09\uc744 \uc2dc\uc791\ud558\uae30 \uc804\uc5d0 \uce58\uc218 \uc801\ud569\uc131 \ubc0f \uc6a9\uad11\ub85c \uc2dc\ud5d8 \uacb0\uacfc\ub97c \ubb38\uc11c\ud654\ud55c \uc801\uaca9\uc131 \ubc30\uce58 \ubcf4\uace0\uc11c\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n<hr \/>\n<p>\ucc38\uc870:<\/p>\n<div class=\"footnotes\">\n<hr \/>\n<ol>\n<li id=\"fn:1\">\n<p>\ud06c\ub9ac\uc2a4\ud1a0\ubc1c\ub77c\uc774\ud2b8\ub294 1,050\u00b0C \uc774\uc0c1\uc758 \uc6a9\uc735 \uc2e4\ub9ac\uce74\uac00 \ud0c8\uc11d\ud654\ub418\ub294 \uacfc\uc815\uc5d0\uc11c \ud615\uc131\ub418\ub294 \uc774\uc0b0\ud654\uaddc\uc18c\uc758 \uace0\uc628 \ub2e4\ud615\uc131\uccb4\uc785\ub2c8\ub2e4.<a href=\"#fnref1:1\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:2\">\n<p>\ud575 \ud615\uc131\uc740 \ud45c\uba74 \ub610\ub294 \uc6a9\uc735\ubb3c \ub0b4\uc758 \uc6b0\uc120\uc801 \ubd80\uc704\uc5d0\uc11c \uc0c8\ub85c\uc6b4 \uacb0\uc815 \uad6c\uc870\uac00 \ud615\uc131\ub418\uae30 \uc2dc\uc791\ud558\ub294 \uc0c1 \ubcc0\ud658\uc758 \ucd08\uae30 \ub2e8\uacc4\uc785\ub2c8\ub2e4.<a href=\"#fnref1:2\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<li id=\"fn:3\">\n<p>\ud45c\uba74 \ud558\uc774\ub4dc \ub85d\uc2e4\ud654\ub294 \uc2e4\ub9ac\uce74 \ubb3c\uc9c8\uc758 \ub178\ucd9c\ub41c \ud45c\uba74\uc5d0 \uc2e4\ub77c\ub180\uae30\uac00 \ub300\uae30 \uc911 \uc218\ubd84\uacfc \uc811\ucd09\ud558\uc5ec \ud615\uc131\ub418\ub294 \ud654\ud559\uc801 \uacfc\uc815\uc785\ub2c8\ub2e4.<a href=\"#fnref1:3\" rev=\"footnote\" class=\"footnote-backref\">&#8617;<\/a><\/p>\n<\/li>\n<\/ol>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\ubc18\ub3c4\uccb4 \ud339\uc740 \ub3c4\uac00\ub2c8\ub97c \ud55c \ubc88 \ubf51\uc744 \ub54c\ub9c8\ub2e4 \uad50\uccb4\ud569\ub2c8\ub2e4. \uc870\ub2ec \uc8fc\uae30\uac00 \uc774\ub7ec\ud55c \uc218\uc694\ub97c \ub530\ub77c\uac00\uc9c0 \ubabb\ud558\uba74 \uc0dd\uc0b0\uc774 \uc911\ub2e8\ub429\ub2c8\ub2e4. [...]<\/p>","protected":false},"author":2,"featured_media":11115,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[10],"tags":[73],"class_list":["post-11112","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blogs","tag-quartz-glass-crucible"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v25.4 (Yoast SEO v27.4) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>Quartz Glass Crucibles in Semiconductor Crystal Growth | TOQUARTZ\u00ae<\/title>\n<meta name=\"description\" content=\"Purity grades, dimensional tolerances, batch consistency, and lead times for quartz glass crucibles in semiconductor CZ production \u2014 all specifications in one place.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link 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TOQUARTZ\u00ae\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/toquartz.com\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/toquartz.com\\\/quartz-glass-crucibles-in-semiconductor-crystal-growth\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/toquartz.com\\\/quartz-glass-crucibles-in-semiconductor-crystal-growth\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/toquartz.com\\\/wp-content\\\/uploads\\\/2026\\\/02\\\/Quartz-Glass-Crucibles-for-Semiconductor-CZ-Crystal-Growth-Specs.webp\",\"datePublished\":\"2026-03-08T18:00:59+00:00\",\"description\":\"Purity grades, dimensional tolerances, batch consistency, and lead times for quartz glass crucibles in semiconductor CZ production \u2014 all specifications in one 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Specs\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/toquartz.com\\\/quartz-glass-crucibles-in-semiconductor-crystal-growth\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/toquartz.com\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Blogs\",\"item\":\"https:\\\/\\\/toquartz.com\\\/blogs\\\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Quartz Glass Crucibles Determine CZ Silicon Production Quality\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/toquartz.com\\\/#website\",\"url\":\"https:\\\/\\\/toquartz.com\\\/\",\"name\":\"TOQUARTZ\",\"description\":\"\",\"publisher\":{\"@id\":\"https:\\\/\\\/toquartz.com\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/toquartz.com\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ko-KR\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/toquartz.com\\\/#organization\",\"name\":\"TOQUARTZ\",\"url\":\"https:\\\/\\\/toquartz.com\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\\\/\\\/toquartz.com\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/toquartz.com\\\/wp-content\\\/uploads\\\/2025\\\/02\\\/logo-2.png\",\"contentUrl\":\"https:\\\/\\\/toquartz.com\\\/wp-content\\\/uploads\\\/2025\\\/02\\\/logo-2.png\",\"width\":583,\"height\":151,\"caption\":\"TOQUARTZ\"},\"image\":{\"@id\":\"https:\\\/\\\/toquartz.com\\\/#\\\/schema\\\/logo\\\/image\\\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\\\/\\\/toquartz.com\\\/#\\\/schema\\\/person\\\/64de60160e69ad73646f68c4a56a90d3\",\"name\":\"ECHO\u00a0YANG\u200b\",\"url\":\"https:\\\/\\\/toquartz.com\\\/ko\\\/author\\\/webadmin\\\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\ubc18\ub3c4\uccb4 \uacb0\uc815 \uc131\uc7a5\uc744 \uc704\ud55c \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8 | TOQUARTZ\u00ae","description":"\ubc18\ub3c4\uccb4 CZ \uc0dd\uc0b0\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \uc21c\ub3c4 \ub4f1\uae09, \uce58\uc218 \uacf5\ucc28, \ubc30\uce58 \uc77c\uad00\uc131, \ub9ac\ub4dc \ud0c0\uc784 \ub4f1 \ubaa8\ub4e0 \uc0ac\uc591\uc744 \ud55c \uacf3\uc5d0\uc11c \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/toquartz.com\/ko\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/","og_locale":"ko_KR","og_type":"article","og_title":"Quartz Glass Crucibles Determine CZ Silicon Production Quality","og_description":"Purity grades, dimensional tolerances, batch consistency, and lead times for quartz glass crucibles in semiconductor CZ production \u2014 all specifications in one place.","og_url":"https:\/\/toquartz.com\/ko\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/","og_site_name":"TOQUARTZ: Quartz Glass Solution","article_published_time":"2026-03-08T18:00:59+00:00","og_image":[{"width":900,"height":600,"url":"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Crucibles-for-Semiconductor-CZ-Crystal-Growth-Specs.webp","type":"image\/webp"}],"author":"ECHO\u00a0YANG\u200b","twitter_card":"summary_large_image","twitter_misc":{"\uae00\uc4f4\uc774":"ECHO\u00a0YANG\u200b","\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04":"7\ubd84"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/#article","isPartOf":{"@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/"},"author":{"name":"ECHO\u00a0YANG\u200b","@id":"https:\/\/toquartz.com\/#\/schema\/person\/64de60160e69ad73646f68c4a56a90d3"},"headline":"Quartz Glass Crucibles Determine CZ Silicon Production Quality","datePublished":"2026-03-08T18:00:59+00:00","mainEntityOfPage":{"@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/"},"wordCount":5697,"commentCount":0,"publisher":{"@id":"https:\/\/toquartz.com\/#organization"},"image":{"@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/#primaryimage"},"thumbnailUrl":"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Crucibles-for-Semiconductor-CZ-Crystal-Growth-Specs.webp","keywords":["quartz glass crucible"],"articleSection":["Blogs"],"inLanguage":"ko-KR","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/","url":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/","name":"\ubc18\ub3c4\uccb4 \uacb0\uc815 \uc131\uc7a5\uc744 \uc704\ud55c \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8 | TOQUARTZ\u00ae","isPartOf":{"@id":"https:\/\/toquartz.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/#primaryimage"},"image":{"@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/#primaryimage"},"thumbnailUrl":"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Crucibles-for-Semiconductor-CZ-Crystal-Growth-Specs.webp","datePublished":"2026-03-08T18:00:59+00:00","description":"\ubc18\ub3c4\uccb4 CZ \uc0dd\uc0b0\uc5d0\uc11c \uc11d\uc601 \uc720\ub9ac \ub3c4\uac00\ub2c8\uc758 \uc21c\ub3c4 \ub4f1\uae09, \uce58\uc218 \uacf5\ucc28, \ubc30\uce58 \uc77c\uad00\uc131, \ub9ac\ub4dc \ud0c0\uc784 \ub4f1 \ubaa8\ub4e0 \uc0ac\uc591\uc744 \ud55c \uacf3\uc5d0\uc11c \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.","breadcrumb":{"@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/#breadcrumb"},"inLanguage":"ko-KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/"]}]},{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/#primaryimage","url":"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Crucibles-for-Semiconductor-CZ-Crystal-Growth-Specs.webp","contentUrl":"https:\/\/toquartz.com\/wp-content\/uploads\/2026\/02\/Quartz-Glass-Crucibles-for-Semiconductor-CZ-Crystal-Growth-Specs.webp","width":900,"height":600,"caption":"Quartz Glass Crucibles for Semiconductor CZ Crystal Growth Specs"},{"@type":"BreadcrumbList","@id":"https:\/\/toquartz.com\/quartz-glass-crucibles-in-semiconductor-crystal-growth\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/toquartz.com\/"},{"@type":"ListItem","position":2,"name":"Blogs","item":"https:\/\/toquartz.com\/blogs\/"},{"@type":"ListItem","position":3,"name":"Quartz Glass Crucibles Determine CZ Silicon Production Quality"}]},{"@type":"WebSite","@id":"https:\/\/toquartz.com\/#website","url":"https:\/\/toquartz.com\/","name":"\ud1a0\ucffc\uce20","description":"","publisher":{"@id":"https:\/\/toquartz.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/toquartz.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ko-KR"},{"@type":"Organization","@id":"https:\/\/toquartz.com\/#organization","name":"\ud1a0\ucffc\uce20","url":"https:\/\/toquartz.com\/","logo":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/toquartz.com\/#\/schema\/logo\/image\/","url":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/02\/logo-2.png","contentUrl":"https:\/\/toquartz.com\/wp-content\/uploads\/2025\/02\/logo-2.png","width":583,"height":151,"caption":"TOQUARTZ"},"image":{"@id":"https:\/\/toquartz.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/toquartz.com\/#\/schema\/person\/64de60160e69ad73646f68c4a56a90d3","name":"\uc5d0\ucf54 \uc591","url":"https:\/\/toquartz.com\/ko\/author\/webadmin\/"}]}},"_links":{"self":[{"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/posts\/11112","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/comments?post=11112"}],"version-history":[{"count":4,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/posts\/11112\/revisions"}],"predecessor-version":[{"id":11123,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/posts\/11112\/revisions\/11123"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/media\/11115"}],"wp:attachment":[{"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/media?parent=11112"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/categories?post=11112"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/toquartz.com\/ko\/wp-json\/wp\/v2\/tags?post=11112"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}